JPH0688214B2 - Electroformed thin blade grindstone and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention particularly relates to an electroformed thin blade grindstone suitable for use in highly accurate cutting and grooving of a work material such as silicon or ferrite, and a method for manufacturing the same. It is about.

[Prior Art] In recent years, when cutting or grooving with high accuracy on a work material made of silicon, GaAs, ferrite or the like,
A thin blade grindstone called an electroformed thin blade grindstone in which superabrasive grains are dispersed in a metal plating phase is being used.

The figure shows a conventional electroformed thin blade grindstone of this type.
This electroformed thin blade grindstone 1 has a thickness of several tens of μ which is formed by dispersing superabrasive grains such as diamond and CBN in a metal plating phase selected from Ni, Co and their alloys.
It is a ring-shaped plate with a diameter of m to several hundreds of μm, and is sandwiched between a pair of mounting flanges 2 and 2 arranged on both sides, and is also fastened by a nut 3 to a whetstone shaft 4 rotating around its axis. It is made available for use.

By the way, in the production of such a conventional electroformed thin blade grindstone, first, on the surface of a stainless steel substrate, Ni ions in which superabrasive grains such as diamond are dispersed, Co ions or their alloy bases, etc. By applying electric plating using a liquid, a grindstone layer in which the superabrasive grains are dispersed in the metal plating phase made of Ni or the like is formed, and then the grindstone layer obtained after peeling the grindstone layer from this substrate is obtained. A method of obtaining the electroformed thin blade grindstone 1 by forming a circular grindstone shape by punching or the like is adopted.

Here, in the above conventional manufacturing method, the Ni formed
Since it is important to suppress the internal stress in the metallic plating phase composed of, for example, a small amount, a primary brightener made of a compound containing sulfur such as Satsukaline Na is added to the above electrical plating solution. In this case, the primary brightening agent or the like added to the electric plating solution is decomposed and produced by the sulfur contained therein during the electric plating, and co-folds in the metallic plating phase. And in this electroformed thin blade grindstone 1, the hardness of the metal plating phase increases to Hv = 550 to 650 mainly due to the influence of the co-folded sulfur of about 0.01 to 0.3 wt%, so that mechanical strength There is an advantage that the strength and the rigidity are enhanced, and therefore even a very thin one can be put to practical use.

[Problems to be Solved by the Invention] However, in the above conventional electroformed thin blade grindstone, as a result of the metal plating phase being hardened due to the effect of the brightening agent containing sulfur, etc., the superabrasive grains involved in cutting Even if it is worn away, the wear rate of the metal plating phase is slow, and thus the protrusion of the superabrasive grains that should be newly involved in cutting becomes slow. That is,
Since the so-called self-generated effect is not smoothly performed, the sharpness thereof deteriorates with time, and in extreme cases, the cutting resistance increases and the electroformed thin blade grindstone itself may be bent.

Then, the inventors of the present application have earned the following knowledge as a result of intensive studies to solve the drawbacks of the conventional electroformed thin blade grindstone.

(B) When the metallic plating phase made of Ni or the like as it is formed by electric plating is heated to 20 ° C. or higher, the metallic plating phase is softened and its self-propelling action is improved.

(B) At the same time, the metallic plating phase becomes brittle due to the formation of an intermetallic compound such as Ni-S at the crystal grain boundaries, which reduces the fatigue strength against repeated loading, and When it is used for a long time, arc-shaped cracks, which are considered to be caused by repetitive load, are generated at the contact portion of the mounting flanges 2 and 2 with the outer peripheral edge portion before the sharpness of the cutting edge is deteriorated. As a result, the tool life is shortened.

(C) However, when forming the metal plating phase, if a small amount of Mn is added to this in advance, when this metal plating phase is heated to 200 ° C. or higher in the same manner, it softens and While the self-reliance is improved, the above Mn
As a result, the formation of an intermetallic compound of sulfur and Ni or Co is prevented, so that the embrittlement of the metallic plating phase due to the above intermetallic compound is eventually prevented.

[Object of the Invention] The present invention has been made based on the above-mentioned findings, and is capable of smoothly performing self-propelled action and excellent in sharpness, and
An object of the present invention is to provide an electroformed thin blade grindstone having a long service life and a manufacturing method thereof.

[Means for Solving Problems] The electroformed thin blade grindstone and the method for manufacturing the same according to the present invention have superabrasive grains dispersed therein, and 0.01 to 0.3% by weight of sulfur relative to the total weight.
Included in the metal plating phase selected from Ni, Co, and alloys thereof containing Mn about 10% more than the sulfur content of this metal plating phase, and at least the periphery of the metal plating phase. By subjecting the portion to heat treatment at a temperature of 200 ° C. or higher, the metallic plating phase of the portion has a recrystallized structure.

[Operation] In the electroformed thin blade grindstone having the above-mentioned configuration, 0.
First, the metal plating phase containing 01 to 0.3% by weight of sulfur and Mn, in which superabrasive particles are dispersed, selected from Ni, Co, and alloys thereof is heated to 200 ° C. or higher to be contained inside. Since the metal plating phase is softened by the release of stored hydrogen, etc., the wear of the metal plating phase at the time of cutting is promoted, and the autogenous action thereof is improved. Along with this, the formation of intermetallic compounds of sulfur and Ni or Co at the grain boundaries by Mn contained in the metal plating phase by about 10% more than the sulfur content of the metal plating phase. Is prevented, so that the embrittlement of the metal plating phase due to this is prevented.

[Embodiment] An embodiment of the electroformed thin blade grindstone of the present invention and a method for manufacturing the same will be specifically described below.

In the electroformed thin blade grindstone of this example, diamond and CBN
Ni, Co in which superabrasive grains such as
And in the metallurgical phase selected from those alloys, a small amount of Mn is further added, and the range of 0.05 to 3.0 mm of the outer peripheral portion having the cutting edge portion is formed by the recrystallization structure of this metallurgical phase. There is.

The method for manufacturing the electroformed thin blade grindstone will be specifically described below.

First, after masking the surface of a stainless steel substrate that has been subjected to a process of peeling off the metal to be plated, leaving a portion that is the prototype shape of the grindstone, a cleaning process such as degreasing is performed. Next, on the surface of this substrate, superabrasive grains such as diamond are dispersed, and a small amount of Mn ions are added to an electric plating solution containing Ni ions and Co ions, and a brightening agent made of an organic compound containing sulfur is added. The thickness of the above-mentioned superabrasive grains dispersed in the Ni-Co alloy plating phase containing a trace amount of Mn is several tens to several hundreds μm.
To form a whetstone layer.

Here, as the content of Mn in the alloy plating phase, the content of sulfur in the alloy plating phase (0.01 to
0.3 wt%) about 10% more. That is, when the content of Mn is not more than the content of sulfur, the effect of suppressing the formation of an intermetallic compound of sulfur and Ni or Co is not sufficiently exerted, and the content of sulfur is 10 or less.
Even if Mn is added in an amount exceeding%, the remarkable effect corresponding to it can no longer be obtained.

Next, after the substrate on which the grindstone layer has been formed in this way is washed with water including brushing, the grindstone layer is peeled off from this substrate. Then, the obtained grindstone layer is formed into a circular grindstone shape by punching or the like and further processed into a perfect circle. Then, in the thin disk-shaped electroformed grindstone obtained in this manner, a heat treatment is applied to a portion of 0.05 to 3.0 mm from the outer periphery which is the cutting edge portion by an electric discharge machine, and the structure is recrystallized to Obtain an electroformed thin blade grindstone.

Here, the temperature of the heat treatment needs to be set to 200 ° C. or higher. That is, if the heat treatment temperature is less than 200 ° C., the recrystallization of the metal plating phase is not sufficiently performed, and the required softening effect of the metal plating phase cannot be obtained.

However, according to such an electroformed thin blade grindstone, since the outer peripheral portion which is the cutting edge portion is formed by the metallurgical phase which is a recrystallized structure, the metal metallic phase of this portion is softened, and thereby during cutting. The abrasion removal of the metal plating phase is promoted, and new superabrasive grains are smoothly projected. As a result, since the self-reliance can be improved, the sharpness does not deteriorate over time, and thus excellent cutting performance can be obtained.

At the same time, the formation of the intermetallic compound of sulfur is hindered by the small amount of Mn added in the metallic plating phase, so that the embrittlement of the metallic plating phase due to this is prevented. Therefore, it is possible to prevent the occurrence of cracks and the like due to repeated loads because it does not cause a reduction in fatigue strength due to the embrittlement of the metal plating phase, and as a result, the tool life can be greatly extended. .

Moreover, in the electroformed thin blade grindstone, it is possible to obtain an excellent sharpness because it is softened by recrystallizing only the metallurgical phase of the cutting edge portion involved in cutting, and further the main body portion not involved in cutting Can maintain high rigidity as it is. Therefore, it can be sufficiently used even in a process requiring severe cutting conditions such as deep cutting and high-speed feed cutting.

In addition, since the electric discharge machining is used for the heat treatment of the metal plating phase, the heat treatment can be locally performed without affecting other portions. Therefore, for example, when the heat treatment is applied to the outer peripheral portion of the small-diameter thin blade wheel within the range of 0.1 mm width, it is possible to recrystallize the above-mentioned metallic plating phase in a required range according to each application.

Incidentally, in the description of the above-mentioned examples, although the re-crystallized structure was subjected to the heat treatment to the metal plating phase within the range of 0.005 to 3.0 mm of the outer peripheral portion to be the cutting edge, it is not limited to this, but of the soft material. For those used for cutting, those having a small outer diameter, etc., the entire metal plating phase may be subjected to heat treatment for recrystallization.

[Experimental Example] Trace amount of sulfur (content: 0.1wt%) and Mn (content: 0.13wt)
%) Electroplated thin blade grindstone (outer diameter: 76.2φ, inner diameter: 40.0φ, thickness: 0.20mm) with diamond (particle size: 20-30μm) dispersed as a superabrasive grain in a metallic plating phase made of Ni ) Was prepared.

Then, from these electroformed thin blade grindstones, the electroformed thin blade grindstone A according to the present invention, which is heat-treated at 300 ° C. for 2 hours in an inert gas atmosphere only within the range of 2 mm of the outer peripheral portion to be the blade tip, Of the outer peripheral part
The above three types of electroformed thin blade grindstones were produced: the electroformed thin blade grindstone B according to the present invention, which was heat-treated by electric discharge machining only within the range of 0.2 mm, and the conventional electroformed thin blade grindstone, which was not heat-treated at all.

Then, with these three types of electroformed thin blade grindstones, wet cutting of single crystal ferrite was performed under the following cutting conditions.

Peripheral speed: 1500 mm / min, Depth of cut: 2.0 mm Feed rate: 50 mm / min As a result of the above cutting process, compared to the conventional electroformed thin blade grindstone, the electroformed thin blade grindstones A and B according to the present invention each start cutting 25% in cutting resistance at the time of cutting, and 55% in the amount of increase in cutting resistance over time (electroformed thin blade grindstone A), 60%
(Same as above, B) It was confirmed to decrease.

[Effects of the Invention] As described above, the electroformed thin blade grindstone of the present invention and the method for manufacturing the same are composed of Ni, Co and alloys thereof in which superabrasive grains are dispersed and which contains 0.01 to 0.3% by weight of sulfur with respect to the total weight. In the metal plating phase selected from the above, Mn is added by about 10% with respect to the sulfur content of the metal plating phase, and at least the outer peripheral portion is subjected to heat treatment at a temperature of 200 ° C. or higher to A part of the metal plating phase has a recrystallized structure.

Therefore, in the electroformed thin blade grindstone of the present invention, it is possible to soften the metal plating phase of the portion that has been subjected to the heat treatment, and as a result, the self-sustaining effect is smoothly performed and excellent sharpness is maintained for a long period of time. You can get it,
During the heat treatment, Mn prevents the formation of the intermetallic compound of sulfur and prevents the embrittlement of the metal-plated phase due to this, so that the fatigue resistance strength does not decrease due to the embrittlement of the metal-plated phase. Therefore, the tool life can be greatly extended.

[Brief description of drawings]

The figure is a schematic side sectional view showing a conventional electroformed thin blade grindstone fixed to a grindstone shaft. 1 ... Electroformed thin blade grindstone.

Claims (3)

[Claims] 1. Sulfur is 0.01 to 0.3% by weight based on the total weight.
A thin-walled plate-shaped electroformed thin blade grindstone in which superabrasive grains are dispersed in a metal plating phase selected from Ni, Co, and alloys thereof, including sulfur of the metal plating phase in the metal plating phase. The electroformed thin blade grindstone is characterized by containing about 10% more Mn with respect to the content of, and at least the outer peripheral portion of the metal plating phase having a recrystallized structure. 2. An electroplating solution containing an organic compound containing sulfur and Mn ions, wherein Ni, Co and their alloys on which the sulfur co-deposits and the co-deposition of the sulfur is prevented by Mn. While forming the selected metal plating phase,
Superabrasive grains are dispersed in the metal plating phase to form a grindstone layer, and then the substrate is removed to form a thin plate grindstone, and at least the outer peripheral portion of this grindstone is subjected to heat treatment at a temperature of 200 ° C. or higher. As a result, at least the outer peripheral portion of this grindstone has a recrystallized structure, and a method for manufacturing an electroformed thin blade grindstone. 3. The method for producing an electroformed thin blade grindstone according to claim 2, wherein the heat treatment is electric discharge machining or laser machining.