JPH0624044B2 - Composite type magnetic head - Google Patents

Description

Description: Industrial field of application The present invention is mainly composed of a ferromagnetic oxide such as ferrite,
According to the improvement of the composite type magnetic head using the metal magnetic material in the vicinity of the working gap, eliminating the magnetic pseudo-gap generated at the junction with the metal magnetic material, and magnetic characteristics, for example, the swell of the frequency characteristic of the reproduction output. The present invention relates to a composite magnetic head suitable for various magnetic recording / reproducing devices that use a recording medium having a high coercive force and having a flat output characteristic and good manufacturability.

BACKGROUND ART In recent years, in the magnetic recording field, a so-called metal-based recording medium having a high coercive force has been used in response to a demand for higher recording signal density. For example, it is being used for magnetic recording / reproducing devices of various recording forms such as FDD, HDD, VTR, magnetic tape storage device for computer, S-DAT, and still video floppy.

A magnetic head that performs magnetic recording / reproduction on a magnetic recording medium having a high residual magnetic flux density, such as a metal tape, needs to have a higher magnetic field strength generated in the magnetic gap than before.

On the other hand, in the case of a magnetic head having a structure in which a magnetic core made of a ferromagnetic oxide such as single crystal ferrite is used as a half-divided body and a pair of them is butted and the butted portion is a magnetic gap, the ferrite that forms the gap is Bs is at most 60
Since it is as low as 00 G, there is a problem that sufficient recording magnetic field strength cannot be obtained.

Therefore, in a magnetic head mainly composed of a ferromagnetic oxide, various so-called composite magnetic heads have been proposed in which a magnetic gap vicinity portion of the magnetic head is composed of a metal magnetic thin film having a higher saturation magnetic flux density Bs than ferrite.

For example, referring to the schematic view of the medium facing surface of the conventional composite magnetic head shown in FIGS. 5A and 5B, the composite magnetic head has a pair of magnetic cores made of a ferromagnetic oxide such as single crystal ferrite. After forming a metal magnetic thin film (3) (4) on each butting surface (1a) (2a) of the half piece (1) (2) using a vacuum thin film forming technique such as a sputtering method, the magnetic core half Body piece (1) (2)
Are abutted against each other to form a magnetic gap (5).

Further, the metal magnetic thin film of the composite magnetic head having such a structure is required to have the following characteristics, and a Fe-Al-Si based metal magnetic thin film is a material satisfying the following requirements.

Bs higher than Bs of ferrite material Excellent wear resistance Excellent thermal stability Excellent magnetic permeability at high frequencies (eg 10MHz) Problems with conventional technology A composite magnetic head using a Fe-Al-Si alloy film as a metal magnetic thin film is widely used as an excellent magnetic head that satisfies various conditions corresponding to the use of a metal tape. However, there were the following problems.

The magnetic core will be described with reference to the schematic diagram of the magnetic head shown in FIG.
(1) When depositing a metal magnetic thin film (3) (4) on the butt surface of (2), the thin film forming conditions and the heat of the core (1b) (2b) and the thin film (3) (4) Due to the difference in expansion coefficient, etc., the magnetic properties of the initial layer of the metallic magnetic thin film are deteriorated, and the joints (1b) (2b) with the magnetic cores (1) (2)
Magnetic discontinuity occurs at the time of reproduction, and when reproducing with such a composite type magnetic head, the junctions (1) and (2) work as a pseudo gap, and a pseudo peak as shown in Fig. 7 appears, and the reproduction output is There is a problem that the frequency characteristic is wavy.

Also, if there is a work strain layer on the surface to be adhered to the metal magnetic thin film of the abutting surface of the magnetic cores (1) and (2), magnetic discontinuity occurs at the joint (1b) and the pseudo gap as described above. Turned out to work.

For such a pseudo gap generation problem, azimuth loss is generally used to create a pseudo gap joint.
(1b) (2b) and the magnetic gap (5) are not parallel,
For example, as shown in FIG. 5, this has been dealt with by providing a predetermined azimuth angle.

However, in the structure as shown in FIG. 5, it is necessary to deposit the metal magnetic thin film to a thickness of about 20 μm, which reduces the yield due to film peeling, or requires a long time for deposition to increase productivity. There was a problem such as bad.

OBJECT OF THE INVENTION The present invention aims at a composite type magnetic head suitable for high density recording / reproducing on a magnetic recording medium having a high coercive force Hc,
An object of the present invention is to provide a composite type magnetic head which prevents generation of a so-called pseudo gap, is excellent in mass production, has high reliability, and has good wear resistance.

According to the present invention, in a composite magnetic head in which at least an operation gap vicinity portion of a magnetic core mainly composed of a ferromagnetic oxide is composed of a metal magnetic material, the metal magnetic material is ferromagnetic Fe or Fe having a bcc structure. A ferromagnetic oxide surface composed of a Fe-Al-Si alloy thin film and a strain-free high flatness surface.
Ferromagnetic Fe with bcc structure between Fe-Al-Si alloy thin films
Alternatively, a composite magnetic head is characterized in that an Fe-based alloy thin film is formed.

That is, the composite magnetic head of the present invention is, for example, Ni-Z
The butt surface of the magnetic core half-piece made of ferromagnetic oxide such as n-ferrite or Mn-Zn ferrite is made into a high-precision flat surface with no distortion by strain-free processing such as mechanochemical polishing and float polishing. After processing, a ferromagnetic Fe or Fe-based alloy film having a bcc structure is deposited on the surface, and further a Fe-Al-Si-based alloy thin film, a so-called sendust film is deposited and formed into a predetermined shape. After processing, the magnetic core half pieces are abutted against each other to form a magnetic gap.

The composite magnetic head according to the present invention is characterized by a metal magnetic material having a laminated structure laminated on the abutting surface of the magnetic core halves in a required order, and is made of ferromagnetic Fe or Fe having a bcc structure.
A ferromagnetic Fe or Fe alloy film having a bcc structure and a ferromagnetic oxide of a magnetic core half body, as well as a two-layer structure consisting of a Fe-Al-Si alloy thin film and a Fe-Al-Si alloy thin film, and an Fe or Fe alloy film It also includes the case of a laminated structure having a diffusion layer formed on one or both of the joint surfaces of the Fe and Si-Al-based alloy films.

Effect of the Invention A metallic magnetic material having a two-layer structure of a Fe-Al-Si alloy thin film and a ferromagnetic Fe or Fe alloy thin film having a bcc structure, which is a feature of the present invention, is provided on a ferromagnetic oxide magnetic core surface. Thereby, a composite magnetic head suitable for high-density recording / reproducing on a magnetic recording medium having a high coercive force Hc can be obtained, a so-called pseudo gap is substantially eliminated, and waviness of the frequency characteristic is significantly reduced, and The metal magnetic body may be a relatively thin film, and it does not take time to deposit and form the metal magnetic body, which is excellent in productivity, high in reliability, and excellent in wear resistance.

The reason why such an effect is obtained will be described in detail.

Fe, which is considered as one of the causes of the above-mentioned pseudo gap
The initial deterioration layer of the -Al-Si alloy thin film cannot be easily removed even by changing the film forming conditions of the ordinary sputtering method or vacuum evaporation method.

The reason for this is not clear, but as is clear from the relationship with the effect of the film thickness on the magnetic characteristics of the sendust film by the sputtering method shown in FIG.
It can be seen that the magnetic permeability is significantly reduced.

Therefore, the part of several thousand liters on the side close to the interface with the magnetic core half has significantly lower magnetic permeability than the part above it, and it is presumed that this acts as a pseudo gap.

As a result of various studies by the present inventors, the magnetic properties of the initial layer of the Fe-Al-Si alloy thin film are significantly deteriorated because the Fe-Al-Si film is directly attached to the ferromagnetic oxide forming the magnetic core half pair. When a film is formed,
It is considered that this is because the crystal orientation is likely to be disturbed at the initial stage of film formation, and recrystallization and grain growth hardly occur near the interface with the ferromagnetic oxide even if heat treatment is performed.

Therefore, a ferromagnetic F having the same bcc structure as the Fe-Al-Si alloy film is used.
If an e or Fe alloy film is first formed on a substrate made of a ferromagnetic oxide or the like, and then an Fe-Al-Si alloy film is formed,
It is considered that an Fe-Al-Si alloy film (a so-called Fe-Al-Si alloy film by epitaxial growth) is formed along with the crystal orientation of the underlying Fe or Fe alloy film, and the disorder of the crystal orientation of the initial layer is small. It was found that the soft magnetic properties are easily improved by heat treatment.

It should be noted here that the Fe thin film has a coercive force of several
When it is combined with the Fe-Al-Si alloy film (Fe film 0.1μm, Fe-Al-Si alloy film 0.9μm, though it is only Oe and is not enough as a soft magnetic film for magnetic heads) ), The coercive force of the hard axis is 0.1 Oe or less, and the magnetic permeability is improved to about 2800 (10 MHz). This is simply unpredictable from a combination of known techniques and knowledge.

That is, ferromagnetic Fe having a bcc structure can be obtained by a vacuum deposition method, a sputtering method, etc., but it is also described in the literature such as the 10th Japan Society for Applied Magnetics Academic Conference, 414 pages. In addition, a normal Fe sputtered film has a high coercive force of about 10 Oe or more and a magnetic permeability of only several hundreds or less.

Since this is insufficient as a soft magnetic film for a magnetic head, no attempt has been made to use ferromagnetic Fe having a bcc structure as it is as a material for a magnetic head. Further, combining such an insufficient soft magnetic film and a sendust alloy film has never been considered at all.

Further, according to the present invention, the two-layer structure of the Fe-Al-Si-based alloy film and the Fe or Fe-based alloy film has an effect of relieving the stress of the film, and can prevent peeling of the film after the heat treatment.

Further, even if mutual diffusion occurs between the two alloy films due to the heat treatment, since both of them have Fe as a main component, there is an advantage that the problem of deterioration of the characteristics due to the heat treatment is unlikely to occur.

BEST MODE FOR CARRYING OUT THE INVENTION In a preferred embodiment of the present invention, a composite magnetic head is composed of ferromagnetic Fe or Fe having a bcc structure in which a metal magnetic material is deposited on a ferromagnetic oxide surface having a strain-free high flatness surface. Any known structure can be used as long as it has a laminated structure of a system alloy thin film and a Fe-Al-Si system alloy thin film deposited thereon.

Further, in the present invention, a single crystal ferrite such as Ni-Zn ferrite or Mn-Zn ferrite, or HIP-treated sintered ferrite can be used as the ferromagnetic oxide mainly composed of the magnetic core.

As described above, the Fe or Fe alloy film, which is a feature of the present invention, first has a bcc structure for the purpose of promoting the crystal orientation of the initial layer of the Fe-Al-Si alloy film. Alternatively, the Fe alloy film itself must be ferromagnetic so that it does not form a pseudo gap.

Further, the saturation magnetic flux density Bs is required to be about 70% or more of the Bs of the basic ferromagnetic oxide, and the B of the ferromagnetic oxide to be the base is required.
It is preferably equal to or more than s.

The coercive force can be used if it is several 10 Oe or less, but it is preferably 10 Oe or less, more preferably several Oe or less.

The composition of this Fe or Fe-based alloy film may be so-called pure Fe consisting of Fe and unavoidable impurities, and the main component is Fe and Co, Ni, Cu, Mn, Cr, V, Mo, Nb as minor components. , Z
r, W, Ta, Hf, Y, B, C, Al, Si, Ru, Rh, Pd, P
A Fe alloy film containing at least one of t and rare earth elements and inevitable impurities may be used.

However, the concentrations of these subcomponents need to be appropriately selected within a range that satisfies the above-mentioned bcc structure and ferromagnetism conditions. For example, in the case of an Fe-Ni alloy with Fe added, an alloy film called Permalloy that contains about 50% or more of Ni and has an fcc structure is unsuitable because it cannot promote the crystal orientation of the initial layer of the sendust film. Is.

Further, when an amorphous forming element such as B, Zr, or Hf is added in an amount of about 10 to 20 atom%, an amorphous Fe alloy film is formed, which is also inappropriate.

Therefore, when the elements of the above subcomponents are added for each element or in combination, whether or not a Fe or Fe alloy film satisfying the above-mentioned conditions is formed, its concentration is determined by known techniques and knowledge. Just decide.

Further, the Fe-Al-Si alloy thin film provided in the outermost layer is a so-called sendust alloy, which has been widely used in composite magnetic heads from the past, and a known composition is appropriately selected depending on the application of the magnetic head and the like. Obtain, but 3-10wt% Al, 6-15wt% Si, 80-90
An alloy in the range of wt% Fe is often used, and if necessary, Cr, Ta, Ni, Co, Mo, Zr, a rare earth element, etc. may be added.

A ferromagnetic Fe or Fe-based alloy thin film having a bcc structure and an Fe-Al-Si-based alloy thin film are formed on the surface of the ferromagnetic oxide forming the magnetic core half body. As the method, various known vapor phase film forming methods such as various sputtering methods, vacuum deposition, ion plating and the like can be used.

As a preferable deposition method and conditions, in any method, the higher the ultimate vacuum is, the more preferable, and at least 10 ⁻⁶ To
It is necessary to make a high vacuum below rr level, preferably 2 x 10
^-6 Torr or less, more preferably 1 × 10 ^-6 Torr or less.

When the sputtering method is used, an inert gas such as argon gas is used as the sputtering gas, but this pressure may be appropriately selected depending on the structure of the sputtering device.

For example, in the case of magnetron-type sputtering apparatus, the gas pressure is preferably ^{1 × 10 -3 Torr~20 × 10 -3} Torr, more preferably preferably ^{2 × 10 -3 Torr~8 × 10 -3} Torr.

The substrate temperature is preferably 300 ° C or lower, preferably 200 ° C or lower, and more preferably 100 ° C or lower.

Furthermore, the substrate roughness of the ferromagnetic oxide surface on which the ferromagnetic Fe or Fe-based alloy thin film having the bcc structure is deposited is preferably
Keep it below 40Å. The reason is that the ferromagnetic Fe or Fe-based alloy thin film having a bcc structure to be deposited has a thin film thickness of several Å to several thousand Å.
This is because the residual strain stress, the roughness, etc. are strongly influenced and the magnetic characteristics may be deteriorated.

According to the experiment by the inventor, the characteristic deterioration of the ferromagnetic Fe or Fe-based alloy thin film having the bcc structure is remarkable because the surface roughness of the ferromagnetic oxide becomes 1/10 of the magnetic film thickness. The surface roughness of the ferromagnetic oxide is preferably 100 Å or less, more preferably 40 Å or less.

As a method for obtaining the strain-free and high flatness state of the ferromagnetic oxide surface, mechanochemical polishing, float polishing, mechanochemical polishing after diamond polishing, or mechanochemical polishing after diamond polishing, and further float polishing The way to do is good.

In the present invention, as the mechanochemical polishing method, 0.5 wt% to 20 wt% of pure or fine powder of MgO, ZrO ₂ , Al ₂ O ₃ , SiO ₂ or the like having a particle size of 0.1 μm or less is added in pure water. Using a suspended suspension, in the suspension, for example, a hard disk, a solder, a disk-shaped polisher made of Sn or the like is rotatably arranged, and the workpiece is polished in this suspension. It is preferable to bring the surfaces into contact with each other with a predetermined load and relatively rotate both to perform polishing.

In the polishing method, polisher material and rotation speed,
The load pressure may be appropriately selected according to the conditions such as the particle size of the fine powder, the amount of suspension in pure water, the work material, etc., but the lapping pressure is 0.
The conditions of 01 kg / cm ^{2 to 1} kg / cm ² and rotation speed; 10 m / min to 100 m / min are preferable. Further, if the particle size of the single or mixed fine powder exceeds 0.1 μm, scratches are generated, and therefore the particle size is preferably 0.1 μm or less.

In the present invention, ferromagnetic Fe or F having a bcc structure
The thickness of the metal magnetic body composed of the e-alloy film and the Fe-Al-Si alloy film is 0.3 μm to 30 μm, preferably 0.5 μm to 20 μm, in view of the magnetic characteristics of the alloy magnetic film, the productivity of the head, and the reliability. .

Further, the deposition thickness of the Fe or Fe-based alloy film having the bcc structure, which is a feature of the present invention, is required to be 0.001 μm or more for the purpose of promoting the crystal orientation of the Fe-Al-Si alloy film, and preferably 0.01 μm or more, more preferably 0.1 μm or more. However, if the thickness is more than 2 μm, the magnetic properties of the entire metal magnetic film deteriorate, so less than 2 μm, preferably 1 μm.
Hereafter, 0.5 μm or less is more desirable.

In addition, the thickness of the Fe-Al-Si alloy film must be 0.1 μm or more for sufficient saturation recording on the high coercive force medium, and stable high magnetic properties (permeability, coercive force) can be secured. In order to obtain excellent workability, 30 μm or less, preferably 20
It is less than or equal to μm, and more preferably less than or equal to 10 μm.

The metal magnetic body may be formed only in one magnetic core half body in the vicinity of the gap of the magnetic core half body pair made of a ferromagnetic oxide, or in both of them.

Further, in the case of being formed on both pairs of magnetic core halves, the film thickness constitution of each metal magnetic body may be within the above-mentioned film thickness range, and it is not necessary to unify them.

In order to improve the magnetic characteristics of the metal magnetic film thus deposited on the two layers in this manner, heat treatment may be performed as necessary.

The heat treatment may be performed after film formation and before processing, or after processing into the shape of the magnetic head, and also for glass welding when performing bonding processing of the magnetic head core half pair. The heating may be combined with the heat treatment.

The temperature and time of the heat treatment are appropriately selected such that the temperature and time are sufficient to improve the magnetic properties of the metal magnetic film, and at the same time, the thermal expansion coefficient difference with the ferromagnetic oxide forming the magnetic core half body,
The heat resistance of the ferromagnetic oxide that constitutes the magnetic core half body, and the mutual diffusion between the ferromagnetic oxide, the Fe or Fe-based alloy film, and the Fe-Al-Si-based alloy film are taken into consideration at the same time. It should be properly selected depending on the composition of the ferromagnetic oxide used and the metal magnetic film.

Normal temperature is preferably 300 ℃ or more and 800 ℃ or less,
It is more preferably 0 ° C or higher and 600 ° C or lower. Time is more than 1 minute,
It is preferably 1000 hours or less, more preferably 10 minutes or more and 100 hours or less.

The cooling rate also needs to be appropriately selected according to the composition of the ferromagnetic oxide used as well as the heat treatment temperature and time, and the metal magnetic film, and is usually 1 ° C./hr or more and 10,000 ° C./hr or less, but 50 The range of ° C / hr to 600 ° C / hr is more preferable.

The atmosphere may be any atmosphere as long as it does not significantly deteriorate the magnetic properties of the metal magnetic film and the ferromagnetic oxide, but it is preferably vacuum or an inert gas or nitrogen gas.

When the heat treatment is performed in this manner, an interdiffusion layer that can be detected by an analytical instrument may be formed depending on the heat treatment temperature and the time.

In such a case, the magnetic head according to the present invention has the diffusion layer on at least one of the boundary surfaces of the ferromagnetic oxide and the ferromagnetic Fe or Fe alloy film having the bcc structure and the Fe-Si-Al alloy film. It will be a configuration that includes.

Disclosure of the Invention Based on the Drawings FIG. 1 is a perspective explanatory view of a composite type magnetic head according to the present invention. 2, 3, and 4 are perspective explanatory views showing the manufacturing process of the composite magnetic head according to the present invention.

The composite magnetic head according to the present invention, as shown in FIG.
For example, a magnetic gap obtained by strain-free processing of magnetic core halves (10) (11) made of ferromagnetic oxide such as Mn-Zn ferrite.
(12) Ferromagnetic thin films (13) and (14) and ferromagnetic thin films (13 ') and (14') are respectively deposited and formed on the surface in the vicinity by a vacuum thin film forming technique such as sputtering to form a multilayer structure. The gap (12) is formed of a non-magnetic material (15) such as SiO ₂ deposited on the ferromagnetic thin film, and
Form the window (16) for coil winding and core with glass (17)
(10) (11) Half body pairs are joined.

The manufacturing process of such a composite head will be described with reference to FIGS. 2, 3, and 4.

First, the magnetic substrate (20) made of a ferromagnetic oxide such as Mn-Zn ferrite is subjected to mechanochemical polishing on the substrate surface to be joined to the metal magnetic thin film in the subsequent step, and further polished if necessary. Float polishing is performed with a gap of several μm provided between the plate and the plate, and the substrate surface is polished with high precision and without distortion. At this time, make sure that the surface roughness does not exceed 100Å,
It is preferably 40Å or less.

Next, a ferromagnetic Fe or Fe-based alloy first magnetic film (13) having a bcc structure is deposited and formed on the polished magnetic substrate (20) surface by a vacuum thin film forming technique such as a sputtering method. The second magnetic film (14) of Fe—Al—Si alloy is continuously deposited without changing the degree of vacuum of the vacuum thin film forming apparatus.

Furthermore, a non-magnetic material for forming a magnetic gap having a predetermined thickness
(15) Form a film.

On the surface of the thus obtained composite magnetic substrate (20) to which the magnetic film is attached, for example, by using a rotating grindstone, as shown in FIG. Forming a plurality.

Further, a plurality of concave ship-shaped grooves (21) are formed in a direction on the same plane orthogonal to the groove (22) having a concave cross section by 90 °.

Next, as shown in FIG. 4, only a composite magnetic substrate (20) having the grooves (21) and (22) formed therein and a groove (31) having a concave cross-section are formed to cover two layers of magnetic films. Butt the composite magnetic substrate (30) attached, insert the glass rod into the groove (22) of the magnetic substrate (20),
For example, the block (40) is obtained by melting at 600 ° C., filling the groove (22) with glass, and bonding the substrate (20) and the substrate (30) together.

Next, by slicing the block (40) at the positions of the aa line and the bb line, a plurality of head chips can be obtained.

Then, the sliding contact surface of the recording medium of the head chip is cylindrically polished to obtain the composite magnetic head shown in FIG.

Example As in FIG. 2, one main surface of the magnetic substrate made of Mn-Zn single crystal ferrite was mechanochemically polished using a suspension of MgO powder having a particle size of 0.1 μm or less manufactured by Amplex Co. After that, 5 between the polishing surface plate and one main surface
While maintaining a gap of μm, the same suspension was subjected to float polishing to finish the main surface into a highly accurate non-strained surface.

At this time, the roughness was 40 Å or less in the measurement by a Talystep (made by Taylor Hobson) surface level difference measuring device. The removal state of the surface strain layer was confirmed by ellipsometry.

On the main surface of the strain-free processed magnetic substrate, a 99.5% Fe film of 0.1% was formed by an RF 2-pole magnetron sputtering device.
The Fe-Al-Si film was continuously deposited to a thickness of 5 μm without exposing the thin film layer to the atmosphere.

Further, an Al ₂ O ₃ film for forming a magnetic gap is deposited to a thickness of 0.1 μm by an RF _2- pole magnetron sputtering device to obtain a three-layer composite magnetic substrate as shown in FIG.

Next, as shown in FIG. 3, a large number of track grooves for forming tracks and winding grooves for winding for recording / reproducing were formed.

Further, a Cr film having a thickness of 0.05 μm was formed on one main surface of this composite magnetic substrate in order to improve the glass flowability during the subsequent glass bonding.

Next, the composite magnetic substrate was cut into a plurality of half bodies each having a predetermined size, and as shown in FIG. 4, the half body having the winding groove and the half body having no winding groove were vacuumed at 490 ° C. for 1 hr. By heat treatment, glass bonding was performed, and at the same time, the magnetic characteristics of the metal magnetic film were improved.

At this time, the magnetic properties of the sheet-like film subjected to the same heat treatment as a dummy were measured and found to be Bs 11.2 KG or more, Hc 0.2 Oe or less, and μ at 10 MHz was 2000 or more.

Further, similarly to FIG. 4, slicing was performed along the line aa and the line bb, and external processing was performed so as to have a predetermined size and shape, and chips were formed.

Next, as shown in FIG. 9, a composite head is formed,
The electromagnetic conversion characteristics were measured.

For comparison, we also prepared a composite head using only the conventional Fe-Al-Si film and measured its electromagnetic conversion characteristics.

FIG. 10 is a schematic diagram of a reproducing waveform of a composite head according to the conventional method and the present invention. (A) is an output from a magnetic gap, and (b) is a magnetic imperfection between a metal magnetic film and a magnetic core half. It is an output by the pseudo gap by continuation.

As a result of measuring the output ratio b / a, b / a of the present invention is 0.02,
b / a was 0.2, and it was confirmed that in the case of the head according to the present invention, the effect of the pseudo gap was significantly reduced to such a degree that it did not cause any problem, and the recording / reproducing characteristics were good.

Also, as a natural result, the undulation of the reproduction frequency characteristic of the composite head according to the present invention is significantly improved,
It was below.

[Brief description of drawings]

FIG. 1 is a perspective explanatory view of a composite magnetic head according to the present invention. 2, 3, and 4 are perspective explanatory views showing the manufacturing process of the composite magnetic head according to the present invention. FIGS. 5a, 5b and 6 are explanatory views of a conventional composite type magnetic head. 7 and 10 are schematic diagrams of output frequency characteristics of the magnetic head. FIG. 8 is a graph of the relationship between film thickness and magnetic permeability for explaining the effect of film thickness on the magnetic characteristics of the sendust film. FIG. 9 is a perspective explanatory view of a composite head. 10,11 …… magnetic core half, 12 …… magnetic gap, 13 ……
First magnetic film, 14 ... Second magnetic film, 15 ... Non-magnetic material, 16 ...
… Coil winding window, 17 …… glass, 20,30 …… magnetic substrate, 21,22,31 …… groove, 40 …… block.

Claims (1)

[Claims] 1. A composite magnetic head comprising a magnetic core mainly composed of a ferromagnetic oxide, wherein at least a portion near an actuation gap is made of a metal magnetic material. A composite magnetic head having a ferromagnetic metal or a Fe-based alloy thin film having a structure and a Fe-Al-Si-based alloy thin film laminated in this order.