JPH0635930B2 - Cylindrical shape measuring device - Google Patents

Description

The present invention relates to a shape measuring device for a cylindrical body such as a roller bearing.

(Prior Art) Conventionally, a measuring device such as a laser system or a stylus system has been used to measure the shape of a cylindrical body such as a roller bearing.
This is a method in which a laser spot focused on a point or the tip of a sharp needle is scanned along the side surface of a cylindrical body to obtain a one-dimensional uneven shape.

(Problems to be Solved by the Invention) In the above-mentioned conventional technique, although the one-dimensional measurement is repeatedly performed to measure the generatrix shape of the cylinder, the relationship between the measured generatrix shape and the centerline of the cylinder is It was unknown. However, in tapered roller bearings, etc., the relationship (angle) between the generatrix shape and the center line is also an important measurement factor, but there is no direct measurement method, and the center line of the cylinder cannot be known until the results are analyzed after measurement. In the measurement, there is a problem that positioning of the object to be measured is very difficult and it takes an extremely long time.

(Means for Solving the Problem) The present invention has an object of solving the above-mentioned problems, and has two reference planes that are in contact with the ridge line portion of a cylindrical body, and emits light rays from the outside in the direction perpendicular to the reference planes. An optical system for irradiating, an optical system for obtaining an interference fringe generated by interference between the reflected light from the measured surface and the reflected light from the reference surface, and an interference fringe analysis processing device. is there.

In this method, the cylindrical body is in contact with the reference plane along the tallest part of the cylindrical body, and the center line can be easily visually recognized, which facilitates positioning of the measured object. Further, by measuring the angle between the reference planes in advance, the positional relationship between the generatrix shape and the center line can be measured in the same manner.

(Embodiment) An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

Reference numeral 1 denotes a component to be measured having a tapered cylindrical body such as a tapered roller bearing, which is a V groove 2a on the upper surface of a support base 2 that slightly moves in the Y and Z directions, and an inclined surface 3a on one side of the upper surface of the fixed support base 3.
It is mounted and supported on the upper side, and the reference surfaces 4 and 5 are arranged on both sides thereof, and the support base 2 is finely moved in the Y and Z directions so that the ridge line portion of the DUT 1 becomes parallel to the reference surfaces 4 and 5. To install. A light source 6, a beam expander 7, a cylindrical lens 8, a half mirror 9 and an imaging lens 10 are arranged on the right side of the reference plane 4, and an image input section 11 is provided behind the imaging lens 10. Reference numeral 12 denotes an interference fringe analysis processing device, which is an image processing unit 14 of the image input 13 and an interference fringe analysis unit 15, which is composed of interference fringes generated by interference of reflected light on the measured surface and the reference surface input to the image input unit 11. It comprises an analysis result display section 16. The same device as that on the right side is arranged on the left side.

Next, the operation will be described.

The monochromatic light emitted from the light source is magnified to illuminate the component surface and the reference surface, and the reflected light is condensed and imaged by the lens on the image input unit. At this time, the shape of the component surface based on the reference surface is obtained from the observed interference fringes. That is, due to the fixed relationship between the reference plane at each point on the image plane and the measured surface and the wavelength λ of the light source used, the interference fringes are higher than the reference plane. Each contour line becomes. The shape can be obtained by incorporating this in the image input unit, performing image processing, and analyzing.
After measuring both side surfaces, the cross-sectional shape is constructed based on the spacing angle of the reference surface.

(Effect) According to the present invention, an optical system that has two reference surfaces that come into contact with the ridge of the cylindrical body, irradiates light rays from the outside in the direction perpendicular to the reference surfaces, and the reflected light from the surface to be measured. Since it is equipped with an interference fringe analysis processor of the optical system that obtains interference fringes caused by interference with the reflected light from the reference surface, the angle between the crowning shape and the center line of both ends of the cylindrical body such as the tapered roller bearing can be determined. It can be easily and accurately measured in a short time, and it becomes possible to clarify the relationship between the bearing shape and durability, accuracy, etc., which can contribute to the improvement of quality.

[Brief description of drawings]

FIG. 1 is an explanatory view of the basic configuration of the present invention, FIG. 2 is an external perspective view of the component to be measured and its supporting portion of FIG. 1, a reference plane, and FIG. 3 is a front view of FIG. 1 ... Parts to be measured 2, 3 ... Support base 4, 5 ... Reference plane 6 ... Light source 7 ... Beam expander 8 ... Cylindrical lens 9 ... Half mirror 10 ... Imaging lens 11 ... Image Input unit 12 ... Interference fringe analysis processor

 ─────────────────────────────────────────────────── ─── Continuation of the front page Examiner Motofumi Tabe

Claims (1)

[Claims] 1. An optical system having two reference surfaces that come into contact with the ridge of a cylindrical body and irradiating light rays from the outside in the direction perpendicular to the reference surfaces, and reflected light from the measured surface and the reference surface. A shape measuring device for a cylindrical body, comprising an interference fringe analysis processing device of an optical system for obtaining an interference fringe generated by interference with reflected light.