JPH0658679B2 - Method of detecting short circuit between wires - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a method for detecting a short-circuited portion between wirings, and particularly to detect a short-circuited portion between a power supply wiring and a ground wiring in verification of a mask pattern design of an integrated circuit. Regarding the method.

[Prior Art] Conventionally, in a mask pattern data of an integrated circuit, when the power supply wiring and the ground wiring are short-circuited, the detection of the short-circuited portion is placed on the power supply wiring and indicates a power supply label. This has been done by finding a path connecting the data and the ground label data placed on the ground wiring and indicating the ground.

Hereinafter, the technique of the conventional short-circuit point detection method will be described in more detail with reference to the drawings.

As shown in FIG. 3, the conventional method for detecting a short-circuit between the power supply wiring and the ground wiring is the step B ₁ of inputting the mask pattern data of the power supply ground wiring which is short-circuited at the start and the wiring pattern data. and step B ₂ is divided into basic shapes, a power supply labels, step B ₃ for searching for a route between ground label consists step B ₄ for outputting the information of the found path.

FIG. 4 is an example showing a part of the power supply ground wiring which is short-circuited. FIG. 5 shows a state after the data shown in FIG. 4 is divided into figures. FIG. 7 is an example of a short circuit that the conventional short-circuit point detection method outputs with respect to the data of FIG.

In FIG. 4, 5 is a power wiring, 6 to 9 are power level contacts, 10 is power label data, 11 is ground wiring, 12 to 15 are ground level contacts, and 16 is ground label data. Reference numerals 17 and 18 are short-circuited points where the power supply wiring 5 and the ground wiring 11 are short-circuited. In FIG. 5, 21 to 38 are basic divided figures. In FIG. 7, reference numeral 49 is pattern data of a short-circuited place, which is output by the conventional short-circuited place detecting method.

Next, the operation of the conventional short-circuit point detection method will be specifically described.

Entering a power ground line are short in Step B _1. Then divide the wiring pattern on the basic figures in Step B _2. Here, the basic figures 21 to 38 are divided into trapezoids. FIG. 5 shows a state after figure division.
Next, find a path from the basic division figure 21 including the power label data 10 to the basic division figure 29 including the Grand label data 16 in step B _3. The route is searched by a method called predicate. That is, the basic divided figure 21 including the power supply label data which is the starting point is numbered 1, all the adjacent basic divided figures are numbered 2, and the basic divided figure numbered 2 is also adjacent to all the basic divided figures. The basic divided figure 29 including the ground label data 16 is numbered as 3
Repeat the numbering process until are numbered. After the numbering is completed, the route to be found can be found by tracing the basic divided figure 29 including the ground label data 16 in descending order. In the example shown in FIG. 5, the paths indicated by the basic divided figures 21, 22, 29 are found. Basic division shapes and power label data contained therein on the path found in step B _4, and outputs the ground label data. For the example shown in FIG. 4, the result shown in FIG. 7 is obtained.

[Problems to be solved by the invention]

In the above-described conventional method for detecting a short-circuit between the power supply wiring and the ground wiring, since only one path between the power supply label data and the ground label data can be found, it is not possible to find all short-circuited locations when there are a plurality of short-circuited locations. . In addition, there is a disadvantage that the number of divided figure data on the route becomes very large, and it may be necessary to work to further limit the short-circuited portion.

In contrast to the above-described conventional method for detecting a short-circuited portion between the power supply wiring and the ground wiring, the present invention relates to a power supply level contact or a ground level contact used for fixing a substrate to a power supply or a ground level in a CMOS process or the like. Paying attention to the data unique to the power supply and the data unique to the ground, the pattern data of the power supply ground wiring short-circuited in the information processing system is divided into basic figures, and the data unique to the power supply and the data unique to the ground are divided. By recognizing the inclusive relationship with the basic divided figure and the connection relationship between the basic divided figure containing data specific to the power source and the basic divided figure containing data specific to the ground, all shorted parts can be sufficiently limited. The difference is that multiple locations can be found at the same time.

[Means for solving problems]

The detection method according to the present invention includes a means for receiving pattern data of a power supply wiring having a plurality of power supply level contacts and a ground wiring having a plurality of ground level contacts, and dividing the power supply and the ground wiring into basic divided figures, and a divided basic pattern. Among the divided figures, a recognition means for recognizing a basic divided figure including the power level contact and a basic divided figure including the ground level contact respectively, and the power level from the basic divided figure recognized by the recognizing means. A means for recognizing a divided figure including both a contact and the ground level contact is provided.

〔Example〕

 Next, the present invention will be described with reference to the drawings.

As shown in FIG. 2, an information processing system used in one embodiment of the present invention includes a data input means 1 such as a magnetic tape device for inputting mask pattern data, a central processing unit in which an application program runs, and the like. It is composed of a processing execution means 2, a storage means 3 such as a magnetic disk device, and an image drawing means 4 such as a plotter.

As shown in FIG. 1, one embodiment of the present invention is an application program running on the process executing means 2 of FIG. _2, which includes a data input step A ₁ , a figure dividing step A ₂ , an inclusion relation recognizing step A ₃ , and a connection relation. It consists of five steps of the recognition step a ₄ plotting data output step a _5.

Power that is short in step A _1, and inputs taken out the data of ground wiring. Step A ₂ divides the wiring pattern of the power ground wire to the basic shapes. In this embodiment, the figure is divided so that the basic figure becomes a trapezoid. Specific data trapezoidal and power generated in Step A ₃ in step A _2, recognizes the inclusion relation data unique to the ground. That is, the trapezoid including the data unique to the power supply is recognized. Further, when the above trapezoids are adjacent to each other, they are merged into one divided graphic element. In addition, in this step, a trapezoid including both data unique to the power supply and data unique to the ground (hereinafter referred to as a short division figure) is found. A power supply step A ₄ find a path connecting the trapezoidal (hereinafter referred to as short path) containing data specific to a trapezoid and a ground that contains the unique data. Finally, the output trapezoid and the data they contain adjacent trapezoidal and short path that is on the short path, the further data contained and their short division graphic as data for drawing in step A _5.

This embodiment will be described by using an example of a part of the short-circuited power supply / ground wiring of FIG. 4 used in the description of the conventional method of detecting a short circuit between wirings. The example in FIG. 4 is a CM.
It is a part of the power supply wiring and the ground wiring of the integrated circuit manufactured by the OS method. In the CMOS method, since the potential of the substrate is fixed to the power supply level or the ground level, data called power supply level contacts 6 to 9 on the power supply wiring 5 and data called ground level contacts 12 to 15 on the ground wiring 11. Is placed. When the present embodiment is applied to a CMOS integrated circuit, the power supply level contacts 6 to 9 may be treated as data unique to the power source, and the ground level contacts 12 to 15 may be treated as data unique to the ground.

FIG. 5 shows a state after the data shown in FIG. 4 has been subjected to the figure division in step A ₂ of FIG. 1 as in the case of detecting a short-circuited portion between wirings in the related art. Fig. 6
The pattern data 47 and 48 shown in (a) and (b) are examples of short-circuit locations which the present embodiment outputs with respect to the data of FIG.

Next, the overall operation of this embodiment will be specifically described.

First, the mask pattern data of the short-circuited power supply wiring and ground wiring is input to the system by using the data input means 2 shown in FIG. Here, description will be made assuming that the pattern shown in FIG. 4 is input. Here, the data unique to the power source is the power level contacts 6 to 9, and the data unique to the ground is the ground level contact 12 to 9.
It is 15. After the data is input, the wiring pattern is divided into figures and the result is stored in the auxiliary storage means 4. FIG. 5 shows a state after figure division.

Next, a trapezoidal basic divided figure including power level contacts and a trapezoidal basic divided figure including ground level contacts are recognized. Basic divided figures 22, 24, 2 in FIG.
Reference numerals 6 and 28 include power supply level contacts, and basic divided figures 22, 32, 34 and 37 include ground level contacts. Furthermore, a basic divided figure (short divided figure) including both the power supply level contact and the ground level contact is searched from among these. The basic divided figure 22 in FIG. 5 is a short divided figure. Next, by following the connection relationship of the basic divided figures, a path (short path) connecting the basic divided figure including the power level contact and the basic divided figure including the ground level contact is recognized.
The path indicated by the basic divided figures 35-36 in FIG. 5 is a short path. As can be seen from FIG. 5, the short divided figure and the section indicated by the divided figure corresponding to the short path are short-circuited portions.

Finally, basic divided figures 35-36 corresponding to the short path
And basic divided figures 28, 34, 3 adjacent to the short path
7, the power level contact 9, the ground level contacts 14 and 15 included therein, and the basic divided figure 22 corresponding to the short divided figure, the power level contact 6 and the ground level contact 12 included therein are output as drawing data.

〔The invention's effect〕

As described above, according to the present invention, the application program on the information processing system automatically finds a short-circuited place between the power supply wiring and the ground wiring in the mask / pattern design. All short-circuit locations can be found in a short period of time without the need for this, and therefore the number of man-hours and the period required for integrated circuit mask / pattern design can be shortened.

[Brief description of drawings]

FIG. 1 is a processing flow chart of a method for detecting a short-circuited portion between a power supply wiring and a ground wiring according to an embodiment of the present invention, and FIG.
FIG. 3 is a device configuration diagram of an information processing system used in the embodiment shown in FIG. 3, FIG. 3 is a process flow chart of a method for checking a short circuit between a conventional power supply wiring and ground wiring, and FIG. 4 is an example of a shorted power supply ground wiring. FIG. 5, FIG. 5 is a view for explaining the state after dividing the example of FIG. 4 into basic figures, and FIG. 6
(a) and (b) are diagrams showing an output pattern when the example of FIG. 6 is processed by the embodiment shown in FIG. 1, and FIG. 7 is a conventional power source shown in FIG. 3 of the example of FIG. It is a figure which shows the output pattern by the short-circuit check method between wiring and a ground wiring. 1 ... Mask / pattern / data input means, 2 ... Process execution means, 3 ... Auxiliary storage means, 4 ... Drawing means, 5 ...
… Power supply wiring, 6-9… Power supply level contact, 10…
… Power supply label data, 11 …… Ground wiring, 12 to 1
5 ... Ground level contact, 16 ... Grand label data, 17,18 ... Short part, 21-38
...... Basic divided figure (trapezoid), 47, 48 ...... Short pattern data output by one embodiment of the present invention, 49
...... Pattern data of the short place output by the conventional short place detection method between the power supply wiring and the ground wiring, A ₁ ...
… Step of inputting mask pattern data of short-circuited power / ground wiring, A ₂ … Step of dividing wiring pattern into basic figures, A ₃ … Including data unique to power supply, data division figure unique to ground Step for recognizing the relationship, A ₄ ... Step for recognizing the connection relationship between the divided figures including the data unique to the power supply and the data unique to the ground, A ₅ ... The figure data of the shorted portion is used as the drawing data. , B ₁ ...... Step of inputting mask pattern data of shorted power supply and ground wiring, B ₂ ...... Step of dividing wiring pattern into basic figures, B ₃ ...... Between power supply label and ground label step for searching for a route, the step of outputting the divided shapes on routes found B 4 _.......

Claims (1)

[Claims] 1. A means for receiving pattern data of a power supply wiring having a plurality of power level contacts and a ground wiring having a plurality of ground level contacts, and dividing the power supply and the ground wiring into basic divided figures, and the divided basic divided figures. Of the basic divided figures including the power level contact and the basic divided figure including the ground level contact, and the power level contact and A method for detecting a short-circuited portion between wirings, comprising: a means for recognizing a divided figure including both of the ground level contacts.