JPH0643610B2 - Method for producing high silicon steel strip in continuous line - Google Patents
Method for producing high silicon steel strip in continuous lineInfo
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- JPH0643610B2 JPH0643610B2 JP61071491A JP7149186A JPH0643610B2 JP H0643610 B2 JPH0643610 B2 JP H0643610B2 JP 61071491 A JP61071491 A JP 61071491A JP 7149186 A JP7149186 A JP 7149186A JP H0643610 B2 JPH0643610 B2 JP H0643610B2
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、連続ラインにおける化学気相蒸着(以下、C
VDと称す)法による高珪素鋼帯の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is directed to chemical vapor deposition in a continuous line (hereinafter referred to as C
The present invention relates to a method for producing a high silicon steel strip by the VD method).
電磁鋼板として高珪素鋼板が用いられている。この種の
鋼板はSiの含有量が増すほど鉄損が低減され、Si:
6.5%では、磁歪が0となり、最大透磁率もピークとな
る等最も優れた磁気特性を呈することが知られている。A high silicon steel plate is used as the electromagnetic steel plate. With this type of steel sheet, iron loss is reduced as the Si content increases, and Si:
It is known that at 6.5%, the magnetostriction becomes 0, and the maximum magnetic permeability reaches a peak, exhibiting the best magnetic properties.
従来、高珪素鋼板を製造する方法として、圧延法、直接
鋳造法及び滲珪法があるが、このうち圧延法はSi含有
量を4%程度までは製造可能であるが、それ以上のSi
含有量では加工性が著しく悪くなるため冷間加工は困難
である。また直接鋳造法、所謂ストリツプキヤステイン
グは圧延法のような加工性の問題は生じないが、未だ開
発途上の技術であり、形状不良を起し易く、特に高珪素
鋼板の製造は困難である。Conventionally, there are a rolling method, a direct casting method and a siliconizing method as a method for producing a high silicon steel sheet. Among them, the rolling method can produce a Si content of up to about 4%.
Cold working is difficult because the workability is remarkably deteriorated with the content. Further, the direct casting method, so-called strip casting, does not cause the problem of workability as in the rolling method, but it is still under development, and it is easy to cause shape defects, and it is particularly difficult to manufacture high silicon steel sheets. is there.
これに対し、滲珪法は低珪素鋼を溶製して圧延により薄
板とした後、表面からSiを浸透させることより高珪素
鋼板を製造するもので、これによれば加工性や形状不良
の問題を生じることなく高珪素鋼板を得ることができ
る。On the other hand, the siliconizing method produces a high silicon steel sheet by melting low silicon steel and rolling it into a thin plate, and then infiltrating Si from the surface. A high silicon steel plate can be obtained without causing any problems.
この滲珪法は、五弓、阿部により提案され、三谷、大西
らにより詳しく検討されたものであるが、従来提案され
た方法はいずれも浸透処理時間が30分以上と長く、ま
たCVD処理後に行われる拡散熱処理も、蒸着したSi
を母材内部に均一に拡散させる必要から比較的長時間を
要し、事実上連続ラインには適用できないという根本的
な問題がある。またCVD処理温度も1230℃程度と
極めて高いことから浸透処理後の薄鋼板の形状が極めて
悪く、加えて処理温度が高過ぎるためエツジ部が過加熱
によつて溶解するおそれがあり、連続ラインでの安定通
板が期待できない。This siliconization method was proposed by Gokyu and Abe, and was examined in detail by Mitani and Onishi. However, all of the conventionally proposed methods have a long infiltration treatment time of 30 minutes or more, and after the CVD treatment. The diffusion heat treatment that is carried out is
There is a fundamental problem that it takes a relatively long time because it is necessary to uniformly disperse the metal in the base metal, and it cannot be applied to a continuous line in practice. Further, since the CVD treatment temperature is also extremely high at about 1230 ° C., the shape of the thin steel sheet after the infiltration treatment is extremely poor, and the treatment temperature is too high, so that the edge portion may be melted by overheating. I can't expect a stable threading.
また、滲珪法では蒸着反応により鋼板面のFeがFeCl2
等の形で放散され、これによつて板圧が減少する。しか
しこの種の処理では雰囲気ガス濃度分布の不均一性等の
原因で蒸着(膜厚)が不均一になり易く、この結果板厚
の減り方にバラツキを生じ、板厚が幅方向、長手方向で
不均一になり易いという問題がある。Further, in the siliconizing method, Fe on the surface of the steel plate becomes FeCl 2 due to the vapor deposition reaction.
And the like, which reduces the plate pressure. However, in this type of treatment, the deposition (film thickness) is likely to be non-uniform due to the non-uniformity of the atmospheric gas concentration distribution, etc. As a result, there is variation in how the plate thickness decreases, and the plate thickness varies in the width direction and the longitudinal direction. However, there is a problem in that it tends to be non-uniform.
加えて、Si含有量が4.0%以上の高珪素鋼板は脆性
であり、処理後鋼板をコイルに捲取る場合破断し易いと
いう問題もある。In addition, a high silicon steel sheet having a Si content of 4.0% or more is brittle, and there is a problem that the steel sheet after processing is easily broken when wound into a coil.
本発明はこのような従来技術の欠点を改善するためにな
されたもので、滲珪法を用い、連続ラインにおいて短時
間でしかも高品質の高珪素鋼帯を安定して製造すること
ができる方法の提供を目的とする。The present invention has been made to solve the above-mentioned drawbacks of the prior art, and is a method capable of stably producing a high-quality high-silicon steel strip in a continuous line in a short time in a continuous line by using a siliconizing method. For the purpose of providing.
このため本発明は、鋼帯を無酸化性ガス雰囲気中で連続
的に通板させつつ、SiCl4をmolで分率で5〜35%
含んだ無酸化性ガスを吹付ノズルから鋼帯面に吹き付け
て1023〜1200℃の温度で連続的に滲珪処理し、
次いでSiCl4を含まない無酸化性ガス雰囲気中でS
iを鋼帯内部に拡散させる拡散処理するに当り、該拡散
処理を、表層Si濃度が鋼帯厚み方向中心部のSi濃度
よりも高い状態にあるうちに打ち切り、Si濃度が厚み
方向で不均一な鋼帯を得、続く冷却過程の途中または冷
却後、鋼帯を200〜600℃で圧延により塑性加工す
ることをその基本的特徴とする。Therefore, according to the present invention, while continuously passing the steel strip in an atmosphere of non-oxidizing gas, SiCl 4 is used in a mol ratio of 5 to 35%.
The contained non-oxidizing gas is sprayed from the spray nozzle onto the steel strip surface to continuously perform the silicidation treatment at a temperature of 1023 to 1200 ° C.
Then, S in a non-oxidizing gas atmosphere containing no SiCl 4
When performing the diffusion treatment for diffusing i into the steel strip, the diffusion treatment was terminated while the surface layer Si concentration was higher than the Si concentration in the central portion in the thickness direction of the steel strip, and the Si concentration was uneven in the thickness direction. The basic feature is that a steel strip is obtained, and the steel strip is plastically worked by rolling at 200 to 600 ° C. during or after the subsequent cooling process.
また本発明は、上記拡散処理−冷却及び圧延による塑性
加工後、絶縁皮膜コーティングを施し、次いで焼付処理
するようにしたことを他の基本的特徴とする。Another basic feature of the present invention is that after the plastic processing by the diffusion treatment-cooling and rolling, an insulating film coating is applied and then a baking treatment is performed.
以下、本発明の詳細を説明する。Hereinafter, the details of the present invention will be described.
本発明において、母材たる鋼帯(出発薄鋼帯)の成分組
成は、特に限定はないが、優れた磁気特性を得るため以
下のように定めるのが好ましい。In the present invention, the composition of the steel strip (starting thin steel strip) as the base material is not particularly limited, but it is preferably determined as follows in order to obtain excellent magnetic properties.
3〜6.5%Si−Fe合金の場合 C:0.01%以下、Si:0〜4.0%、Mn:2%以下、
その他不可避不純物は極力低い方が望ましい。In the case of 3 to 6.5% Si-Fe alloy C: 0.01% or less, Si: 0 to 4.0%, Mn: 2% or less,
It is desirable that other unavoidable impurities be as low as possible.
センダスト合金の場合 C:0.01%以下、Si:4%以下、Al:3〜8%、N
i:4%以下、Mn:2%以下、Cr,Tiなどの耐食
性を増す元素5%以下、その他の不可避不純物は極力低
い方が望ましい。In the case of Sendust alloy C: 0.01% or less, Si: 4% or less, Al: 3-8%, N
It is desirable that i: 4% or less, Mn: 2% or less, elements such as Cr and Ti that increase corrosion resistance of 5% or less, and other unavoidable impurities as low as possible.
鋼帯は熱間圧延−冷間圧延により得られるものに限ら
ず、直接鋳造、急冷凝固法により得られたものでもよ
い。The steel strip is not limited to that obtained by hot rolling-cold rolling, but may be obtained by direct casting or rapid solidification.
なお、上述したように鋼帯はCVD処理により板厚が減
少するものであり、このため最終製品板厚に対し減少厚
分を付加した板厚のものを用いる必要がある。As described above, the steel strip has a reduced plate thickness due to the CVD process, and therefore, it is necessary to use a plate having a thickness reduced by the final product plate thickness.
本発明は、このような鋼帯にCVD法による滲珪処理−
拡散処理に施すことにより高珪素鋼帯を得るものであ
る。According to the present invention, such a steel strip is subjected to a siliconizing treatment by a CVD method.
A high silicon steel strip is obtained by applying a diffusion treatment.
第1図は本発明法を実施するための連続処理ラインを示
すもので、(1)は加熱炉、(2)はCVD処理炉、(3)は拡
散処理炉、(4)は冷却炉である。FIG. 1 shows a continuous processing line for carrying out the method of the present invention. (1) is a heating furnace, (2) is a CVD processing furnace, (3) is a diffusion processing furnace, and (4) is a cooling furnace. is there.
鋼帯(S)は加熱炉(1)でCVD処理温度またはその近傍
まで無酸化加熱された後、CVD処理炉(2)に導かれ、S
iCl4を含む無酸化性ガス雰囲気中でCVD法による滲珪
処理が施される。SiCl4を含む無酸化性ガスとは、中性
或いは還元性ガスを意味し、SiCl4のキヤリアガスとし
てはAr,H2,He,H2,CH4等を使用すること
ができる。これらキヤリアガスのうち、排ガスの処理性
を考慮した場合、H2,CH4等はHClを発生させその
処理の必要性が生じる難点があり、このような問題を生
じないAr,He,N2が望ましく、さらに材料の窒化
を防止するという難点からすればこれらのうちでも特に
Ar,Heが最も好ましい。The steel strip (S) is non-oxidatively heated up to or near the CVD processing temperature in the heating furnace (1), and then introduced into the CVD processing furnace (2), where S
Silicidation is performed by a CVD method in an atmosphere of non-oxidizing gas containing iCl 4 . The non-oxidizing gas containing SiCl 4 means a neutral or reducing gas, and as the carrier gas of SiCl 4 , Ar, H 2 , He, H 2 , CH 4 or the like can be used. Among these carrier gases, when considering the processability of exhaust gas, H 2 , CH 4 and the like generate HCl, which has a disadvantage that the process is required, and Ar, He, and N 2 that do not cause such a problem are generated. Of these, Ar and He are most preferable from the standpoint of difficulty in preventing nitriding of the material.
CVD処理における鋼帯表面の主反応は、 5Fe+SiCl4→Fe3Si+2FeCl2↑ である、Si1原子が鋼帯面に蒸着してFe3Si層を形成
し、Fe2原子がFeCl2となり、FeCl2の沸点1023℃
以上の温度において気体状態で鋼帯表面から放散され
る。したがつてSi原子量が28.086、Fe原子量が5
5.847であることから、鋼帯は質量減少し、これに
伴い板厚も減少することになる。ちなみに、Si3%鋼帯
を母材とし、CVD処理でSi6.5%鋼帯を製造すると、
質量は8.7%減少し、板厚は約7.1%減少する。The main reaction of the steel strip surface in the CVD treatment is 5Fe + SiCl 4 → Fe 3 Si + 2FeCl 2 ↑ Si1 atoms are vapor-deposited on the steel strip surface to form a Fe 3 Si layer, and Fe 2 atoms become FeCl 2 and FeCl 2 Boiling point 1023 ° C
At the above temperatures, it is emitted from the surface of the steel strip in a gaseous state. Therefore, Si atomic weight is 28.086 and Fe atomic weight is 5
Since it is 5.847, the mass of the steel strip decreases, and the plate thickness also decreases accordingly. By the way, if Si3% steel strip is used as the base material and Si6.5% steel strip is manufactured by CVD treatment,
The mass is reduced by 8.7% and the plate thickness is reduced by about 7.1%.
従来法においてCVD処理に時間がかかり過ぎるのは、
そのCVD処理条件に十分な検討が加えられていなかつ
たことによるものと考えられる。本発明者等が検討した
ところでは、CVD処理を迅速に行うための要素には次
のようなものがあることが判つた。In the conventional method, the CVD process takes too long,
It is considered that this is because the CVD processing conditions have not been sufficiently studied. The inventors of the present invention have studied and found that there are the following elements for rapid CVD processing.
雰囲気中ガス中のSiCl4濃度の適正化。Optimization of SiCl 4 concentration in the gas in the atmosphere.
処理温度の適正化。Optimization of processing temperature.
SiCl4の鋼帯表面への拡散及びFeCl2の鋼帯表面からの
放散の促進。Promotion of diffusion of SiCl 4 to the steel strip surface and emission of FeCl 2 from the steel strip surface.
このため本発明ではCVD処理における雰囲気ガス中の
Si濃度及び処理温度を規定するものである。Therefore, in the present invention, the Si concentration in the atmospheric gas and the processing temperature in the CVD processing are defined.
まず、CVD処理における無酸化性ガス雰囲気中のSiCl
4濃度mol分率で5〜35%に規定し、このような雰囲気
中で鋼帯を連続的にCVD処理する。First, SiCl in a non-oxidizing gas atmosphere in the CVD process
4 concentration mol fraction is defined to be 5 to 35%, and the steel strip is subjected to continuous CVD treatment in such an atmosphere.
雰囲気中のSiCl4が5%未満であると期待するSi富化
効果が得られず、また、例えば鋼帯のSiを1.0%富化
するために5分以上も必要となる等、処理に時間がかか
り過ぎ、連続プロセス化することが困難となる。The effect of Si enrichment expected to be less than 5% of SiCl 4 in the atmosphere cannot be obtained, and it takes more than 5 minutes to enrich Si of the steel strip by 1.0%. It takes too much time, and it becomes difficult to form a continuous process.
一方、SiCl4を35%を超えて含有させても界面におけ
る反応が律速になり、それ以上のSi富化効果が期待で
きなくなる。On the other hand, even if SiCl 4 is contained in an amount of more than 35%, the reaction at the interface becomes rate-determining and further Si enrichment effect cannot be expected.
またCVD処理では、SiCl4濃度が高いほど所謂カーケ
ンダールボイドと称する大きなボイドが生成し易い。こ
のボイドはSiCl4濃度が15%程度まではほとんど見ら
れないが、15%を超えると生成しはじめる。しかし、
SiCl4濃度が35%以下では、ボイドが生成してもCV
D処理に引き続き行われる拡散処理によりほぼ完全に消
失させることができる。ボイドが消滅するために要する
時間は、拡散処理温度に強く依存し、拡散開始後に表層
Si濃度の低下に応じて処理温度を上げることにより、短
時間でボイドを消滅させることができる。しかしなが
ら、SiCl4濃度が35%を超えると、発生するボイドの
径が大きくなり、また隣接するボイドが合体してさらに
大きなものとなり、長時間拡散均熱処理を施してもボイ
ドが残存してしまう。これに対し、SiCl4濃度が35%
以下であればあまり大きなボイドにはならないため拡散
処理で消滅可能である。Moreover, in the CVD process, the higher the SiCl 4 concentration, the more easily large voids called so-called Kirkendall voids are generated. This void is hardly seen up to a SiCl 4 concentration of about 15%, but begins to form when it exceeds 15%. But,
If the SiCl 4 concentration is 35% or less, CV
It can be almost completely eliminated by the diffusion process performed after the D process. The time required for the voids to disappear depends strongly on the diffusion treatment temperature, and the surface layer
Voids can be eliminated in a short time by raising the treatment temperature according to the decrease in Si concentration. However, when the SiCl 4 concentration exceeds 35%, the diameter of the generated voids becomes large, and adjacent voids coalesce to become even larger, and the voids remain even after the diffusion and soaking treatment for a long time. In contrast, the SiCl 4 concentration is 35%
If it is below, it does not become a very large void and can be eliminated by diffusion processing.
CVD処理温度は1023〜1200℃の範囲とする。
CVD処理反応は鋼帯表面における反応であるから、こ
の処理温度は厳密には鋼帯表面温度である。The CVD processing temperature is in the range of 1023 to 1200 ° C.
Since the CVD treatment reaction is a reaction on the surface of the steel strip, this treatment temperature is strictly the surface temperature of the steel strip.
CVD処理による反応生成物であるFeCl2の沸点は10
23℃であり、この温度未満ではFeCl2が鋼帯表面から
気体状態で放散されず、鋼帯表面に液体状に付着して蒸
着反応を阻害してしまう。本発明者らが行つた基礎実験
の結果では、このFeCl2の沸点を境に、単位時間当りの
Siの富化割合が著しく異なり、1023℃未満では蒸
着速度が小さため連続プロセスへ適用は困難である。こ
のため処理温度の下限は1023℃とする。The boiling point of FeCl 2 which is a reaction product of the CVD process is 10
The temperature is 23 ° C., and below this temperature, FeCl 2 is not diffused from the surface of the steel strip in a gaseous state, and adheres to the surface of the steel strip in a liquid state to hinder the vapor deposition reaction. The results of basic experiments conducted by the present inventors show that the enrichment ratio of Si per unit time is remarkably different at the boiling point of FeCl 2 as a boundary, and if the temperature is less than 1023 ° C., the vapor deposition rate is small and thus it is difficult to apply to a continuous process. Is. Therefore, the lower limit of the processing temperature is 1023 ° C.
一方、上限を1200℃と規定する理由は次の通りであ
る。Fe3Siの融点は、第4図に示すFe−Si状態図か
ら明らかなように1250℃であるが、発明者等の実験
によれば、1250℃より低い1230℃程度で処理し
た場合でも、鋼帯表面が部分的に溶解し、また、鋼帯エ
ツジ部分が過加熱のため溶解する。このように1250
℃以下でも鋼帯が溶解するのは、鋼帯表面ではFe3Si相
当のSi濃度14.5%以上にSiが蒸着されているた
めであると推定される。これに対し処理温度が1200
℃以下であれば鋼帯表面は溶解は全く認められず、ま
た、エツジの過加熱も、鋼帯中心部の平均温度を120
0℃とすることで、1220℃程度におさえることが可
能であり、微量な溶解で済むことが実験的に確認でき
た。以上の理由から、CVD処理温度は1023℃〜1
200℃と規定する。On the other hand, the reason for defining the upper limit as 1200 ° C. is as follows. The melting point of Fe 3 Si is 1250 ° C. as is clear from the Fe-Si phase diagram shown in FIG. 4, but according to the experiments by the inventors, even when treated at about 1230 ° C. lower than 1250 ° C., The surface of the steel strip is partially melted, and the edge portion of the steel strip is melted due to overheating. 1250 like this
It is presumed that the reason why the steel strip melts even at a temperature equal to or lower than ° C is that Si is vapor-deposited on the surface of the steel strip at a Si concentration of 14.5% or more corresponding to Fe 3 Si. In contrast, the processing temperature is 1200
If the temperature is below ℃, no melting is observed on the surface of the steel strip, and even if the edge is overheated, the average temperature of the central portion of the steel strip is 120
By setting the temperature to 0 ° C., it was possible to suppress the temperature to about 1220 ° C., and it was experimentally confirmed that a minute amount of dissolution was sufficient. For the above reasons, the CVD processing temperature is 1023 ° C to 1
It is specified as 200 ° C.
CVD処理速度を鋼帯の連続処理を可能ならしめるまで
高めるには、上述したように雰囲気ガス中のSiCl4
濃度と処理温度の適正化を図ることが必要であるが、こ
れに加え鋼帯表面へのSiCl4の供給・拡散と反応副
生成物たるFeCl2の鋼帯表面から放散(離脱)とを
促進することによりCVD処理速度をより高めることが
必要となる。In order to increase the CVD processing rate to the extent that continuous processing of steel strip is possible, SiCl 4 in the atmosphere gas as described above can be used.
It is necessary to optimize the concentration and treatment temperature, but in addition to this, supply and diffusion of SiCl 4 to the steel strip surface and promotion (release) of FeCl 2 as a reaction byproduct from the steel strip surface are promoted. Therefore, it is necessary to further increase the CVD processing speed.
従来では、CVD処理で反応ガスを大きく流動させる
と、蒸着層にボイドが発生し、また蒸着層の純度も低下
するとされ、このためガス流動は必要最小限にとどめる
という考え方が定着していた。しかし本発明者等の研究
では、このようにガス流動が抑えられることにより、反
応ガスの母材界面への拡散移動、及び反応副生成物の界
面表層からの離脱がスムースに行われず、このため処理
に長時間を要すること、さらにはガス流動が抑えられる
ためCVD処理炉内の反応ガス濃度に分布を生じ、この
結果蒸着膜厚の不均一化を招くことが判った。In the past, when a reaction gas was largely flowed in the CVD process, voids were generated in the vapor deposition layer and the purity of the vapor deposition layer was also lowered. Therefore, the idea that the gas flow should be kept to the minimum necessary was established. However, in the study by the present inventors, by suppressing the gas flow in this way, the diffusion transfer of the reaction gas to the base material interface and the separation of the reaction by-product from the interface surface layer are not smoothly performed, and therefore, It has been found that the processing requires a long time, and further, the gas flow is suppressed, so that the reaction gas concentration in the CVD processing furnace is distributed, and as a result, the deposition film thickness becomes nonuniform.
そして、このような事実に基づきさらに検討を加えた結
果、CVD処理炉において吹付ノズルにより雰囲気ガス
を被処理材に吹付けることによりSiCl4の鋼帯表面
への拡散及び反応生成物たるFeCl2の鋼帯表面から
の放散を著しく促進し、高い蒸着速度でしかも蒸着膜の
不均一化を抑えつつCVD処理できることが判った。As a result of further study based on such facts, by spraying an atmosphere gas onto a material to be processed by a spray nozzle in a CVD processing furnace, diffusion of SiCl 4 to the surface of the steel strip and reaction product FeCl 2 of It was found that the CVD process can be carried out at a high vapor deposition rate while suppressing the non-uniformity of the vapor deposited film by significantly promoting the emission from the surface of the steel strip.
一般にCVD反応と呼ばれているものの多くは、気相中
でのガスの反応によって生成(析出)したものが基板面
に付着するものであり、この反応の場合の副生成物(反
応生成ガス)は気相中で生じ、固体側から発生するもの
ではない。これに対して鋼帯の滲珪処理では、Feと反
応ガス中のSiとが鋼帯表面で置換することで、Siが
鋼中に取り込まれる。これは置換型CVD反応と呼ばれ
るもので、鋼帯表面すなわち固体側からFeCl2が気
体(反応生成ガス)として発生する。したがって、この
ような置換型CVD反応を伴う処理では、反応生成ガス
が固体側から生じるという点で、一般に知られたCVD
反応とは異なる反応生成ガスの生成挙動を示す。Most of what is generally called a CVD reaction is that which is produced (deposited) by the reaction of gas in the gas phase and adheres to the substrate surface. By-products (reaction product gas) in the case of this reaction Occurs in the gas phase and is not generated from the solid side. On the other hand, in the siliconizing treatment of the steel strip, Fe is replaced with Si in the reaction gas on the surface of the steel strip, so that Si is taken into the steel. This is called a substitutional CVD reaction, and FeCl 2 is generated as a gas (reaction product gas) from the surface of the steel strip, that is, the solid side. Therefore, in a process involving such a substitutional CVD reaction, the reaction product gas is generated from the solid side, which is a generally known CVD method.
The behavior of the reaction product gas different from the reaction is shown.
そして、このような置換型CVD反応では、反応ガスを
含む雰囲気ガスを鋼帯表面に次々に供給し、且つ反応生
成ガス(FeCl2)等を反応界面から速やかに離脱さ
せることが反応を促進させる上で極めて重要である。In such a substitutional CVD reaction, the reaction is promoted by supplying the atmospheric gas containing the reaction gas to the surface of the steel strip one after another and promptly releasing the reaction product gas (FeCl 2 ) from the reaction interface. Extremely important above.
この意味で、鋼帯面に吹付ノズルによって雰囲気ガスを
吹き付けることは、反応界面への反応ガスを供給と反応
生成ガスの反応界面からの離脱を促進することができる
という大きな利点がある。In this sense, spraying the atmospheric gas onto the steel strip surface with a spray nozzle has a great advantage that the reaction gas can be supplied to the reaction interface and the separation of the reaction product gas from the reaction interface can be promoted.
第6図はこのノズル吹付方式による実施状況を示すもの
で、CVD処理炉2内に鋼帯Sに面して吹付ノズル5が
配置され、鋼帯表面にSiCl4を含む雰囲気ガスが吹
き付けられる。第7図(イ)及び(ロ)は、吹付ノズルによる
吹付状況を示すもので、同図(イ)に示すように鋼帯面に
対して直角方向から、或いは(ロ)に示すように斜め方向
からガスを吹付けることができる。FIG. 6 shows a state of implementation by this nozzle spraying method. A spray nozzle 5 is arranged in the CVD treatment furnace 2 so as to face the steel strip S, and an atmosphere gas containing SiCl 4 is sprayed on the surface of the steel strip. 7 (a) and 7 (b) show the spraying situation by the spraying nozzle. As shown in FIG. 7 (a), it is from the direction perpendicular to the steel strip surface or diagonally as shown in (b). Gas can be sprayed from the direction.
このようなノズル吹付による単位時間当りのSi富化割
合は、ガスの鋼帯表面に対する衝突流速の増大に比例し
て大きくなるが、流速を過剰に大きくしても界面におけ
る反応律速となるためそれ以上のSi富化効果は期待で
きない。一般的には、5Nm/sec以下の流速で十分
な効果が得られる。The Si enrichment rate per unit time due to such nozzle spraying increases in proportion to the increase in the collision flow velocity of the gas with respect to the steel strip surface, but even if the flow velocity is excessively increased, the reaction rate is limited at the interface. The above Si enrichment effect cannot be expected. Generally, a sufficient effect can be obtained at a flow velocity of 5 Nm / sec or less.
以上のようにしてCVD処理された鋼帯(S)は、引き続
き拡散炉(3)に導かれSiCl4を含まない無酸化性ガス雰囲
気中で拡散処理される。すなわち、CVD処理直後で
は、鋼帯表面近くは中心部に較べSi濃度が極めて高
く、鋼帯を均熱することによつて表面に過濃状態にある
Siを鋼帯内部に拡散させる処理をする。しかし、本発
明では、この拡散熱処理によりSiを鋼帯内に均一に拡
散させるようなことはせず、表層Si濃度が鋼帯厚み方
向中心部のSi濃度よりも高い状態にあるうちに拡散処
理を打ち切り、Si濃度が厚み方向で不均一な鋼帯とす
るものである。The steel strip (S) subjected to the CVD treatment as described above is continuously introduced into the diffusion furnace (3) and subjected to the diffusion treatment in the non-oxidizing gas atmosphere containing no SiCl 4 . That is, immediately after the CVD treatment, the Si concentration near the surface of the steel strip is much higher than that in the central portion, and the steel strip is soaked that the Si that is in a rich state on the surface is diffused inside the steel strip. . However, in the present invention, the diffusion heat treatment does not uniformly diffuse Si into the steel strip, and the diffusion treatment is performed while the surface layer Si concentration is higher than the Si concentration in the central portion in the thickness direction of the steel strip. Is cut to form a steel strip having a non-uniform Si concentration in the thickness direction.
本発明者等が拡散処理時間を短縮化するという観点から
CVD処理鋼材のSi濃度分布と磁気特性との関係等に
ついて検討を加えた結果、高珪素鋼材の磁気特性は鋼材
表層部の結晶粒径とSi濃度に大きく支配され、表層部
を所定の粒度とSi濃度に調整することにより、Si濃
度を板厚方向で均一としなくとも十分な磁気特性が得ら
れることを見い出した。そして、このような傾向は特に
高周波磁気特性において顕著であることも判つた。From the viewpoint of shortening the diffusion treatment time, the present inventors have examined the relationship between the Si concentration distribution and the magnetic characteristics of the CVD-treated steel material, and as a result, the magnetic characteristics of the high silicon steel material are found to be the grain size of the steel surface layer. It was found that sufficient magnetic characteristics can be obtained without adjusting the Si concentration in the plate thickness direction by adjusting the surface layer portion to a predetermined grain size and Si concentration, which is largely controlled by the Si concentration. It was also found that such a tendency is remarkable especially in high frequency magnetic characteristics.
このため本発明では、CVD処理に続く拡散処理を、表
層Si濃度が鋼帯厚み方向中心部のSi濃度よも高い状
態にあるうちに打ち切り、Si濃度が厚み方向で不均一
な鋼帯を得るようにしたものである。Therefore, in the present invention, the diffusion process following the CVD process is terminated while the surface layer Si concentration is higher than the Si concentration in the central portion of the steel strip in the thickness direction, and a steel strip having a non-uniform Si concentration in the thickness direction is obtained. It was done like this.
このような方法によれば短時間の拡散熱処理により磁気
特性が十分確保された鋼帯を得ることができる。加え
て、このようにして得られた鋼帯は、厚みの中心部が低
Si濃度に維持されているため、靭性が確保され、鋼帯
の破断を適切に防ぐことができる。According to such a method, it is possible to obtain a steel strip having sufficiently secured magnetic characteristics by a diffusion heat treatment for a short time. In addition, in the steel strip thus obtained, the central portion of the thickness is maintained at a low Si concentration, so that the toughness is ensured and the fracture of the steel strip can be appropriately prevented.
第5図は本発明法における鋼帯板厚方向のSi濃度分布
の変化を示すものであり、3%Si添加鋼の鋼帯を母材
とし、これをCVD処理−拡散処理した場合を示してい
る。(A)はCVD処理直後の状態を示しており、鋼帯表
面にはFe3Si相当(Si:14.5%)のSiが蒸着してい
る。本発明ではこのような鋼帯を(B)の状態まで拡散熱
処理し、板厚方向でSi濃度が不均一な鋼帯を得る。
(B)に示す例では表層のSi濃度が6.5%になるまで
拡散熱処理が施されたものであり、板厚中心部はほぼ母
材Si濃度たる3%に維持されている。FIG. 5 shows changes in the Si concentration distribution in the thickness direction of the steel strip in the method of the present invention, showing a case where a steel strip of 3% Si-added steel is used as a base material and this is subjected to a CVD treatment-diffusion treatment. There is. (A) shows the state immediately after the CVD treatment, and Si equivalent to Fe 3 Si (Si: 14.5%) is deposited on the surface of the steel strip. In the present invention, such a steel strip is subjected to diffusion heat treatment to the state of (B) to obtain a steel strip having a non-uniform Si concentration in the plate thickness direction.
In the example shown in (B), the diffusion heat treatment is performed until the Si concentration of the surface layer reaches 6.5%, and the central portion of the plate thickness is maintained at 3% which is the base material Si concentration.
このようにして得られる鋼帯は、拡散熱処理温度と処理
時間を選択して表層部を適当な粒径とSi濃度に調整す
ることにより優れた磁気特性、特に高周波磁気特性を確
保することができる。In the steel strip thus obtained, excellent magnetic characteristics, especially high-frequency magnetic characteristics can be secured by selecting the diffusion heat treatment temperature and the treatment time and adjusting the surface layer portion to an appropriate grain size and Si concentration. .
この拡散処理は、鋼帯表面を酸化させない為に、無酸化
雰囲気中で行う必要があり、また高温で行うほど処理時
間が少なくて済む。This diffusion treatment needs to be performed in a non-oxidizing atmosphere so as not to oxidize the surface of the steel strip, and the treatment time is shorter as the temperature is higher.
拡散処理は、一定温度で行つてもよいが、第4図のFe
−Si状態図から判るように、拡散の進行とともに鋼帯
表層部のSi濃度が減少しその融点が上がることから、
拡散の進行に伴い鋼帯を溶解させない程度に徐々に昇温
させる(例えば複数段階で昇温させる)ことにより、処
理を短時間で行うことができる。このような拡散処理
後、鋼帯(S)は冷却炉(4)で冷却され、しかる後捲取ら
れるが、本発明ではこの冷却途中または冷却後200〜
600℃の温間状態で圧延による塑性加工を行う。第3
図はこのため冷却炉の具体的な構造例を示すもので、冷
却炉(4)の途中には中間室(8)が設けられ、この中間室
(8)にスキンパスミル(9)が配設されている。拡散炉(3)
を出た鋼帯(S)は冷却炉(4)の前部冷却室(41)で温間状
態まで冷却された後、中間室(8)のスキンパスミル(9)で
圧延され、最終冷却されることなく温間状態でそのまま
捲取られるか或いは引き続き後部冷却室(42)で室温まで
冷却された後捲取られる。The diffusion treatment may be carried out at a constant temperature, but Fe in FIG.
As can be seen from the -Si phase diagram, as the diffusion progresses, the Si concentration in the steel strip surface layer decreases and the melting point increases,
The treatment can be performed in a short time by gradually raising the temperature so that the steel strip is not melted with the progress of diffusion (for example, raising the temperature in multiple stages). After such diffusion treatment, the steel strip (S) is cooled in the cooling furnace (4) and then wound up.
Plastic working by rolling is performed in a warm state of 600 ° C. Third
Therefore, the figure shows a concrete example of the structure of the cooling furnace.An intermediate chamber (8) is provided in the middle of the cooling furnace (4).
A skin pass mill (9) is provided in (8). Diffusion furnace (3)
The steel strip (S) exiting from is cooled to a warm state in the front cooling chamber (41) of the cooling furnace (4), then rolled in the skin pass mill (9) of the intermediate chamber (8) and finally cooled. Without being warmed up, it is wound up as it is, or is subsequently cooled to room temperature in the rear cooling chamber (42) and then wound up.
上述したようにCVD処理では蒸着反応により鋼帯面の
FeがFeCl2の形で放散され、その分板厚が減少するこ
とになるが、CVD処理炉(2)内での雰囲気ガス濃度分
布の不均一によりSi蒸着が不均一になり易く、このた
めCVD処理−拡散処理後の鋼帯(S)は幅方向、長手方
向で板厚にバラツキを生じている。そこで本発明では2
00〜600℃の温間状態にある鋼帯(S)に圧延(スキ
ンパス圧延または通常圧延)を施すことにより、板厚を
均一化するものであり、かかる圧延により形状矯正と表
面粗さの調整も合せて行うことができる。なお、圧延は
スキンパス圧延のような軽圧下ではなく、板厚の減少を
目的としてより大きな圧下量(通常の圧延)で行つても
よい。本発明は高珪素鋼帯を製造対象とするもので、こ
のため鋼帯(S)の温度が200〜600℃の温間状態で
圧延による塑性加工を行う。すなわち鋼帯温度が200
℃未満では所望の塑性加工性が得られない。As described above, in the CVD process, Fe on the surface of the steel strip is diffused in the form of FeCl 2 due to the vapor deposition reaction, and the plate thickness is reduced accordingly. However, the atmospheric gas concentration distribution in the CVD process furnace (2) Due to the non-uniformity, Si vapor deposition is likely to be non-uniform, and therefore the steel strip (S) after the CVD treatment-diffusion treatment has variations in the plate thickness in the width direction and the longitudinal direction. Therefore, in the present invention, 2
By rolling (skin pass rolling or normal rolling) a steel strip (S) in a warm state of 00 to 600 ° C, the plate thickness is made uniform. By such rolling, shape correction and surface roughness adjustment Can be done together. Note that the rolling may be performed with a larger amount of reduction (normal rolling) for the purpose of reducing the plate thickness, instead of light reduction such as skin pass rolling. The present invention is intended to manufacture a high silicon steel strip, and for this reason, the plastic working by rolling is performed in a warm state where the temperature of the steel strip (S) is 200 to 600 ° C. That is, the steel strip temperature is 200
If it is less than ° C, the desired plastic workability cannot be obtained.
鋼帯(S)は通常、常温ないし300℃までの温間状態で
捲取られる。一般にSi含有量が多く(例えば4.0%
以上)、板厚が比較的厚い鋼帯は温間で捲取ることが好
ましい。したがつて、鋼帯(S)は熱間状態から冷却炉
(4)で上記温度域まで冷却された後圧延による塑性加工
が施され、そのまま温間状態で捲取られるか、或いは室
温で捲取る場合には、上記圧延による塑性加工後、冷却
炉後段で室温まで最終冷却され、しかる後捲取られる。The steel strip (S) is usually wound in a warm state from room temperature to 300 ° C. Generally, the Si content is high (for example, 4.0%
Above), it is preferable that the steel strip having a relatively large plate thickness be wound up warm. Therefore, the steel strip (S) is cooled from the hot state to the cooling furnace.
After being cooled to the above temperature range in (4), it is plastically worked by rolling and wound in the warm state as it is, or when it is wound at room temperature, after plastic working by the above rolling, in the latter stage of the cooling furnace. It is finally cooled to room temperature and then wound up.
なお、実ラインにおいてはミルの上流に板厚計、プロフ
イル計を設け、これによる板厚、板形状の検出に基づき
ミルが制御される。In the actual line, a plate thickness meter and a profile meter are provided upstream of the mill, and the mill is controlled based on the detection of the plate thickness and plate shape.
また本発明では、上記拡散処理−冷却及び圧延による塑
性加工後、鋼帯に連続的に絶縁皮膜コーテイングを施
し、焼付処理後捲取るようにすることができる。第2図
はこのための連続処理ラインを示すもので、(6)はコー
テイング装置、(7)は焼付炉である。Further, in the present invention, after the plastic treatment by the diffusion treatment-cooling and rolling, the steel strip may be continuously coated with an insulating film, and may be wound after the baking treatment. FIG. 2 shows a continuous processing line for this purpose. (6) is a coating device and (7) is a baking furnace.
電磁鋼板は通常積層状態で使用され、この場合積層され
る各鋼板はそれぞれ絶縁される必要がある。このため電
磁鋼板には絶縁皮膜コーテイグが施される。Electromagnetic steel sheets are usually used in a laminated state, and in this case, each laminated steel sheet needs to be insulated. For this reason, the insulating coating is applied to the electromagnetic steel sheet.
Si含有量が4.0%以上の鋼帯は、常温状態ではぜい
性材料であり、ほとんど塑性変形しない。このため絶縁
皮膜コーテイングをCVD処理ラインと別ラインで行つ
た場合、コイルの捲戻し、捲取り時に鋼帯が破断するお
それがある。そこで、本発明は拡散処理−冷却及び圧延
による塑性加工後、鋼帯(S)にコーテイング装置(6)で
絶縁塗料を塗布し、次いで塗装焼付炉(7)で焼付処理す
る。A steel strip having a Si content of 4.0% or more is a brittle material at room temperature and hardly plastically deforms. Therefore, when the insulating film coating is performed on a line different from the CVD processing line, the steel strip may be broken at the time of rewinding and winding of the coil. Therefore, in the present invention, after the plastic processing by diffusion treatment-cooling and rolling, the steel strip (S) is coated with the insulating coating material by the coating device (6) and then baked by the coating baking furnace (7).
絶縁塗料としては、無機系、有機系の適宜なものを用い
ることができる。無機系塗料としては、例えばリン酸マ
グネシウム、無水クロム酸、シリカゾル等が、また有機
系塗料としてはプラスチツク樹脂等が用いられる。塗料
はロールコータ方式、スプレー方式等により鋼帯(S)に
塗布され、無機系塗料の場合には約800℃程度、有機
系塗料の場合には200〜300℃程度で焼付処理す
る。As the insulating coating material, an appropriate inorganic or organic coating material can be used. As the inorganic paint, for example, magnesium phosphate, chromic anhydride, silica sol and the like are used, and as the organic paint, plastic resin and the like are used. The paint is applied to the steel strip (S) by a roll coater method, a spray method or the like, and is baked at about 800 ° C. for the inorganic paint and about 200 to 300 ° C. for the organic paint.
なお前記加熱炉(1)では無酸化加熱が行われるものであ
り、このため電気間接加熱、誘導加熱、ラジアントチユ
ーブ間接加熱、直火還元加熱等の加熱方式を単独または
適当に組み合せた加熱方法が採られる。なお、間接加熱
方式を採る場合、加熱に先立ち電気洗浄等の前処理が行
われる。前処理を含めた加熱方式として例えば次のよう
なものを採用できる。In the heating furnace (1), non-oxidative heating is performed.Therefore, heating methods such as electric indirect heating, induction heating, radiant tube indirect heating, and direct heating reduction heating may be used alone or in an appropriate combination. To be taken. When the indirect heating method is adopted, pretreatment such as electric cleaning is performed before heating. As a heating method including pretreatment, for example, the following one can be adopted.
前処理−〔予熱〕−電気間接加熱(または誘導加熱) 前処理−〔予熱〕−ラジアントチユーブ加熱−電気間
接加熱(または誘導加熱) 〔予熱〕−直火還元加熱−電気間接加熱(または誘導
加熱) 前処理−〔予熱〕−ラジアントチユーブ間接加熱(セ
ラミツクラジアントチユーブ方式) 〔予熱〕−直火還元加熱 また、冷却炉(4)での冷却方式に特に限定はなくガスジ
エツト冷却、ミスト冷却、放射冷却等の各種冷却方式を
単独または組合せた形で採用することができる。Pretreatment- [Preheating] -Electrical indirect heating (or induction heating) Pretreatment- [Preheating] -Radiant tube heating-Electrical indirect heating (or induction heating) [Preheating] -Open flame reduction heating-Electrical indirect heating (or induction heating) ) Pretreatment- [Preheating] -Radiant tube indirect heating (ceramics radiant tube method) [Preheating] -Direct flame reduction heating There is no particular limitation on the cooling method in the cooling furnace (4), gas jet cooling, mist cooling, radiant cooling. Various cooling methods such as the above can be used alone or in combination.
本発明は、6.5%Si鋼帯のような珪素含有量が極めて
高い鋼帯の製造に好適なものであることは以上述べた通
りであるが、従来、圧延法で製造する場合に変形が多く
歩留りが悪かつたSi:2〜4%程度の高珪素鋼帯も容
易に製造できる利点がある。As described above, the present invention is suitable for the production of steel strips having a very high silicon content such as 6.5% Si steel strip, but conventionally there are many deformations when produced by the rolling method. There is an advantage that a high silicon steel strip having a poor yield of Si: about 2 to 4% can be easily manufactured.
〔実施例〕 実施例−1 小型のCVD処理炉を用い、CVD処理性に対するSiCl
4濃度及びCVD処理温度の影響を調べた。その結果を
第8図及び第9図に示す。[Example] Example-1 Using a small-sized CVD processing furnace, SiCl for CVD processability
The effects of 4 concentration and CVD processing temperature were investigated. The results are shown in FIGS. 8 and 9.
図中、Aが雰囲気法、すなわちノズル吹付を行わないで
CVD処理した場合、またBがノズル吹付法、すなわち
第6図に示すように雰囲気ガスを鋼帯面に0.5m/sの流速
で吹き付けつつCVD処理した場合を示す。なお、Si
富化割合とは、母材当初のSiに対するCVD処理のS
i量増加分を示す。In the figure, A is the atmosphere method, that is, the CVD process is performed without nozzle spraying, and B is the nozzle spraying method, that is, the atmosphere gas is sprayed onto the steel strip surface at a flow rate of 0.5 m / s as shown in FIG. A case where the CVD process is performed while being shown. Note that Si
The enrichment ratio is the S of the CVD process for Si at the beginning of the base material.
The i increment is shown.
これによれば、SiCl4濃度5%以上、CVD処理温度1
023℃以上において大きなSi富化効果が得られてい
る。また同じ条件でも、吹付ノズルにより雰囲気ガスを
吹付ける方法の場合、単に雰囲気中で鋼帯を通板せしめ
る場合に較べ格段に優れたSi富化効果(CVD処理
性)が得られていることが判る。According to this, the SiCl 4 concentration is 5% or more, the CVD processing temperature is 1
A large Si enrichment effect is obtained at 023 ° C or higher. Even under the same conditions, the method of spraying the atmospheric gas with the spray nozzle can obtain a significantly superior Si enrichment effect (CVD processability) as compared with the case of simply passing the steel strip in the atmosphere. I understand.
第10図は同様のCVD処理炉を用い、雰囲気法Aとノ
ズル吹付法Bの蒸着時間と鋼帯中Si濃度(母材Si量
+蒸着Si量)との関係を、Si:3%、板厚0.5mmの
鋼帯をSiCl4濃度21%、処理温度1150℃でCVD
処理した場合について調べたものである。なお、ノズル
吹付法では、スリツトノズルにより鋼帯に対し垂直方向
から0.2Nm/secの流速で雰囲気ガスを吹付けた。同図か
ら判るように、6.5%Si鋼相当のSi蒸着量を得るた
め雰囲気法Aでは7分かかるのに対し、ノズル吹付法B
では1.5分で処理することができた。FIG. 10 shows the relationship between the vapor deposition time and the Si concentration in the steel strip (base material Si content + vapor deposition Si content) in the atmosphere method A and the nozzle spraying method B using the same CVD processing furnace. CVD of 0.5 mm thick steel strip with SiCl 4 concentration of 21% and processing temperature of 1150 ° C
This is an examination of the case of processing. In the nozzle spraying method, atmospheric gas was sprayed from the slit nozzle at a flow rate of 0.2 Nm / sec from the vertical direction to the steel strip. As can be seen from the figure, in order to obtain the Si deposition amount equivalent to 6.5% Si steel, the atmosphere method A takes 7 minutes, whereas the nozzle spray method B
I was able to process it in 1.5 minutes.
第11図はノズル吹付法における衝突ガス流速と鋼帯の
Si富化割合(第8図及び第9図と同様)との関係を示
すものであり、所定レベルまでは衝突ガス流速に比例し
て鋼帯のSi富化割合が増大している。FIG. 11 shows the relationship between the collision gas flow rate in the nozzle spraying method and the Si enrichment ratio of the steel strip (similar to FIGS. 8 and 9), which is proportional to the collision gas flow rate up to a predetermined level. The Si enrichment ratio of the steel strip is increasing.
実施例−2 第1図に示す連続プロセスにより、それぞれ同量のSi
蒸着量で拡散処理時間を変えた鋼帯を製造し、これらの
鋼帯のSi拡散の度合い及び磁気特性を調べた。Example-2 By the continuous process shown in FIG.
Steel strips having different diffusion treatment times depending on the amount of vapor deposition were manufactured, and the degree of Si diffusion and magnetic properties of these steel strips were investigated.
具体的には、板厚0.35mm、板幅900mmのSi3%
含有鋼帯を素材とし、ラインスピードを5〜50mpmの
範囲で変化させることにより拡散炉の通過時間を変え、
CVD処理を行つた。なお、ラインスピードの違いによ
つてSi蒸着量が変化しないようにするため、ラインス
ピードに応じCVD雰囲気ガス中のSiCl4濃度、及びガ
ス吹付ノズルからの雰囲気ガス吹付量を変え、Siの蒸
着量がラインスピードに関係なく一定となるよう調整し
た。本実施例では母材を含めた平均Si濃度が6.5wt
%となるような蒸着量でSiを蒸着させ、また一連の処
理は第12図に示す熱サイクルで行つた。なお、拡散処
理時間が短い鋼帯については、表層部のSi量が非常に
多いことから、表層のひび割れを防止するため温間(25
0〜300℃)で巻取つた。Specifically, the plate thickness is 0.35 mm, the plate width is 900 mm, and Si 3%
Change the passage time of the diffusion furnace by changing the line speed in the range of 5 to 50 mpm using the contained steel strip as the material,
A CVD process was performed. In order to prevent the Si deposition amount from changing due to the difference in line speed, change the SiCl 4 concentration in the CVD atmosphere gas and the atmosphere gas spray amount from the gas spray nozzle according to the line speed. Was adjusted to be constant regardless of the line speed. In this embodiment, the average Si concentration including the base material is 6.5 wt.
Si was vapor-deposited at an amount of vapor deposition so that the concentration became 100%, and a series of treatments was performed by the thermal cycle shown in FIG. For steel strips with a short diffusion treatment time, since the amount of Si in the surface layer is very large, warm steel (25
It was wound at 0-300 ° C.
第13図はCVD処理ままの鋼帯、及び拡散時間が各5
分、10分、20分、40分の上記鋼帯について、板厚
方向断面のSi濃度およびFe温度をXMAにより測定
したもので、約40分の拡散処理(1200℃)でほぼ
均一にSiが拡散されている。Fig. 13 shows the steel strip as it is CVD processed, and the diffusion time is 5 each
Min., 10 min., 20 min., 40 min., The Si concentration and the Fe temperature in the cross section in the plate thickness direction were measured by XMA. It has been diffused.
第14図は上記と同様条件により拡散時間を変えて得ら
れたサンプルについて、磁気特性たる鉄損を測定した結
果を示すもので、拡散処理時間10分程度、すなわち第
13図(c)程度のSi拡散状態でSiを均一拡散させた
場合とぼぼ同等の十分に高い磁気特性が得られているこ
とが判る。FIG. 14 shows the results of measuring iron loss, which is a magnetic property, of samples obtained by changing the diffusion time under the same conditions as described above. The diffusion treatment time is about 10 minutes, that is, about the time of FIG. 13 (c). It can be seen that sufficiently high magnetic characteristics are obtained, which is almost equivalent to the case where Si is uniformly diffused in the Si diffused state.
実施例−3 実施例−2と同様の素材鋼帯について、連続プロセスに
より各種SiCl4濃度の雰囲気でCVD処理をし、引き続
き1200℃×10分の拡散均熱処理を施し、ボイドの
残存度合いを調べた。その結果を第1表に示す。For similar material steel strip as in Example -3 Example -2 was CVD process in an atmosphere of various SiCl 4 concentration by a continuous process, subsequently subjected to a diffusion soaking of 1200 ° C. × 10 minutes, examined the residual degree of voids It was The results are shown in Table 1.
このようにSiCl4濃度30%、35%ではボイドの残存
が認められた。そこで、SiCl4濃度30%、35%につ
いて、処理温度を、 A)1200℃一定×10分 B)1200℃×5分→1250℃×5分 C)1200℃×3分→1250℃×3分→ 1280℃×4分 の3水準に設定して鋼帯を製造し、それらのボイド残存
を調査した。その結果を第2表に示す。 In this way, residual voids were observed at SiCl 4 concentrations of 30% and 35%. Therefore, for SiCl 4 concentrations of 30% and 35%, the treatment temperature is A) 1200 ° C. constant × 10 minutes B) 1200 ° C. × 5 minutes → 1250 ° C. × 5 minutes C) 1200 ° C. × 3 minutes → 1250 ° C. × 3 minutes → Steel strips were manufactured at three levels of 1280 ° C x 4 minutes, and the remaining voids were investigated. The results are shown in Table 2.
このように拡散処理条件を選択することにより、SiCl4
35%でもある程度満足し得る製品が得られる。但し、
実際には若干の温度制御によりボイドを消滅させること
ができるSiCl4濃度30%以下が好ましい。 By selecting the diffusion treatment conditions in this way, SiCl 4
Even with 35%, a product that is satisfactory to some extent can be obtained. However,
In practice, it is preferable that the concentration of SiCl 4 is 30% or less so that the voids can be eliminated by slightly controlling the temperature.
実施例−4 第1図に示す連続プロセスに第3図のスキンパスミルを
組み込んだプロセスラインにおいて、板厚0.33mmの
Si3.5%含有鋼帯を母材とし、50mpmのラインス
ピードにより、目標板厚0.30mm、幅900mmのSi
6.5%含有鋼帯を製造した。この際、次の4条件によ
りそれぞれ鋼帯を製造した。なお、いずれも拡散処理は
1200℃×10分で行つた。Example-4 In a process line in which the skin pass mill shown in FIG. 3 was incorporated into the continuous process shown in FIG. 1, a steel strip containing 0.33 mm of Si3.5% was used as a base material, and a target was obtained at a line speed of 50 mpm. Si with a plate thickness of 0.30 mm and a width of 900 mm
A steel strip containing 6.5% was produced. At this time, steel strips were manufactured under the following four conditions. In addition, in all cases, the diffusion treatment was performed at 1200 ° C. for 10 minutes.
A)CVD処理を、Ar80%、SiCl420%の雰囲気
中で実施し、スキンパス圧延を実施しない。A) The CVD process is performed in an atmosphere of Ar 80% and SiCl 4 20%, and skin pass rolling is not performed.
B)A)と同様のCVD処理を行いスキンパス圧延を実
施。B) The same CVD process as in A) was performed and skin pass rolling was performed.
C)CVD処理を、Ar80%、SiCl420%の反応ガ
スをノズル吹付法で鋼帯に対し、0.5Nm/sのガス流速
で衝突させることにより実施し、スキンパス圧延を実施
しない。C) The CVD process is performed by causing a reaction gas of 80% Ar and 20% SiCl 4 to collide with the steel strip by a nozzle spraying method at a gas flow rate of 0.5 Nm / s, and does not perform skin pass rolling.
D)CVD処理をC)と同様に行い、スキンパス圧延を
実施。D) CVD treatment is performed in the same manner as C), and skin pass rolling is performed.
第3表は、これらの各ケースのサンプルについて、板厚
偏差(目標板厚に対する増減)及び表面粗さを測定した
結果を示したもので、スキンパス圧延を実施することに
より板厚が精度良く均一化していることが判る。Table 3 shows the results of measuring the plate thickness deviation (increase / decrease with respect to the target plate thickness) and the surface roughness of the samples in each of these cases. By performing skin pass rolling, the plate thickness is uniform with high accuracy. You can see that it has changed.
〔発明の効果〕 以上述べた本発明によれば、連続ラインにおいて短時間
呑CVD処理及び拡散熱処理により優れた磁気特性の高
珪素鋼帯を得ることができ、また1200℃以下の温度
でCVD処理を行うため鋼帯の形状不良やエツジ部溶解
等の問題を生じさせることがなく、加えて鋼帯の磁気特
性を損うことなく優れた靭性を確保し且つ板厚を均一化
させることができ、このためラインの長大化を招くこと
なく高品質の高珪素鋼板を能率的に製造することができ
る。 [Effect of the Invention] According to the present invention described above, a high silicon steel strip having excellent magnetic characteristics can be obtained by a short-time swirl CVD treatment and a diffusion heat treatment in a continuous line, and the CVD treatment is performed at a temperature of 1200 ° C. or less. Since it does not cause problems such as defective shape of the steel strip and melting of the edge portion, in addition, excellent toughness can be secured and the plate thickness can be made uniform without impairing the magnetic properties of the steel strip. Therefore, it is possible to efficiently manufacture a high-quality high-silicon steel sheet without increasing the length of the line.
第1図及び第2図はそれぞれ本発明法を実施するための
連続処理ラインを示す説明図である。第3図は第1図及
び第2図における冷却炉の具体的構成例を示す説明図で
ある。第4図はFe−Si系状態図である。第5図(A),(B)
は本発明の拡散熱処理における鋼帯板厚方向のSi濃度分
布の変化を示すものである。第6図及び第7図(イ),(ロ)
はノズル吹付方式によるCVD処理状況を示すもので、
第6図は全体説明図、第7図(イ)及び(ロ)はそれぞれノ
ズル吹付方法を示す説明図である。第8図はCVD処理
におけるガス中SiCl4濃度と鋼帯Si富化割合との関係、
第9図はCVD処理温度と鋼帯Si富化割合との関係をそ
れぞれ示すものである。第10図は本発明におけるSi蒸
着時間と鋼帯中Si濃度との関係を、雰囲気法及びノズル
吹付法で比較して示したものである。第11図はノズル
吹付法によりCVD処理において、雰囲気ガスの鋼帯に
対する衝突ガス流速と鋼帯Si富化割合との関係を示すも
のである。第12図は実施例で採つた熱サイクルを示す
ものである。第13図(a)〜(e)は実施例における各供
試材のSi濃度分布を示すものである。第14図は実施例
における各供試材の磁気特性を示すものである。 図において、(1)は加熱炉、(2)はCVD処理炉、(3)は
拡散処理炉、(4)は冷却炉、(6)はコーテイング装置、
(7)は焼付炉、(9)はスキンパスミル、(S)は鋼帯であ
る。1 and 2 are explanatory views showing continuous processing lines for carrying out the method of the present invention. FIG. 3 is an explanatory view showing a specific structural example of the cooling furnace in FIGS. 1 and 2. FIG. 4 is a phase diagram of Fe-Si system. Fig. 5 (A), (B)
Shows changes in the Si concentration distribution in the thickness direction of the steel strip in the diffusion heat treatment of the present invention. Figures 6 and 7 (a), (b)
Shows the state of CVD processing by the nozzle spray method.
FIG. 6 is an overall explanatory view, and FIGS. 7A and 7B are explanatory views showing a nozzle spraying method. Fig. 8 shows the relationship between the SiCl 4 concentration in the gas and the Si enrichment ratio in the steel strip in the CVD process,
FIG. 9 shows the relationship between the CVD processing temperature and the steel strip Si enrichment ratio. FIG. 10 shows the relationship between the Si deposition time and the Si concentration in the steel strip in the present invention by comparing the atmosphere method and the nozzle spraying method. FIG. 11 shows the relationship between the collision gas flow velocity of the atmospheric gas with respect to the steel strip and the Si enrichment ratio of the steel strip in the CVD process by the nozzle spraying method. FIG. 12 shows the thermal cycle taken in the example. FIGS. 13 (a) to 13 (e) show the Si concentration distribution of each test material in Examples. FIG. 14 shows the magnetic characteristics of each test material in the examples. In the figure, (1) is a heating furnace, (2) is a CVD processing furnace, (3) is a diffusion processing furnace, (4) is a cooling furnace, (6) is a coating device,
(7) is a baking furnace, (9) is a skin pass mill, and (S) is a steel strip.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特公 昭45−21181(JP,B1) 特公 昭47−25564(JP,B1) 特公 昭53−42019(JP,B2) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References Japanese Patent Publication No. Sho 42-21181 (JP, B1) Japanese Patent Publication No. 47-25655 (JP, B1) Japanese Patent Publication No. 53-42019 (JP, B2)
Claims (2)
板させつつ、SiCl4をmol分率で5〜35%含んだ無
酸化性ガスを吹付ノズルから鋼帯面に吹き付けて102
3〜1200℃の温度で連続的に滲珪処理し、次いでS
iCl4を含まない無酸化性ガス雰囲気中でSiを鋼帯
内部に拡散させる拡散処理するに当り、該拡散処理を、
表層Si濃度が鋼帯厚み方向中心部のSi濃度よりも高
い状態にあるうちに打ち切り、Si濃度が厚み方向で不
均一な鋼帯を得、続く冷却過程の途中または冷却後、鋼
帯を200〜600℃で圧延により塑性加工することを
特徴とする連続ラインにおける高珪素鋼帯の製造方法。1. A non-oxidizing gas containing SiCl 4 in a mole fraction of 5 to 35% is sprayed onto a steel strip surface from a spraying nozzle while continuously passing the steel strip in an non-oxidizing gas atmosphere. 102
Silica treatment is continuously performed at a temperature of 3 to 1200 ° C., and then S
In the diffusion treatment for diffusing Si into the steel strip in the non-oxidizing gas atmosphere containing no iCl 4 , the diffusion treatment is
The steel strip is cut off while the surface Si concentration is higher than the central Si concentration in the thickness direction of the steel strip to obtain a steel strip having a non-uniform Si concentration in the thickness direction. A method for producing a high silicon steel strip in a continuous line, which comprises performing plastic working by rolling at a temperature of up to 600 ° C.
板させつつ、SiCl4をmol分率で5〜35%含んだ無
酸化性ガスを吹付ノズルから鋼帯面に吹き付けて102
3〜1200℃の温度で連続的に滲珪処理し、次いでS
iCl4を含まない無酸化性ガス雰囲気中でSiを鋼帯
内部に拡散させる拡散処理するに当り、該拡散処理を、
表層Si濃度が鋼帯厚み方向中心部のSi濃度よりも高
い状態にあるうちに打ち切り、Si濃度が厚み方向で不
均一な鋼帯を得、続く冷却過程の途中または冷却後、鋼
帯を200〜600℃で圧延により塑性加工し、次いで
絶縁皮膜コーティング及び焼付処理することを特徴とす
る連続ラインにおける高珪素鋼帯の製造方法。2. A steel strip is continuously passed in an atmosphere of non-oxidizing gas, and non-oxidizing gas containing SiCl 4 in a mole fraction of 5 to 35% is sprayed onto the surface of the steel strip from a spray nozzle. 102
Silica treatment is continuously performed at a temperature of 3 to 1200 ° C., and then S
In the diffusion treatment for diffusing Si into the steel strip in the non-oxidizing gas atmosphere containing no iCl 4 , the diffusion treatment is
The steel strip is cut off while the surface Si concentration is higher than the central Si concentration in the thickness direction of the steel strip to obtain a steel strip having a non-uniform Si concentration in the thickness direction. A method for producing a high silicon steel strip in a continuous line, which comprises performing plastic working by rolling at ~ 600 ° C, followed by insulating film coating and baking treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61071491A JPH0643610B2 (en) | 1986-03-28 | 1986-03-28 | Method for producing high silicon steel strip in continuous line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61071491A JPH0643610B2 (en) | 1986-03-28 | 1986-03-28 | Method for producing high silicon steel strip in continuous line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62227035A JPS62227035A (en) | 1987-10-06 |
| JPH0643610B2 true JPH0643610B2 (en) | 1994-06-08 |
Family
ID=13462181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61071491A Expired - Lifetime JPH0643610B2 (en) | 1986-03-28 | 1986-03-28 | Method for producing high silicon steel strip in continuous line |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0643610B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62227078A (en) * | 1986-03-28 | 1987-10-06 | Nippon Kokan Kk <Nkk> | Manufacture of high silicon steel strip continuous line |
| KR930011625B1 (en) * | 1990-07-16 | 1993-12-16 | 신닛뽄 세이데쓰 가부시끼가이샤 | Manufacturing method of ultra-high silicon steel sheet with thin plate thickness by cold rolling |
| NL9101722A (en) * | 1991-10-16 | 1993-05-17 | Hoogovens Groep Bv | IRON AND SILICON-CONTAINING PLATE FOR ELECTRICAL APPLICATIONS AND METHOD FOR MANUFACTURING THOSE. |
| WO1999046417A1 (en) * | 1998-03-12 | 1999-09-16 | Nkk Corporation | Silicon steel sheet and method for producing the same |
| US5993568A (en) * | 1998-03-25 | 1999-11-30 | Nkk Corporation | Soft magnetic alloy sheet having low residual magnetic flux density |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6012686B2 (en) * | 1976-09-29 | 1985-04-03 | 株式会社日立製作所 | floating magnetic head |
-
1986
- 1986-03-28 JP JP61071491A patent/JPH0643610B2/en not_active Expired - Lifetime
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| JPS62227035A (en) | 1987-10-06 |
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