JPH0672045B2 - Translucent spinel sintered body and method for producing the same - Google Patents
Translucent spinel sintered body and method for producing the sameInfo
- Publication number
- JPH0672045B2 JPH0672045B2 JP63167616A JP16761688A JPH0672045B2 JP H0672045 B2 JPH0672045 B2 JP H0672045B2 JP 63167616 A JP63167616 A JP 63167616A JP 16761688 A JP16761688 A JP 16761688A JP H0672045 B2 JPH0672045 B2 JP H0672045B2
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- sintered body
- spinel
- spinel sintered
- pressure
- purity
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、透光性に優れた多結晶スピネル焼結体、特に
厚さ3mm以上で使用する赤外透過窓等の用途に好適な透
光性スピネル焼結体、及びその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a polycrystalline spinel sintered body excellent in translucency, particularly a transmissive window suitable for use as an infrared transmissive window having a thickness of 3 mm or more. The present invention relates to an optical spinel sintered body and a method for manufacturing the same.
スピネル(MgAl2O4)はマグネシア(MgO)とアルミナ(Al
2O3)とからなる酸化物で、結晶型が立方晶であるため結
晶粒界での散乱が起り難く、高密度に焼結した場合良好
な透光性が得られることが知られている。Spinel (MgAl 2 O 4 ) is composed of magnesia (MgO) and alumina (Al
2 O 3 ), which is known to have good transparency when sintered at high density because scattering at grain boundaries does not occur easily because the crystal type is cubic. .
通常、スピネル焼結体の透光性は可視領域の波長0.4μ
m付近から急激に高くなり、赤外領域の波長3〜5μm
付近で最高となる。従つて、スピネル焼結体は光学窓の
ような透光性材料として有望視され、従来から各種の方
法によつて製造が試みられている。Usually, the transparency of spinel sintered bodies is 0.4μm in the visible region.
The wavelength rapidly increases from around m, and the wavelength in the infrared region is 3 to 5 μm.
The highest in the vicinity. Therefore, the spinel sintered body is promising as a translucent material such as an optical window, and its manufacture has been attempted by various methods.
例えば、特開昭47-6028号公報に記載されているよう
に、焼結助剤として弗化リチウム(LiF)を添加して真空
中でホツトプレスする方法がある。焼結助剤としては、
LiFの他に酸化カルシウム(CaO)も有効であることが知ら
れている。又、特開昭55-27837号公報にはMgOとAl2O3の
組成比を等モルから僅かにAl2O3過剰とし、焼結助剤と
してLiFを添加して常圧焼結する方法が、及び特開昭59-
121158号公報にはアルコキシドを加水分解して得られた
スピネル微粉末にLiFを添加して水素中で常圧焼結する
方法が記載されている。For example, as described in JP-A-47-6028, there is a method of adding lithium fluoride (LiF) as a sintering aid and hot pressing in vacuum. As a sintering aid,
Besides LiF, calcium oxide (CaO) is known to be effective. Further, JP-A-55-27837 discloses a method in which the composition ratio of MgO and Al 2 O 3 is equimolar to a slight excess of Al 2 O 3, and LiF is added as a sintering aid to carry out atmospheric pressure sintering. , And JP-A-59-
121158 discloses a method in which LiF is added to spinel fine powder obtained by hydrolyzing an alkoxide, and sintering is performed under normal pressure in hydrogen.
上記した従来の透光性スピネル焼結体の製造方法におい
ては、いずれも緻密化のためLiF等の焼結助剤を添加す
るので第2相が出現しやすく、組織的不均一性により光
が散乱され、直接透過率が低い欠点があつた。In any of the above-mentioned conventional methods for producing a translucent spinel sintered body, since a sintering aid such as LiF is added for densification, the second phase is likely to appear, and the light is not emitted due to the structural nonuniformity. There was a defect that the light was scattered and the direct transmittance was low.
その他、前者の真空中のホツトプレス法では、1300〜16
00℃の高温と1000kg/cm2以上の高圧力を必要とするた
め、通常用いているグラフアイト等の型材では強度的に
不足し、大型の焼結体を製造し難い欠点があつた。又、
後者の常圧焼結法では粒成長のコントロールが難しく空
孔が残存しやすいため透光性のレベルが低く、焼結助剤
の添加以外にMgOとAl2O3の組成比を変えた場合にも第2
相が出現しやすく、直接透過率が更に低下する欠点があ
つた。In addition, in the former hot press method in vacuum, 1300 to 16
Since a high temperature of 00 ° C and a high pressure of 1000 kg / cm 2 or more are required, the strength of conventional mold materials such as graphite is insufficient and it is difficult to manufacture a large sintered body. or,
In the latter atmospheric pressure sintering method, it is difficult to control grain growth and voids tend to remain, so the level of translucency is low, and when the composition ratio of MgO and Al 2 O 3 is changed in addition to the addition of a sintering aid. Also second
The phase is likely to appear and the direct transmittance is further lowered.
この様に従来の方法に製造された透光性スピネル焼結体
では、直線透過率が試料厚さ1mmで75〜80%程度が最大
であり、試料厚さ3mm以上で使用される赤外透過窓の材
料に用いるためには更に直線透過率の向上が必要であつ
た。In the case of the translucent spinel sintered body manufactured by the conventional method as described above, the linear transmittance is about 75 to 80% at a sample thickness of 1 mm, and the infrared transmission used at a sample thickness of 3 mm or more. It was necessary to further improve the linear transmittance for use as a window material.
本発明はかかる従来の事情に鑑み、高純度且つ高密度で
透光性のレベルが高く、特に厚さ3mm以上の赤外透過窓
材として好適な直線透過率を有する透光性スピネル焼結
体、及びその製造方法を提供することを目的とする。In view of such conventional circumstances, the present invention has a high purity and high density and a high level of translucency, and in particular, a translucent spinel sintered body having a linear transmittance suitable as an infrared transmissive window material having a thickness of 3 mm or more. , And its manufacturing method.
上記目的を達成するため、本発明の透光性スピネル焼結
体の製造方法では、純度99.5%以上及び比表面積(BET
値)10m2/g以上のスピネル粉末を、温度1200〜1700℃及
び圧力100〜500kg/cm2での真空中におけるホツトプレス
により理論密度比95%以上に緻密化し、次に温度1400〜
1800℃及び圧力500kg/cm2以上でHIP処理する。In order to achieve the above object, in the method for producing a translucent spinel sintered body of the present invention, a purity of 99.5% or more and a specific surface area (BET
Value) Spinel powder of 10 m 2 / g or more is densified to a theoretical density ratio of 95% or more by hot pressing in a vacuum at a temperature of 1200 to 1700 ° C and a pressure of 100 to 500 kg / cm 2 , and then a temperature of 1400 to
HIP at 1800 ℃ and pressure of 500kg / cm 2 or more.
上記方法によつて製造される本発明の透光性スピネル焼
結体は、純度99.5%以上の多結晶スピネル焼結体からな
り、試料厚さ3mmでの直線透過率が、波長0.4〜3μmの
可視及び近赤外光で平均65%以上、及び波長3〜5μm
の赤外光で最高75%以上であつて、従来にない極めて優
れた直線透過率を有するもので、この透光性は赤外透過
窓材料として好適である。The translucent spinel sintered body of the present invention produced by the above method is made of a polycrystalline spinel sintered body having a purity of 99.5% or more, and the linear transmittance at a sample thickness of 3 mm has a wavelength of 0.4 to 3 μm. Average visible light and near infrared light 65% or more, and wavelength 3-5 μm
It has a maximum infrared light of 75% or more and has an extremely excellent linear transmittance which has never been obtained, and its translucency is suitable as an infrared transmitting window material.
上記の如く本発明においては、真空中でのホツトプレス
及びその後のHIP(熱間等方圧プレス)により、LiF等の
焼結助剤を添加せずに、高密度で直線透過率の高いスピ
ネル焼結体を得ることができる。As described above, in the present invention, by hot pressing in vacuum and subsequent HIP (hot isostatic pressing), spinel firing with high density and high linear transmittance is performed without adding a sintering aid such as LiF. You can get a unity.
原料であるスピネル粉末は不純物吸収による透光性の低
下を防ぐために99.5%以上の純度のものを使用し、特に
Fe等の遷移金属元素の含有は好ましくない。又スピネル
粉末は一次粒子の粒径が約0.2μm以下、即ち表面積がB
ET値で10m2/g以上であることが緻密な焼結体を得るため
に必要である。このように高純度で且つ微細なスピネル
粉末としては、アルコキシドの加水分解によるもの等が
好適である。The raw material spinel powder has a purity of 99.5% or more in order to prevent a decrease in translucency due to absorption of impurities.
The inclusion of transition metal elements such as Fe is not preferable. The spinel powder has a primary particle size of about 0.2 μm or less, that is, the surface area is B
An ET value of 10 m 2 / g or more is necessary to obtain a dense sintered body. As such high-purity and fine spinel powder, those obtained by hydrolysis of alkoxide are suitable.
又、特にLiFやCaO等の焼結助剤を添加する必要がないの
で、従来のような第2相による透過率の低下がない。Further, since it is not particularly necessary to add a sintering aid such as LiF or CaO, there is no decrease in transmittance due to the second phase as in the conventional case.
ホツトプレスは真空中で行ない、温度が1200〜1700℃と
する。1200℃未満の温度では理論密度比95%以上の高密
度な焼結体が得られ難く、1700℃を超えると真空中では
MgOが蒸発し、冷却した際にAl2O3(コランダム)相が第
2相として析出しやすく、透光性が低下してしまう。
又、ホツトプレスの圧力が100kg/cm2未満では理論密度
比95%以上の高密度な焼結体が得られ難く、500kg/cm2
を超えると強度的に通常のグラフアイト型の使用が難し
くなる。The hot press is performed in a vacuum and the temperature is 1200 to 1700 ° C. It is difficult to obtain a high-density sintered body with a theoretical density ratio of 95% or more at a temperature below 1200 ° C, and in a vacuum above 1700 ° C.
MgO evaporates, and when cooled, the Al 2 O 3 (corundum) phase is likely to precipitate as the second phase, resulting in a decrease in the light-transmitting property.
Also, if the pressure of the hot press is less than 100 kg / cm 2, it is difficult to obtain a high density sintered body with a theoretical density ratio of 95% or more, and 500 kg / cm 2
If it exceeds, it becomes difficult to use a normal graphite type in terms of strength.
HIP処理においては、1400〜1800℃の温度及び500kg/cm2
以上の圧力で焼結体が等方的に加圧されるので、塑性変
形や拡散機構により空孔の除去が促進されて更に高密度
化が達成され、透光性が一層向上する。HIPで用いる高
圧ガスは、Ar等の不活性ガス、N2ガス又はO2ガス、或い
はこれらの混合ガスが好ましく、特にO2ガスを混合すれ
ばHIP処理時の焼結体からの脱酸素による透光性の低下
を防止できる利点がある。これらのガスは500kg/cm2以
上(2000kg/cm2以下)の高圧でしかも等方的に働くた
め、従来のホツトプレス法(約1000kg/cm2で上下二方向
加圧)よりも空孔の除去による緻密化が均一に進行し、
透光性に優れたスピネル焼結体が得られる。In HIP processing, temperature of 1400-1800 ℃ and 500kg / cm 2
Since the sintered body is isotropically pressed by the above-mentioned pressure, the plastic deformation and the diffusion mechanism promote the removal of the pores, the density is further increased, and the translucency is further improved. The high-pressure gas used in HIP is preferably an inert gas such as Ar, N 2 gas or O 2 gas, or a mixed gas thereof. Especially, if O 2 gas is mixed, deoxidation from the sintered body at the time of HIP treatment will result. There is an advantage that the reduction of translucency can be prevented. These gases 500 kg / cm 2 or more (2000 kg / cm 2 or less) high and moreover to work isotropically, the removal of conventional Hotsutopuresu method (about 1000 kg / cm 2 in the vertical two-way pressure) vacancies than Densification progresses uniformly,
A spinel sintered body excellent in translucency can be obtained.
尚、ホツトプレスで得られた焼結体の理論密度比が95%
未満の場合には、残留気孔の多くが所謂解放気孔とな
り、この気孔を通つてHIPで用いる高圧ガスが焼結体内
部に侵入してしまうため、HIPによる高密度化が充分に
進行しない結果となる。The theoretical density ratio of the sintered body obtained by hot pressing is 95%.
When less than, many of the residual pores become so-called open pores, and the high-pressure gas used in HIP penetrates into the sintered body through these pores, resulting in insufficient progress of densification by HIP. Become.
実施例1 純度99.9%、比表面積14m2/g(BET値)の高純度スピネ
ル粉末を、1×10-1torrの真空中において内径50mmのグ
ラフアイト型を用いて1400℃の温度と300kg/cm2の圧力
で2時間ホツトプレスし、理論密度比97%の白色の焼結
体を得た。次に、この焼結体をHIP装置に入れ、Arガス
を用いて1600℃の温度及び2000kg/cm2の圧力で2時間の
HIP処理を行なつた。得られたスピネル焼結体は外観的
に無色透明であつた。Example 1 A high-purity spinel powder having a purity of 99.9% and a specific surface area of 14 m 2 / g (BET value) was used in a vacuum of 1 × 10 -1 torr using a graphite type having an inner diameter of 50 mm at a temperature of 1400 ° C. and 300 kg / g. It was hot pressed at a pressure of cm 2 for 2 hours to obtain a white sintered body having a theoretical density ratio of 97%. Next, this sintered body was put into a HIP device, and using Ar gas at a temperature of 1600 ° C. and a pressure of 2000 kg / cm 2 for 2 hours.
HIP processing was performed. The obtained spinel sintered body was colorless and transparent in appearance.
このスピネル焼結体を厚さ3mmに鏡面研磨加工し、分光
光度計で直線透過率を測定したところ、波長3〜5μm
の赤外領域で最高85%、及び波長0.4〜3μmの領域で
平均75%の優れた透光性を示した。This spinel sintered body was mirror-polished to a thickness of 3 mm, and the linear transmittance was measured with a spectrophotometer. The wavelength was 3 to 5 μm.
In the infrared region, the maximum light transmittance was 85%, and the average light transmittance was 75% in the wavelength region of 0.4 to 3 μm.
実施例2 純度99.7%、比表面積11m2/g(BET値)の高純度スピネ
ル粉末を、3×10-3torrの真空中において内径50mmのグ
ラフアイト型を用いて1600℃の温度と200kg/cm2の圧力
で1時間ホツトプレスし、理論密度比96%の白色の焼結
体を得た。更に、この焼結体をHIP装置に入れ、N2ガス
を用いて1700℃の温度及び1000kg/cm2の圧力で3時間の
HIP処理を行なつた。得られたスピネル焼結体は外観的
に無色透明であつた。Example 2 A high-purity spinel powder having a purity of 99.7% and a specific surface area of 11 m 2 / g (BET value) was heated in a vacuum of 3 × 10 −3 torr using a graphite mold with an inner diameter of 50 mm at a temperature of 1600 ° C. and 200 kg / It was hot pressed at a pressure of cm 2 for 1 hour to obtain a white sintered body having a theoretical density ratio of 96%. Further, this sintered body was put into a HIP device, and N 2 gas was used for 3 hours at a temperature of 1700 ° C. and a pressure of 1000 kg / cm 2 .
HIP processing was performed. The obtained spinel sintered body was colorless and transparent in appearance.
このスピネル焼結体を厚さ3mmに鏡面研磨加工し、分光
光度計で直線透過率を測定したところ、波長3〜5μm
の赤外領域で最高83%、及び波長0.4〜3μmの領域で
平均73%の優れた透光性を示した。This spinel sintered body was mirror-polished to a thickness of 3 mm, and the linear transmittance was measured with a spectrophotometer. The wavelength was 3 to 5 μm.
In the infrared region, the maximum light transmittance was 83%, and the average light transmittance was 73% in the wavelength region of 0.4 to 3 μm.
実施例3 純度99.8%、比表面積20m2/g(BET値)の高純度スピネ
ル粉末を、8×10-2torrの真空中において内径50mmのグ
ラフアイト型を用いて1300℃の温度と400kg/cm2の圧力
で3時間ホツトプレスし、理論密度比98%の白色の焼結
体を得た。更に、この焼結体をHIP装置に入れ、Ar-5%O2
混合ガスを用いて1500℃の温度及び1500kg/cm2の圧力に
て2.5時間のHIP処理を行なつた。得られたスピネル焼結
体は外観的に無色透明であつた。Example 3 High-purity spinel powder having a purity of 99.8% and a specific surface area of 20 m 2 / g (BET value) was heated in a vacuum of 8 × 10 -2 torr using a Graphite type having an inner diameter of 50 mm at a temperature of 1300 ° C. and 400 kg / g. It was hot pressed at a pressure of cm 2 for 3 hours to obtain a white sintered body having a theoretical density ratio of 98%. Further, this sintered body was put into a HIP device and Ar-5% O 2
HIP treatment was performed for 2.5 hours at a temperature of 1500 ° C. and a pressure of 1500 kg / cm 2 using the mixed gas. The obtained spinel sintered body was colorless and transparent in appearance.
このスピネル焼結体を厚さ3mmに鏡面研磨加工し、分光
光度計で直線透過率を測定したところ、波長3〜5μm
の赤外領域で最高82%、及び波長0.4〜3μmの領域で
平均75%の優れた透光性を示した。This spinel sintered body was mirror-polished to a thickness of 3 mm, and the linear transmittance was measured with a spectrophotometer. The wavelength was 3 to 5 μm.
In the infrared region, the maximum light transmittance was 82%, and the average light transmittance was 75% in the wavelength region of 0.4 to 3 μm.
本発明によれば、焼結助剤を用いずに、高密度であつて
可視及び赤外領域で非常に優れた直線透過率を有する透
光性スピネル焼結体を得ることができる。この透光性ス
ピネル焼結体は3mm以上の厚さで使用される赤外透過窓
の素材として特に有用である。According to the present invention, it is possible to obtain a translucent spinel sintered body that has a high density and a very excellent linear transmittance in the visible and infrared regions without using a sintering aid. This translucent spinel sintered body is particularly useful as a material for an infrared transmissive window used in a thickness of 3 mm or more.
Claims (3)
2/g以上のスピネル粉末を、温度1200〜1700℃及び圧力1
00〜500kg/cm2での真空中におけるホツトプレスにより
理論密度比95%以上に緻密化し、次に温度1400〜1800℃
及び圧力500kg/cm2以上でHIP処理することを特徴とする
透光性スピネル焼結体の製造方法。1. A purity of 99.5% or more and a specific surface area (BET value) of 10 m
Spinel powder of 2 / g or more, temperature 1200 ~ 1700 ℃ and pressure 1
Densified to a theoretical density ratio of 95% or more by hot pressing in a vacuum of 00 to 500 kg / cm 2 , then temperature 1400 to 1800 ℃
And a method for producing a translucent spinel sintered body, which comprises HIPing at a pressure of 500 kg / cm 2 or more.
ガス、若しくはこれらの混合ガスを用いることを特徴と
する、請求項(1)記載の透光性スピネル焼結体の製造
方法。2. The method for producing a translucent spinel sintered body according to claim 1, wherein the HIP treatment uses an inert gas, a nitrogen gas, an oxygen gas, or a mixed gas thereof.
らなり、試料厚さ3mmでの直線透過率が、波長0.4〜3μ
mの可視及び近赤外光で平均65%以上、波長3〜5μm
の赤外光で最高75%以上であることを特徴とする赤外透
過窓用の透光性スピネル焼結体。3. A polycrystalline spinel sintered body having a purity of 99.5% or more, and a linear transmittance at a sample thickness of 3 mm has a wavelength of 0.4 to 3 μm.
m or more in visible and near infrared light 65% or more on average, wavelength 3-5 μm
The infrared transmissive spinel sintered body for infrared transmission windows, which has a maximum of 75% or more in infrared light.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63167616A JPH0672045B2 (en) | 1988-07-05 | 1988-07-05 | Translucent spinel sintered body and method for producing the same |
| EP89302254A EP0332393B1 (en) | 1988-03-09 | 1989-03-07 | Method of producing a light-transmitting spinel sintered body |
| DE68916282T DE68916282T2 (en) | 1988-03-09 | 1989-03-07 | Process for producing a translucent body from sintered spinel. |
| US07/579,085 US5152940A (en) | 1988-03-09 | 1990-09-07 | Method of producing a light-transmitting spinel sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63167616A JPH0672045B2 (en) | 1988-07-05 | 1988-07-05 | Translucent spinel sintered body and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0218354A JPH0218354A (en) | 1990-01-22 |
| JPH0672045B2 true JPH0672045B2 (en) | 1994-09-14 |
Family
ID=15853088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63167616A Expired - Lifetime JPH0672045B2 (en) | 1988-03-09 | 1988-07-05 | Translucent spinel sintered body and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0672045B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2904123B2 (en) * | 1996-05-10 | 1999-06-14 | 日本電気株式会社 | Method for producing multilayer film carrier |
| JP4959909B2 (en) * | 2003-03-19 | 2012-06-27 | 独立行政法人物質・材料研究機構 | Method for producing translucent magnesium silicate sintered body |
| WO2008090909A1 (en) * | 2007-01-23 | 2008-07-31 | World Lab. Co., Ltd. | Transparent spinal ceramics, method for production thereof, and optical material using the transparent spinal ceramics |
| JP4830911B2 (en) | 2007-03-02 | 2011-12-07 | 住友電気工業株式会社 | Spinel sintered body, manufacturing method thereof, transparent substrate and liquid crystal projector |
| JP2009126749A (en) * | 2007-11-26 | 2009-06-11 | Sumitomo Electric Ind Ltd | Transparent polycrystalline spinel substrate, method for producing the same, and optical product using the substrate |
| JP5168724B2 (en) * | 2008-05-23 | 2013-03-27 | 住友電気工業株式会社 | Transparent polycrystalline spinel substrate, manufacturing method thereof, and electro-optical device |
| JP5435397B2 (en) * | 2009-04-02 | 2014-03-05 | 住友電気工業株式会社 | Spinel light-transmitting window material and manufacturing method |
| JP2012017218A (en) * | 2010-07-07 | 2012-01-26 | Sumitomo Electric Ind Ltd | Substrate, substrate production method, nd filter, and optical characteristic measurement device |
| DE102013226579A1 (en) * | 2012-12-19 | 2014-06-26 | Ceramtec-Etec Gmbh | Ceramic material |
| US9624136B2 (en) | 2014-07-01 | 2017-04-18 | Corning Incorporated | Transparent spinel article and tape cast methods for making |
| KR102329559B1 (en) | 2018-03-30 | 2021-11-23 | 제이엑스금속주식회사 | MgAl2O4 sintered compact, sputtering target using the sintered compact, and manufacturing method of MgAl2O4 sintered compact |
-
1988
- 1988-07-05 JP JP63167616A patent/JPH0672045B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0218354A (en) | 1990-01-22 |
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