JPH0620710B2 - Disk member transfer device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a disk member transfer device for automatically transferring a disk member to each processing step during a manufacturing process of a magnetic disk, an optical disk, or the like. .

[Prior Art] A recording medium having a recording layer formed on its surface, such as a magnetic disk or an optical disk, needs to undergo various steps to manufacture it, and becomes a substrate for each of these steps. A disk member transfer device is used.

By the way, in the above-mentioned magnetic disk, optical disk, etc., since the recording layer is formed on the surface, the surface of the disk member is not scratched, and is held so that foreign matters such as oil stains and dust do not adhere. There is a need to. In particular, in the case of a magnetic disk, it is possible to reduce the thickness of the magnetic film due to the demands for higher density of recorded information and faster response.
When the magnetic film is formed into a thin film in this way, the surface of the disk member must be kept in a completely clean state without being damaged. For this reason, it is necessary to clean and dust-free the disk member as it approaches the latter stage of the process.

As a disk member transfer device according to the prior art, a transfer device that is driven by a driving means to grip and transfer the disk member is separately installed for each process, and the transfer device is operated. The disk member is sequentially transferred to each process to perform a predetermined process in each process.

[Problems to be Solved by the Invention] Providing a transfer device for each process as in the above-described conventional technique makes the device configuration complicated and large. Especially when configuring a magnetic disk manufacturing device that requires processing in a dust-free environment,
Although there is a strong demand for downsizing and downsizing of the components of the apparatus, as described above, the installation of the transfer device in each process has been a regressive factor for the request for downsizing.

The present invention has been made in view of the above points, and makes it possible to transfer a disk member between a plurality of steps by a single transfer device, and thus the structure of the transfer device is simple, small and compact. The purpose is to

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a main shaft that reciprocally rotates with an angular width of 90 degrees, and an angular interval of 90 degrees in a direction orthogonal to the axis of the main axis. An arm connected to three positions out of the four parts where the above is placed, and a drive part provided at the other one part, and the tip of each arm has an outer peripheral edge or an inner part of the disk member, respectively. Three chucking rollers that detachably grip the peripheral edge, an operation piece that is attached with each chucking roller and that rotates about a rotation fulcrum, and a cam member that simultaneously rotates the three operation pieces. And a rotary disk that is reciprocally rotated by a motor at a predetermined angle is mounted on the drive unit, and the rotary disk is provided between the rotary disk and the cam member of each chuck member provided on each arm. Drive rod to connect to the motor By rotating the rotary disk, the chuck members provided on each of the three arms are opened and closed at the same time to chuck and release the disk member, and the main shaft is reciprocated 90 degrees. It is characterized in that the three disk members are simultaneously moved from the receiving position to the transferring position by moving them.

[Operation] With the configuration described above, the first arm of the plurality of arms attached to the main shaft reciprocates between the first step and the second step, and the second arm moves to the second step. It reciprocates between the process and the third process, and the third arm moves to the third process and the fourth process.
Thus, each arm can be reciprocated between one step and the subsequent step.

Therefore, first, in the first step, the first arm holds the disk member by its chuck member, and transfers the disk member in the forward direction of the main shaft, that is, in the direction of shifting to the next step. When the transfer of the disc member is completed, the main shaft is rotated in the backward direction, which is the opposite direction to the forward direction. Thereafter, the disk member transferred to the first step is chucked by the first arm, while the preceding disk member located in the second step is chucked by the second arm. It will be.
Then, when the main shaft is rotated in the forward direction again, the preceding disk member in the second step is moved to the third position by the second arm.
And the succeeding disc member is transferred to the second step by the first arm. Then, the rotation of the main shaft in the forward direction and the backward direction is sequentially repeated, and the disc member can be transferred between a plurality of steps by repeatedly holding and detaching the disc member by the chuck member.

Thus, the arm is provided at three of the four parts for each angle of 90 degrees on the single main shaft, the chuck member is attached to each arm, and the driving means for opening and closing each chuck member is provided. Since the three driving rods are simultaneously pushed and pulled by this driving means, the structure of the transfer device can be made simple, small and compact, and the opening and closing of each chuck member can be performed. Since the operations are always performed in a synchronized state, the controllability of this transfer device is facilitated.

Moreover, since each arm attached to the main shaft is adapted to transfer the disc member between the two processes, the disc member that needs to be cleaned is contaminated by the operation of the arm as the process progresses. Does not cause any inconvenience.

Embodiments Embodiments of the present invention will be described in detail below with reference to the drawings.

In the present embodiment, as shown in FIG. 5, in the cleaning device for cleaning the disk member 1 of the magnetic disk, the carry-in section A to the cleaning section B, the cleaning section B to the drying section C, and the drying section C are used. It is shown that it is installed in order to transfer it to the unloading section D.

Thus, the transfer device 2 has a structure as shown in FIGS. That is, as shown in FIG. 1, three arms 3a, 3b, 3c are attached to the main shaft 4, and each of the arms 3a, 3b, 3c is substantially T-shaped on a plane orthogonal to the main shaft 4. Attached to the first arm 3a and the second arm 3b
And between the second arm 3b and the third arm 3c.
It has an angle of 0 degrees. Each of the arms 3a, 3b, 3c has a disk-shaped supporting portion 5 at its tip end, and the supporting portion 5 has a chuck member 7 having three chucking rollers 6 as shown in FIG. Is provided, and each chucking roller 6 is rotatably attached to a support shaft 9 provided upright on the operating piece 8. Each of the operating pieces 8 is rotatably attached to a turning point 10 provided on the support portion 5, and a roller 11 attached to the operating piece 8 is rotatable by a spring 12 at a predetermined angle by a cam plate 13 Is urged in the direction of coming into contact with the cam surface. A rotating shaft 14 for rotating the cam plate 13 is projected on a surface of the supporting portion 5 opposite to the portion where the chucking roller 6 is arranged, and a lever 15 is connected to the rotating shaft 14. Has been done. Further, one end of a drive rod 16 is attached to the lever 15, and the other end of the drive rod 16 is connected to a rotary disc 18 attached to an output shaft 17a of a motor 17 to rotate the motor 17 by a predetermined angle. Thus, the lever 15 can be rotated via the drive rod 16, and the rotation of the lever 15 causes the cam plate 13 to rotate.
Is rotated to bring the chucking roller 6 constituting the chuck member 7 into contact with the outer peripheral edge portion of the disk member 1 as shown by the third arm 3c in FIG. 1 and the second arm 3b. As shown in FIG. 3, the disc member 1 is displaced from the outer peripheral edge portion thereof to a chuck release position separated from it.

The above-mentioned arms 3a, 3b, 3c can be reciprocally rotated by 90 degrees corresponding to the distance between them by the operation of the main shaft 4 and can also reciprocate in that direction. For this purpose, the main shaft 4 is spline-coupled to the pulley 19, and a belt is provided between the pulley 19 and the reciprocating drive source (not shown).
20 is wound and provided, whereby the main shaft 4 is reciprocally rotated by 90 degrees. A crank shaft 21 is connected to the tip of the main shaft 4, and the main shaft 4 can be reciprocated in the axial direction by the crank shaft 21.

The transfer device for the disk member 1 is configured as described above, and this transfer device is, for example, as shown in FIG.
The disk member 1 is installed in a cleaning device for the disk member 1, and the disk member 1 is transferred from the loading section A to the cleaning section B and from the cleaning section B to the drying section C
And further from the drying section C to the unloading section D.

Thus, the carry-in section A is provided with a carry-in rack 31 and a carry-in handler 32 for taking out the disk member 1 placed on the carry-in rack 31, and the carry-in handler 32 causes the disk member 1 to move in the arm 3a of the transfer device 2. It is carried in to a position facing the chuck member 7. Then, the main shaft 4 of the transfer device 2 is displaced in the axial direction and the cam plate 13 is rotated,
By operating each chuck member 7, the handler
The disc member 1 is transferred from 32 to the first arm 3a.

Therefore, as shown by an arrow X in FIG. 4, the main shaft 4 is axially displaced so as to be separated from the carry-in handler 32 and rotated by 90 degrees to move the first arm 3a to the cleaning section B.
Move to. A rotary table 33 is installed in the cleaning section B, and the rotary table 33 is divided into four working partition portions, and the disk member 1 transferred from the first arm 3a is placed in each of these working partition portions. A chuck member 34 for chucking is provided. Therefore, as shown by the arrow Y in FIG. 4, the spindle 4 is displaced in the direction of approaching the rotary table 33, and the disc member 1 is transferred to the chuck member 34 provided in the working partition of the rotary table 33. .
A disk member in which a cleaning tool 35, a rinsing tool 36, and an edge cleaning tool 37 for performing a predetermined cleaning operation on the disk member 1 corresponding to each work partition provided on the rotary table 33 are supported by a chuck member 34, respectively. It is installed so that it can be moved toward and away from the rotary table.
The disk member 1 is cleaned by the cleaning tool 35, the rinsing tool 36, and the edge cleaning tool 37 while the 33 is rotated by a predetermined angle. Then, during this time, the spindle 4 is displaced in the X direction away from the rotary table 33, and
The arm 3a is returned to the loading section A. Next, as described above, the cleaning of the disc member 1 is completed while the rotary table 33 makes one revolution, and the disc member 1 is transferred to the drying section C. Therefore, the main shaft 4 of the transfer device 2 is displaced in the Y direction so that the chuck member 7 of the second arm 3b faces the disk member 1 supported by the chuck member 34 of the rotary table 33. It is transferred to the second arm 3b by being operated, the main shaft 4 is separated from the rotary table 33, and
It is transferred to the drying section C by rotating it once,
In the drying section C, the disk member 1 is dried by means such as high speed spin drying.

Further, when the above-mentioned drying is completed, the main shaft 4 is rotated in the X direction, the forward direction, and the Y direction in the same manner as described above, whereby the disk member 1 is moved by the third arm 3c of the transfer device 2. It is transferred from the drying section C to the carry-out section D, is transferred to the carry-out handler 38 installed in the carry-out section D, is mounted on the carry-out rack 39 by the carry-out handler 38, and is carried out to the outside by the carry-out rack 39.

As described above, the disc in the loading section A is moved by one operation including axial displacement of the main shaft 4 in the X direction, rotation in the forward direction, axial displacement in the Y direction, and rotation in the backward direction. The member 1 is attached to the cleaning section B by the first arm 3a, and the second arm
By 3b, the disk member 1 in the cleaning section B is transferred to the drying section C,
Further, the disk member 1 in the drying section C is simultaneously moved to the unloading section D by the third arm 3c. Therefore, the disk member 1 can be continuously washed and dried by repeating such an operation of the spindle 4. Then, during the operation of the main shaft 4, the first arm 3a reciprocates between the carry-in section A which is the first step and the cleaning section B which is the second step, and the second arm 3b is the first arm 3b. It reciprocates between the cleaning section B which is the second step and the drying section C which is the third step, and the third arm 3c is the drying section C which is the third step and the unloading which is the fourth step. The disk member after the first arm 3a, which has been soiled by chucking the disk member 1 to which dust or the like has adhered in the carry-in section A, is cleaned because it reciprocates between the disk member 1 and the section D. The third arm 3c for chucking the disk member 1 that has been cleaned and dried has no risk of coming into contact with the disk member 1. The disk member 1 has no risk of being contacted and soiled. Smooth and reliable cleaning and drying are performed.

Moreover, the first and second chucks for transferring the disk member 1
Since the second and third arms 3a, 3b, 3c are actuated by the single main shaft 4, the structure of the transfer device is simple, downsized and compact, and it is possible to perform various operations in a dust-free environment. It is suitable for use in an apparatus for manufacturing a disk member that needs to be processed. Further, by operating the first, second, and third arms 3a, 3b, 3c simultaneously by the single main shaft 4, the control can be facilitated and the operation can be stabilized.

In the above-mentioned embodiment, the transfer device of the present invention is attached to the device for cleaning and drying the disk member, but the important point is that when manufacturing magnetic disks, optical disks, etc., If the disk member is transferred between a plurality of steps, it can be used in other parts.

[Effects of the Invention] Since the present invention is configured as described above, the following effects are achieved.

A single spindle is provided with three arms each having a chuck member for every 90 degrees, and a drive means for simultaneously driving the chuck members of these arms to open and close,
Since the disk members are configured to be transferred, the disk members are simple, small, and compact, and the disk members can be reliably transferred one by one to four steps, and three disk members can be simultaneously received and delivered. As a result, the controllability is improved, for example, the operating members of each process that receives the disk member and performs the predetermined processing or processing can be operated at the same time, and the motor rotates the rotating disk by a predetermined angle. The three cam members are respectively displaced by the arms via the arms, and the chuck rollers are displaced by the cam members so that the disc member is chucked and dechucked. Depending on the structure, it is possible to reliably perform the operation of chucking and releasing the chuck. As compared with the case or the like for using the star gear mechanism or the like, structurally are also not only significantly easier in terms of the assembly,
Since there are few rotating parts and there is no deviation of the chuck position due to backlash variations, etc., the stability of operation and the positional accuracy of the disk member at the time of chucking and releasing the chuck are good, resulting in the transfer of the disk member. Is extremely accurate, and the disk member is transferred by reciprocally rotating the rotary shaft by 90 degrees, so that each arm attached to it is only between one step and the next step. The disk member will be transferred, and even if dirt is attached to the arm and the chuck member attached to it, this dirt will not be transferred before the next step. The effect of preventing the disk member from being soiled in the above is obtained.

[Brief description of drawings]

FIG. 1 is an overall structural view of a transfer device showing an embodiment of the present invention, FIG. 2 is a structural explanatory view of a chuck member, FIG. 3 is a structural explanatory view of a chuck member operating mechanism, and FIG. FIG. 5 is an explanatory diagram of the operation of the shaft, and FIG. 5 is a configuration explanatory diagram showing a state in which the shaft is attached to the cleaning device of the transfer device. 1: Disc member, 2: Transfer device, 3a, 3b, 3c: Arm,
4: spindle, 6: chucking roller, 7: chuck member, 16: rotating shaft, A: loading section, B: cleaning section, C: drying section, D: unloading section.

Claims (1)

[Claims] 1. A main shaft which reciprocally rotates with an angular width of 90 degrees, and an arm which is connected to three positions out of four parts spaced at an angular interval of 90 degrees in a direction orthogonal to the axis of the main shaft. , A driving portion provided at another position, and at the tip of each arm, three chucking rollers for detachably gripping the outer peripheral edge or the inner peripheral edge of the disk member, and the chucking rollers. A chuck member, which is equipped with a roller and rotates about a rotation fulcrum, and a cam member that simultaneously rotates the three operation pieces, is provided, and the drive unit reciprocates a predetermined angle by a motor. By mounting a rotating rotating disk, connecting the rotating disk and the cam member of each chuck member provided on each arm with a drive rod, and by rotating the rotating disk by the motor, Three
By simultaneously opening and closing the chuck members provided on each of the provided arms, the chucks of the disk members and the release of the chucks are performed, respectively, and the main shaft is reciprocally rotated by 90 degrees so that the three disk members are simultaneously moved. A transfer device for a disk member, characterized in that it is configured to transfer from a receiving position to a transferring position.