JPH0696458B2 - Optical glass molding and molding method thereof - Google Patents
Optical glass molding and molding method thereofInfo
- Publication number
- JPH0696458B2 JPH0696458B2 JP1007249A JP724989A JPH0696458B2 JP H0696458 B2 JPH0696458 B2 JP H0696458B2 JP 1007249 A JP1007249 A JP 1007249A JP 724989 A JP724989 A JP 724989A JP H0696458 B2 JPH0696458 B2 JP H0696458B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical glass
- processing jig
- molding
- molded body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000005304 optical glass Substances 0.000 title claims description 67
- 238000000034 method Methods 0.000 title claims description 24
- 238000000465 moulding Methods 0.000 title claims description 24
- 230000003287 optical effect Effects 0.000 claims description 38
- 239000010409 thin film Substances 0.000 claims description 28
- 239000011521 glass Substances 0.000 claims description 17
- 230000001590 oxidative effect Effects 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 229910052735 hafnium Inorganic materials 0.000 claims description 5
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 5
- 229910000510 noble metal Inorganic materials 0.000 claims description 5
- 229910052702 rhenium Inorganic materials 0.000 claims description 5
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- 230000003746 surface roughness Effects 0.000 description 14
- 230000007547 defect Effects 0.000 description 11
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 3
- 239000004327 boric acid Substances 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 229910001080 W alloy Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- SUKVCQODWJHLJU-UHFFFAOYSA-N [W].[Au].[Rh] Chemical compound [W].[Au].[Rh] SUKVCQODWJHLJU-UHFFFAOYSA-N 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- FZFYOUJTOSBFPQ-UHFFFAOYSA-M dipotassium;hydroxide Chemical compound [OH-].[K+].[K+] FZFYOUJTOSBFPQ-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000008282 halocarbons Chemical class 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 2
- 239000001095 magnesium carbonate Substances 0.000 description 2
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000820 Os alloy Inorganic materials 0.000 description 1
- 229910002835 Pt–Ir Inorganic materials 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- DYCKMDCRYZZTOV-UHFFFAOYSA-N [Os].[Ir].[Pt] Chemical compound [Os].[Ir].[Pt] DYCKMDCRYZZTOV-UHFFFAOYSA-N 0.000 description 1
- IDYCSJCRFJSSQA-UHFFFAOYSA-N [Ta].[Re].[Pt] Chemical compound [Ta].[Re].[Pt] IDYCSJCRFJSSQA-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000005308 flint glass Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、レンズやプリズム等の高精度な光学ガラス素
子および前記光学ガラス素子のリヒートプレス成形用素
材の光学ガラス成形体およびその成形方法並びにその方
法に用いる熱加工治具に関する。Description: TECHNICAL FIELD The present invention relates to a highly accurate optical glass element such as a lens or prism, an optical glass molded body of a material for reheat press molding of the optical glass element, a molding method thereof and a method thereof. The present invention relates to a heat processing jig used for.
従来の技術 近年、光学ガラスレンズは光学機器のレンズ構の簡略化
とレンズ部分の軽量化の両方を同時に達成しうる非球面
化の方向にある。この非球面レンズの製造にあっては、
従来の光学レンズの製造方法である研磨法では、加工お
よび量産化が困難であり、金型を用いて成形法が有望視
されている。2. Description of the Related Art In recent years, optical glass lenses are in the direction of aspherical surface that can achieve both simplification of the lens structure of optical equipment and weight reduction of the lens portion at the same time. In manufacturing this aspherical lens,
It is difficult to process and mass-produce by the conventional polishing method which is a method of manufacturing an optical lens, and a molding method using a mold is considered promising.
この金型を用いて成形法というのは、予め所望の面品質
および面精度に仕上げた金型上に水酸化アルミニウム，
炭酸マグネシウム，カーボン等の離型剤を塗布あるいは
被覆した状態で、光学ガラスの塊状物を加熱成形する
か、あるいは溶融状態の光学ガラスの塊状物を加熱成形
を行なう方法である（例えば、特公昭54−60312号公
報）。The molding method using this mold is to make aluminum hydroxide on a mold that has been finished to the desired surface quality and surface accuracy in advance.
This is a method in which a lump of optical glass is heat-molded or a lump of optical glass in a molten state is heat-molded in a state where a release agent such as magnesium carbonate or carbon is applied or covered (for example, Japanese Patent Publication No. 54-60312).
発明が解決しようとする課題 非球面レンズ，プリズム等の光学ガラス素子の場合、欠
陥あるいは離型剤の付着のない表面，面粗度および面精
度であることが要求されるため、光学ガラス素子および
前記光学ガラス素子のリヒートプレス成形用素材の光学
ガラス成形体は非常に高価なものになっていた。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention In the case of an optical glass element such as an aspherical lens or a prism, it is required that the surface, surface roughness and surface accuracy are free from defects or the release agent is adhered to. The optical glass molded body of the reheat press molding material for the optical glass element has become very expensive.
すなわち光学ガラス成形体の表面に欠陥がない状態（例
えば表面粗さRMSで0.005ミクロン以下の鏡面状態）にす
るために、研磨またはエッチング処理を施す必要があり
化学ガラス成形体が高価なものになっており、低コスト
で高精度な光学ガラス成形体が製造できる方法の開発が
強く望まれていた。That is, in order to make the surface of the optical glass molding free from defects (for example, a mirror surface condition with a surface roughness RMS of 0.005 micron or less), it is necessary to perform polishing or etching treatment, which makes the chemical glass molding expensive. Therefore, it has been strongly desired to develop a method capable of producing a highly accurate optical glass molded body at low cost.
課題を解決するための手段 本発明は前記課題を解決するために、一面が化学的に安
定な薄膜で被覆された１つの熱加工治具の光学面の転写
面であり、他面が自由表面である光学ガラス成形体およ
び非酸化性雰囲気中で、化学的に安定な薄膜で被覆され
た熱加工治具の光学面上でガラス塊を熱変形させた光学
ガラス成形体の成形方法並びに該方法に用いる化学的に
安定な薄膜で被覆され、かつ所望の形状および光学面を
有した熱加工治具を提供するものである。Means for Solving the Problems In order to solve the above problems, the present invention is a transfer surface of an optical surface of one thermal processing jig, one surface of which is coated with a chemically stable thin film, and the other surface is a free surface. And a method for molding an optical glass molded body in which a glass gob is thermally deformed on the optical surface of a thermal processing jig coated with a chemically stable thin film in a non-oxidizing atmosphere The present invention provides a thermal processing jig which is coated with a chemically stable thin film and has a desired shape and optical surface.
熱加工治具に被覆する薄膜は、非酸化性雰囲気中で光学
ガラスと反応あるいは融着しない貴金属，タングステ
ン，タンタル，レニウム，ハフニウムの単体あるいはそ
れらの合金であることが望ましい。The thin film coated on the thermal processing jig is preferably a simple substance of noble metal, tungsten, tantalum, rhenium, hafnium or an alloy thereof which does not react or fuse with the optical glass in a non-oxidizing atmosphere.
作用 従来熱加工治具を用いた成形法というのは、予め所望の
面品質および面精度に仕上げた熱加工治具に水酸化アル
ミニウム，炭酸マグネシウム，カーボン等の離型剤を塗
布あるいは被覆していたため、光学ガラス成形体の表面
に離型剤が異物として残り、光学ガラス成形体の光学面
の品質に大きな問題があった。The conventional molding method using a heat processing jig is to apply or coat a release agent such as aluminum hydroxide, magnesium carbonate, or carbon to a heat processing jig that has been finished to the desired surface quality and surface accuracy in advance. Therefore, the release agent remains as a foreign substance on the surface of the optical glass molded body, and there is a big problem in the quality of the optical surface of the optical glass molded body.
この問題を解決するために光学ガラスと反応あるいは融
着しない薄膜（貴金属，タングステン，タンタル，レニ
ウム，ハフニウムの単体あるいはそれらの合金）を熱加
工治具に被覆することを考案した。これらの薄膜は空気
中で高温の光学ガラス塊を熱変形させた場合、光学ガラ
ス塊とこれらの薄膜とがぬれやすくなり光学ガラスと反
応あるいは融着した。しかしながらこれらの薄膜を被覆
した熱加工治具を非酸化性雰囲気中で使用した結果、化
学ガラス塊とこれらの薄膜とがぬれにくくなり光学ガラ
スと反応あるいは融着しないことを見いだした。In order to solve this problem, we devised to coat the thermal processing jig with a thin film (noble metal, tungsten, tantalum, rhenium, hafnium or their alloys) that does not react or fuse with the optical glass. When the high temperature optical glass block was thermally deformed in air, these thin films were easily wetted with the optical glass block and reacted or fused with the optical glass. However, as a result of using a heat processing jig coated with these thin films in a non-oxidizing atmosphere, it was found that the chemical glass lump and these thin films are hard to wet and do not react or fuse with the optical glass.
本発明において、光学ガラス塊とこれらの薄膜とがぬれ
にくい非酸化性雰囲気は、窒素，アルゴン，ヘリウム等
の不活性ガスに水素、あるいは一酸化炭素，二酸化炭素
の炭素酸化物，メタン，エタン，エチレン，トルエン等
の炭化水素類，トリクロロエチレン，トリクロルトリフ
ルオルエタン等のハロゲン化炭化水素類，エチレングリ
コール，グリセリン等のアルコール類、Ｆ−113,F−11
等のフルオロカーボン類を適宜混合したものであった。In the present invention, the non-oxidizing atmosphere in which the optical glass lump and these thin films are hard to wet is hydrogen, or carbon monoxide, carbon dioxide of carbon dioxide, methane, ethane, etc. in an inert gas such as nitrogen, argon, or helium. Hydrocarbons such as ethylene and toluene, halogenated hydrocarbons such as trichloroethylene and trichlorotrifluoroethane, alcohols such as ethylene glycol and glycerin, F-113, F-11
It was a mixture of such fluorocarbons.
これらの雰囲気は、光学ガラス組成、熱加工治具に被覆
する薄膜組成、熱変形の温度と時間、あるいは光学ガラ
ス成形体の形状等の条件によて適宜選択する。These atmospheres are appropriately selected depending on conditions such as the optical glass composition, the thin film composition for coating the thermal processing jig, the temperature and time of thermal deformation, the shape of the optical glass molded body, and the like.
このように化学的に安定しな薄膜で被覆された熱加工治
具の光学面上でガラス塊を熱変形させると、一面が熱加
工治具の光学面の転写面であり、他面が自由表面である
光学ガラス成形体を得ることができる。When the glass gob is thermally deformed on the optical surface of the heat processing jig coated with such a chemically stable thin film, one surface is the transfer surface of the optical surface of the heat processing jig and the other surface is free. An optical glass molded body that is the surface can be obtained.
実施例 以下本発明の一実施例について、図面を用いて、詳細に
説明する。Embodiment One embodiment of the present invention will be described in detail below with reference to the drawings.
実施例１ 第１図は本発明に用いた熱加工治具の断面図である。熱
加工治具の母材として超硬合金（WC−5TiC−8Co）を用
いて曲率半径が20mmの凹形の光学面１を形成した。この
光学面１をさらに超微細なダイヤモンド粉末を用いてラ
ッピングし、約１時間で表面の表面粗さ（RMS）が約30
Åの鏡面にした。鏡面となった熱加工治具表面に、スッ
パッタ法で白金−イリジウム−オスミウム合金（Pt−Ir
−Os）の薄膜２を被覆して光学ガラス成形体の熱加工治
具を作製した。Example 1 FIG. 1 is a sectional view of a thermal processing jig used in the present invention. A concave optical surface 1 having a radius of curvature of 20 mm was formed using cemented carbide (WC-5TiC-8Co) as the base material of the heat processing jig. The optical surface 1 was lapped with ultrafine diamond powder, and the surface roughness (RMS) was about 30 in about 1 hour.
I made it a mirror surface of Å. Platinum-iridium-osmium alloy (Pt-Ir
-Os) thin film 2 was coated to prepare a thermal processing jig for an optical glass molded body.
光学ガラス塊３は、シリカ（SiO2）30重量パーセント、
酸化バリウム（BaO）50重量パーセント、ホウ酸（B
2O3）15重量パーセント、残部が微量成分からなるホウ
ケイ酸バリウムガラスを用いた。このガラスを1200℃で
溶融したあと、ノズル温度800℃で３グラムの光学ガラ
ス塊３を窒素ガス20リッター／分、水素ガス２リッター
／分の割合で混合した雰囲気の成形機内に保持した上記
の熱加工治具に滴下した。熱加工治具は予め640℃に加
熱しておき、第２図のように光学ガラス塊３を熱化工治
具に載せて10分間熱変形させたあと、直ちに徐冷炉にい
れて徐冷し300℃で取り出して第３図に示した形状の光
学ガラス成形体を得た。The optical glass gob 3 is composed of 30% by weight of silica (SiO 2 ),
50 weight percent barium oxide (BaO), boric acid (B
2 barium borosilicate glass containing 15% by weight of 2 O 3 ) and the balance being trace components was used. This glass was melted at 1200 ° C, and then held at a nozzle temperature of 800 ° C in a molding machine in an atmosphere in which 3 g of the optical glass block 3 was mixed at a rate of 20 liters / minute of nitrogen gas and 2 liters / minute of hydrogen gas. It was dropped on the heat processing jig. The heat processing jig is preheated to 640 ° C, the optical glass block 3 is placed on the thermal processing jig as shown in Fig. 2 and heat-deformed for 10 minutes, then immediately put in an annealing furnace and gradually cooled to 300 ° C. Then, the optical glass molded body having the shape shown in FIG. 3 was obtained.
このような工程によって作製した光学ガラス成形体にお
いて、熱加工治具の転写面５は表面粗さ（RMS）が約25
Åの光学的鏡面であり、気泡，傷，あるいは剥離跡とい
った欠陥は認められず、面精度もニュートンリング２本
以内、アス５分の１本以内であり、その光学性能は極め
て優れていた。In the optical glass molded body manufactured by such a process, the transfer surface 5 of the thermal processing jig has a surface roughness (RMS) of about 25.
Since it is an optical mirror surface of Å, defects such as bubbles, scratches, and peeling marks were not recognized, and the surface accuracy was within 2 Newton rings and within 1/5 ass, and its optical performance was extremely excellent.
一方他面はガラスの表面張力によりファイヤーポリッシ
ュ状の自由表面４が得られ、表面粗さ（RMS）が約20Å
の光学的鏡面であり、欠陥も認められなかった。On the other hand, due to the surface tension of the glass, a fire-polished free surface 4 is obtained, and the surface roughness (RMS) is about 20Å.
No optical defect was observed.
実施例２ 熱加工治具の母材としてオーステナイト鋼 （SUS316）を用いて曲率半径が45mmの凹形の光学面１を
形成した。この光学面１をさらに超微細なダイヤモノド
粉末を用いてラッピングし、約１時間で表面の表面粗さ
（RMS）が約30Åの鏡面にした。鏡面となった熱化工治
具表面に、スパッ法でロジウム−金−タングステン合金
（Rh−Au−Ｗ）の薄膜２を被覆して光学ガラス成形体の
熱加工治具を作製した。Example 2 An austenitic steel (SUS316) was used as a base material of a heat processing jig to form a concave optical surface 1 having a radius of curvature of 45 mm. This optical surface 1 was further lapped with ultrafine diamond monode powder to make a mirror surface having a surface roughness (RMS) of about 30Å in about 1 hour. A thin film 2 of rhodium-gold-tungsten alloy (Rh-Au-W) was coated on the mirror-finished surface of the thermal chemical treatment jig by a spat method to prepare a thermal processing jig for an optical glass molded body.
光学ガラス塊３は、ジルコニア（ZrO2）８重量パーセン
ト、酸化ランタン（La2O3）30重量パーセント、ホウ酸
（B2O3）42重量パーセント、酸化カルシウム（CaO）10
重量パーセント、残部が微量成分からなるランタン系ガ
ラスを用いた。Optical glass gob 3, zirconia (ZrO 2) 8% by weight, lanthanum oxide (La 2 O 3) 30% by weight, of boric acid (B 2 O 3) 42% by weight, calcium oxide (CaO) 10
A lanthanum-based glass having a weight percentage and the balance being trace components was used.
このガラスを1400℃で溶融したあと、ノズル温度950℃
で４グラムの光学ガラス塊３を雰囲気コントロールした
成形機内に保持した加熱工治具に滴下した。成形機内は
窒素ガスをキャリア−ガスにしたトリクロルトリフルオ
ルエタン（C2Cl3F3）蒸気を導入したハロゲン化炭化水
素雰囲気であった。熱加工治具は予め780℃に加熱して
おき、第２図のように光学ガラス塊３を熱加工治具に載
せて20分間熱変形させたあと、直ちに徐冷炉にいれて徐
冷し400℃で取り出して第３図に示した形状の光学ガラ
ス成形体を得た。After melting this glass at 1400 ℃, nozzle temperature 950 ℃
Then, 4 g of the optical glass block 3 was dropped onto a heating jig held in a molding machine whose atmosphere was controlled. The inside of the molding machine was a halogenated hydrocarbon atmosphere into which trichlorotrifluoroethane (C 2 Cl 3 F 3 ) vapor with nitrogen gas as a carrier gas was introduced. The heat processing jig is preheated to 780 ° C, and the optical glass block 3 is placed on the heat processing jig as shown in Fig. 2 and heat-deformed for 20 minutes, then immediately put in an annealing furnace and gradually cooled to 400 ° C. Then, the optical glass molded body having the shape shown in FIG. 3 was obtained.
このような工程によって作製した光学ガラス成形体にお
いて、熱加工治具の転写面５は表面粗さ（RMS）が約25
Åの光学的鏡面であり、気泡，傷，あるいは剥離跡とい
った欠陥は認められず、面精度もニュートリング２本以
内、アス５分の１本以内であり、その光学性能は極めて
優れていた。In the optical glass molded body manufactured by such a process, the transfer surface 5 of the thermal processing jig has a surface roughness (RMS) of about 25.
Since it is an optical mirror surface of Å, no defects such as bubbles, scratches or peeling marks were observed, and the surface accuracy was within 2 Neutring and within 1/5 ass, and its optical performance was extremely excellent.
一方他面はガラスの表面張力によりファイヤーポリッシ
ュ状の自由表面４が得られ、表面粗さ（RMS）が約20Å
の光学的鏡面であり、欠陥も認められなかった。On the other hand, due to the surface tension of the glass, a fire-polished free surface 4 is obtained, and the surface roughness (RMS) is about 20Å.
No optical defect was observed.
実施例３ 熱加工治具の母材としてサーメット（TiC−10Mo−9Ni）
を用いて曲率半径が200mmの凹形の光学面１を形成し
た。この光学面１をさらに超微細なダイヤモンド粉末を
用いてラッピングし、約１時間で表面の表面粗さ（RM
S）が約30Åの鏡面にした。鏡面となった熱加工治具表
面に、スパッタ法で白金−タンタル−レニウム合金（Pt
−Ta−Re）の薄膜２を被覆して光学ガラス成形体の熱加
工治具を作製した。Example 3 Cermet (TiC-10Mo-9Ni) as the base material of the heat processing jig
Was used to form a concave optical surface 1 having a radius of curvature of 200 mm. The optical surface 1 was lapped with ultrafine diamond powder, and the surface roughness (RM
S) has a mirror surface of about 30Å. Platinum-tantalum-rhenium alloy (Pt
-Ta-Re) thin film 2 was coated to prepare a thermal processing jig for an optical glass molded body.
光学ガラス塊３は、シリカ（SiO2）65重量パーセント、
酸化カリウム（K2O）９重量パーセント、ホウ酸（B
2O3）10重量パーセント、酸化ナトリウム（Na2O）10重
量パーセント、残部が微量成分からなるホウケイ酸ガラ
スを用いた。The optical glass gob 3 is composed of 65% by weight of silica (SiO 2 ),
9 weight percent potassium oxide (K 2 O), boric acid (B
Borosilicate glass consisting of 10% by weight of 2 O 3 ), 10% by weight of sodium oxide (Na 2 O) and the balance being trace components was used.
このガラスを1350℃で溶融したあと、ノズル温度920℃
で３グラムの光学ガラス塊３を雰囲気コントロールした
成形機内に保持した熱加工治具に滴下した。成形機内は
アルゴンガス20リッター／分、エチレン（C2H4）１リッ
ター／分の割合で混合した炭化水素雰囲気であった。熱
加工治具は予め780℃に加熱しておき、第２図のように
光学ガラス塊３を熱加工治具に載せて５分間熱変形させ
たあと、直ちに徐冷炉にいれて徐冷し380℃で取り出し
て第３図に示した形状の光学ガラス成形体を得た。After melting this glass at 1350 ℃, nozzle temperature 920 ℃
Then, 3 g of the optical glass block 3 was dropped onto a heat processing jig held in a molding machine whose atmosphere was controlled. The inside of the molding machine was a hydrocarbon atmosphere mixed with argon gas at a rate of 20 liters / minute and ethylene (C 2 H 4 ) at a rate of 1 liter / minute. The heat processing jig is preheated to 780 ° C, and the optical glass block 3 is placed on the heat processing jig as shown in Fig. 2 and thermally deformed for 5 minutes, and then immediately put in an annealing furnace to gradually cool it to 380 ° C. Then, the optical glass molded body having the shape shown in FIG. 3 was obtained.
このような工程によって作製した光学ガラス成形体にお
して、熱加工治具の転写面５は表面粗さ（RMS）約25Å
の光学的鏡面であり、気泡，傷，あるいは剥離跡といっ
た欠陥は認められず、面精度もニュートリング２本以
内、アス５分の１本以内であり、その光学性能は極めて
優れていた。In the optical glass molded body manufactured by such a process, the transfer surface 5 of the thermal processing jig has a surface roughness (RMS) of about 25Å
No optical defects such as bubbles, scratches, or peeling marks were observed, and the surface accuracy was within 2 Neutring lines and within 1/5 ass, and the optical performance was extremely excellent.
一方他面はガラスの表面張力によりファイヤーポリッシ
ュ状の自由表面４が得られ、表面粗さ（RMS）が約20Å
の光学的鏡面であり、欠陥も認められなかった。On the other hand, due to the surface tension of the glass, a fire-polished free surface 4 is obtained, and the surface roughness (RMS) is about 20Å.
No optical defect was observed.
実施例４ 熱加工治具の母材としてシリコンを用いて曲率半径が45
mmの凹形の光学面１を形成した。この光学面１をさらに
超微細なダイヤモンド粉末を用いてラッピングし、約１
時間で表面の表面粗さ（RMS）が約20Åの鏡面にした。
鏡面となった熱加工治具表面に、スパッタ法でロジウム
−金−タングステン合金（Rh−Au−Ｗ）の薄膜２を被覆
して第一図のような光学ガラス成形体の熱加工治具を作
製した。Example 4 Silicon was used as the base material of the heat processing jig and the radius of curvature was 45.
A concave optical surface 1 of mm was formed. The optical surface 1 was lapped with ultrafine diamond powder to obtain about 1
The surface has a surface roughness (RMS) of about 20Å.
A thin film 2 of rhodium-gold-tungsten alloy (Rh-Au-W) is coated on the surface of the heat-processing jig which has become a mirror surface by a sputtering method to form a heat-processing jig for an optical glass molded body as shown in Fig. 1. It was made.
光学ガラス塊３は、シリカ（SiO2）52重量パーセント、
酸化カリウム（K2O）６重量パーセント、酸化鉛（PbO）
35重量パーセント、酸化ナトリウム（Na2O）５重量パー
セント、残部が微量成分からなる重フリントガラスを用
いた。The optical glass gob 3 comprises 52% by weight of silica (SiO 2 ),
6 weight percent potassium oxide (K 2 O), lead oxide (PbO)
A heavy flint glass containing 35 weight percent, 5 weight percent of sodium oxide (Na 2 O) and the balance being trace components was used.
予め冷間で前加工した光学ガラス塊３を、ヘリウムガス
20リッター／分、二酸化炭素ガス２リッター／分の割合
で混合した雰囲気の成形機内に保持した上記の熱加工治
具に静置した。第２図のように光学ガラス塊３を熱加工
治具に載せた状態で650℃まで昇温させたあと10分間保
持して熱変形させた。熱変形後、直ちに徐冷炉にいれて
徐冷し300℃で取り出して第３図に示した形状の光学ガ
ラス成形を得た。The optical glass gob 3 pre-processed in the cold is helium gas
20 liters / minute, carbon dioxide gas was mixed with the rate of 2 liters / minute. As shown in FIG. 2, the optical glass gob 3 was placed on a thermal processing jig, heated to 650 ° C., and then held for 10 minutes for thermal deformation. Immediately after thermal deformation, the product was put in an annealing furnace, gradually cooled, and taken out at 300 ° C. to obtain an optical glass molding having the shape shown in FIG.
このような工程によって作製した光学ガラス成形体にお
いて、熱加工治具の転写面５は表面粗さ（RMS）が約20
Åの光学的鏡面であり、気泡，傷，あるいは剥離跡とい
った欠陥は認められず、面精度もニュートリング２本以
内、アス５分の１本以内であり、その光学性能は極めて
優れていた。In the optical glass molded body manufactured by such a process, the transfer surface 5 of the thermal processing jig has a surface roughness (RMS) of about 20.
Since it is an optical mirror surface of Å, no defects such as bubbles, scratches or peeling marks were observed, and the surface accuracy was within 2 Neutring and within 1/5 ass, and its optical performance was extremely excellent.
一方他面はガラスの表面張力によりファイヤーポリッシ
ュ状の自由表面４が得られ、表面粗さ（RMS）が約18Å
の光学的鏡面であり、欠陥も認められなかった。On the other hand, the free surface 4 in the form of fire polish is obtained on the other surface due to the surface tension of the glass, and the surface roughness (RMS) is about 18Å.
No optical defect was observed.
なお本発明の光学ガラス成形体およびその成形方法並び
に該方法に用いる熱加工治具は、一面が化学的に安定な
薄膜で被覆された熱加工治具の光学面の転写面であり、
他面が自由表面である光学ガラス成形体および非酸化性
雰囲気中で、化学的に安定な薄膜で被覆された熱加工治
具の光学面上でガラス塊を熱変形させた光学ガラス成形
体の成形方法並びに該方法に用いる化学的に安定な薄膜
で被覆され、かつ所望の形状および光学面を有した熱加
工治具であることを特徴とするものであり、成形の雰囲
気、光学ガラス組成、熱加工治具に被覆する薄膜組成、
熱変形の温度と時間、あるいは光学ガラス成形体の形状
等の条件は本実施例に限定されるものではない。The optical glass molded body of the present invention and the method for molding the same, and the heat processing jig used in the method are transfer surfaces of the optical surface of the heat processing jig whose one surface is coated with a chemically stable thin film,
An optical glass molded body whose other surface is a free surface and an optical glass molded body obtained by thermally deforming a glass gob on the optical surface of a thermal processing jig coated with a chemically stable thin film in a non-oxidizing atmosphere. A molding method and a thermal processing jig which is coated with a chemically stable thin film used in the method, and has a desired shape and optical surface, a molding atmosphere, an optical glass composition, Thin film composition for coating the thermal processing jig,
Conditions such as the temperature and time of heat deformation, the shape of the optical glass molded body, and the like are not limited to those in this embodiment.
発明の効果 以上説明したように、本発明の光学ガラス成形体および
その成形方法並びにその方法に用いる熱加工治具は、化
学的に安定な薄膜で被覆され、かつ所望の形状および光
学面を有した熱加工治具の光学面上でガラス塊を非酸化
性雰囲気中で熱変形させることから、一面が化学的に安
定な薄膜で被覆された熱加工治具の光学面の転写面であ
り、他面が自由表面である光学ガラス成形体を得ること
ができる。光学ガラスと反応あるいは融着しない薄膜
（貴金属，タングステン，タンタル，レニウム，ハフニ
ウムの単体あるいはそれらの合金）を被覆した熱加工治
具を非酸化性雰囲気中で使用することにより、光学ガラ
ス塊とこれらの薄膜とがぬくにくくなり光学ガラスと反
応あるいは融着を防ぐことができ、一面が熱加工治具の
光学面の転写面であり、他面が自由表面であり、またい
ずれの面にも異物付着あるいは欠陥のない光学ガラス成
形体を得ることができる。EFFECTS OF THE INVENTION As described above, the optical glass molded body of the present invention, the molding method thereof, and the thermal processing jig used in the method are coated with a chemically stable thin film and have a desired shape and optical surface. Since the glass gob is thermally deformed on the optical surface of the heat processing jig in a non-oxidizing atmosphere, one surface is a transfer surface of the optical surface of the heat processing jig coated with a chemically stable thin film, An optical glass molded product having the other surface as a free surface can be obtained. By using a thermal processing jig coated with a thin film (noble metal, tungsten, tantalum, rhenium, hafnium, or alloys thereof) that does not react or fuse with the optical glass in a non-oxidizing atmosphere, It is difficult to remove the thin film of the glass and it can prevent reaction or fusion with the optical glass. One surface is the transfer surface of the optical surface of the heat processing jig, the other surface is the free surface, and the foreign material on either surface. It is possible to obtain an optical glass molded body that is free from adhesion or defects.
すなわち、本発明によって高精度な光学ガラス成形体の
大量生産が可能になり、生産性の向上と製造コストの低
減に著しい効果がある。That is, the present invention enables mass production of highly accurate optical glass moldings, and has a remarkable effect in improving productivity and reducing manufacturing cost.
第１図は熱加工治具の断面図、第２図は光学ガラス塊の
熱変形を示す本発明実施例の断面図、第３図は光学ガラ
ス成形体の断面図である。 １……光学面、２……薄膜、３……光学ガラス塊、４…
…自由表面、５……転写面。FIG. 1 is a sectional view of a heat processing jig, FIG. 2 is a sectional view of an embodiment of the present invention showing thermal deformation of an optical glass block, and FIG. 3 is a sectional view of an optical glass molded body. 1 ... Optical surface, 2 ... Thin film, 3 ... Optical glass block, 4 ...
… Free surface, 5 …… Transfer surface.
Claims (4)
つの熱加工治具の光学面の転写面であり、他面がガラス
の表面張力により形成された自由表面である光学ガラス
成形体。1. A one side coated with a chemically stable thin film.
An optical glass molded body, which is the transfer surface of the optical surface of one heat processing jig, and the other surface is a free surface formed by the surface tension of glass.
レニウム、ハフニウムの単体あるいはそれらの合金であ
る請求項１記載の光学ガラス成形体。2. The thin film is a noble metal, tungsten, tantalum,
The optical glass molding according to claim 1, which is a simple substance of rhenium or hafnium or an alloy thereof.
で被覆された１つの熱加工治具の光学面上でガラス塊を
熱変形させる光学ガラス成形体の成形方法。3. A method of molding an optical glass molded body, which comprises thermally deforming a glass gob on an optical surface of one thermal processing jig coated with a chemically stable thin film in a non-oxidizing atmosphere.
レニウム、ハフニウムの単体あるいはそれらの合金であ
る請求項３記載の光学ガラス成形体の成形方法。4. The thin film is a noble metal, tungsten, tantalum,
The method for molding an optical glass molded body according to claim 3, which is a simple substance of rhenium or hafnium or an alloy thereof.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1007249A JPH0696458B2 (en) | 1989-01-13 | 1989-01-13 | Optical glass molding and molding method thereof |
| EP90300031A EP0378292B1 (en) | 1989-01-13 | 1990-01-03 | Method of manufacturing glass optical element |
| DE90300031T DE69004103T2 (en) | 1989-01-13 | 1990-01-03 | Process for the production of an optical object made of glass. |
| US07/866,265 US5171347A (en) | 1989-01-13 | 1992-04-10 | Method of manufacturing glass optical element |
| US07/932,228 US5284501A (en) | 1989-01-13 | 1992-08-19 | Method of manufacturing glass optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1007249A JPH0696458B2 (en) | 1989-01-13 | 1989-01-13 | Optical glass molding and molding method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02188433A JPH02188433A (en) | 1990-07-24 |
| JPH0696458B2 true JPH0696458B2 (en) | 1994-11-30 |
Family
ID=11660750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1007249A Expired - Fee Related JPH0696458B2 (en) | 1989-01-13 | 1989-01-13 | Optical glass molding and molding method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0696458B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010001163A (en) * | 2008-06-18 | 2010-01-07 | Konica Minolta Opto Inc | Method for producing glass gob, method for producing glass molding, apparatus for producing glass gob and apparatus for producing glass molding |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57116614A (en) * | 1981-01-12 | 1982-07-20 | Ricoh Co Ltd | Lens molding method |
| JPS60246230A (en) * | 1984-05-17 | 1985-12-05 | Matsushita Electric Ind Co Ltd | Mold for press molding of optical glass element |
| JPH0695279B2 (en) * | 1984-07-23 | 1994-11-24 | 株式会社リコー | Display information processing device |
| JPS62230634A (en) * | 1985-12-09 | 1987-10-09 | Ohara Inc | Mold for press-forming of high-precision formed glass article |
| JPS63166729A (en) * | 1986-12-26 | 1988-07-09 | Matsushita Electric Ind Co Ltd | Method for manufacturing optical glass elements |
| JPH0712942B2 (en) * | 1987-08-25 | 1995-02-15 | 松下電器産業株式会社 | Method for manufacturing optical glass element |
-
1989
- 1989-01-13 JP JP1007249A patent/JPH0696458B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02188433A (en) | 1990-07-24 |
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