JPH0623489B2 - Clean room floor structure - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floor structure of a clean room, and more particularly to a floor structure of a clean room in which a breathable floor surface is installed.

[Background of the Invention]

Since semiconductor manufacturing requires a dust-free environment, the manufacturing is usually performed in a clean room. Generally, a clean room has multiple HEPA (high performance) mounted on the ceiling surface.
An air circulation system is adopted in which clean air is blown into a clean room room through a filter, air is sucked from the floor surface having a ventilation structure, and is again passed through a HEPA filter on the ceiling surface, and clean air is down-flowed in the room. . By the way, to install a floor with a ventilation structure,
Conventionally, this is carried out by placing a grating plate (perforated plate) of about 0.6 m square in length and width on a bundle of four erected on a foundation. However, when the heights of the bundles that are erected are different, the grating plates installed in the facility may not have the same height as the adjacent grating plates, so there may be steps or they may not be placed horizontally. Dust generated by backlash becomes a problem. Therefore, it is necessary to accurately match all the heights of the bundles to be erected, and it is troublesome to install a large number of bundles at a uniform height. In addition, when the facility area of the grating is large, the number of facilities of the grating increases with the number of facilities of the grating, so it takes time to erect the bundle and the height of each bundle is made to match. It takes more work.

[Object of the Invention]

The present invention has been made in view of such circumstances, and an object thereof is to provide a floor structure of a clean room in which the number of bundles is reduced to reduce the amount of dust emission and the amount of on-site construction in the clean room is reduced. I am trying.

[Outline of Invention]

According to the floor structure of the clean room of the present invention, the underfloor chamber is formed between the foundation floor and the breathable floor surface provided above the foundation floor, and the clean air blown from the ceiling surface is used as the underfloor chamber. In the floor structure of a clean room that takes in air inside, a plurality of vertical members that stand upright on the foundation floor, a horizontal member that can be mounted between the vertical members and whose height can be adjusted, and a horizontal member that is horizontally arranged In addition, a grid-like framework is formed so that a plurality of perforated boards can be fitted in advance and the four sides of each perforated board can be supported, and a grid-like framework unit arranged on the entire surface of the foundation floor and a grid of this grid-like framework unit And a perforated plate that is fitted to form the air-permeable floor surface.

〔Example〕

Hereinafter, preferred embodiments of a floor structure of a clean room according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a sectional view of a floor structure of a clean room according to the present invention. As shown in FIG. 1, the ceiling chamber 12 of the clean room 10 is provided with an inlet 14 on the right side surface, and the circulating air is supplied to the ceiling chamber 12 through the inlet 14. A plurality of HEPA filters 16 are arranged in the ceiling chamber 12, and the air in the ceiling chamber 12 is sent to the room 20 through the HEPA filter 16.

Further, a plurality of bundles 30, 30, ... Are erected at a predetermined interval on the foundation floor 28, and a breathable floor surface 32 is laid on these bundles 30, and the air in the room 20 is It is sucked into the underfloor chamber 34 through 32. An intake port 36 is provided on the right side surface of the chamber 34, and the intake port 36 is the intake duct 3
8 is connected to the air conditioner 40 together with the outside air introducing duct 42, and the conditioned air mixed by the air conditioner 40 is supplied to the ceiling chamber 12 again by the blower 44 via the air blowing duct 46.

As shown in FIG. 2, level mortar 50 is provided on the foundation floor 28.
The base 54 of the bundle 30 is formed on the upper side, and the height of the base 54 is provided so as to be constant by the transit and the bases 54 of the other plurality of bundles 30. The height of the formed base 54 is finished to a height within at least ± 2 mm with other bases. Mounting brackets 56, 56 are provided on both sides of the upper portion of the bundle 30, and a large pull 58 is mounted on the mounting bracket 56. Two insertion holes 60 are formed in the mounting member 56, and the insertion holes 60 are formed in an oval shape in the vertical direction. A hole 62 is formed in the large pull 58 corresponding to the insertion hole 60, and the large pull 58 is attached to the metal fitting 56 by inserting bolts into the insertion hole 60 and the hole 62 and fastening them.
Since the insertion hole 60 of the metal fitting 56 is oval, the height of the large pull 58 can be adjusted at the time of mounting. For this adjustment, a hydraulic device 66 is installed on a table 64 formed on the bundle 30. Is adjusted. By this adjustment, the heights of the large pulls are horizontally attached between the bundles 30 at a constant height with an accuracy within ± 1.0 mm. The large pull 58 and the mounting bracket 56 are welded to each other when the level of the entire floor is adjusted to prevent distortion.

The frame unit 68 shown in FIG. 3 is provided on the large pull 58 as shown by the imaginary line in FIG. 2, and the frame unit 68 is prepared in advance so that the horizontal accuracy is within ± 1.0 mm on the surface plate. The grating plate 70 shown in FIG. 4 is fitted in the lattice, and therefore the four sides of the grating plate 70 are supported by the lattice of the frame unit 68. The frame unit 68 is formed in a size of 2.5 m in width and about 1.9 m in width, and the grating plate 70 of 0.6 m square is one.
Two pieces are fitted. Further, a fitting 74 for the grating plate 70 is provided at the intersection of the joists of the frame unit 68 via a conductive rubber mat 72.

According to the floor structure of the clean room according to the present invention configured as described above, the bundles 30 are erected at predetermined intervals on the foundation floor 28, and the large pulls 58 are horizontally provided between the bundles 30. The height of the tug 58 is adjusted by a hydraulic device 66 and is easily mounted horizontally at a constant height. A grid-like frame unit 68 is provided on the horizontally attached large pull 58.
Are installed and installed on the entire floor 32. Further, a grating plate 70 is attached to the lattice of the frame unit so that the floor surface 3
Two facilities will be constructed. Since the frame unit is used, the number of upright bundles 30 can be reduced, and the amount of looseness of the perforated plate is reduced, so that the amount of dust emission can be reduced. In addition, the bundle 30 can be easily constructed with a constant height by a transit. Further, the large pull 58 to be attached can be easily adjusted horizontally, and the grating plate 70 placed thereon can be horizontally attached to the uniform height through the frame unit 68. On the floor surface 32 of the grating plate 70 configured as described above, a clean downward flow of air from the ceiling surface can be efficiently ventilated to the floor surface 32 and sent into the underfloor chamber 34.

〔The invention's effect〕

As described above, according to the floor structure of the clean room according to the present invention, the lattice-shaped frame unit is used in which a plurality of perforated plates can be fitted in advance and the lattice-shaped frame is formed so as to support the four sides of each perforated plate. Therefore, it is possible to significantly reduce the amount of on-site construction as compared with the case where the conventional framework for grating is performed on site.

Further, since the lattice-shaped frame unit is used, the number of vertical members is reduced, the construction is facilitated and the amount of looseness of the perforated plate is reduced, and the amount of dust generated in the clean room is reduced.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view of a floor structure of a clean room in which the present invention is used, FIG. 2 is a side view of a bundle of floor structures of a clean room according to the present invention, and FIG. FIG. 4 is a perspective view of a frame unit used for the floor structure of such a clean room, and FIG. 4 is a cross-sectional view of a main part of the frame unit. 10: Clean room, 16: HEPA filter,
20: Clean room room, 30: Bundle, 50: Level mortar, 54: Base, 58: Large pull, 68
…… Frame unit, 70 …… Grating board.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kuma Murakami 1-1-14 Uchikanda, Chiyoda-ku, Tokyo Inside Hirit Plant Construction Co., Ltd. (72) Inventor Kazuo Yumoto 1-chome, Uchikanda, Chiyoda-ku, Tokyo No. 14 Hiritsu Plant Construction Co., Ltd. (72) Inventor Tadahiro Omi 2-1-17-301 Yonegabukuro, Sendai City, Miyagi Prefecture (56) References: 62-146833 (JP, U)

Claims (1)

[Claims] 1. A floor of a clean room in which an underfloor chamber is formed between a foundation floor and a breathable floor surface laid above the foundation floor, and clean air blown from the ceiling surface is sucked into the underfloor chamber. In the structure, a plurality of vertical members that are erected on the foundation floor, a horizontal member that is supported by a plurality of vertical members and whose height can be adjusted, and a plurality of perforated plates that can be fitted into each vertical perforated plate The lattice-like frame unit in which the lattice-like frame is formed in advance so as to be able to support the four sides, and the breathable floor by being fitted into the lattice of a plurality of lattice-like frame units horizontally arranged side by side on the cross member. A floor structure for a clean room, which is composed of a perforated plate that forms a surface.