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JPH0641890B2 - Stress distribution sensor - Google Patents
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JPH0641890B2 - Stress distribution sensor - Google Patents

Stress distribution sensor

Info

Publication number
JPH0641890B2
JPH0641890B2 JP61012356A JP1235686A JPH0641890B2 JP H0641890 B2 JPH0641890 B2 JP H0641890B2 JP 61012356 A JP61012356 A JP 61012356A JP 1235686 A JP1235686 A JP 1235686A JP H0641890 B2 JPH0641890 B2 JP H0641890B2
Authority
JP
Japan
Prior art keywords
pressure
sensitive conductive
stress distribution
rubber
conductive rubber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61012356A
Other languages
Japanese (ja)
Other versions
JPS62169031A (en
Inventor
智司 真下
進 長安
良雄 山口
徹 野口
正仁 中嶋
一 垣内
亀寿郎 谷田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Belting Ltd
Original Assignee
Mitsuboshi Belting Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Belting Ltd filed Critical Mitsuboshi Belting Ltd
Priority to JP61012356A priority Critical patent/JPH0641890B2/en
Publication of JPS62169031A publication Critical patent/JPS62169031A/en
Publication of JPH0641890B2 publication Critical patent/JPH0641890B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 (産業上利用分野) 本発明は応力分布検出センサーに係り、詳しくはセンサ
ーの電極部材に加わる応力分布の分解能を向上させてな
る応力分布検出センサーに関する。
TECHNICAL FIELD The present invention relates to a stress distribution detection sensor, and more particularly to a stress distribution detection sensor in which the resolution of stress distribution applied to an electrode member of the sensor is improved.

(従来技術) 従来の面圧応力分布を検出するセンサーとしては、スプ
リングやバネを組合わせた接触子や歪ゲージを用いた機
械的なものが使用され、局所的な平面の面圧を検出して
いた。
(Prior Art) As a conventional sensor for detecting the stress distribution of a surface pressure, a spring, a contactor combining springs, or a mechanical one using a strain gauge is used to detect a local surface pressure. Was there.

また、最近では上記機械的なセンサー代わりに銀の回路
パターンを印刷したポリエチレン製の電極フィルムの間
に感圧導電性ゴムを挟持して電極に加わる圧力の大き
さ、圧力分布を求めることができるセンサーが触感セン
サーとして開発され、例えばポリマーダイジェスト9,
P107(1985)に開示されている。
Recently, instead of the above mechanical sensor, a pressure-sensitive conductive rubber is sandwiched between polyethylene electrode films printed with a silver circuit pattern, and the magnitude and pressure distribution of the pressure applied to the electrodes can be obtained. The sensor was developed as a tactile sensor, for example polymer digest 9,
P107 (1985).

(発明が解決しようとする問題点) 上記センサーは、押圧力が大きくなるに従って徐々に電
気抵抗値が減少して一定の電圧を加えた時の電流値の変
化から押圧力を検出することができる。このため、該セ
ンサーの所定の面に加わっている応力分布を測定するこ
とが可能である。しかし、電極フィルム間に挟持されて
いる感圧導電性ゴム内においては、電流は主として電極
フィルムに設定された最短距離の端子間を流れるが、そ
ればかりでなく種々の端子間にも回路が形成される。セ
ンサーが局所的な押圧力を受けると、各出力端子から流
れる電流は夫々干渉し合った状態であるため正確な値が
出力されず、また応力分布の分解能も劣る欠点があっ
た。
(Problems to be Solved by the Invention) The above-mentioned sensor can detect the pressing force from the change of the current value when the electric resistance value gradually decreases as the pressing force increases and a constant voltage is applied. . Therefore, it is possible to measure the stress distribution applied to the predetermined surface of the sensor. However, in the pressure-sensitive conductive rubber sandwiched between the electrode films, current flows mainly between the terminals of the shortest distance set in the electrode film, but not only that, but a circuit is also formed between various terminals. To be done. When the sensor receives a local pressing force, the currents flowing from the output terminals interfere with each other, so that an accurate value cannot be output and the stress distribution resolution is poor.

本発明はこのような問題に対処するものであり、センサ
ーの受けた押し圧力を夫々電気的に干渉されずに正確に
検出し、しかも応力分布の分解能にも優れる応力分布検
出センサーを提供することを目的とするものである。
The present invention addresses such a problem, and provides a stress distribution detection sensor that can accurately detect a pressing force received by a sensor without being electrically interfered with each other and that is excellent in resolution of stress distribution. The purpose is.

(問題を解決するための手段) 即ち、本発明に係る応力分布検出センサーは、2枚の電
極部材間に感圧導電性ゴムを介在させた応力分布検出セ
ンサーにおいて、感圧導電性ゴムをシート状の電気絶縁
体中に分離した状態で配置するとともに、上記電気絶縁
体から突出させ、各端子を分散させた電極部材を少なく
とも前記感圧導電性ゴムの少なくとも一方の側に積層さ
せ、該端子を感圧導電性ゴムと接触させてなることを特
徴とする。
(Means for Solving the Problem) That is, the stress distribution detecting sensor according to the present invention is a stress distribution detecting sensor in which a pressure sensitive conductive rubber is interposed between two electrode members, and the pressure sensitive conductive rubber is used as a sheet. -Shaped electrical insulators, which are arranged in a separated state, are protruded from the electrical insulators, and electrode members in which terminals are dispersed are laminated on at least one side of the pressure-sensitive conductive rubber, and the terminals are laminated. Is brought into contact with a pressure-sensitive conductive rubber.

(作用) 本発明の応力分布検出センサーは、感圧導電性ゴムをシ
ート状の電気絶縁体中に分離した状態で配置するととも
に、上記電気絶縁体から突出させ、該ゴムの表面を電極
部材に接触させた状態になっているため、電極部材が受
けた局所的な面圧はその部位に独立して存在する感圧導
電性ゴムの変形によって電流値あるいは電圧値に変換さ
れて夫々の端子から出力され、また感圧導電性ゴムは所
定位置に分散しているため夫々の位置において隣接する
ゴム体の電気的な干渉を受けずにその位置の圧力を正確
に検出する。
(Function) In the stress distribution detection sensor of the present invention, the pressure-sensitive conductive rubber is arranged in a sheet-like electric insulator in a separated state, and the pressure-sensitive conductive rubber is projected from the electric insulator so that the surface of the rubber serves as an electrode member. Since they are in contact with each other, the local surface pressure received by the electrode member is converted into a current value or a voltage value by the deformation of the pressure-sensitive conductive rubber that exists independently at that site, and is converted from each terminal. Further, since the pressure-sensitive conductive rubber is output at predetermined positions, the pressure at each position is accurately detected without being affected by the electrical interference of the adjacent rubber bodies at each position.

しかも、各感圧導電性ゴムが電気絶縁体によって安定し
た状態で保持されるばかりか、電気絶縁体の影響を大き
く受けず自由に変形するため、本発明のセンサーはより
一層正確な応力を検出することができる。
Moreover, since each pressure-sensitive conductive rubber is not only held in a stable state by the electric insulator but also deformed freely without being greatly affected by the electric insulator, the sensor of the present invention detects even more accurate stress. can do.

(実施例) 以下、本発明の具体的実施例を添付図面に従って説明す
る。
(Examples) Specific examples of the present invention will be described below with reference to the accompanying drawings.

第1図は本発明の応力分布検出センサーの一部断面斜視
図、第2図は第1図の応力分布検出センサーに使用され
る感圧導電層の平面図を示すものであり、本発明の応力
分布検出センサー(1)は芯部分に感圧導電層(2)が位置
し、その上下面には電極部材(3)(3)が積層され、更にそ
の表面には電極部材(3)(3)を保護するためのカバー材
(4)(4)が被覆された構成からなっている。
1 is a partial sectional perspective view of the stress distribution detecting sensor of the present invention, and FIG. 2 is a plan view of a pressure-sensitive conductive layer used in the stress distribution detecting sensor of FIG. In the stress distribution detection sensor (1), the pressure-sensitive conductive layer (2) is located in the core portion, the electrode members (3) and (3) are laminated on the upper and lower surfaces thereof, and the electrode member (3) ( 3) Cover material to protect
(4) (4) is covered.

前記感圧導電層(2)は天然ゴム、SBR、CRあるいは
シリコンゴム等のゴム部材またポリウレタン等の弾性体
からなるシート状の電気絶縁体(5)の所定の位置に設け
られた貫通穴(6)にチップ状の感圧導電性ゴム(7)を配置
している。感圧導電性ゴム(7)は夫々分離独立した状態
にあってシート状電気絶縁体(5)の表面から突出してい
る。このため、応力分布検出センサー(1)は各部位に存
在する感圧導電性ゴム(7)が該電気絶縁体(5)の影響をあ
まり受けずに自由に変形するため、より一層正確な応力
を検出することが可能となる。この場合、前記シート状
電気絶縁体(5)は、感圧導電性ゴム(7)を分離した状態に
安定して位置させる保持材としての機能を有している。
The pressure-sensitive conductive layer (2) is a through-hole (5) provided at a predetermined position of a sheet-like electric insulator (5) made of a rubber member such as natural rubber, SBR, CR or silicon rubber, or an elastic body such as polyurethane. A chip-shaped pressure-sensitive conductive rubber (7) is arranged in 6). The pressure-sensitive conductive rubbers (7) are separated and independent from each other and protrude from the surface of the sheet-like electric insulator (5). For this reason, the stress distribution detection sensor (1) has a more accurate stress because the pressure-sensitive conductive rubber (7) present in each part is freely deformed without being greatly affected by the electric insulator (5). Can be detected. In this case, the sheet-like electric insulator (5) has a function as a holding member for stably positioning the pressure-sensitive conductive rubber (7) in a separated state.

また、上側に位置する電極部材(3)は各端子(8)を分散さ
せた可撓性を有するものであり、一方下側に位置する電
極部材(3)は剛性をもつ電極板でよい。この感圧導電層
(2)は厚さ約0.1〜5mm程度である。
Further, the electrode member (3) located on the upper side may have flexibility in which the terminals (8) are dispersed, while the electrode member (3) located on the lower side may be a rigid electrode plate. This pressure sensitive conductive layer
(2) has a thickness of about 0.1 to 5 mm.

感圧導電性ゴム(7)の分散密度は自由に変化させること
が可能であり、分散密度を大きくすれば応力位置の分解
能もそれだけ大きくなる。
The dispersion density of the pressure-sensitive conductive rubber (7) can be freely changed, and the higher the dispersion density, the higher the resolution of the stress position.

前記感圧導電性ゴム(7)は加圧力に応じて抵抗値が変形
するものであれば特に限定されないが、例えば電気絶縁
性を有する天然ゴム、ポリブタジエンゴム、ポリイソプ
レンゴム、スチレン−ブダジェン共重合体ゴム、ブチル
ゴム、クロロプレンゴム、アクリロニトル−ブタジェン
共重合体ゴム、エチレン−プロピレン共重合体ゴム、シ
リコンゴム等に導電性カーボンブラックであるファーネ
スブラック系、アセチレンブラック系、サーマルブラッ
ク系、チャネルブラック系等の公知のものが混入され、
更には種々の導電部材である金属粉末、金属繊維あるい
は非金属無機質の短繊維、粉末あるいはウイスカー等が
混入されている。このうち、本発明においては繰り返し
加圧変形に対してヒステリシスの小さい感圧導電性ゴム
が好ましく、これを満足するゴムの一例として例えばゴ
ムにカーボンブラックあるいは非金属無機質の短繊維、
粉末あるいはウイスカーを混入したものが好ましい。
The pressure-sensitive conductive rubber (7) is not particularly limited as long as the resistance value is deformed according to the applied pressure, for example, natural rubber having electric insulation, polybutadiene rubber, polyisoprene rubber, styrene-Budagen copolymer Combined rubber, butyl rubber, chloroprene rubber, acrylonitol-butadiene copolymer rubber, ethylene-propylene copolymer rubber, silicone rubber, etc. are conductive carbon black such as furnace black, acetylene black, thermal black, channel black, etc. Known substances are mixed,
Further, various conductive materials such as metal powder, metal fiber or non-metal inorganic short fiber, powder or whiskers are mixed. Among these, in the present invention, a pressure-sensitive conductive rubber having a small hysteresis against repeated pressure deformation is preferable, and as an example of a rubber satisfying this, for example, carbon black or non-metal inorganic short fiber is used for the rubber,
A mixture of powder or whiskers is preferable.

上記短繊維としては炭化珪素(SiC)、ガラス、窒化珪
素(Si3N4)等のセラミック等を素材とするもので、長
100μm〜10mm、径0.3〜30μmを有し、一方粉
末として粉末が0.5μm〜100μmのセラミック粉と
呼ばれるもので、例えば炭化珪素(SiC)、炭化チタン
(TiC)、炭化ホウ素(BC)、炭化タングステン(W
C)等の炭化物、窒化珪素(Si3N4)、窒化アルミニウム
(AlN)、窒化ホウ素(BN)、窒化チタン(TiC)等の窒
化物及びアルミナ(Al2O3)、ジルコニア(ZrO2)、ベ
リリア(BeO)等の酸化物であり、最も好ましくは炭化
珪素または窒化珪素である。
The short fibers are made of ceramics such as silicon carbide (SiC), glass and silicon nitride (Si 3 N 4 ) and have a length of 100 μm to 10 mm and a diameter of 0.3 to 30 μm. It is called a ceramic powder of 0.5 μm to 100 μm, for example, silicon carbide (SiC), titanium carbide (TiC), boron carbide (B 4 C), tungsten carbide (W
C) and other carbides, silicon nitride (Si 3 N 4 ), aluminum nitride (AlN), boron nitride (BN), titanium nitride (TiC) and other nitrides, and alumina (Al 2 O 3 ), zirconia (ZrO 2 ). Oxides such as beryllia (BeO), and most preferably silicon carbide or silicon nitride.

更に、ウイスカーとしては、α−炭化珪素(α−Si
C)、β−炭化珪素(β−SiC)、窒化珪素(Si3N4)、
α−アルミナ(Al2O3)、酸化チタン、酸化亜鉛、酸化
スズ、黒鉛、Fe、Cu、Ni等であり、直径0.05〜3μm、
長さ5〜500μm程度の形状からなる針状単結晶体で
ある。上記無機充填材をゴムに添加するにあたっては、
前もってシランカップリング剤やチタンカップリング剤
等で処理したり、ゴムと混合時にシランカップリング剤
やチタンカップリング剤を添加することも可能である。
このことにより、補強効果がより高まり、ゴムへの分散
性がより良好となる。
Furthermore, as whiskers, α-silicon carbide (α-Si
C), β-silicon carbide (β-SiC), silicon nitride (Si 3 N 4 ),
α-alumina (Al 2 O 3 ), titanium oxide, zinc oxide, tin oxide, graphite, Fe, Cu, Ni, etc., having a diameter of 0.05 to 3 μm,
It is a needle-shaped single crystal having a length of about 5 to 500 μm. When adding the inorganic filler to rubber,
It is also possible to previously treat with a silane coupling agent, a titanium coupling agent, or the like, or to add a silane coupling agent or a titanium coupling agent when mixing with rubber.
This further enhances the reinforcing effect and improves the dispersibility in rubber.

上記無機充填剤の添加量は、ゴム100重量部に対して
1〜80重量部、好ましくは5〜40重量部であり、も
し無機充填材の1重量部以下ではゴムシート表面におけ
る機充填材の露出効果が小さくなって非加圧時の抵抗値
が減少し、また加圧0.5kg/cm2における電気抵値も高く
て導電性が悪くなり、また一方80重量部以上になると
ゴムの効果により加圧時の抵抗変化率が小さくなる。
The amount of the inorganic filler added is 1 to 80 parts by weight, preferably 5 to 40 parts by weight, relative to 100 parts by weight of rubber. If 1 part by weight or less of the inorganic filler is used, The exposure effect decreases and the resistance value when not pressurized decreases, and the electrical resistance at a pressure of 0.5 kg / cm 2 is also high, resulting in poor conductivity. On the other hand, when it exceeds 80 parts by weight, it is due to the effect of rubber. The rate of resistance change during pressurization becomes small.

尚、本発明において使用する感圧導電性ゴム(7)は、前
述のとおり上記特定のものに限定されるものではなく、
加圧力に応じて抵抗値が変化するものであればよい。ま
た、前記電極部材(3)は第1図にその一例が示される
が、電気的絶縁性を有する可撓性の合成樹脂シート内に
分離した状態で露出したポイント状の端子(8)が存在し
ており、各端子(8)には夫々リード線(9)が連結した状態
で埋設している。上記端子(8)は感圧導電層のシート状
電気絶縁体(5)に埋設している感圧導電性ゴム(7)と接触
しており、感圧導電性ゴム(7)の押圧変化に対する電流
値あるいは電圧値の変化を検出する。
Incidentally, the pressure-sensitive conductive rubber (7) used in the present invention is not limited to the above specific one as described above,
Any material may be used as long as the resistance value changes according to the applied pressure. An example of the electrode member (3) is shown in FIG. 1, in which point-like terminals (8) exposed in a separated state are present in a flexible synthetic resin sheet having electrical insulation. The lead wire (9) is embedded in each terminal (8) in a connected state. The terminal (8) is in contact with the pressure-sensitive conductive rubber (7) embedded in the sheet-like electric insulator (5) of the pressure-sensitive conductive layer, and against pressure change of the pressure-sensitive conductive rubber (7). Detect changes in current or voltage.

尚、本発明のセンサーにおいては、上記同様電極部材
(3)を感圧導電層(2)の上下面に積層してよいが、一方の
面にはこのと異なりポイント状端子を点在させないよう
な金属製の電極シート体、電極板あるいは電極薄等電極
部材(3)を使用することができる。
In the sensor of the present invention, the electrode member is the same as above.
(3) may be laminated on the upper and lower surfaces of the pressure-sensitive conductive layer (2), but unlike this, a metal electrode sheet body, electrode plate or electrode thin film that does not intersperse point-like terminals on one surface An equal electrode member (3) can be used.

上記電極部材(3)(3)の表面にはこれを保護するカバー層
(4)が積層されているが、該カバー層(4)は発泡体、合成
樹脂フィルム等からなり、本発明のセンサーにおいては
このカバー層を必ず積層する必要はない。
The surface of the electrode member (3) (3) has a cover layer for protecting it.
The cover layer (4) is laminated, but the cover layer (4) is made of a foam, a synthetic resin film or the like, and it is not always necessary to laminate the cover layer in the sensor of the present invention.

このような構成を有する応力分布検出センサー(1)は、
例えば複雑な曲面をもった物品が自重によりセンサーの
電極部材(3)に付加する応力またその分布を検出した
り、あるいは同様の物品を保持する力及びその分布を検
出する触覚センサーとして使用することが出来る。
The stress distribution detection sensor (1) having such a configuration,
For example, to detect the stress applied to the electrode member (3) of the sensor by its own weight due to the weight of an article having a complicated curved surface or its distribution, or to use as a tactile sensor to detect the force holding the same article and its distribution. Can be done.

(効果) 以上のように本発明の応力分布検出センサーは、特にシ
ート状の電気絶縁体内に感圧導電性ゴムを分散した状態
で配置するとともに上記電気絶縁体から突出させ、しか
も該感圧導電性ゴムの少なくとも一方を電極部材に設け
た夫々の端子に接触させた構成となり、隣接する感圧導
電性ゴムの電気的な干渉を阻止することにより、センサ
ーが受ける各部位の面圧を正確に電流値あるいは電圧値
に変換することが可能になって応力分布の分散能力に優
れ、また感圧導電性ゴムの分散密度を変化されることに
より応力分布の分解能力を変化させることも可能とな
り、そして応力分布の結果から対象物の形状及び応力集
中の領域等を知ることができ、また各感圧導電性ゴムが
電気絶縁体によって安定した状態で保持されるばかり
か、電気絶縁体の影響を大きく受けず自由に変形するた
め、より一層正確な応力を検出することができる等の効
果がある。
(Effect) As described above, in the stress distribution detection sensor of the present invention, the pressure-sensitive conductive rubber is arranged in a sheet-like electric insulator in a dispersed state and protruded from the electric insulator. At least one of the conductive rubbers is brought into contact with each terminal provided on the electrode member, and by blocking the electrical interference of the adjacent pressure-sensitive conductive rubbers, the surface pressure of each part that the sensor receives can be accurately measured. It is possible to convert it into a current value or a voltage value and it is excellent in the ability to disperse the stress distribution, and it is also possible to change the ability to decompose the stress distribution by changing the dispersion density of the pressure-sensitive conductive rubber. The shape of the object and the area of stress concentration can be known from the result of the stress distribution, and each pressure-sensitive conductive rubber is not only held in a stable state by the electrical insulator, but also electrically insulated. Since it is freely deformed without being greatly affected by the body, there is an effect that more accurate stress can be detected.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の応力分布検出センサーの一部断面斜視
図、第2図は第1図の応力分布検出センサーに使用され
る感圧導電層の平面図を示す。 (1)……応力分布検出センサー (3)(3)……電極部材 (5)……電気絶縁体 (7)……感圧導電性ゴム (8)……端子
FIG. 1 is a partial cross-sectional perspective view of the stress distribution detection sensor of the present invention, and FIG. 2 is a plan view of a pressure-sensitive conductive layer used in the stress distribution detection sensor of FIG. (1) …… Stress distribution detection sensor (3) (3) …… Electrode member (5) …… Electrical insulator (7) …… Pressure-sensitive conductive rubber (8) …… Terminal

───────────────────────────────────────────────────── フロントページの続き (72)発明者 垣内 一 兵庫県伊丹市瑞穂町5丁目28 (72)発明者 谷田 亀寿郎 兵庫県芦屋市若宮町4−8−510 審査官 森 雅之 (56)参考文献 特開 昭56−142430(JP,A) 特開 昭59−175992(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hajime Kakiuchi 5-chome, Mizuho-cho, Itami City, Hyogo Prefecture 28 (72) Inventor Kamejuro Yata 4-8-510 Wakamiya-cho, Ashiya City, Hyogo Prefecture Masayuki Mori (56) Reference Reference JP-A-56-142430 (JP, A) JP-A-59-175992 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】2枚の電極部材間に感圧導電性ゴムを介在
させた応力分布検出センサーにおいて、前記感圧導電性
ゴムをシート状の電気絶縁体中に分離した状態で配置す
るとともに、上記電気絶縁体から突出させ、各端子を分
散させた電極部材を、少なくとも前記感圧導電性ゴムの
一方の側に積層させて該端子を感圧導電性ゴムと接触さ
せ、且つ電極部材の少なくとも一方を可撓性にしたこと
を特徴とする応力分布検出センサー。
1. A stress distribution detecting sensor having a pressure-sensitive conductive rubber interposed between two electrode members, wherein the pressure-sensitive conductive rubber is arranged in a sheet-like electric insulator in a separated state. An electrode member that is projected from the electrical insulator and has each terminal dispersed therein is laminated on at least one side of the pressure-sensitive conductive rubber to bring the terminal into contact with the pressure-sensitive conductive rubber, and at least the electrode member. A stress distribution detection sensor, characterized in that one is made flexible.
JP61012356A 1986-01-22 1986-01-22 Stress distribution sensor Expired - Lifetime JPH0641890B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61012356A JPH0641890B2 (en) 1986-01-22 1986-01-22 Stress distribution sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61012356A JPH0641890B2 (en) 1986-01-22 1986-01-22 Stress distribution sensor

Publications (2)

Publication Number Publication Date
JPS62169031A JPS62169031A (en) 1987-07-25
JPH0641890B2 true JPH0641890B2 (en) 1994-06-01

Family

ID=11802996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61012356A Expired - Lifetime JPH0641890B2 (en) 1986-01-22 1986-01-22 Stress distribution sensor

Country Status (1)

Country Link
JP (1) JPH0641890B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7645398B2 (en) * 2005-12-07 2010-01-12 Electronics And Telecommunications Research Institute Pressure sensor for electronic skin and fabrication method of pressure sensor for electronic skin
JP5702202B2 (en) * 2011-03-22 2015-04-15 ゼネラル株式会社 Tactile sensor, information board and touch panel
CN108760111B (en) * 2018-05-22 2020-02-21 京东方科技集团股份有限公司 Pressure sensor and preparation method, pressure sensing method and display device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142430A (en) * 1980-03-24 1981-11-06 Morita Mfg Co Ltd Biting pressure sensor

Also Published As

Publication number Publication date
JPS62169031A (en) 1987-07-25

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