JPH0619966B2 - Sample rotation tilting device - Google Patents
Sample rotation tilting deviceInfo
- Publication number
- JPH0619966B2 JPH0619966B2 JP58248822A JP24882283A JPH0619966B2 JP H0619966 B2 JPH0619966 B2 JP H0619966B2 JP 58248822 A JP58248822 A JP 58248822A JP 24882283 A JP24882283 A JP 24882283A JP H0619966 B2 JPH0619966 B2 JP H0619966B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- frame
- motor
- belt
- frame body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
【発明の詳細な説明】 (イ)産業上の利用分野 本発明は走査形電子顕微鏡（ＳＥＭ）やエレクトロン・
プローブマイクロアナライザ（ＥＰＭＡ）などの表面分
析装置において、試料を回転、傾斜、さらに傾斜面で微
動させるために適用される試料回転傾斜装置を関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention is a scanning electron microscope (SEM) and electron
In a surface analysis device such as a probe microanalyzer (EPMA), the present invention relates to a sample rotation tilting device applied for rotating, tilting, and finely moving a sample on a tilted surface.
(ロ)従来技術 一般に、ＳＥＭ、ＥＰＭＡなどの表面分析装置において
は、試料を互いに直交するＸ.Ｙ.Ｚの３軸方向に位置調
整するたけでなく、さらに試料を回転、傾斜、傾斜面で
微動させたい場合がある。このため、従来はＸ.Ｙ.Ｚの
動きをもつ試料ステージに、回転、傾斜等の動きをもつ
試料回転傾斜装置を取付けるようにしている。ところ
が、従来の試料回転傾斜装置は装填試料の大きさが制限
を受けたり、あるいは大型試料を装填できる場合におい
てもこの装置を試料ステージに取付ける際、その都度、
試料室の真空をリークした後、交換作業を行なわねばな
らず、分析操作に時間がかかるとともに交換作業も煩雑
になるという難点がある。(B) Prior art Generally, in a surface analyzer such as SEM or EPMA, not only the position of the sample is adjusted in the three XYZ directions orthogonal to each other, but also the sample is rotated, tilted, or tilted. Sometimes you want to make a slight movement. For this reason, conventionally, a sample rotating and tilting device having a motion such as rotation and tilt is attached to a sample stage having a motion of XYZ. However, the conventional sample rotation tilting device has a limitation on the size of the sample to be loaded, or even when a large sample can be loaded, each time the device is mounted on the sample stage,
After leaking the vacuum in the sample chamber, the replacement work has to be performed, which causes a problem that the analysis operation takes time and the replacement work becomes complicated.
(ハ)目 的 本発明は従来のこのような問題点を解消し、小型でか
つ、交換操作が容易で、しかも傾斜角、直線微動の範囲
が大きく、駆動機構も簡単で、故障の少ない試料回転傾
斜装置を得ることを目的とする。(C) Objective The present invention solves the above problems of the prior art, is compact, easy to replace, has a wide range of inclination angle and fine linear movement, has a simple drive mechanism, and has few failures. The purpose is to obtain a rotary tilting device.
(ニ)構 成 本発明は、このような目的を達成するために、受台に円
弧状の案内面が形成され、この案内面上に枠体が揺動可
能に載置され、この枠体はタイミングベルトを介して前
記受台に設けた傾斜用モータに連結され、また、この枠
体には取付枠が揺動可能に設けられ、この取付枠は、張
力調整手段でその張力が調整されるベルトを介して前記
受台に設けた直線微動用モータに連続され、また、この
取付枠には試料台が回転可能に支持されるとともにこの
試料台を回転駆動する試料回転用モータが取付けられて
いる。(D) Structure In order to achieve such an object, the present invention has an arcuate guide surface formed on a pedestal, on which a frame is swingably mounted. Is connected to a tilting motor provided on the pedestal through a timing belt, and a mounting frame is swingably provided on the frame body, and the tension of the mounting frame is adjusted by a tension adjusting means. Is connected to the linear fine movement motor provided on the pedestal via a belt, and the sample frame is rotatably supported on this mounting frame and a sample rotation motor for rotatably driving the sample table is attached. ing.
(ホ)実施例 以下、本発明を図面に示す実施例に基づいて詳細に説明
する。(E) Example Hereinafter, the present invention will be described in detail based on an example shown in the drawings.
第１図はこの実施例の試料回転傾斜装置の平面図、第２
図は同正面図、第３図は第１図のIII−III線に沿う断面
図である。この実施例の試料回転傾斜装置１は円板４
と、この円板４上に固定された支持体６とからなる受台
２を備える。そして、支持体６に円弧状の案内面6aなら
びにこの案内面6aに沿う蟻溝状の案内溝6bが形成されて
いる。また、円板４上に傾斜用モータ８と直線微動用モ
ータ10とが設けられている。前記支持体６の案内面6a上
には枠体12が載置され、かつ、枠体12の底部に設けられ
た突状12aが上記案内溝6b内に嵌合している。さらに、
枠体12の底部には周方向に沿って凹凸部12bが形成さ
れ、この凹凸部12bにタイミングベルト14の一部が接触
係合している。そして、このタイミングベルト14は傾斜
用モータ８の軸端に取付けた第１主プーリ16、受台２に
それぞれ取付けた第１から第３の各補助プーリ、18,20,
22に順次周回されている。これにより枠体12はタイミン
グベルト14を介して傾斜用モータ８に連結される。さら
に、枠体12の一側部には直線微動用軸24がベアリング26
で回転自在に取付けられ、この直線微動用軸24は外端に
第２主プーリ28が固着され、また、内端にピニオン部24
aが形成されている。そして、上記第２主プーリ28、枠
体12の第２主プーリ28と同じ側に取付けた第４補助プー
リ32、直線微動用モータ10の軸端部に取付けた第３主プ
ーリ34および受台２に取付けた第５補助プーリ36にわた
ってベルト38が周回されている。このベルト３８は、後
述のように枠体１２の変位に応じて、その張力が第２主
プーリ２８、第４補助プーリ３２、第３主プーリ３４、
第５補助プーリ３６およびベルト規制用補助プーリ５２
からなる張力調整手段によって調整されてその周回長が
略同一とされる。このベルト３８は、周回長が最小のと
きでも弛みが生じない長さに設定されている。さらに、
枠体12には取付枠40が滑動手段42により枠体12に対して
第１図上左右方向に摺動可能に支持されている。この取
付枠40の下部の一部には第１図上左右方向に延びるラッ
ク部40aが形成され、このラック部40aに前記直線微動用
軸24のピニオン部24aが噛合している。従って、取付枠4
0が、直線微動用軸24、ベルト38等を介して直線微動用
モータ10に連結される。取付枠40には、上部に試料台44
がベアリング46により回転可能に支持されるとともに、
取付枠40の一側部に試料回転用モータ48が取付けられて
いる。そして、試料台44と試料回転用モータ48とは両者
の軸端部にそれぞれ設けたかさ歯車部44a，48aにより互
いに連結されている。なお、50はリターンスプリング、
52はベルト規制用補助プーリー、54は各モータ８,10,48
の電源コードである。FIG. 1 is a plan view of the sample rotating and tilting device of this embodiment, and FIG.
FIG. 3 is a front view of the same, and FIG. 3 is a sectional view taken along the line III-III of FIG. The sample rotating and tilting device 1 of this embodiment is a disc 4
And a support 2 composed of a support 6 fixed on the disc 4. The support 6 is formed with an arcuate guide surface 6a and a dovetail-shaped guide groove 6b along the guide surface 6a. Further, a tilting motor 8 and a linear fine movement motor 10 are provided on the disk 4. The frame 12 is placed on the guide surface 6a of the support 6, and the projection 12a provided on the bottom of the frame 12 is fitted in the guide groove 6b. further,
An uneven portion 12b is formed on the bottom of the frame 12 along the circumferential direction, and a part of the timing belt 14 is in contact with and engaged with the uneven portion 12b. The timing belt 14 includes a first main pulley 16 attached to the shaft end of the tilting motor 8 and first to third auxiliary pulleys 18, 20 attached to the pedestal 2, respectively.
It has been lapped to 22 in sequence. As a result, the frame body 12 is connected to the tilting motor 8 via the timing belt 14. In addition, a linear fine movement shaft 24 is provided with a bearing 26 on one side of the frame body 12.
The linear fine-movement shaft 24 has a second main pulley 28 fixed to its outer end and a pinion portion 24 to its inner end.
a is formed. The second main pulley 28, the fourth auxiliary pulley 32 mounted on the same side of the frame 12 as the second main pulley 28, the third main pulley 34 mounted on the shaft end of the linear fine movement motor 10, and the pedestal. A belt 38 is wound around a fifth auxiliary pulley 36 attached to the No. 2. As described later, the tension of the belt 38 varies depending on the displacement of the frame body 12, and the tension of the second main pulley 28, the fourth auxiliary pulley 32, the third main pulley 34,
Fifth auxiliary pulley 36 and belt regulating auxiliary pulley 52
It is adjusted by the tension adjusting means, and the circumference lengths thereof are substantially the same. The belt 38 is set to a length that does not cause slack even when the lap length is minimum. further,
A mounting frame 40 is supported on the frame body 12 by a sliding means 42 so as to be slidable relative to the frame body 12 in the left-right direction in FIG. A rack portion 40a extending in the left-right direction in FIG. 1 is formed in a part of the lower portion of the mounting frame 40, and the pinion portion 24a of the linear fine movement shaft 24 is meshed with the rack portion 40a. Therefore, the mounting frame 4
0 is connected to the linear fine movement motor 10 via the linear fine movement shaft 24, the belt 38 and the like. The mounting frame 40 has a sample table 44 on the top.
Is rotatably supported by the bearing 46,
A sample rotation motor 48 is attached to one side of the attachment frame 40. The sample table 44 and the sample rotation motor 48 are connected to each other by bevel gears 44a and 48a provided at the shaft ends of the two. In addition, 50 is a return spring,
52 is an auxiliary pulley for belt regulation, 54 is each motor 8,10,48
It is the power cord of.
上記構成を有する試料回転傾斜装置１において、試料50
を傾斜するには、傾斜用モータ８を駆動すると、タイミ
ングベルト14が回転され、これに係合する枠体12が支持
体６の案内面6aに沿って一点01を中心に変位する。この
枠体12の変位量は第２図に示すように時計方向回りで約
15゜反時計方向回りで約90゜まで可能で、その限界値に
達したときには、枠体12とタイミングベルト14間で滑り
を生じ傾斜用モータ８に過負荷がかかることなく空回り
する。なお、枠体１２が第２図の実線で示される位置に
あるときに比べて、枠体１２が反時計方向に９０゜変位
した仮想線で示される位置にあるときは、第２主プーリ
２８と第３主プーリ３４との間のベルト３８の周回長
は、上述の張力調整手段としての第２主プーリ２８、第
４補助プーリ３２、第３主プーリ３４、第５補助プーリ
３６およびベルト規制用補助プーリ５２による張力の調
整によって、ベルト３８を有する弾性で吸収できる程度
の若干の変化、すなわち、略同一とされて動力の伝達に
支障がないようになっている。特に、この実施例では、
張力調整手段として、第４補助プーリ３２、第５補助プ
ーリ３６およびベルト規制用補助プーリ５２を設けてい
るので、これら３つのプーリ３２，３６，５２を設けな
かった場合、この場合には、ベルト３８の周回長は、枠
体１２が反時計方向に約５０゜変位した位置にあるとき
に最小、枠体１２が時計方向に約１５゜変位した位置に
あるときに最大となるが、この場合に比べて、ベルト３
８の周回長の変化が一層抑制される。次に、試料50をあ
る傾斜位置で固定した状態で、直線微動するには、直線
微動用モータ10を駆動する。すると、ベルト38、第２主
プーリ28、直線駆動用軸24を介して取付枠40が直線移動
する。その際、取付枠40の動きは枠体12の位置に無関係
である。そして、この場合も取付枠40が移動限界値に達
したときにはベルト38が空回りし、直線微動用モータ10
に過負荷がかからない。さらに、試料50を回転するには
試料回転用モータ48を駆動することによりかさ歯車部48
a，44aを介して試料台44が軸線Ｃ1を中心に回転され
る。In the sample rotating and tilting device 1 having the above configuration, the sample 50
To tilt the can, when driving the tilt motor 8, a timing belt 14 is rotated, the frame 12 which engages thereto is displaced about the single point 0 1 along the guide surface 6a of the support 6. The displacement amount of this frame body 12 is approximately clockwise as shown in FIG.
It is possible to rotate about 15 ° counterclockwise up to about 90 °, and when the limit value is reached, slipping occurs between the frame 12 and the timing belt 14 and the tilting motor 8 runs idle without being overloaded. When the frame body 12 is in the position shown by the imaginary line displaced by 90 ° in the counterclockwise direction as compared with the case where the frame body 12 is in the position shown by the solid line in FIG. The circumferential length of the belt 38 between the third main pulley 34 and the third main pulley 34 is the second main pulley 28, the fourth auxiliary pulley 32, the third main pulley 34, the fifth auxiliary pulley 36, and the belt regulation as the tension adjusting means described above. By adjusting the tension by the auxiliary pulley 52 for use, a slight change that can be absorbed by the elasticity of the belt 38, that is, substantially the same change, does not hinder the transmission of power. In particular, in this example,
Since the fourth auxiliary pulley 32, the fifth auxiliary pulley 36, and the belt regulating auxiliary pulley 52 are provided as the tension adjusting means, if these three pulleys 32, 36, and 52 are not provided, in this case, the belt The circumference of 38 is the minimum when the frame body 12 is displaced by about 50 ° in the counterclockwise direction, and is the maximum when the frame body 12 is displaced by about 15 ° in the clockwise direction. Belt 3 compared to
The change in the orbital length of 8 is further suppressed. Next, in order to perform fine linear movement with the sample 50 fixed at a certain tilt position, the fine linear movement motor 10 is driven. Then, the mounting frame 40 linearly moves via the belt 38, the second main pulley 28, and the linear drive shaft 24. At this time, the movement of the mounting frame 40 is independent of the position of the frame body 12. Also in this case, when the mounting frame 40 reaches the movement limit value, the belt 38 idles, and the linear fine movement motor 10
Is not overloaded. Further, in order to rotate the sample 50, the bevel gear part 48 is driven by driving the sample rotation motor 48.
The sample stage 44 is rotated about the axis C 1 via a and 44a.
(ヘ)効 果 以上のように本発明によれば装置の構成が従来に比べて
簡単で、しかも、回転、傾斜、直線微動の各動きの限界
値が機械的なストッパーによって設定できるので、従来
に比べて装置全体が小型化できるとともに、故障も起き
にくくなる。さらに、小型化により、予備排気室を通し
て装置を真空室内へ装填できるので分析操作が簡単か
つ、短時間になるという優れた効果が得られる。(F) Effects As described above, according to the present invention, the configuration of the device is simpler than the conventional one, and the limit values of each movement of rotation, tilt, and fine linear movement can be set by a mechanical stopper. Compared with, the entire device can be downsized, and failure is less likely to occur. Further, due to the miniaturization, the apparatus can be loaded into the vacuum chamber through the preliminary exhaust chamber, so that an excellent effect that the analysis operation is simple and the time is short can be obtained.
図面は本発明の一実施例を示し、第１図は試料回転傾斜
装置の平面図、第２図は同正面図、第３図は第１図のII
I−III線に沿う断面図である。 １……試料回転傾斜装置、２……受台、８……傾斜用モ
ータ、10……直線微動用モータ、12……枠体、14……タ
イミングベルト、38……ベルト、40……取付枠、44……
試料台、48……試料回転用モータ。FIG. 1 shows an embodiment of the present invention. FIG. 1 is a plan view of a sample rotating and tilting device, FIG. 2 is a front view of the same, and FIG. 3 is II of FIG.
It is sectional drawing which follows the I-III line. 1 ... Sample rotation tilting device, 2 ... Cradle, 8 ... Tilt motor, 10 ... Linear fine movement motor, 12 ... Frame, 14 ... Timing belt, 38 ... Belt, 40 ... Mounting Frame, 44 ……
Specimen stand, 48 ... Motor for specimen rotation.
Claims (1)
内面上に枠体が揺動可能に載置され、この枠体はタイミ
ングベルトを介して前記受台に設けた傾斜用モータに連
結され、また、この枠体には取付枠が揺動可能に設けら
れ、この取付枠は、張力調整手段でその張力が調整され
るベルトを介して前記受台に設けた直線微動用モータに
連結され、また、この取付枠には試料台が回転可能に支
持されるとともにこの試料台を回転駆動する試料回転用
モータが取付けられていることを特徴とする試料回転傾
斜装置。1. An arc-shaped guide surface is formed on a pedestal, and a frame body is swingably mounted on the guide surface. The frame body is provided for inclination on the pedestal via a timing belt. The frame is connected to a motor, and a mounting frame is swingably provided on the frame body. The mounting frame is for fine linear movement provided on the pedestal via a belt whose tension is adjusted by a tension adjusting means. A sample rotating and tilting device, which is connected to a motor, and further has a sample stage rotatably supported on the mounting frame and a sample rotating motor for rotationally driving the sample stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58248822A JPH0619966B2 (en) | 1983-12-26 | 1983-12-26 | Sample rotation tilting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58248822A JPH0619966B2 (en) | 1983-12-26 | 1983-12-26 | Sample rotation tilting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60136143A JPS60136143A (en) | 1985-07-19 |
| JPH0619966B2 true JPH0619966B2 (en) | 1994-03-16 |
Family
ID=17183927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58248822A Expired - Lifetime JPH0619966B2 (en) | 1983-12-26 | 1983-12-26 | Sample rotation tilting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619966B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9472374B2 (en) | 2011-09-28 | 2016-10-18 | Hysitron, Inc. | Testing assembly including a multiple degree of freedom stage |
| JP6842161B2 (en) * | 2017-01-17 | 2021-03-17 | 株式会社エヌエステイー | Resolver characteristic measurement method and measuring device |
| JP6957002B2 (en) * | 2017-03-31 | 2021-11-02 | 株式会社日立ハイテクサイエンス | Charged particle beam device |
-
1983
- 1983-12-26 JP JP58248822A patent/JPH0619966B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60136143A (en) | 1985-07-19 |
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