JPS6059251B2 - Continuous vacuum processing equipment - Google Patents

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a continuous vacuum processing apparatus for continuously plasma-treating plastic molded products, such as vinyl chloride resin films, in a vacuum state. refers to plastic films, plastic sheets, plastic-coated wires, etc.

[Background of the invention]

Recently, an apparatus has been developed in which preliminary vacuum chambers are arranged before and after a vacuum processing chamber, and the vacuum pressure is lowered stepwise to continuously surface-treat the workpiece.

This preliminary vacuum chamber includes a pair of seal rolls that face each other in the vertical direction and are juxtaposed in the conveyance direction of the workpiece, and a ripple member that continuously faces a part of the seal rolls along the axial direction. There is.

By the way, since the ripple member is arranged so as to be pressed against the seal roll due to the pressure difference between the atmosphere side and the vacuum side, especially in the preliminary vacuum chamber on the atmosphere side, the difference in attractive force causes the preliminary vacuum on the vacuum processing chamber side. Since the pressure difference is large compared to the pressure difference in the chamber, the driving torque of the seal roll is very large, which increases heat generation, and as a result, wear of the seal roll and the ripple member increases. [Object of the Invention] In view of the above points, an object of the present invention is to improve the durability of a seal roll and a ripple member.

[Summary of the invention]

In order to achieve the above object, the present invention is provided with a vacuum processing chamber for continuously processing objects to be processed, and preliminary vacuum chambers before and after this vacuum processing chamber. It consists of a pair of seal rolls arranged in plural sets, a ripple member that faces each other along the axial direction of these seal rolls, and a side piece that seals the end face of the seal roll, and the ripple member is connected to the atmosphere side and It is characterized in that it is arranged so as to be separated from the seal roll due to the pressure difference on the vacuum side.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 1 and 2, 1 is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber 1 A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1. It is evacuated via an exhaust pipe 5 to maintain a vacuum pressure of about 2 torr. The inside of the preliminary vacuum chambers 2 and 3 is maintained at a vacuum pressure slightly higher than the vacuum pressure inside the vacuum processing chamber 1 by a vacuum pump 6 connected thereto, and gradually reduced from atmospheric pressure through an exhaust pipe 7. and evacuated. The workpiece F to be processed is sent from the unwinding device 8 through the preliminary vacuum chamber 2 on the front side to the vacuum processing chamber 1, where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side to the winding device. 9 and is wound up.

10 is a driving motor, and this driving motor 10 is connected to a line shaft 11 and continuously variable transmissions 12, 13, 14, 15.
Through the vacuum processing chamber 1, pre-vacuum chambers 2 and 3, winding device 9
The rotational speeds of the respective drives of the vacuum processing chamber 1, preliminary vacuum chambers 2 and 3, and winding device 9 are appropriately adjusted by the continuously variable transmissions 12, 13, 14, and 15.

As shown in FIGS. 3 and 4, the front and rear preliminary vacuum chambers 2, 3 are provided with a pair of upper and lower seal rolls 16, 17,
Upper and lower cases 18, 19 and upper and lower ripple members 20, 2
1, etc., and the details will be explained below.

In FIGS. 3 and 4, a pair of upper and lower seal rolls 16 and 17 on the atmosphere side of the preliminary vacuum chamber (the leftmost or right preliminary vacuum chamber in FIG. 1) are made of metal, such as iron; An elastic material such as nitrile, rubber, silicone rubber, or urethane rubber is attached to the entire surface of the upper seal roll 16.

20 is fixed to the upper case 18 and the upper seal roll 1
The ripple member 20 is a ripple member that is in continuous contact with a part of the surface of the rubber member 6 along the axial direction, and is made of a material with high wear resistance such as urethane rubber.

21 is fixed to the lower case 19, and the lower seal roll 1
This ripple member 21 is a ripple member that continuously contacts a part of the surface of 7 in the axial direction, and similarly to the ripple member 20 described above, this ripple member 21 is also made of urethane rubber or the like.

The cross-sectional shapes of these ripple members 20 and 21 are bent so that the tip sides facing the upper and lower seal rolls 16 and 17 have elasticity, as shown in FIG. Then, as shown in FIG. 6, the ripple members 20 and 21 are separated from the seal rolls 16 and 17 by the pressure difference between the atmospheric side and the vacuum side of the preliminary vacuum chamber. The seal rolls 16 and 17 are attached in opposite directions. In FIG. 6, if the pressure on the atmospheric side is A1, the pressure on the vacuum side is B1, and the pressure between the atmospheric side and the vacuum side is C, then pressure A is higher than pressure C on the atmospheric side of the preliminary vacuum chamber 2, so A force acts on the ripple member 20 or the ripple member 21 in the direction of separating it from the upper and lower seal rolls 16 and 17. Furthermore, since the pressure C is higher than the pressure B on the vacuum side of the preliminary vacuum chamber 2, the same force as described above acts on the ripple member 2.
Acts on 0. That is, the ripple member 20 on the atmospheric side of the preliminary vacuum chamber 2 has its tip facing upwardly against the upper seal roll 16, and the tip of the ripple member 21 faces downwardly facing the lower sealing roll 17. Further, the ripple members 20 and 21 on the vacuum side of the preliminary vacuum chamber 2 are opposed to the seal rolls 16 and 17 in the opposite direction to the ripple members 20 and 21 on the atmosphere side. On the other hand, the pre-vacuum chamber 3 is installed in the opposite direction to the pre-vacuum chamber 2 based on the same principle. Next, the operation of the device of the present invention will be explained.

The ripple members 20 and 21 facing each other along the axial direction of the upper and lower seal rolls 16 and 17 on the atmospheric side of the preliminary vacuum chamber on the far left or right side of FIG. 1 are in a state where no pressure difference occurs between the atmospheric side and the vacuum side. That is, when the vacuum pump 6 is not in operation, the elastic force of the ripple member causes the seal rolls 16, 1 to
It is pressed against 7.

Next, the vacuum pump 6 is activated, and the pressures A, C and C, B are
When a pressure difference occurs, a force is applied to the ripple members 20, 21 on the atmospheric side and the vacuum side, respectively, in a direction away from the seal rolls 16, 17. As a result, the force due to the pressure difference overcomes the elastic force of the ripple members 20, 21, and a minute gap is formed between the ripple members 20, 21 and the upper and lower seal rolls 16, 17, and air flows through the gap. . At this time, the air that has flowed into the seal roll 1
6, 17 and the ripple members 20, 21, the sliding resistance between the seal roll and the ripple member is extremely small, and the cooling effect reduces the heat generation of the seal roll and the ripple member. To prevent. However, although the degree of vacuum in the preliminary vacuum chamber on the atmosphere side deteriorates slightly due to the inflowing air, in the preliminary vacuum chamber near the vacuum processing chamber 1, the pressure difference is very small, so the pressure difference between the seal roll and the ripple member is The sealing effect is great because it is almost in contact with the In order to confirm the effect of arranging the ripple member so as to separate from the seal roll due to the pressure difference as in the present invention, we compared the same case where the ripple member was arranged so as to press against the seal roll due to the pressure difference as in the past. Comparisons were made based on the conditions. The results of measuring the driving torque, temperature, and vacuum degree of the seal roll in the preliminary vacuum chamber on the atmospheric side are shown in the table below.

As is clear from this table, when the ripple member is arranged as in the device of the present invention, the driving torque and temperature of the seal roll due to the sliding resistance and heat generation between the seal roll and the ripple member Since this is significantly reduced compared to the conventional arrangement, the durability of the seal roll and ripple member on the atmosphere side in particular is greatly improved. However, when comparing the degree of vacuum, when the ripple member is arranged as in the apparatus of the present invention, it is worse than in the conventional case, but as mentioned above, in the preliminary vacuum chamber near the vacuum processing chamber 1, the pressure Since the difference is very small, the sealing effect is large. [Effects of the Invention] According to the present invention, the sliding resistance between the seal roll and the ripple member is reduced and heat generation is prevented.
The durability of the seal roll and ripple member can be improved.

[Brief explanation of the drawing]

FIG. 1 is a schematic longitudinal sectional view of a continuous vacuum processing apparatus of the present invention, FIG. 2 is a schematic plan view of FIG. 1, FIG. 3 is a vertical sectional view of an embodiment of the apparatus of the present invention, and FIG. 3 is a sectional view taken along the line 4-4 in FIG. 3, FIG. 5 is a side sectional view showing the ripple member in the device of the present invention, and FIG. 6 is a diagram for explaining the mounting state of the ripple member in the device of the present invention. . 1... Vacuum processing chamber, 2, 3... Preliminary vacuum chamber, 16.
... Upper seal roll, 17 ... Lower seal roll, 20
, 21... Ripple member.

Claims (1)

[Claims] 1. A vacuum processing chamber for continuously processing objects to be processed, and preliminary vacuum chambers before and after this vacuum processing chamber, and a plurality of sets of the preliminary vacuum chambers are arranged in the transport direction of the objects to be processed. It consists of a pair of seal rolls, a ripple member that faces each other along the axial direction of these seal rolls, and a side piece that seals the end face of the seal roll. A continuous vacuum processing device characterized by being arranged so as to be separated from the seal roll by a difference. 2. The continuous vacuum processing apparatus according to claim 1, wherein the preliminary vacuum chamber provided with the ripple member is disposed on the atmosphere side.