JPH0671645B2 - Mold for an electron beam melting furnace equipped with an electron beam deflection coil - Google Patents
Mold for an electron beam melting furnace equipped with an electron beam deflection coilInfo
- Publication number
- JPH0671645B2 JPH0671645B2 JP61089444A JP8944486A JPH0671645B2 JP H0671645 B2 JPH0671645 B2 JP H0671645B2 JP 61089444 A JP61089444 A JP 61089444A JP 8944486 A JP8944486 A JP 8944486A JP H0671645 B2 JPH0671645 B2 JP H0671645B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- mold
- molten metal
- melting furnace
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 66
- 238000002844 melting Methods 0.000 title claims description 19
- 230000008018 melting Effects 0.000 title claims description 18
- 239000002184 metal Substances 0.000 claims description 25
- 239000002994 raw material Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005266 casting Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Continuous Casting (AREA)
- Manufacture And Refinement Of Metals (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は電子ビーム溶解炉に係り、特に鋳型内の湯面温
度を均一に保持可能な電子ビーム溶解炉用鋳型に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam melting furnace, and more particularly to a mold for an electron beam melting furnace capable of uniformly maintaining a molten metal surface temperature in the mold.
（従来の技術） 電子ビームを利用した溶解法は、高真空下で高温溶解で
きることから高純度溶解乃至難溶解材料の溶解に適用さ
れている。(Prior Art) A melting method using an electron beam is applied to melting a high-purity or hardly-melting material because it can melt at high temperature under high vacuum.
この電子ビーム溶解法は、原料の形態に応じて次の２つ
の方法に大別される。This electron beam melting method is roughly classified into the following two methods depending on the form of the raw material.
すなわち、第２図に示すように、電子ビーム溶解炉内に
おいて、炉の側方より、棒状に形成した原料７を供給
し、これに電子ビームガン１より発せられた電子ビーム
EBを照射して溶解させ、溶融した金属を鋳型２に滴下し
て、インゴツトを製造する方法がある。また、第３図に
示すように、棒状原料７に代え、塊状等の原料８をハー
ス３に供給し、同様にしてこれに電子ビームを照射して
溶解させ、鋳型２に滴下してインゴット６を製造する方
法がある。That is, as shown in FIG. 2, in the electron beam melting furnace, the rod-shaped raw material 7 is supplied from the side of the furnace, and the electron beam emitted from the electron beam gun 1 is supplied thereto.
There is a method of producing an ingot by irradiating EB for melting and dropping the molten metal into the mold 2. Further, as shown in FIG. 3, instead of the rod-shaped raw material 7, a lump-shaped raw material 8 is supplied to the hearth 3, and similarly, this is irradiated with an electron beam to be melted and dropped into the mold 2 to drop the ingot 6. There is a method of manufacturing.
これらの電子ビーム溶解法のいずれも、鋳型内の湯面温
度を均一に保持するために湯面にも電子ビームを照射さ
せている。しかし、電子ビームガンから発せられる電子
ビームは直進するが、この電子ビームを電子ビームガン
に内蔵した偏向コイルによって第２図及び第３図に示す
ように直進状態のまま左右に偏向（振らす）させても、
原料が棒状であったり或いはハースの存在により、湯面
上に電子ビームを照射できない影の部分が生じてしま
う。In all of these electron beam melting methods, the molten metal surface is also irradiated with an electron beam in order to keep the molten metal surface temperature in the mold uniform. However, although the electron beam emitted from the electron beam gun travels straight, the electron beam gun deflects (swings) the light beam left and right with the deflection coil built in the electron beam gun as shown in FIGS. 2 and 3. Also,
Due to the rod-shaped raw material or the presence of hearth, a shadow portion where the electron beam cannot be irradiated occurs on the molten metal surface.
そこで、従来、第４図に示すように、電子ビームガン１
を複数個設置して影の部分を照射する方法や、ハースを
揺動させて影の部分を間欠的に照射する方法などが試み
られている。Therefore, conventionally, as shown in FIG.
Attempts have been made to irradiate the shadow portion by installing a plurality of shadows or to irradiate the shadow portion intermittently by swinging the hearth.
（発明が解決しようとする問題点） 鋳型内のインゴット内部には液相の部分、すなわち溶湯
プール９が存在する。この溶湯プールの形状はインゴッ
ト内部に発達してくる結晶の方向性に非常に大きな影響
を与える。したがって、結晶を最適の方向に発達させ、
良好な内部組織を有するインゴットを得るためには、溶
湯プールの形状を最適に保つ必要がある。その際、湯面
の温度が不均一な場合には、溶湯プールの形状がいびつ
になり、鋳片の内部組織が不均一となり、インゴットの
品質が不良となる。実験においても、湯面上で影になっ
た部分は明かに品質が劣化し、それに伴って欠陥が生じ
ていることが確認されている。(Problems to be Solved by the Invention) A liquid phase portion, that is, a molten metal pool 9 exists inside the ingot in the mold. The shape of this molten metal pool has a great influence on the orientation of the crystals that develop inside the ingot. Therefore, the crystal is developed in the optimal direction,
In order to obtain an ingot having a good internal structure, it is necessary to keep the shape of the molten metal pool optimum. At that time, if the temperature of the molten metal surface is not uniform, the shape of the molten metal pool becomes distorted, the internal structure of the slab becomes uneven, and the quality of the ingot becomes poor. Also in the experiment, it is confirmed that the shadowed portion on the surface of the molten metal is clearly deteriorated in quality and the defect is caused accordingly.
さて、この影の問題を解決するための前述の従来の方法
を検討してみると、以下に述べるような問題点がある。Now, when the above-mentioned conventional method for solving the problem of the shadow is examined, there are the following problems.
（１）複数のEBガンを設置する場合 電子ビーム（EB）ガンそのものが高価なものであるの
で、設備費が高くつく。(1) When installing multiple EB guns Since the electron beam (EB) gun itself is expensive, the equipment cost is high.
EBガンからはそれぞれ冷却水用、真空排気用の配管が
突出している。したがって、EBガンの個数が増加するこ
とにより、溶解炉の炉上が輻輳した状態になり、メンテ
ナンスが困難になってくる。Pipes for cooling water and vacuum exhaust project from the EB gun. Therefore, as the number of EB guns increases, the top of the melting furnace becomes congested and maintenance becomes difficult.
EBガンの機械的な取合により、複数個の設置が不可能
なケースもある。In some cases, multiple installations are impossible due to the mechanical coupling of EB guns.
（２）ハースを揺動させる場合 揺動させるための駆動軸等を溶解炉内に導入する必要
が生じる。すなわち、炉外の大気と炉内の真空を遮断す
るためのシール部分が必要となり、この部分のリークの
問題が生じてくる。(2) When swinging the hearth It is necessary to introduce a drive shaft for swinging the hearth into the melting furnace. That is, a seal portion is required to shut off the atmosphere outside the furnace from the vacuum inside the furnace, which causes a problem of leakage in this portion.
ハースは通常、冷却水が必要である。揺動させるなら
ば、当然、冷却水固定配管とハースを接続するフレキシ
ブルチューブ等が必要となってくる。一般的に真空中で
使用されるフレキシブルチューブは頻度の高い繰返し運
動に対しては耐久性がないので、操作中にチューブが破
損する危険性が極めて高くなる。Hearth usually requires cooling water. If it is rocked, naturally, a flexible tube or the like for connecting the cooling water fixing pipe and the hearth is required. Flexible tubes, which are generally used in vacuum, are not durable to frequent repetitive movements, so that the risk of tube breakage during operation is extremely high.
電子ビームの照射位置をハースの揺動運動に同調させ
て移動させる必要がある。It is necessary to move the irradiation position of the electron beam in synchronization with the swinging motion of the hearth.
溶湯で満杯の状態のハースを揺動させるのであるか
ら、揺動のサイクル時間をあまり短くできない。したが
って、電子ビームの均一照射にも、自ずと限界がある。Since the hearth full of molten metal is swung, the swing cycle time cannot be shortened so much. Therefore, even irradiation of the electron beam is naturally limited.
本発明は、上記従来技術の欠点を解消し、電子ビームの
照射を鋳型内の湯面に対して効果的に可能にし、しかも
簡易な構成により、鋳型内の湯面温度を均一に保持で
き、欠損のない高品質なインゴットの製造を可能にする
電子ビーム溶解炉用鋳型を提供することを目的とするも
のである。The present invention eliminates the above-mentioned drawbacks of the prior art, effectively enables electron beam irradiation to the molten metal surface in the mold, and with a simple structure, can uniformly maintain the molten metal surface temperature in the mold, An object of the present invention is to provide a mold for an electron beam melting furnace that enables production of a high quality ingot without defects.
（問題点を解決するための手段） 上記目的を達成するため、本発明者は、従来のように電
子ビームガンの個数の増加やハースの揺動等によるハー
ド面での解決策が得策でないことに鑑み、電子ビームそ
のものを所要の影の部分に照射できるようにビームの特
性を利用して偏向させることに想到したものである。(Means for Solving Problems) In order to achieve the above-mentioned object, the present inventor has found that a conventional solution to the problem of increasing the number of electron beam guns and swinging of a hearth is not good. In view of the above, the present invention has been conceived to use the characteristics of the electron beam so as to deflect the electron beam itself so that it can be irradiated onto a desired shadow portion.
すなわち、本発明の要旨とするところは、鋳型の上方に
設置した電子ビームガンから直進する電子ビームを、該
ビームの進路の一部を妨げる方向及び位置に配置した原
料に照射させ、その溶滴を鋳型内に鋳込むと共に鋳型内
の湯面を該電子ビームによって加熱する電子ビーム溶解
炉において、前記原料と湯面との間に電子ビーム偏向用
コイルを設けたことを特徴とする電子ビーム溶解炉用鋳
型、にある。That is, the gist of the present invention is to irradiate an electron beam that travels straight from an electron beam gun installed above the mold onto a raw material that is arranged in a direction and a position that obstructs part of the path of the beam, and the droplets An electron beam melting furnace for casting in a mold and heating a molten metal surface in the mold with the electron beam, wherein an electron beam deflection coil is provided between the raw material and the molten metal surface. The mold is for.
以下に本発明を実施例に基づいて詳細に説明する。The present invention will be described in detail below based on examples.
第１図は本発明の一実施例に係る鋳型を備えた電子ビー
ム溶解炉の概略断面図である。FIG. 1 is a schematic sectional view of an electron beam melting furnace provided with a mold according to an embodiment of the present invention.
図中、１は電子ビームガン、２は水冷インサート（鋳
型）、３は原料８を収容するハースであり、電子ビーム
ガン１から発せられた電子ビームEBを原料８に照射し溶
解させ、溶融した金属を水冷インサート２に滴下してイ
ンゴット６を製造することは、従来と同様であり、また
直進する電子ビームを直進状態のまま左右に偏向（振ら
す）させるための偏向コイルを電子ビームガンに内蔵さ
せることも従来と同様である。In the figure, 1 is an electron beam gun, 2 is a water-cooled insert (mold), 3 is a hearth for containing a raw material 8, and the raw material 8 is irradiated with an electron beam EB emitted from the electron beam gun 1 to melt the molten metal. Manufacturing the ingot 6 by dripping it on the water-cooled insert 2 is the same as the conventional one, and incorporating a deflection coil in the electron beam gun for deflecting (swinging) the electron beam traveling straight ahead in the left and right directions. Is also the same as the conventional one.
電子ビームガン１より発射される電子ビームは、磁界が
存在しない限り、直進するので、本来は発射位置からみ
て影の部分には照射することができない。この点、本発
明では、原料と湯面との間に電子ビーム偏向用コイルを
設けることにより、直進する電子ビームの進路を曲げ、
影の部分に照射させるものである。図示の場合は、鋳型
２の上部にコイル４を装着し、このコイル４により、適
宜、湯面直上部に磁界を発生させ、この磁界によって電
子ビームの進路を曲げ、影の部分に照射させるものであ
る。この磁界の方向、強さ、更には電子ビームの照射位
置の組合せを変えることにより、湯面上でハース等の存
在によって影になった部分に電子ビームを照射すること
が可能となる。The electron beam emitted from the electron beam gun 1 goes straight unless a magnetic field is present, so that it cannot originally irradiate the shadowed portion as seen from the emission position. In this respect, in the present invention, by providing an electron beam deflection coil between the raw material and the molten metal surface, the path of the electron beam traveling straight is bent,
It is to irradiate the shadow part. In the case shown in the figure, a coil 4 is attached to the upper part of the mold 2, and a magnetic field is appropriately generated just above the molten metal surface by the coil 4, and the path of the electron beam is bent by this magnetic field to irradiate the shadowed portion. Is. By changing the combination of the direction and strength of this magnetic field, and further the irradiation position of the electron beam, it becomes possible to irradiate the electron beam onto the shaded portion on the molten metal surface due to the presence of hearth or the like.
なお、コイル４はバックアップフレーム５を介して水冷
インサート２に装着されているが、他の適当な手段にて
装着することも可能であり、更には、鋳型に装着するほ
か、原料８又はハース３と鋳型２との間の適当な位置
（例えば、鋳型直上）にコイル４を設けることもでき、
同様の作用及び効果が得られることは云うまでもない。
また、図示の場合、原料をハース３に収容した供給態様
を示したが、第２図の如く棒状に成形した棒状原料によ
り供給する場合にも、同様に適用できることは云うまで
もない。Although the coil 4 is attached to the water-cooled insert 2 via the backup frame 5, it may be attached by any other suitable means. Further, the coil 4 may be attached to the mold and the raw material 8 or the hearth 3 may be attached. The coil 4 may be provided at an appropriate position between the mold and the mold 2 (for example, directly above the mold),
It goes without saying that similar actions and effects can be obtained.
Further, in the illustrated case, the supply mode in which the raw material is housed in the hearth 3 is shown, but it goes without saying that the same can be applied to the case where the raw material is supplied by a rod-shaped raw material formed into a rod shape as shown in FIG.
（発明の効果） 以上詳述したように、本発明によれば、原料と湯面との
間に電子ビーム偏向用コイルを設けたので、簡易な構成
にて従来技術の問題点をすべて解決することができる。
すなわち、従来ハース等の存在により生じた影の部分へ
電子ビームを照射することができるため、電子ビームガ
ンの個数を特別に増加することなく、鋳型内の湯面全体
に電子ビームを照射でき、更にハースを揺動させるなど
の物理的な運動の導入に伴う諸問題も起こらない。(Effects of the Invention) As described in detail above, according to the present invention, since the electron beam deflection coil is provided between the raw material and the molten metal surface, all the problems of the prior art can be solved with a simple structure. be able to.
That is, since it is possible to irradiate the electron beam to the shadow portion generated by the presence of the hearth or the like conventionally, it is possible to irradiate the electron beam to the entire molten metal surface in the mold without increasing the number of electron beam guns. The problems associated with the introduction of physical movement, such as rocking the hearth, do not occur.
したがって、鋳型内の湯面温度を均一に保持することが
でき、欠陥のない高品質のインゴットを製造することが
可能である。Therefore, the molten metal surface temperature in the mold can be kept uniform, and a high-quality ingot without defects can be manufactured.
第１図は本発明の一実施例に係る鋳型を備えた電子ビー
ム溶解炉の概略断面図、 第２図乃至第４図は各々従来の電子ビーム溶解炉を示す
概略断面図である。 １…電子ビームガン、２…水冷インサート（鋳型）、 ３…ハース、４…コイル、 ５…バックアップフレーム、６…インゴット、 ７、８…原料、９…溶湯プール、 EB…電子ビーム。FIG. 1 is a schematic sectional view of an electron beam melting furnace equipped with a mold according to an embodiment of the present invention, and FIGS. 2 to 4 are schematic sectional views showing a conventional electron beam melting furnace. 1 ... Electron beam gun, 2 ... Water cooling insert (mold), 3 ... Hearth, 4 ... Coil, 5 ... Backup frame, 6 ... Ingot, 7, 8 ... Raw material, 9 ... Molten pool, EB ... Electron beam.
Claims (1)
直進する電子ビームを、該ビームの進路の一部を妨げる
方向及び位置に配置した原料に照射させ、その溶滴を鋳
型内に鋳込むと共に鋳型内の湯面を該電子ビームによっ
て加熱する電子ビーム溶解炉において、前記原料と湯面
との間に電子ビーム偏向用コイルを設けたことを特徴と
する電子ビーム偏向コイルを装着した電子ビーム溶解炉
用鋳型。1. An electron beam traveling straight from an electron beam gun installed above a mold is irradiated onto a raw material arranged in a direction and a position that obstructs a part of the path of the beam, and the droplets are cast into the mold. An electron beam melting furnace equipped with an electron beam deflection coil, wherein an electron beam deflection coil is provided between the raw material and the molten metal surface in an electron beam melting furnace for heating the molten metal surface in the mold with the electron beam. Mold for furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61089444A JPH0671645B2 (en) | 1986-04-18 | 1986-04-18 | Mold for an electron beam melting furnace equipped with an electron beam deflection coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61089444A JPH0671645B2 (en) | 1986-04-18 | 1986-04-18 | Mold for an electron beam melting furnace equipped with an electron beam deflection coil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62248558A JPS62248558A (en) | 1987-10-29 |
| JPH0671645B2 true JPH0671645B2 (en) | 1994-09-14 |
Family
ID=13970851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61089444A Expired - Lifetime JPH0671645B2 (en) | 1986-04-18 | 1986-04-18 | Mold for an electron beam melting furnace equipped with an electron beam deflection coil |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0671645B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8891583B2 (en) | 2000-11-15 | 2014-11-18 | Ati Properties, Inc. | Refining and casting apparatus and method |
| JP4547127B2 (en) * | 2002-12-26 | 2010-09-22 | 東邦チタニウム株式会社 | Viewing window portion of electron beam melting furnace and operation method thereof |
| US8748773B2 (en) * | 2007-03-30 | 2014-06-10 | Ati Properties, Inc. | Ion plasma electron emitters for a melting furnace |
| WO2008121630A1 (en) | 2007-03-30 | 2008-10-09 | Ati Properties, Inc. | Melting furnace including wire-discharge ion plasma electron emitter |
| JP5871320B2 (en) * | 2012-07-24 | 2016-03-01 | 東邦チタニウム株式会社 | Electron beam melting furnace and operation method of electron beam melting furnace using the same |
| CN103966458A (en) * | 2013-02-04 | 2014-08-06 | 青海聚能钛业有限公司 | Single-electron gun cold hearth melting furnace |
| CN116855753B (en) * | 2023-07-12 | 2026-03-20 | 西北工业大学 | A method for improving the surface quality of titanium or titanium alloy EB ingots |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2406128A1 (en) * | 1977-07-25 | 1979-05-11 | Abex Pagid Equip | METHOD FOR MANUFACTURING LININGS FOR DISC BRAKES |
-
1986
- 1986-04-18 JP JP61089444A patent/JPH0671645B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62248558A (en) | 1987-10-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5211824A (en) | Method and apparatus for sputtering of a liquid | |
| JPH0671645B2 (en) | Mold for an electron beam melting furnace equipped with an electron beam deflection coil | |
| JP4773340B2 (en) | Semiconductor single crystal manufacturing equipment | |
| JP5244725B2 (en) | Deposition equipment | |
| JPS60193236A (en) | Magnetron cathode unit | |
| EP0434822A1 (en) | Continuous casting of ingots | |
| US3235647A (en) | Electron bombardment heating with adjustable impact pattern | |
| CN101678441B (en) | Continuous casting of reactionary metals using a glass covering | |
| JP3089060B2 (en) | Automatic welding equipment | |
| JP4570232B2 (en) | Plasma display protective film forming apparatus and protective film forming method | |
| US20030213427A1 (en) | Method of welding single crystals | |
| US3177535A (en) | Electron beam furnace with low beam source | |
| KR102698389B1 (en) | Thin plate single crystal manufacturing device and thin plate single crystal manufacturing method | |
| US3820586A (en) | Apparatus for sweeping the beam from a plasma electron gun on the surface of a mold of a continuous ingot casting device | |
| NO153507B (en) | FIREOWS FOR ROTATION PROJECTIL. | |
| AU776095B2 (en) | Electron beam shielding apparatus and methods for shielding electron beams | |
| CN217104072U (en) | Laser cladding coating preparation facilities | |
| KR910003807B1 (en) | Apparatus for producing picture tube | |
| JPH06340967A (en) | Vapor deposition equipment | |
| RU2436853C2 (en) | Procedure for control over process of melting | |
| JP2502792B2 (en) | Vacuum deposition source and magnetic recording medium deposited using the vacuum deposition source | |
| JP4813345B2 (en) | Glass tube heating device and lamp manufacturing device | |
| JP2928366B2 (en) | Apparatus and method for casting casting material | |
| JPS6015699B2 (en) | Method and apparatus for vapor deposition treatment of strip steel | |
| JPS59177130A (en) | Vacuum vapor deposition method |