JPH0686541B2 - Vacuum processing device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum processing apparatus for processing an object to be processed in a vacuum processing chamber.

[0002]

2. Description of the Related Art For plastics, especially vinyl chloride resin films, such as plasma treatment, plasticizer migration prevention, surface wettability, antistatic, blocking prevention, improvement of printing characteristics, abrasion resistance, weather resistance, resistance to abrasion are thereby improved. Since it is provided with useful properties such as contamination, it has been conventionally performed in a small-scale apparatus such as batch processing.

An example of this type is disclosed in JP-A-50-152074.

[0004]

Although a batch continuous processing apparatus has been proposed several times, when it contains a plasticizer, a stabilizer, and other internal additives like a soft vinyl chloride-based fat film. The film roll is set inside the device, and when the initial pressure is set, the internal additives volatilize and disperse, which causes deterioration of the film. It has an essential drawback that it takes a considerably long time to set the initial pressure.

Generally, low-temperature plasma treatment is performed by applying high-frequency power of several KHz to several hundred KHz within a pressure range of 0.01 to 10 Torr, and is supplied for plasma generation. At this time, in order to carry out uniform processing, it is important that the pressure is kept constant and that the mixing of gases other than the selected gas, such as air, is avoided as much as possible.

Particularly when it is subjected to plasma treatment, it is necessary to maintain the pressure in the vacuum treatment chamber at around 0.1 Torr in order to efficiently impart the treatment effect. However, since the loss time is too large and the productivity is poor, it is difficult to put it into practical use in terms of processing cost.

In view of the above points, the present invention provides a vacuum for an object to be processed.
It is an object of the present invention to provide a vacuum processing apparatus which can perform good processing and is suitable for improving productivity.

[0008]

SUMMARY OF THE INVENTION The above object of the vacuum processing chamber
Place at least one spare vacuum chamber on both sides or one side
And vacuum processing for vacuum processing the object to be processed in the vacuum processing chamber
In the device, the preliminary vacuum chamber is arranged in the conveying direction of the workpiece.
The first and second seal roll groups, which are arranged to face each other,
A case surrounding the first and second seal roll groups,
Between the first and second seal roll groups and this case,
And a first sealing member and a second sealing member.
The seal roll group of the first seal roll is
Formed by the second and third seal rolls adjacent to the seal roll
Consisting of a set of three sealing rolls, the first and second
The seal roll group of is based on the first seal roll
2. Cross the third seal roll with the conveyance direction of the object.
It is achieved by arranging it horizontally in the direction .

[0009]

The first and second seal roll groups and the first and second seal roll groups
A case surrounding the second seal roll group, and the first and second
A seal that seals between the seal roll group and this case.
And the first and second seal rollers.
The roll groups are the first seal roll and the first seal roll, respectively.
Formed by the second and third seal rolls adjacent to the roll roll
Therefore, for this reason, for example,
Insert the material to be processed on the outward path between the two seal rolls, and
Double-pass treatment between the first and second seal rolls
Since it can be transported by sandwiching it, the true
The empty treatment can be performed well and the productivity can be improved.
Can be achieved.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.
It

In FIGS . 1 and 2 , reference numeral 1 denotes a vacuum processing chamber for continuously plasma-processing a flexible object F such as a plastic molded product in a vacuum state. The inside of this vacuum processing chamber 1 is connected to this. The vacuum pump 4 evacuates through an exhaust pipe 5 so as to maintain a vacuum pressure of about 10 to ² Torr. Although not shown, the vacuum processing chamber 1 contains an anode and a cathode for performing plasma processing in a vacuum state. Reference numeral 2 denotes a plurality of preliminary vacuum chambers arranged on the front side of the vacuum processing chamber 1, and 3 denotes a plurality of preliminary vacuum chambers arranged on the rear side of the vacuum processing chamber 1.
The inside is evacuated via an exhaust pipe 7 so that the inside of the vacuum processing chamber 1 is maintained at a vacuum pressure slightly higher than that of the vacuum processing chamber 1 by a vacuum pump 6 connected thereto.

3 and 4 show a cross section of the seal roll portion.
In to one, 8,9 rotatably at both ends via the radial bearing 11 and the eccentric bearing housing 12 to the housing 10, and on the second and third sealing roll sealing that is movably supported downward Then, on the surfaces of the second and third seal rolls 8 and 9, a hard nickel chromium layer 13 is formed.
Has been applied. 14 is disposed so as to be adjacent to the second and third seal rolls 8 and 9, and has a rubber surface.
An elastic material 15 such as a fluororesin is integrally fired to form the first
In seal roll), the first sealing roll 14 is rotatably supported via a radial bearing 11 and the fixed bearing housing 16 in the lateral casing 10 at both ends.

17 is fixed to the upper case 18, and the second
Is an upper seal roll support receiver disposed on the outer peripheral surface side of the seal roll 8, and the inner peripheral surface of the upper seal roll support receiver 17 has a low friction coefficient in contact with the nickel chrome layer 13 of the second seal roll 8. The fluororesin film 19 is baked. Reference numeral 20 denotes a lower seal roll support receiver fixed to the lower case 21 and arranged on the outer peripheral surface side of the third seal roll 9 .
The fluororesin film 22 having a low friction coefficient, which is in contact with the surface of the seal roll 9 of No. 3, is baked.

First, second and third seal rolls are formed
A seal roll group is composed of a set of three seal rolls.
The seal roll group is at a right angle to the conveying direction of the workpiece F.
2 rows, that is, 1st and 2nd seal roll group
And constitute one preliminary vacuum chamber. Therefore,
For example, by arranging the seal rolls in 3 rows, 2
Adjacent vacuum chambers are constructed.

FIG. 5 is a side view interposed between the second, third and first seal rolls 8, 9, 14 and both ends of the upper and lower cases 18, 21 and the lateral case 10 and the eccentric bearing housing 12. The attachment state of the piece 23 is shown, and the second, third and first seal rolls 8 of the side piece 23,
A fluorine resin film 24 having a low coefficient of friction is baked on the surfaces of the side surfaces 9 and 14 facing the end surfaces, and the side pieces 23 are pressed against the lateral case 10 via the coil springs 26 by tightening bolts 25. At this time, the second,
The surface of the third and first seal rolls 8, 9 and 14 facing the end faces is coated with a fluororesin film 24 having a low friction coefficient. It is pressed against the lateral case 10 via. At this time, a gap of about 20 μm is formed between the second, third and first seal rolls 8, 9, 14 and the fluorine resin film 24 of the side piece 23. Further, the pressing force of the side piece 23 is restricted by the gap H between the side piece 23 and the bolt 25.

FIG. 6 shows the second and third seal rolls 8 and 9.
FIG. 7 is an explanatory view for moving the shaft up and down by the eccentric bearing housing 12. The center position A of the eccentric bearing housing 12 is provided eccentric (the amount of eccentricity C) with respect to the center positions B of the second and third seal rolls 8 and 9. A hydraulic cylinder device (not shown) rotates about the center of rotation in the direction of the arrow. At this time, the second and third seal rolls 8 and 9 move upward or downward, that is, the first seal roll 1
4 or the first seal roll 14
Move away from. Therefore, by adjusting the rotation angle of the eccentric bearing housing 12, the pressing force of the second seal roll 8 and the first seal roll 14 or the third seal roll 9 and the first seal roll 14 is arbitrarily adjusted. third sealing roll 9 it is possible to vary the first
The object F to be processed can be easily inserted into the gap of the first seal roll 14.

Referring back to FIGS. 1 and 2, reference numeral 27 is a delivery device for transferring the object F to be processed to the vacuum processing chamber via the preliminary vacuum chamber 2, and 28 is the object F to be plasma-processed in the vacuum processing chamber 1. The winding device 29 for winding up the drive motor 29 is a drive motor, and the drive force of the drive motor 29 causes the second of the preliminary vacuum chambers 2 and 3 via the rotary shaft 30 and the power distributor 31 .
The third and first seal rolls 8, 9, 14 are rotated.

Preliminary vacuum chambers 2 and 3 constructed as described above.
In the seal between the second seal roll 8 and the first seal roll 14, the second seal roll 8 is pressed against the first seal roll 14 by the eccentric bearing housing 12, It is applied by bending the elastic material 15. Similarly, the seal between the third seal roll 9 and the first seal roll 14 is the third seal.
Pressing the Lumpur roll 9 with respect to the first sealing roll 14 is subjected by deflecting the elastic member 15 of the middle seal roll 14. Further, the seal between the second seal roll 8 and the upper seal roll support receiver and between the third seal roll 9 and the lower seal roll support receiver 20 is very small, for example, about 20 μm. It is possible.

Next, the operation of the vacuum processing apparatus of the present invention will be described.

First, the vacuum pumps 4 and 6 are operated to evacuate the vacuum processing chamber 1 and the preliminary vacuum chambers 2 and 3. At this time, the pressure in the vacuum processing chamber 1 is kept lower than the pressure in the preliminary vacuum chambers 2 and 3. Further, the vacuum processing chamber 1 is ventilated with argon gas, nitrogen gas or the like for improving plasma characteristics. Next, the preliminary vacuum chambers 2, 3
The second, third and first seal rolls 8, 9 and 14 are rotated by the driving force of the drive motor 29 and the plasma device in the vacuum processing chamber 1 is operated. In this state, the object to be processed F is continuously introduced from the delivery device 27 into the vacuum processing chamber 1 through the space between the third seal roll 9 and the first seal roll 14 of the preliminary vacuum chamber 2. In the vacuum processing chamber 1, the surface of the object F to be processed is subjected to plasma processing by plasma discharge generated between the anode and the cathode. The object F to be processed, which has been subjected to the plasma surface treatment in the vacuum processing chamber 1, is immediately transferred to the preliminary vacuum chamber 3
It is wound by the winding device 28 after passing between the third seal roll 9 and the first seal roll 14. As described above, the object F to be processed has a good sealing effect in the preliminary vacuum chamber and is plasma-processed in the vacuum processing chamber 1 for a short time. Therefore, the plasticizer contained in the plastic molded product is internally added. In addition to controlling the volatilization and dissipation of the agent, the object to be processed F is continuously introduced into the vacuum device, so that air and other contaminants are minimal, and it is possible to perform steady processing with the target gas and target pressure. Therefore, it is possible to impart good modifying characteristics.

The surface of the nickel-chromium layer 13 has a second surface .
And a third sealing roll 8,9 and the surface second elastic member 15
The first seal roll 14 and the second and third seal rolls 8 and 9 are on the surface of the fluorine resin films 19 and 22, and the lower seal roll support receivers 17 and 20 are also slides of the metal layer and the non-metal layer. Therefore, the frictional force is small and it can withstand long-time operation sufficiently.

In the above embodiment, the first seal roll is
Based on the standard, the second and third seal rolls are transported
To be placed adjacent to the top and bottom in the direction intersecting the direction
There is a second and a third seal based on the first seal roll.
The roll roll is horizontal in the direction that intersects the transport direction of the workpiece.
The same effect can be obtained by arranging it adjacent to.

FIG. 7 shows another embodiment of the roll and case of the preliminary vacuum chamber and the axial sealing means between the rolls in the present invention.

In FIG. 7, the same reference numerals as those in FIGS. 3 and 4 indicate the same parts.

Reference numerals 32 and 33 denote the second seal roll 8 and
A lip member made of urethane rubber or the like, which is continuously adjacent to a part of the third seal roll 9 along the axial direction and is detachably supported by the upper and lower cases 18 and 21, and is formed by the lip members 32 and 33. Comprises lip seals 34, 35 and lip mounts 36, 37.

In this way, the lip member 32, so as to come into contact with a part of the second seal roll 8 and the third seal roll 9,
By disposing 33, not only a good sealing effect in the axial direction can be obtained between the roll and the case, but also the durability is improved.

Further, since the lip members 32 and 33 are detachably supported by the upper and lower cases, even if the lip members become unusable due to frictional force, they can be easily replaced.

In the embodiment of the present invention, the case where the preliminary vacuum chambers 2 are arranged on the front and rear sides of the vacuum processing chamber 1 has been described, but as shown in FIG.
A preliminary vacuum chamber 2 is arranged on the front side of the auxiliary vacuum chamber 2, and the object F to be processed is fed into the vacuum processing chamber 1 from between the first seal roll and the third seal roll of the preliminary vacuum chamber 2 to generate the second seal roll. It is also possible to feed it from between the first and second seal rolls.

By arranging the preliminary vacuum chamber 2 on the front side of the vacuum processing chamber 1 in this manner, the number of seal rolls constituting the preliminary vacuum chamber 2 can be halved, and the number of leak points of the vacuum can be reduced. Along with it, the installation area is small .

[0030]

According to the present invention, the durability of the seal and the seal portion in the preliminary vacuum chamber can be greatly improved, so that the vacuum treatment of the object to be treated can be favorably performed. Also, the effect that the productivity can be greatly improved
There is .

[Brief description of drawings]

FIG. 1 is a diagram illustrating the principle of the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is a transverse sectional view of a seal roll portion.

FIG. 4 is a view taken along the line AA of FIG.

FIG. 5 is a detailed view of an end surface of a seal roll.

FIG. 6 is a detailed view of an eccentric bearing of a seal roll.

FIG. 7 is a cross-sectional view of another embodiment of the seal roll.

FIG. 8 is a diagram illustrating the principle of another embodiment of the present invention.

[Explanation of reference numerals] 1 ... vacuum processing chamber, 2, 3 ... preliminary vacuum chamber,
8 ... second seal roll, 9 ... third seal roll, 1
4 ... First seal roll, F ... Object to be treated.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Masaka Tokai, Inoue Masayoshi, Kuramachi, Tsuchiura, Ibaraki Prefecture, 603 Hitachi, Ltd. Tsuchiura Plant (72) Inventor, Keitada Hata, 603, Kamimachi, Tsuchiura, Ibaraki Hitachi Tsuchiura Plant (72) Inventor Kenichi Kato 2-6-2 Otemachi, Chiyoda-ku, Tokyo Hitachi Ltd. (56) References JP-A-57-18737 (JP, A)

Claims (1)

[Claims] 1. A backup true on either or both sides of a vacuum processing chamber.
In a vacuum processing apparatus in which at least one empty chamber is arranged and the object to be processed is vacuum-processed in the vacuum processing chamber, the preliminary vacuum chambers are arranged to face each other in a conveyance direction of the object to be processed. A seal roll group, a case surrounding the first and second seal roll groups, a seal means for sealing between the first and second seal roll groups, and the case, respectively. The second seal roll group is composed of a first seal roll and a set of three seal rolls formed by the second and third seal rolls adjacent to the first seal roll. In the second seal roll group, the second seal roll and the third seal roll are horizontally arranged in the direction intersecting the conveyance direction of the object to be processed with the first seal roll as a reference.
A vacuum processing device characterized by being installed .