JPH0624046B2 - Method for manufacturing sliding contact part of recording medium - Google Patents
Method for manufacturing sliding contact part of recording mediumInfo
- Publication number
- JPH0624046B2 JPH0624046B2 JP60060370A JP6037085A JPH0624046B2 JP H0624046 B2 JPH0624046 B2 JP H0624046B2 JP 60060370 A JP60060370 A JP 60060370A JP 6037085 A JP6037085 A JP 6037085A JP H0624046 B2 JPH0624046 B2 JP H0624046B2
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- sliding contact
- glassy carbon
- contact component
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electronic Switches (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、記録媒体の摺接部品の製造方法に関する。特
に、記録媒体に接触する面にガラス状炭素の被膜を設け
た摺接部品の製造方法に関する。The present invention relates to a method for manufacturing a sliding contact component for a recording medium. In particular, the present invention relates to a method of manufacturing a sliding contact component in which a glassy carbon film is provided on a surface that contacts a recording medium.
現在、シートやフィルム等に磁性体層を設けた記録媒体
を用いる記録再生装置や、紙を記録媒体として用いる記
録再生装置が各種市販されている。これらの記録再生装
置には、記録媒体と常時または一時的に摺接する部品が
多数含まれている。このような部品としては、例えば、
フレキシブルディスクのヘッドスライダ、ハードディス
クの浮上スライダ、感熱式印刷ヘッド、磁気ヘッド等を
挙げることができる。これらの部品には、耐久性に優
れ、しかも相対的に摺接する記録媒体に損傷を与えない
ことが必要である。At present, various types of recording / reproducing devices using a recording medium having a magnetic layer provided on a sheet, a film, etc. and recording / reproducing devices using paper as a recording medium are commercially available. These recording / reproducing devices include a large number of parts which are in continuous or temporary sliding contact with the recording medium. As such a part, for example,
Examples thereof include a flexible disk head slider, a hard disk flying slider, a thermal printing head, and a magnetic head. It is necessary for these parts to have excellent durability and not to damage the recording medium which is in sliding contact with each other.
従来のこのような摺接部品の材質としては、フェライ
ト、センダスト、二酸化ケイ素、炭化ケイ素、硬質ガラ
ス、アルミナ系セラミック等が用いられているが、これ
らはいずれも硬度が高く、記録媒体との摺動性が悪いた
め、記録媒体を損傷させる欠点があった。Ferrite, sendust, silicon dioxide, silicon carbide, hard glass, alumina-based ceramics, etc. have been used as materials for such conventional sliding contact parts, but all of them have high hardness and are slidable with a recording medium. Since the mobility is poor, there is a drawback that the recording medium is damaged.
この点を改良するため、記録媒体表面に保護膜を設けた
り、記録媒体に潤滑剤を塗布したり、記録媒体と摺接す
る部品の表面に潤滑剤を塗布する等により、記録媒体の
損傷を防止する試みがなされた。To improve this point, prevent damage to the recording medium by providing a protective film on the surface of the recording medium, applying a lubricant to the recording medium, or applying a lubricant to the surface of the parts that are in sliding contact with the recording medium. An attempt was made to do so.
しかし、潤滑剤を用いる場合には、潤滑剤が経時的に失
われる問題がある。すなわち、潤滑作用を長時間持続さ
せることが困難であり、定期的に潤滑剤を塗布しなけれ
ばならない欠点があった。However, when a lubricant is used, there is a problem that the lubricant is lost with time. That is, it is difficult to maintain the lubricating action for a long time, and there is a drawback that the lubricant must be applied regularly.
保護膜を設けた例としては、特開昭56-83829に、磁気ヘ
ッドの表面にアルミナまたは炭化塩素の保護膜を設けた
例が開示され、特開昭56-83869に薄膜磁気ヘッドのスラ
イダ面にアルミナ、シリカあるいはチタン酸バリウムの
被膜を形成した例が開示されている。しかし、これらの
例では、磁気ヘッドの耐久性が向上するが、被膜の材質
が硬すぎるため、記録媒体を損傷させやすい欠点があっ
た。As an example of providing a protective film, JP-A-56-83829 discloses an example in which a protective film of alumina or chlorine carbide is provided on the surface of a magnetic head. JP-A-56-83869 discloses a slider surface of a thin film magnetic head. There is disclosed an example in which a coating film of alumina, silica or barium titanate is formed. However, in these examples, although the durability of the magnetic head is improved, there is a drawback that the recording medium is easily damaged because the coating material is too hard.
本発明は、耐久性に優れ、しかも記録媒体との摩擦抵抗
が少なく、記録媒体を損傷させることのないガラス状炭
素を用いて、磁気記録媒体の摺接部品を製造する方法を
提供することを目的とする。The present invention provides a method for manufacturing a sliding contact component of a magnetic recording medium by using glassy carbon that has excellent durability, has a low frictional resistance with the recording medium, and does not damage the recording medium. To aim.
本発明は、記録媒体と接触する面にガラス状炭素の被膜
を形成する記録媒体の摺接部品の製造方法において、堆
積源としてガラス状炭素を用い、１eV以上の運動エネル
ギの粒子を真空中に放射させて上記被膜として堆積させ
る方法を特徴とする。The present invention relates to a method for manufacturing a sliding contact component for a recording medium, in which a glassy carbon film is formed on the surface in contact with the recording medium, using glassy carbon as a deposition source, and particles having a kinetic energy of 1 eV or more are placed in a vacuum. It is characterized by a method of irradiating and depositing as the film.
堆積させる方法としては、スパッタ法またはクラスタイ
オンビーム法を用いる。As a method of depositing, a sputtering method or a cluster ion beam method is used.
本発明の方法は、１eV以上の運動エネルギの粒子を用い
るため、耐久性のよいガラス状炭素の被膜が得られる。
ガラス状炭素の被膜は記録媒体との潤滑性が優れてい
る。Since the method of the present invention uses particles having a kinetic energy of 1 eV or more, a glassy carbon film having excellent durability can be obtained.
The glassy carbon film has excellent lubricity with a recording medium.
摺接部品の表面に被膜を形成する方法としては、スパッ
タ法、クラスタイオンビーム法の他に真空蒸着法等があ
る。真空蒸着法では、蒸着する粒子の運動エネルギが通
常0.5eVと比較的低いので、形成された被膜は剥がれや
すく、耐久性に欠ける。As a method for forming a film on the surface of the sliding contact component, there is a vacuum vapor deposition method in addition to the sputtering method and the cluster ion beam method. In the vacuum vapor deposition method, the kinetic energy of vapor deposited particles is usually as low as 0.5 eV, and thus the formed film is easily peeled off and lacks durability.
被膜の堆積源としてガラス状炭素以外の材料、例えば石
墨等を用いた場合にも、摺接部品の表面にガラス状炭素
の被膜を形成することができる。しかし、この場合に
は、良好な耐久性を有する被膜を形成するために、粒子
の運動エネルギを10eV以上に設定する必要がある。運動
エネルギを高く設定するためには、高価な装置を用いる
必要がある。Even when a material other than glassy carbon such as graphite is used as the deposition source of the coating, the glassy carbon coating can be formed on the surface of the sliding contact component. However, in this case, it is necessary to set the kinetic energy of particles to 10 eV or more in order to form a film having good durability. In order to set the kinetic energy high, it is necessary to use an expensive device.
本発明では、粒子の運動エネルギの上限は特に制限しな
いが、通常は１〜５eVであれば十分である。In the present invention, the upper limit of the kinetic energy of particles is not particularly limited, but 1-5 eV is usually sufficient.
本発明では、堆積源として、熱硬化性樹脂を炭化して得
られるガラス状炭素、共重合や共縮合等により熱硬化す
るように変性された樹脂を炭素化して得られるガラス状
炭素、硬化あるいは炭素化の過程で化学処理により結晶
化を著しく妨げることにより得られるガラス状炭素、メ
タン、エチレン、ベンゼン等の低分子量炭化水素類を気
相で熱分解して得られるガラス状炭素等を用いる。具体
的には、ポリアクリロニトリル系ガラス状炭素、レーヨ
ン系ガラス状炭素、ピッチ系ガラス状炭素、リグニン系
ガラス状炭素、フェノール系ガラス状炭素、フラン系ガ
ラス状炭素、アルキッド樹脂系ガラス状炭素、不飽和ポ
リエステル系ガラス状炭素、キシレン樹脂系ガラス状炭
素等を用いることができる。In the present invention, as a deposition source, glassy carbon obtained by carbonizing a thermosetting resin, glassy carbon obtained by carbonizing a resin modified to be thermoset by copolymerization, cocondensation, etc., or The glassy carbon obtained by thermally decomposing low molecular weight hydrocarbons such as methane, ethylene and benzene in the vapor phase by virtue of the fact that the crystallization is remarkably hindered by chemical treatment in the carbonization process is used. Specifically, polyacrylonitrile glassy carbon, rayon glassy carbon, pitch glassy carbon, lignin glassy carbon, phenol glassy carbon, furan glassy carbon, alkyd resin glassy carbon, Saturated polyester type glassy carbon, xylene resin type glassy carbon, etc. can be used.
本発明は、摺接部品自体の耐久性が優れ、しかも記録媒
体を損傷させることのない摺接部品を製造できる。した
がって、フレキシブルディスクのヘッドスライダ、ハー
ドディスクの浮上スライダ、磁気ヘッド、熱感式印刷ヘ
ッド等に用いて大きな効果がある。INDUSTRIAL APPLICABILITY According to the present invention, it is possible to manufacture a sliding contact component which is excellent in durability of the sliding contact component itself and which does not damage the recording medium. Therefore, it has a great effect when used in a head slider of a flexible disk, a flying slider of a hard disk, a magnetic head, a thermal printing head, and the like.
以下に本発明の実施例および比較例を示して、本発明を
詳細に説明する。実施例ではスパッタ法によりガラス状
炭素薄膜を形成しているが、クラスタイオンビーム法等
の、ガラス状炭素を１eV以上の運動エネルギで堆積させ
ることができる方法であれば、本発明を同様に実施でき
る。Hereinafter, the present invention will be described in detail with reference to Examples and Comparative Examples of the present invention. Although the glassy carbon thin film is formed by the sputtering method in the examples, the present invention is similarly carried out as long as the glassy carbon can be deposited at a kinetic energy of 1 eV or more, such as the cluster ion beam method. it can.
（実施例） 図は本発明実施例磁気ヘッドの構造を示す。(Embodiment) The figure shows the structure of a magnetic head according to an embodiment of the present invention.
記憶媒体の摺接部品として、フェライト薄膜をチタン酸
カルシウムで挟んだ構造の、リングタイプのフレキシブ
ルディスク用磁気ヘッド１を用いた。この磁気ヘッド１
の記録媒体に接触する面に、直径127mmで厚さが３mmの
フラン系ガラス状炭素をターゲット材として用い、高周
波スパッタリングにより約0.1μｍの厚さのガラス状炭
素被膜２を形成した。スパッタリングの条件は、 ・背景の圧力 ：１×10-7Torr ・アルゴンガス圧 ：１×10-3Torr ・高周波電力 ：100W ・粒子運動エネルギ：２eV とした。被膜の厚さは段差計を用いて測定した。A ring-type magnetic head 1 for a flexible disk having a structure in which a ferrite thin film was sandwiched between calcium titanates was used as a sliding contact component of a storage medium. This magnetic head 1
A glassy carbon coating 2 having a thickness of about 0.1 μm was formed on the surface of the recording medium contacting with the recording medium by high frequency sputtering using furan-based glassy carbon having a diameter of 127 mm and a thickness of 3 mm as a target material. The sputtering conditions were: background pressure: 1 × 10 −7 Torr, argon gas pressure: 1 × 10 −3 Torr, high frequency power: 100 W, particle kinetic energy: 2 eV. The thickness of the coating was measured using a step gauge.
この磁気ヘッド１のガラス状炭素薄被膜２を形成した面
と記録媒体との間の摩擦特性を調べるため、Co被着γ-F
e2O3塗布膜（以下Coγ-Fe2O3膜という）、メッキにより
形成したNip膜およびスパッタリングにより形成したCoC
r膜との間の動摩擦特性を、特開昭55-128142に記載され
た装置により測定した。この結果を表に示す。In order to investigate the frictional property between the surface of the magnetic head 1 on which the glassy carbon thin film 2 is formed and the recording medium, Co deposition γ-F
e 2 O 3 coating film (hereinafter referred to as Coγ-Fe 2 O 3 film), Nip film formed by plating, and CoC formed by sputtering
The dynamic friction property with the r film was measured by the device described in JP-A-55-128142. The results are shown in the table.
（比較例１） 実施例で用いた磁気ヘッドの記録媒体と接触する面に、
カーボンブラック粒子を2000°Ｋに加熱して、約0.5eV
のカーボン蒸着膜を形成した。粒子の運動エネルギは0.
5eVであった。この磁気ヘッドを用いて、実施例と同じ
方法により動摩擦特性を測定した。この結果を表に示
す。(Comparative Example 1) On the surface of the magnetic head used in the example that is in contact with the recording medium,
About 0.5eV by heating carbon black particles to 2000 ° K
The carbon vapor deposition film of was formed. The kinetic energy of particles is 0.
It was 5 eV. Using this magnetic head, dynamic friction characteristics were measured by the same method as in the example. The results are shown in the table.
（比較例２） 実施例で用いた磁気ヘッドの記録媒体と接触する面をそ
のまま、すなわち何等の被膜も形成しないで、実施例と
同じ方法により動摩擦特性を測定した。この結果を表に
示す。(Comparative Example 2) Dynamic friction characteristics were measured by the same method as in the example, without changing the surface of the magnetic head used in the example in contact with the recording medium, that is, without forming any coating. The results are shown in the table.
図は本発明実施例磁気ヘッドの構造を示す。 １……磁気ヘッド、２……ガラス状炭素被膜。 The figure shows the structure of a magnetic head according to an embodiment of the present invention. 1 ... Magnetic head, 2 ... Glassy carbon coating.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｇ１１Ｂ 5/255 7303−5Ｄ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location G11B 5/255 7303-5D
Claims (4)
膜を形成する記録媒体の摺接部品の製造方法において、 堆積源としてガラス状炭素を用い、１eV以上の運動エネ
ルギの粒子を真空中に放射させて上記被膜として堆積さ
せる方法 を特徴とする記録媒体の摺接部品の製造方法。1. A method of manufacturing a sliding contact component for a recording medium, wherein a glassy carbon film is formed on a surface in contact with the recording medium, wherein glassy carbon is used as a deposition source, and particles having a kinetic energy of 1 eV or more are vacuumized. A method for manufacturing a sliding contact component of a recording medium, characterized in that the recording medium is radiated to the surface to be deposited as the coating film.
求の範囲第(1)項に記載の記録媒体の摺接部品の製造方
法。2. The method for manufacturing a sliding contact component for a recording medium according to claim 1, wherein the depositing method is a sputtering method.
である特許請求の範囲第(1)項に記載の記録媒体の摺接
部品の製造方法。3. The method of manufacturing a sliding contact component for a recording medium according to claim 1, wherein the deposition method is a cluster ion beam method.
囲第(1)項に記載の記録媒体の摺接部品の製造方法。4. The method of manufacturing a sliding contact component for a recording medium according to claim 1, wherein the sliding contact component is a magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60060370A JPH0624046B2 (en) | 1985-03-25 | 1985-03-25 | Method for manufacturing sliding contact part of recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60060370A JPH0624046B2 (en) | 1985-03-25 | 1985-03-25 | Method for manufacturing sliding contact part of recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61220109A JPS61220109A (en) | 1986-09-30 |
| JPH0624046B2 true JPH0624046B2 (en) | 1994-03-30 |
Family
ID=13140177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60060370A Expired - Lifetime JPH0624046B2 (en) | 1985-03-25 | 1985-03-25 | Method for manufacturing sliding contact part of recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624046B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6396643U (en) * | 1986-12-12 | 1988-06-22 | ||
| JPH01130354A (en) * | 1987-11-16 | 1989-05-23 | Sanyo Electric Co Ltd | Guide cylinder for magnetic recording and reproducing device |
| JPH0610853B2 (en) * | 1988-01-22 | 1994-02-09 | 株式会社半導体エネルギー研究所 | Method for producing magnetic member coated with carbon film |
-
1985
- 1985-03-25 JP JP60060370A patent/JPH0624046B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61220109A (en) | 1986-09-30 |
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