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JPH062264Y2 - Semiconductor device - Google Patents
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JPH062264Y2 - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH062264Y2
JPH062264Y2 JP1988014821U JP1482188U JPH062264Y2 JP H062264 Y2 JPH062264 Y2 JP H062264Y2 JP 1988014821 U JP1988014821 U JP 1988014821U JP 1482188 U JP1482188 U JP 1482188U JP H062264 Y2 JPH062264 Y2 JP H062264Y2
Authority
JP
Japan
Prior art keywords
pellet
semiconductor device
wire
mount portion
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988014821U
Other languages
Japanese (ja)
Other versions
JPH01120331U (en
Inventor
晴夫 山田
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1988014821U priority Critical patent/JPH062264Y2/en
Publication of JPH01120331U publication Critical patent/JPH01120331U/ja
Application granted granted Critical
Publication of JPH062264Y2 publication Critical patent/JPH062264Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/681Shapes or dispositions thereof comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)

Description

【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、例えばCMOS型半導体装置のような低電力
用の半導体装置の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an improvement of a low power semiconductor device such as a CMOS type semiconductor device.

〔従来技術〕[Prior art]

従来より、低電力用の半導体装置のように、半導体ペレ
ットの発熱が小さいものでは、ペレットマウント部を介
してペレットの放熱を行わせる必要がなく、ペレットと
ペレットマウント部とをエポキシ樹脂や銀ペースト等の
導電ペーストによってダイボンディングしている。即
ち、第6図に示すように、ペレットマウント部101に
半導体ペレット102をエポキシ樹脂等の樹脂接着剤1
03によってダイボンディングし、各リード104とペ
レット102の電極102aとをワイヤボンディングし
た後、樹脂105等によってパッケージングが行なわれ
ている。
Conventionally, in a semiconductor device for which low heat generation of a semiconductor pellet, such as a semiconductor device for low power consumption, it is not necessary to dissipate heat of the pellet through the pellet mount portion, and the pellet and the pellet mount portion are made of epoxy resin or silver paste. It is die-bonded with a conductive paste such as. That is, as shown in FIG. 6, the semiconductor pellet 102 is attached to the pellet mount portion 101 with a resin adhesive 1 such as an epoxy resin.
After die-bonding with 03 and wire-bonding each lead 104 and the electrode 102a of the pellet 102, packaging with resin 105 etc. is performed.

〔考案が解決しようとする課題〕[Problems to be solved by the device]

しかしながら、上記低電力用半導体装置は、ワイヤボン
ディング時にペレット102が位置ずれしなければよい
ため、接着剤103は必要最小でよい。一方、この接着
剤103の供給はスタンプ法やシリンジを用いてなされ
るが、周囲の温度や溶剤の比率などにより粘度がばらつ
き、供給量を一定に保つことは煩雑であった。
However, in the above low-power semiconductor device, since the pellets 102 need not be displaced during wire bonding, the adhesive 103 may be the minimum required. On the other hand, the adhesive 103 is supplied by a stamp method or a syringe, but the viscosity varies depending on the ambient temperature, the ratio of the solvent, etc., and it has been complicated to keep the supply amount constant.

そこで、本考案は樹脂接着剤103でダイボンディング
する必要のない構造となる半導体装置を提供することを
目的とする。
Therefore, an object of the present invention is to provide a semiconductor device having a structure that does not require die bonding with the resin adhesive 103.

〔課題を解決するための手段〕[Means for Solving the Problems]

上記の目的を達成するために本考案は、ペレットマウン
ト部に半導体ペレットを支持させ、該ペレットの電極と
ペレットマウント部近傍のリードとをワイヤボンディン
グしてパッケージングした半導体装置において、上記半
導体ペレットはペレットマウント部に接着剤を介さずに
載置され、ペレットマウント部には、半導体ペレットで
覆われる孔が穿孔されていることを特徴とする。
In order to achieve the above object, the present invention provides a semiconductor device in which a semiconductor pellet is supported on a pellet mount portion, and the electrode of the pellet and a lead near the pellet mount portion are wire-bonded and packaged. It is characterized in that it is placed on the pellet mount portion without an adhesive, and that the pellet mount portion has a hole covered with a semiconductor pellet.

〔考案の作用〕[Function of device]

かかる構成の半導体装置の組み立ては、ペレットマウン
ト部に半導体ペレットを載置し、穿孔された透孔の下方
から吸引用のノズル等でペレットを吸着してペレットマ
ウント部に固定し、そのままワイヤボンディングすれば
よいので、ペレットをペレットマウント部にダイボンデ
ィングする必要がなくなる。
In assembling a semiconductor device having such a configuration, a semiconductor pellet is placed on a pellet mount portion, and the pellet is adsorbed by a suction nozzle or the like from below the perforated hole and fixed to the pellet mount portion. Therefore, it is not necessary to die-bond the pellet to the pellet mount.

〔実施例〕〔Example〕

以下、図面を参照して本考案の一実施例を説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は本考案の一実施例にかかる半導体装置1の一部
破断斜視図である。図において、2は半導体ペレットで
あり、予め銅板等を打ち抜き折曲加工したペレットマウ
ント部3a上に樹脂接着剤等を介することなく配置され
ている。該ペレットマウント部3aには透孔4が穿孔さ
れており、配置されるペレット2によって完全に覆われ
ている。そして、該ペレット2の上面の各電極2a…を
ペレットマウント部3a近傍の所定のリード3b…と超
音波ボンディング等によってアルミニウム線等のワイヤ
5でワイヤボンディングされ、充填性のよいエポキシ樹
脂6等によって樹脂モールドパッケージングされた半導
体装置1となっている。
FIG. 1 is a partially cutaway perspective view of a semiconductor device 1 according to an embodiment of the present invention. In the figure, reference numeral 2 denotes a semiconductor pellet, which is arranged on a pellet mount portion 3a in which a copper plate or the like is punched and bent in advance, without a resin adhesive or the like interposed. A through hole 4 is bored in the pellet mount portion 3a and is completely covered by the pellet 2 to be arranged. Each electrode 2a on the upper surface of the pellet 2 is wire-bonded to a predetermined lead 3b in the vicinity of the pellet mount 3a by a wire 5 such as an aluminum wire by ultrasonic bonding or the like, and an epoxy resin 6 having a good filling property is used. The semiconductor device 1 is resin-molded and packaged.

上記のような半導体装置1では、ペレット2の各電極2
a…とリード3b…とのワイヤボンディングを超音波ボ
ンディングで行う場合に、ペレット2がペレットマウン
ト部3aに確実に固定されていなければならないので、
ワイヤボンディング中は、ペレットマウント部3aに形
成された透孔4の下方に例えば、第2図に示すように、
吸引用のノズル7を当接し、ペレット2を真空吸着して
ペレットマウント部3aに固定させて超音波ボンディン
グを行い、超音波ボンディング終了後は真空吸着を解除
して樹脂モールド等のパッケージングを行えばよい。こ
の場合、ペレット2はワイヤ5によってリード3b…に
ワイヤボンディングされているが、ペレットマウント部
3aより浮き上がってパッケージングされることも考え
られる。しかし、樹脂モールド時に一本のワイヤ5にか
かる荷重は微小であり、ワイヤ5の変形等にも問題な
い。従って、ダイボンディング作業を省略できる。
In the semiconductor device 1 as described above, each electrode 2 of the pellet 2 is
When the wire bonding between the a and the leads 3b is performed by ultrasonic bonding, the pellet 2 must be securely fixed to the pellet mount portion 3a.
During wire bonding, for example, as shown in FIG. 2, below the through hole 4 formed in the pellet mount portion 3a,
A nozzle 7 for suction is brought into contact, the pellet 2 is vacuum-sucked and fixed to the pellet mount portion 3a to perform ultrasonic bonding, and after the ultrasonic bonding is completed, the vacuum suction is released to perform packaging such as resin molding. I'll do it. In this case, the pellet 2 is wire-bonded to the leads 3b ... By the wire 5, but it may be floated from the pellet mount portion 3a and packaged. However, the load applied to one wire 5 at the time of resin molding is minute, and there is no problem in deformation of the wire 5 or the like. Therefore, the die bonding work can be omitted.

第3図は本考案の他の実施例にかかる半導体装置10の
斜視図で、第4図は同実施例の要部の縦断面図である。
この半導体装置10は、ペレット2の上面に電気的特性
に全く影響を与えないダミー電極2bを形成し、該ダミ
ー電極2bとペレットマウント部3aの両側に延びる各
マウント支持部3c,3cとを、直線に近い緊張状態で
固定用のワイヤ8でワイヤボンディングしてある。この
ワイヤボンディングの方向は矢印Aで示すパッケージン
グ用樹脂6の注入方向に沿って平行に行うことが好まし
い。他の構成は前述の半導体装置1と同様であるため同
一部材に同一符号を付して説明は省略する。前記第1の
実施例の半導体装置1では、ワイヤボンディング終了後
はペレット2とペレットマウント部3aは固定されてお
らず、ワイヤ5によってリード3b…とワイヤボンディ
ングされているだけの状態であり、パッケージング工程
で流動性の劣る樹脂を注入しても、注入時の樹脂流によ
ってペレット2が固定用のワイヤ8,8で保持され、ワ
イヤ5の変形やワイヤ5同士の接触がなくなる。
FIG. 3 is a perspective view of a semiconductor device 10 according to another embodiment of the present invention, and FIG. 4 is a longitudinal sectional view of a main part of the same embodiment.
In this semiconductor device 10, a dummy electrode 2b that does not affect the electrical characteristics at all is formed on the upper surface of the pellet 2, and the dummy electrode 2b and the mount support portions 3c and 3c extending on both sides of the pellet mount portion 3a are provided. The wire bonding is performed with the fixing wire 8 in a tension state close to a straight line. The wire bonding direction is preferably parallel to the injection direction of the packaging resin 6 indicated by arrow A. Since other configurations are similar to those of the semiconductor device 1 described above, the same members are designated by the same reference numerals and the description thereof will be omitted. In the semiconductor device 1 of the first embodiment, after the wire bonding is completed, the pellet 2 and the pellet mount portion 3a are not fixed, and the wire 5 is only wire-bonded to the leads 3b. Even if a resin having poor fluidity is injected in the casting step, the pellet 2 is held by the fixing wires 8 and 8 due to the resin flow at the time of injection, and the deformation of the wire 5 and the contact between the wires 5 are eliminated.

第5図は更に他の実施例にかかる半導体装置20を示し
ている。この半導体装置20は、矢印Aで示すパッケー
ジング用樹脂6の注入方向に対して、ペレットマウント
部3aの角部を上方に折曲してペレット係止部3dを形
成している。他の構成は上記した第1の実施例の半導体
装置1と同様であるため同一部材に同一符号を付して説
明は省略するが、このような半導体装置20でも、パッ
ケージング工程で注入される樹脂によるペレット2の移
動を上記ペレット係止部3dによって止めることがで
き、ワイヤ5同士が接触する心配がなくなる。この場
合、更に、第2の実施例の半導体装置10と同様のダミ
ー電極2bを形成し、ペレットマウント部3aの両側に
延びる各マウント支持部3c,3cとをワイヤ8によっ
て緊張状態でワイヤボンディングすると、ペレット2の
注入される樹脂による移動はより確実に防止できるよう
になり、一層好ましいものとなる。
FIG. 5 shows a semiconductor device 20 according to another embodiment. In the semiconductor device 20, the pellet locking portion 3d is formed by bending the corner portion of the pellet mount portion 3a upward with respect to the injection direction of the packaging resin 6 indicated by the arrow A. Since the other structure is the same as that of the semiconductor device 1 of the first embodiment described above, the same members are designated by the same reference numerals and the description thereof will be omitted. However, such a semiconductor device 20 is also injected in the packaging process. The movement of the pellet 2 by the resin can be stopped by the pellet locking portion 3d, and there is no fear of the wires 5 coming into contact with each other. In this case, the dummy electrode 2b similar to that of the semiconductor device 10 of the second embodiment is further formed, and the wire 8 is used to wire-bond the mount support portions 3c and 3c extending to both sides of the pellet mount portion 3a under tension. The movement of the pellets 2 due to the injected resin can be prevented more reliably, which is even more preferable.

ここで、上記ペレットマウント部3aには、ペレット2
によって覆われる穴4を複数個穿孔してもよい。
Here, the pellet 2 is mounted on the pellet mount portion 3a.
A plurality of holes 4 covered by may be drilled.

〔考案の効果〕[Effect of device]

以上の説明から明らかなように、本考案の半導体装置で
は、ペレットをペレットマウント部に樹脂接着剤等で固
着することなく支持されているので、ダイボンディング
作業が不用となり、組立工数の削減ができるといった効
果を生じる。
As is clear from the above description, in the semiconductor device of the present invention, the pellets are supported on the pellet mount portion without being fixed with a resin adhesive or the like, so die bonding work is unnecessary and the number of assembly steps can be reduced. Produces the effect.

【図面の簡単な説明】[Brief description of drawings]

第1図は本考案の一実施例にかかる半導体装置の一部破
断斜視図、第2図は同実施例のペレットのワイヤボンデ
ィング時を示す横断面図、第3図は本考案の他の実施例
にかかる半導体装置の一部破断斜視図、第4図は同実施
例の要部縦断面図、第5図は本考案の更に他の実施例に
かかる半導体装置の一部破断斜視図、第6図は従来の半
導体装置の要部断面図である。 1,10,20…半導体装置、 2…ペレット、 2a…電極、 3a…ペレットマウント部、 3b…リード、 4…透孔、
1 is a partially broken perspective view of a semiconductor device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing wire bonding of pellets of the same embodiment, and FIG. 3 is another embodiment of the present invention. FIG. 4 is a partially cutaway perspective view of a semiconductor device according to an example, FIG. 4 is a longitudinal sectional view of an essential part of the same embodiment, and FIG. 5 is a partially cutaway perspective view of a semiconductor device according to still another embodiment of the present invention. FIG. 6 is a sectional view of a main part of a conventional semiconductor device. 1, 10 and 20 ... Semiconductor device, 2 ... Pellet, 2a ... Electrode, 3a ... Pellet mount part, 3b ... Lead, 4 ... Through hole,

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】透孔を有するペレットマウント部に、前記
透孔を閉塞する状態で半導体ペレットをその裏面を直接
接触させて載置し、半導体ペレット上の電極と、一端を
半導体ペレット近傍に配設したリードとを電気的に接続
して樹脂モールドしたことを特徴とする半導体装置。
1. A pellet mounting portion having a through hole, a semiconductor pellet is placed with the back surface thereof in direct contact with the through hole closed, and an electrode on the semiconductor pellet and one end thereof are arranged in the vicinity of the semiconductor pellet. A semiconductor device characterized in that it is electrically connected to the provided lead and is resin-molded.
JP1988014821U 1988-02-05 1988-02-05 Semiconductor device Expired - Lifetime JPH062264Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988014821U JPH062264Y2 (en) 1988-02-05 1988-02-05 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988014821U JPH062264Y2 (en) 1988-02-05 1988-02-05 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH01120331U JPH01120331U (en) 1989-08-15
JPH062264Y2 true JPH062264Y2 (en) 1994-01-19

Family

ID=31226352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988014821U Expired - Lifetime JPH062264Y2 (en) 1988-02-05 1988-02-05 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH062264Y2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583038U (en) * 1981-06-29 1983-01-10 富士通株式会社 lead frame

Also Published As

Publication number Publication date
JPH01120331U (en) 1989-08-15

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