JPH0645465B2 - Method for manufacturing optical glass element - Google Patents
Method for manufacturing optical glass elementInfo
- Publication number
- JPH0645465B2 JPH0645465B2 JP19506189A JP19506189A JPH0645465B2 JP H0645465 B2 JPH0645465 B2 JP H0645465B2 JP 19506189 A JP19506189 A JP 19506189A JP 19506189 A JP19506189 A JP 19506189A JP H0645465 B2 JPH0645465 B2 JP H0645465B2
- Authority
- JP
- Japan
- Prior art keywords
- processing jig
- glass
- heat processing
- optical
- optical glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Surface Treatment Of Glass (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、レンズやプリズム等の高精度な光学ガラス素
子および前記光学ガラス素子のリヒートプレス成形用素
材の光学ガラス成形体等の光学ガラス素子の製造方法に
関する。Description: TECHNICAL FIELD The present invention relates to the production of highly accurate optical glass elements such as lenses and prisms, and optical glass elements such as an optical glass molded body of a material for reheat press molding of the optical glass element. Regarding the method.
従来の技術 近年、光学ガラスレンズは光学機器のレンズ構成の簡略
化とレンズ部分の軽量化の両方を同時に達成しうる非球
面化の方向にある。この非球面レンズの製造にあたって
は、従来の光学レンズの製造方法である研磨法では、加
工および量産化が困難であり、金型を用いた成形法が有
望視されている。2. Description of the Related Art In recent years, optical glass lenses are in the direction of aspherical surface that can achieve both simplification of the lens structure of optical equipment and weight reduction of the lens portion at the same time. In manufacturing this aspherical lens, it is difficult to process and mass-produce it by a conventional polishing method which is a method of manufacturing an optical lens, and a molding method using a mold is considered promising.
この金型を用いた成形法というのは、予め所望の面品質
および面精度に仕上げた金型上に水酸化アルミニウム、
炭酸マグネシウム、カーボン等の離型剤を塗布あるいは
被覆した状態で、光学ガラスの塊状物を加熱成形する
か、あるいは溶融状態の光学ガラスの塊状物を加熱成形
を行なう方法である。(例えば、特公昭54−6031
2号公報) 発明が解決しようとする課題 非球面レンズ、プリズム等の光学ガラス素子の場合、欠
陥あるいは離型剤の付着のない表面、面粗度、および面
精度であることが要求されるため、光学ガラス素子およ
び前記光学ガラス素子のリヒートプレス成形用素材の光
学ガラス成形体は非常に高価なものになっていた。The molding method using this mold is that aluminum hydroxide is applied on the mold that has been finished to the desired surface quality and surface accuracy in advance,
This is a method in which a lump of optical glass is heat-molded or a lump of optical glass in a molten state is heat-molded in a state where a release agent such as magnesium carbonate or carbon is applied or covered. (For example, Japanese Patent Publication No. 54-6031
(2) The problem to be solved by the invention In the case of an optical glass element such as an aspherical lens or a prism, it is required to have a surface free from defects or release agent, surface roughness, and surface accuracy. The optical glass element and the optical glass molded body of the reheat press molding material for the optical glass element have become very expensive.
すなわち光学ガラス成形体の表面に欠陥がない状態(例
えば表面粗さRMSで0.005ミクロン以下の鏡面状態)
にするために、研磨またはエッチング処理を施す必要が
あり光学ガラス成形体が高価なものになっており、低コ
ストで高精度な光学ガラス成形体が製造できる方法の開
発が強く望まれていた。That is, there is no defect on the surface of the optical glass molded body (for example, mirror surface state with surface roughness RMS of 0.005 micron or less).
In order to achieve this, it is necessary to perform a polishing or etching treatment, and the optical glass molded body is expensive, and it has been strongly desired to develop a method capable of producing a highly accurate optical glass molded body at low cost.
課題を解決するための手段 本発明は前記課題を解決するために、非酸化性雰囲気中
で、所望の光学ガラス素子と近似形状でない第一の熱加
工治具で溶融ガラスを受けてガラスコブを作製する工
程、所望の光学ガラス素子と近似形状の第二の熱加工治
具に前記ガラスゴブを接着させた状態で前記ガラスゴブ
と第二の熱加工治具とを反転させて置換する工程、第二
の熱加工治具で熱軟化した前記ガラスゴブの表面張力に
より光学ガラス成形体を作製する工程、光学ガラス成形
体をプレス成形用金型で加熱加圧成形する工程とを含む
光学ガラス素子の製造方法を提供するものである。Means for Solving the Problems In order to solve the above problems, the present invention produces a glass cob by receiving molten glass in a non-oxidizing atmosphere with a first heat processing jig that does not have a shape similar to that of a desired optical glass element. A step of inverting and replacing the glass gob and the second heat processing jig in a state where the glass gob is bonded to a second heat processing jig having a similar shape to a desired optical glass element, A method for producing an optical glass element, which comprises a step of producing an optical glass molded body by the surface tension of the glass gob that is heat-softened by a heat processing jig, and a step of heating and pressing the optical glass molded body with a press molding die. It is provided.
作用 高温の溶融ガラスは化学的に極めて活性な状態にあるた
め、熱加工治具に非常に大きなダメージを与え、光学ガ
ラスと反応あるいは融着した。このことを防ぐために熱
加工治具を加熱せずに使用することは有効であるが、熱
加工治具と接したガラスゴブの接触面には熱収縮に起因
するしわ状の大きな欠陥が発生する。一方、熱加工治具
と接していないガラスゴブの表面は非常に平滑な面であ
った。Action Since high-temperature molten glass is in a chemically extremely active state, it caused a great deal of damage to the heat processing jig and reacted or fused with the optical glass. In order to prevent this, it is effective to use the heat processing jig without heating it, but large wrinkle-shaped defects due to heat shrinkage occur on the contact surface of the glass gob in contact with the heat processing jig. On the other hand, the surface of the glass gob not in contact with the heat processing jig was a very smooth surface.
熱加工治具と接したガラスゴブ表面のしわ状の欠陥を取
り除くために、溶融ガラスを所望の光学ガラス素子と近
似形状でない第一の熱加工治具で受けた後、ガラスゴブ
の平滑な面に所望の光学ガラス素子と近似形状の第二の
熱加工治具を接触させて、ガラスゴブを第二の熱加工治
具に付着させる。ガラスゴブが第二の熱加工治具に付着
した状態で第二の熱加工治具を反転させて、ガラスゴブ
を第一の熱加工治具から第二の熱加工治具に安定して置
換し、加熱した第二の熱加工治具でしわ状の面を上にし
たガラスゴブをガラスの表面張力により大変形を行う。
さらにこの光学ガラス成形体をプレス成形用金型で加熱
加圧成形することにより、表面に欠陥のない光学ガラス
素子を製造することができる。In order to remove wrinkle-like defects on the surface of the glass gob in contact with the heat processing jig, after receiving the molten glass with the first heat processing jig that does not have a shape similar to the desired optical glass element, the desired surface of the glass gob is desired. The glass gob is adhered to the second heat processing jig by bringing the optical glass element and the second heat processing jig having a similar shape into contact with each other. With the glass gob attached to the second thermal processing jig, reverse the second thermal processing jig to stably replace the glass gob from the first thermal processing jig to the second thermal processing jig, The glass gob having a wrinkled surface facing upward is largely deformed by the surface tension of the glass by the heated second heat processing jig.
Furthermore, the optical glass element having no surface defects can be manufactured by subjecting this optical glass molded article to heat and pressure molding with a press molding die.
溶融ガラスを直接受ける第一の熱加工治具は、溶融ガラ
スと濡れ性が悪く、離型性が優れている材料、例えばカ
ーボン,ボロンナイトライド,窒化アルミ,窒化クロ
ム,ステンレス鋼等が適している。また、第二の熱加工
治具及びプレス成形用金型に被覆する薄膜は、非酸化性
雰囲気中で光学ガラスと反応あるいはわずかに付着する
貴金属,タングステン,タンタル,レニウム,ハフニウ
ムの単体あるいはそれらの合金であることが望ましい。For the first heat processing jig that directly receives the molten glass, a material having poor wettability with the molten glass and excellent releasability, such as carbon, boron nitride, aluminum nitride, chromium nitride, and stainless steel, is suitable. There is. The thin film that covers the second heat-processing jig and the press-molding die is a simple substance of noble metal, tungsten, tantalum, rhenium, or hafnium that reacts with or slightly adheres to the optical glass in a non-oxidizing atmosphere, or their An alloy is desirable.
本発明において、光学ガラスとこれらの薄膜とが反応あ
るいは融着しない非酸化雰囲気は、窒素、アルゴン、ヘ
リウム等の不活性ガス、およびこれらの不活性ガスに水
素、あるいは一酸化炭素,二酸化炭素の炭素酸化物,メ
タン,エタン,エチレン,トルエン等の炭化水素類,ト
リクロロエチレン,トリクロルトリフルオルエタン等の
ハロゲン化炭化水素類,エチレングリコール,グリセリ
ン等のアルコール類,F−113,F−11等のフルオ
ロカーボン類を適宜混合したものである。In the present invention, the non-oxidizing atmosphere in which the optical glass and these thin films do not react or fuse with each other is an inert gas such as nitrogen, argon or helium, and hydrogen or carbon monoxide or carbon dioxide in these inert gases. Carbon oxides, hydrocarbons such as methane, ethane, ethylene and toluene, halogenated hydrocarbons such as trichloroethylene and trichlorotrifluoroethane, alcohols such as ethylene glycol and glycerin, fluorocarbons such as F-113 and F-11 It is a mixture of types.
これらの雰囲気は、光学ガラス組成,熱加工治具に被覆
する薄膜組成,熱変形の温度と時間,プレス成形の温度
と時間,あるいは光学ガラス成形体の形状等の条件によ
って適宜選択する。These atmospheres are appropriately selected depending on the conditions such as the optical glass composition, the thin film composition to be coated on the thermal processing jig, the temperature and time of thermal deformation, the temperature and time of press molding, the shape of the optical glass molded body and the like.
実施例 以下に本発明の一実施例を図面にもとづいて説明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
実施例1 第1図は本発明に用いた第一の熱加工治具、第二の熱加
工治具及びプレス成形用金型の断面図である。第一の熱
加工治具としてカーボンを使用し、平型に加工した。第
二の熱加工治具の母材として超硬合金(WC−5TiC
−8Co)を用いて曲率半径が15mmの凹形の光学面1
を形成した。この光学面1をさらに超微細なダイヤモン
ド粉末を用いてラッピングし、第1時間で表面の表面粗
さ(RMS)が約30Åの鏡面にした。鏡面となった熱
加工治具表面に、スパッタ法で白金−イリジウム−オス
ミウム合金(Pt−It−Os)の薄膜2を被覆した。
第二の熱加工治具と同様に母材として超硬合金(WC−
5TiC−8Co)を用いて曲率半径が20mmの凹形の
光学面1を形成し、スパッタ法で白金−イリジウム−オ
スミウム合金(Pt−Ir−Os)の薄膜2を被覆し、
プレス成形用金型とした。Example 1 FIG. 1 is a sectional view of a first heat processing jig, a second heat processing jig and a press molding die used in the present invention. Carbon was used as the first heat processing jig and processed into a flat shape. Cemented carbide (WC-5TiC) as the base material of the second heat processing jig
Concave optical surface 1 with a radius of curvature of 15 mm using -8Co)
Was formed. The optical surface 1 was further lapped with ultrafine diamond powder to make it a mirror surface having a surface roughness (RMS) of about 30Å in the first hour. A thin film 2 of platinum-iridium-osmium alloy (Pt-It-Os) was coated on the mirror-finished surface of the heat processing jig by a sputtering method.
As with the second heat processing jig, cemented carbide (WC-
5TiC-8Co) is used to form a concave optical surface 1 having a radius of curvature of 20 mm, and a platinum-iridium-osmium alloy (Pt-Ir-Os) thin film 2 is coated by sputtering.
The mold was used for press molding.
溶融ガラス14は、シリカ(SiO2)30重量パーセ
ント、酸化バリウム(BaO)50重量パーセント、ホ
ウ酸(B2O3)15重量パーセント、残部が微量成分
からなるホウケイ酸バリウムガラスを用いた。このガラ
スを1200℃で溶融したあと、800℃に保持したノ
ズル12から約3グラムの溶融ガラス14を窒素ガス2
0リッター/分、水素ガス2リッター/分の割合で混合
した雰囲気の成形機内に保持した第一の熱加工治具24
に滴下した。第一の熱加工治具24は予め200℃に加
熱しておき、滴下後直ちに溶融ガラス14に第二の熱加
工治具16を溶融させて第二の熱加工治具16に溶融ガ
ラス14を付着させた。溶融ガラス14の付着した第二
の熱加工治具16をアーム25によって反転させ、第二
の熱加工治具16に第2図のように溶融ガラス14を置
換した。第二の熱加工治具16で630℃、10分間熱
変形させたあと、プレス成形用金型20でプレス成形し
た。プレス成形条件は金型温度560℃、プレス圧力3
0Kg/cm2、プレス時間2分であった。その後300
℃まで徐冷し、取り出し口23から光学ガラス素子22
を取り出した。As the molten glass 14, 30% by weight of silica (SiO 2 ), 50% by weight of barium oxide (BaO), 15% by weight of boric acid (B 2 O 3 ), and barium borosilicate glass having the balance of trace components were used. After melting this glass at 1200 ° C., about 3 g of molten glass 14 was passed through the nozzle 12 kept at 800 ° C. and nitrogen gas 2
First heat processing jig 24 held in a molding machine in an atmosphere mixed with 0 liter / min and hydrogen gas 2 liter / min.
Was added dropwise. The first heat processing jig 24 is heated to 200 ° C. in advance, and immediately after the dropping, the second heat processing jig 16 is melted in the molten glass 14 and the molten glass 14 is transferred to the second heat processing jig 16. Attached. The second heat processing jig 16 having the molten glass 14 attached thereto was inverted by the arm 25, and the molten glass 14 was replaced with the second heat processing jig 16 as shown in FIG. After being thermally deformed by the second heat processing jig 16 at 630 ° C. for 10 minutes, it was press-molded by the press-molding die 20. Press molding conditions are mold temperature 560 ° C, press pressure 3
It was 0 Kg / cm 2 and the pressing time was 2 minutes. Then 300
Slowly cool to ℃, and take out the optical glass element 22 from the outlet 23
Took out.
このような工程によって作製した光学ガラス素子22に
おいて、プレス成形面の表面粗さ (RMS)は約25Åの光学的鏡面であり、気泡、傷、
あるいは剥離跡といった欠陥は認められず、面精度もニ
ュートンリング2本以内、アス5分の1本以内であり、
その光学性能は極めて優れていた。In the optical glass element 22 manufactured by such a process, the surface roughness (RMS) of the press-molded surface is an optical mirror surface of about 25Å, and bubbles, scratches,
Or, defects such as peeling marks are not recognized, and the surface accuracy is within 2 Newton rings and within 1/5 ass.
Its optical performance was extremely excellent.
実施例2 第一の熱加工治具としてボロンナイトライドを使用し、
曲率半径が45mmの凸形に加工した。第二の熱加工治具
の母材としてオーステナイト鋼(SUS316)を用い
て曲率半径が45mmの凹形の光学面1を形成した。この
光学面1をさらに超微細なダイヤモンド粉末を用いてラ
ッピングし、約1時間で表面の表面粗さ(RMS)が約
30Åの鏡面にした。鏡面となった熱加工治具表面に、
スパッタ法で白金−イリジウム−オスミウム合金(Pt
−Ir−Os)の薄膜2を被覆した。第二の熱加工治具
と同様に母材としてオーステナイト鋼(SUS316)
を用いて曲率半径が150mmの凹形の光学面1を形成
し、スパッタ法でロジウム−金−タングステン合金(R
h−Au−W)の薄膜2を被覆し、プレス成形用金型と
した。Example 2 Using boron nitride as the first thermal processing jig,
It was processed into a convex shape with a radius of curvature of 45 mm. A concave optical surface 1 having a radius of curvature of 45 mm was formed using austenitic steel (SUS316) as a base material of the second heat processing jig. The optical surface 1 was further lapped with ultrafine diamond powder to make it a mirror surface having a surface roughness (RMS) of about 30Å in about 1 hour. On the surface of the heat processing jig that became a mirror surface,
Platinum-iridium-osmium alloy (Pt
-Ir-Os) thin film 2 was coated. Austenitic steel (SUS316) as a base material similar to the second heat processing jig
Is used to form a concave optical surface 1 having a radius of curvature of 150 mm, and a rhodium-gold-tungsten alloy (R
h-Au-W) thin film 2 was coated to obtain a press-molding die.
溶融ガラス14は、ジルコニア(ZrO2)8重量パー
セント、酸化ランタン(La2O3)30重量パーセン
ト、ホウ酸(B2O3)42重量パーセント、酸化カル
シウム(CaO)10重量パーセント、残部が微量成分
からなるランタン系ガラスを用いた。このガラスを14
00℃で溶融したあと、950℃に保持したノズル12
から約3グラムの溶融ガラス14を窒素ガス20リッタ
ー/分、トリクロルトリフルオルエタン(C2Cl3F
3)ガス1リッター/分の割合で混合したハロゲン化炭
化水素雰囲気の成形機内に保持した第一の熱加工治具2
4に滴下した。第一の熱加工治具24は予め400℃に
加熱しておき、滴下後直ちに溶融ガラス14に第二の熱
加工治具16を接触させて第二の熱加工治具24に溶融
ガラス14を付着させた。溶融ガラス14の付着した第
二の熱加工治具16をアーム25によって反転させ、第
二の熱加工治具16に第2図のように溶融ガラス14を
置換した。第二の熱加工治具16で780℃、20分間
熱変形させたあと、プレス成形用金型20でプレス成形
した。プレス成形条件は金型温度680℃、プレス圧力
30Kg/cm2、プレス時間2分であった。その後40
0℃まで徐冷し、取り出し口23から光学ガラス素子2
2を取り出した。The molten glass 14 contains zirconia (ZrO 2 ) 8% by weight, lanthanum oxide (La 2 O 3 ) 30% by weight, boric acid (B 2 O 3 ) 42% by weight, calcium oxide (CaO) 10% by weight, and the balance being trace amount. A lanthanum-based glass composed of the components was used. This glass 14
Nozzle 12 held at 950 ° C after melting at 00 ° C
From about 3 grams of molten glass 14 to 20 liters / minute of nitrogen gas, trichlorotrifluoroethane (C 2 Cl 3 F
3 ) First heat processing jig 2 held in a molding machine in a halogenated hydrocarbon atmosphere mixed with gas at a rate of 1 liter / min.
4 was added dropwise. The first heat processing jig 24 is heated to 400 ° C. in advance, and immediately after the dropping, the second heat processing jig 16 is brought into contact with the molten glass 14 so that the second heat processing jig 24 receives the molten glass 14. Attached. The second heat processing jig 16 having the molten glass 14 attached thereto was inverted by the arm 25, and the molten glass 14 was replaced with the second heat processing jig 16 as shown in FIG. After being thermally deformed at 780 ° C. for 20 minutes by the second heat processing jig 16, it was press-molded by the press-molding die 20. The press molding conditions were a mold temperature of 680 ° C., a pressing pressure of 30 kg / cm 2 , and a pressing time of 2 minutes. Then 40
The glass is gradually cooled to 0 ° C., and the optical glass element 2 is taken out from the outlet 23
2 was taken out.
このような工程によって作製した光学ガラス素子22に
おいて、プレス成形面の表面粗さ (RMS)は約20Åの光学的鏡面であり、気泡、傷、
あるいは剥離跡といった欠陥は認められず、面精度もニ
ュートンリング2本以内、アス5分の1本以内であり、
その光学性能は極めて優れていた。In the optical glass element 22 manufactured by such a process, the surface roughness (RMS) of the press-molded surface is an optical mirror surface of about 20Å, and bubbles, scratches,
Or, defects such as peeling marks are not recognized, and the surface accuracy is within 2 Newton rings and within 1/5 ass.
Its optical performance was extremely excellent.
実施例3 第一の熱加工治具として窒化アルミを使用し、曲率半径
が200mmの凸形に加工した。第二の熱加工治具の母材
としてサーメット(TiC-10Mo-9Ni)を用いて曲率半径が
200mmの凹形の光学面1を形成した。この光学面1を
さらに超微細なダイヤモンド粉末を用いてラッピング
し、約1時間で表面の表面粗さ(RMS)が約30Åの
鏡面にした。鏡面となった熱加工治具表面に、スパッタ
法で白金−タンタル−レニウム合金(Pt−Ta−R
e)の薄膜2を被覆した。第二の熱加工治具と同様に母
材としてサーメット(TiC−10Mo−9Ni)を用
いて曲率半径が500mmの凹形の光学面1を形成し、ス
パッタ法で白金−タンタル−レニウム合金(Pt−Ta
−Re)の薄膜2を被覆し、プレス成形用金型とした。Example 3 Aluminum nitride was used as the first heat processing jig, and it was processed into a convex shape with a radius of curvature of 200 mm. A concave optical surface 1 having a radius of curvature of 200 mm was formed by using cermet (TiC-10Mo-9Ni) as a base material of the second heat processing jig. The optical surface 1 was further lapped with ultrafine diamond powder to make it a mirror surface having a surface roughness (RMS) of about 30Å in about 1 hour. Platinum-tantalum-rhenium alloy (Pt-Ta-R
The thin film 2 of e) was coated. Similar to the second heat processing jig, cermet (TiC-10Mo-9Ni) was used as a base material to form a concave optical surface 1 having a radius of curvature of 500 mm, and a platinum-tantalum-rhenium alloy (Pt) was formed by a sputtering method. -Ta
-Re) thin film 2 was coated to obtain a press molding die.
溶融ガラス14は、シリカ(SiO2)65重量パーセ
ント、酸化カリウム(K2O)9重量パーセント、ホウ
酸(B2O3)10重量パーセント、酸化ナトリウム
(Na2O)10重量パーセント、残部が微量成分から
なるホウケイ酸ガラスを用いた。The molten glass 14 comprises 65 weight percent silica (SiO 2 ), 9 weight percent potassium oxide (K 2 O), 10 weight percent boric acid (B 2 O 3 ), 10 weight percent sodium oxide (Na 2 O), and the balance being Borosilicate glass consisting of trace components was used.
このガラスを1350℃で溶融したあと、 920℃に保持したノズル12から約3グラムの溶融ガ
ラス14をアルゴンガス20リッター/分、エチレン
(C2H4)1リッター/分の割合で混合した炭化水素
雰囲気の成形機内に保持した第一の熱加工治具24に滴
下した。第一の熱加工治具24は予め550℃に加熱し
ておき、滴下後直ちに溶融ガラス14に第二の熱加工治
具16を接触させて第二の熱加工治具16に溶融ガラス
14を付着させた。溶融ガラス14の付着した第二の熱
加工治具16をアーム25によって反転させ、第二の熱
加工治具16に第2図のように溶融ガラス14を置換し
た。第二の熱加工治具16で780℃、5分間熱変形さ
せたあと、プレス成形用金型20でプレス成形した。プ
レス成形条件は金型温度680℃、プレス圧力80Kg
/cm2、プレス時間1分であった。その後380℃まで
徐冷し、取り出し口23から光学ガラス素子22を取り
出した。After melting this glass at 1350 ° C., about 3 g of molten glass 14 was mixed from the nozzle 12 kept at 920 ° C. at a rate of 20 liters / minute of argon gas and 1 liter / minute of ethylene (C 2 H 4 ). It was dropped onto the first thermal processing jig 24 held in the molding machine in a hydrogen atmosphere. The first heat processing jig 24 is preheated to 550 ° C., and the molten glass 14 is brought into contact with the second heat processing jig 16 immediately after the dropping, so that the second heat processing jig 16 is exposed to the molten glass 14. Attached. The second heat processing jig 16 having the molten glass 14 attached thereto was inverted by the arm 25, and the molten glass 14 was replaced with the second heat processing jig 16 as shown in FIG. After being thermally deformed by the second heat processing jig 16 at 780 ° C. for 5 minutes, press molding was performed by the press molding die 20. Press molding conditions are mold temperature 680 ° C., press pressure 80 kg.
/ Cm 2 , and the pressing time was 1 minute. After that, it was gradually cooled to 380 ° C., and the optical glass element 22 was taken out from the take-out port 23.
このような工程によって作製した光学ガラス素子22に
おいて、プレス成形面の表面粗さ (RMS)は約20Åの光学的鏡面であり、気泡、傷、
あるいは剥離跡といった欠陥は認められず、面精度もニ
ュートンリング2本以内、アス5分の1本以内であり、
その光学性能は極めて優れていた。In the optical glass element 22 manufactured by such a process, the surface roughness (RMS) of the press-molded surface is an optical mirror surface of about 20Å, and bubbles, scratches,
Or, defects such as peeling marks are not recognized, and the surface accuracy is within 2 Newton rings and within 1/5 ass.
Its optical performance was extremely excellent.
実施例4 第一の熱加工治具としてマルテンサイト系ステンレス鋼
(SUS420)を使用し、平型に加工した。第二の熱
加工治具の母材としてシリコンを用いて曲率半径が55
mmの凹形の光学面1を形成した。この光学面1をさらに
超微細なダイヤモンド粉末を用いてラッピングし、約1
時間で表面の表面粗さ(RMS)が約20Åの鏡面にし
た。鏡面となった熱加工治具表面に、スパッタ法でロジ
ウム−金−タングステン合金(Rh−Au−W)の薄膜
2を被覆した。第二の熱加工治具と同様に母材としてシ
リコンを用いて曲率半径が100mmの凹形の光学面1を
形成し、スパッタ法でロジウム−金−タングステン合金
(Rh−Au−W)の薄膜2を被覆し、プレス成形用金
型とした。Example 4 Martensite stainless steel (SUS420) was used as the first heat processing jig, and processed into a flat shape. Silicon was used as the base material of the second heat processing jig, and the radius of curvature was 55.
A concave optical surface 1 of mm was formed. The optical surface 1 was lapped with ultrafine diamond powder to obtain about 1
The surface had a surface roughness (RMS) of about 20Å. The thin film 2 of rhodium-gold-tungsten alloy (Rh-Au-W) was coated on the mirror-finished surface of the thermal processing jig by a sputtering method. Similar to the second heat processing jig, a concave optical surface 1 having a radius of curvature of 100 mm is formed by using silicon as a base material, and a thin film of rhodium-gold-tungsten alloy (Rh-Au-W) is formed by a sputtering method. 2 was coated to obtain a press molding die.
溶融ガラス14は、シリカ(SiO2)52重量パーセ
ント、酸化カリウム(K2O)6重量パーセント、酸化
鉛(PbO)35重量パーセント、酸化ナトリウム(N
a2O)5重量パーセント、残部が微量成分からなる重
フリントガラスを用いた。The molten glass 14 contains 52 weight percent silica (SiO 2 ), 6 weight percent potassium oxide (K 2 O), 35 weight percent lead oxide (PbO), and sodium oxide (N
a 2 O) 5% by weight, the balance being a heavy flint glass consisting of trace components.
このガラスを1250℃で溶融したあと、 750℃に保持したノズル12から約5グラムの溶融ガ
ラス14をヘルウムガラス20リッター/分、二酸化炭
素ガス2リッター/分の割合で混合した雰囲気の成形機
内に保持した第一の熱加工治具24に滴下した。第一の
熱加工治具24は加熱せずにおき、滴下後直ちに溶融ガ
ラス14に第二の熱加工治具16を接触させて第二の熱
加工治具16に溶融ガラス14を付着させた。溶融ガラ
ス14の付着した第二の熱加工治具16をアーム25に
よって反転させ、第二の熱加工治具16に第2図のよう
に溶融ガラス14を置換した。第二の熱加工治具16で
610℃、5分間熱変形させたあと、プレス成形用金型
20でプレス成形した。プレス成形条件は金型温度55
0℃、プレス圧力80Kg/cm2、プレス時間1分であ
った。その後380℃まで徐冷し、取り出し口23から
光学ガラス素子22を取り出した。After melting this glass at 1250 ° C, from the nozzle 12 kept at 750 ° C, about 5 g of molten glass 14 was held in a molding machine in an atmosphere in which Helium glass was mixed at a rate of 20 liters / minute and carbon dioxide gas was 2 liters / minute. The first heat processing jig 24 was dropped. The first heat processing jig 24 was left without heating, the second heat processing jig 16 was brought into contact with the molten glass 14 immediately after dropping, and the molten glass 14 was attached to the second heat processing jig 16. . The second heat processing jig 16 having the molten glass 14 attached thereto was inverted by the arm 25, and the molten glass 14 was replaced with the second heat processing jig 16 as shown in FIG. After being thermally deformed at 610 ° C. for 5 minutes by the second heat processing jig 16, it was press-molded by the press-molding die 20. Press molding conditions are mold temperature 55
The temperature was 0 ° C., the pressure was 80 kg / cm 2 , and the pressing time was 1 minute. After that, it was gradually cooled to 380 ° C., and the optical glass element 22 was taken out from the take-out port 23.
このような工程によって作製した光学ガラス素子22に
おいて、プレス成形面の表面粗さ (RMS)は約20Åの光学的鏡面であり、気泡、傷、
あるいは剥離跡といった欠陥は認められず、面精度もニ
ュートンリング2本以内、アス5分の1本以内であり、
その光学性能は極めて優れていた。In the optical glass element 22 manufactured by such a process, the surface roughness (RMS) of the press-molded surface is an optical mirror surface of about 20Å, and bubbles, scratches,
Or, defects such as peeling marks are not recognized, and the surface accuracy is within 2 Newton rings and within 1/5 ass.
Its optical performance was extremely excellent.
なお本発明の光学ガラス素子の製造方法は、非酸化性雰
囲気中で、所望の光学ガラス素子と近似形状でない第一
の熱加工治具で溶融ガラスを受けてガラスゴブを作製す
る工程、所望の光学ガラス素子と近似形状の第二の熱加
工治具に前記ガラスゴブを接着させた状態で前記ガラス
ゴブと第二の熱加工治具とを反転させて置換する工程、
第二の熱加工治具で熱軟化した前記ガラスゴブの表面張
力により光学ガラス成形体を作製する工程、光学ガラス
成形体をプレス成形用金型で加熱加圧成形する工程を含
む光学ガラス素子の製造方法であることを特徴とするも
のであり、成形の雰囲気、光学ガラス組成、熱加工治具
に被覆する薄膜組成、熱変形の温度と時間、あるいは光
学ガラス成形体の形状等の条件は本実施例に限定される
ものではない。The method for producing an optical glass element of the present invention is a step of producing a glass gob by receiving molten glass in a non-oxidizing atmosphere with a first heat processing jig that does not have a shape similar to that of the desired optical glass element. A step of inverting and replacing the glass gob and the second heat processing jig in a state where the glass gob is bonded to a second heat processing jig having a glass element and an approximate shape;
Manufacture of an optical glass element including a step of producing an optical glass molded body by the surface tension of the glass gob heat-softened by a second heat processing jig, and a step of heating and pressing the optical glass molded body with a press molding die. This method is characterized in that the molding atmosphere, the optical glass composition, the thin film composition for coating the thermal processing jig, the temperature and time of thermal deformation, the shape of the optical glass molded body, etc. It is not limited to the example.
発明の効果 以上説明したように、本発明の光学ガラス素子の製造方
法は、熱加工治具と接したガラスゴブ表面のしわ状の欠
陥を取り除くために、溶融ガラスを所望の光学ガラス素
子と近似形状でない第一の熱加工治具で受けた後、ガラ
スゴブの平滑な面に所望の光学ガラス素子と近似形状の
第二の熱加工治具を接触させて、ガラスゴブを第二の熱
加工治具に付着させる。ガラスコブが第二の熱加工治具
に付着した状態で第二の熱加工治具を反転させて、ガラ
スゴブを第一の熱加工治具から第二の熱加工治具に安定
して置換し、加熱した第二の熱加工治具でしわ状の面を
上にしたガラスゴブをガラスの表面張力により大変形を
行う。さらにこの光学ガラス成形体をプレス成形用金型
で加熱加圧成形することにより、表面に欠陥のない光学
ガラス素子を製造することができる。Effects of the Invention As described above, the method for producing an optical glass element of the present invention, in order to remove the wrinkle-like defects on the surface of the glass gob that is in contact with the heat processing jig, the molten glass is approximated to the desired optical glass element. After receiving with the first heat processing jig, contact the smooth surface of the glass gob with the desired optical glass element and the second heat processing jig of similar shape, and use the glass gob as the second heat processing jig. Attach it. With the glass cob attached to the second thermal processing jig, reverse the second thermal processing jig to stably replace the glass gob with the second thermal processing jig from the first thermal processing jig, The glass gob having a wrinkled surface facing upward is largely deformed by the surface tension of the glass by the heated second heat processing jig. Furthermore, the optical glass element having no surface defects can be manufactured by subjecting this optical glass molded article to heat and pressure molding with a press molding die.
すなわち、本発明によって高精度な光学ガラス素子の大
量生産が可能になり、生産性の向上と製造コストの低減
に著しい効果がある。That is, the present invention enables mass production of highly accurate optical glass elements, and has a remarkable effect in improving productivity and reducing manufacturing cost.
第1図(a)は本発明を説明するための第一の熱加工治具
の説明図、第1図(b)は本発明を説明するための第二の
熱加工治具の説明図、第1図(c)はプレス成形用金型の
断面図、第2図は光学ガラス素子の製造装置を示す本発
明実施例の断面図である。 1……光学面、2……薄膜、10……ガラス溶融炉、1
1……加熱ヒータ、12……ノズル、13……ノズル加
熱ヒータ、14……溶融ガラス、15……加熱ヒータ、
16……第二の熱加工治具、17……ガス入口、18…
…光学ガラス成形体、19……プレスシリンダ、20…
…プレス成形用金型、21……コンベア、22……光学
ガラス素子、23……取り出し口、24……第1の熱加
工治具、25……アーム。FIG. 1 (a) is an explanatory view of a first thermal processing jig for explaining the present invention, and FIG. 1 (b) is an explanatory view of a second thermal processing jig for explaining the present invention. FIG. 1 (c) is a sectional view of a press-molding die, and FIG. 2 is a sectional view of an embodiment of the present invention showing an optical glass element manufacturing apparatus. 1 ... Optical surface, 2 ... Thin film, 10 ... Glass melting furnace, 1
1 ... Heating heater, 12 ... Nozzle, 13 ... Nozzle heating heater, 14 ... Molten glass, 15 ... Heating heater,
16 ... Second heat processing jig, 17 ... Gas inlet, 18 ...
… Optical glass molding, 19 …… Press cylinder, 20…
... press molding die, 21 ... conveyor, 22 ... optical glass element, 23 ... outlet, 24 ... first heat processing jig, 25 ... arm.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 米本 忠孝 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 川田 紀行 埼玉県大宮市東大宮5丁目19番地24号 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tadataka Yonemoto 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (4)
子と近似形状でない第一の熱加工治具で溶融ガラスを受
けてガラスゴブを作製する工程、所望の光学ガラス素子
と近似形状の第二の熱加工治具に前記ガラスゴブを接着
させた状態で前記ガラスゴブと第二の熱加工治具とを反
転させて置換する工程、第二の熱加工治具で熱軟化した
前記ガラスゴブの表面張力により光学ガラス成形体を作
製する工程、光学ガラス成形体をプレス成形用金型で加
熱加圧成形する工程とを含む光学ガラス素子の製造方
法。1. A step of producing a glass gob by receiving molten glass with a first heat processing jig which is not in a shape similar to that of a desired optical glass element in a non-oxidizing atmosphere, A step of inverting and replacing the glass gob and the second heat processing jig in a state where the glass gob is adhered to the second heat processing jig, the surface tension of the glass gob thermally softened by the second heat processing jig And a step of heating and pressing the optical glass molded body with a press-molding die to produce an optical glass molded body.
悪い請求項(1)記載の光学ガラス素子の製造方法。2. The method for producing an optical glass element according to claim 1, wherein the first heat processing jig has poor wettability with the molten glass.
が、所望の形状および光学面に加工され、かつ溶融ガラ
スと濡れ性が良く化学的に安定な薄膜で被覆された請求
項(1)記載の光学ガラス素子の製造方法。3. The second heat-processing jig and press-molding die are processed into a desired shape and optical surface and are covered with a thin film which has good wettability with molten glass and is chemically stable. (1) The method for producing an optical glass element described in (1).
レニウム、ハフニウムの単体あるいはそれらの合金であ
る請求項(3)記載の光学ガラス素子の製造方法。4. The thin film is a noble metal, tungsten, tantalum,
The method for producing an optical glass element according to claim (3), which is a simple substance of rhenium or hafnium or an alloy thereof.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19506189A JPH0645465B2 (en) | 1989-07-26 | 1989-07-26 | Method for manufacturing optical glass element |
| US07/549,437 US5087279A (en) | 1989-07-14 | 1990-07-06 | Method of producing optical glass element and production apparatus using this method |
| DE69023286T DE69023286T2 (en) | 1989-07-14 | 1990-07-13 | Process for producing an optical glass element and apparatus for carrying out this process. |
| EP90113470A EP0408065B1 (en) | 1989-07-14 | 1990-07-13 | Method of producing optical glass element and production apparatus using this method |
| US07/789,755 US5120343A (en) | 1989-07-14 | 1991-11-08 | Apparatus for producing optical glass element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19506189A JPH0645465B2 (en) | 1989-07-26 | 1989-07-26 | Method for manufacturing optical glass element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360435A JPH0360435A (en) | 1991-03-15 |
| JPH0645465B2 true JPH0645465B2 (en) | 1994-06-15 |
Family
ID=16334908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19506189A Expired - Fee Related JPH0645465B2 (en) | 1989-07-14 | 1989-07-26 | Method for manufacturing optical glass element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645465B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5762673A (en) * | 1997-01-24 | 1998-06-09 | Hoya Precision Inc. | Method of manufacturing glass optical elements |
-
1989
- 1989-07-26 JP JP19506189A patent/JPH0645465B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0360435A (en) | 1991-03-15 |
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