JPH0692073B2 - Electroformed thin blade grindstone and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention particularly relates to an electroformed thin blade grindstone suitable for use in highly accurate cutting and grooving of a work material such as silicon or ferrite, and a method for manufacturing the same. It is about.

[Prior Art] In recent years, when cutting or grooving with high accuracy on a work material made of silicon, GaAs, ferrite or the like,
A thin blade grindstone called an electroformed thin blade grindstone in which superabrasive grains are dispersed in a metal plating phase is being used.

The figure shows a conventional electroformed thin blade grindstone of this type.
This electroformed thin blade grindstone 1 has a thickness of several tens of μm formed by dispersing superabrasive grains such as diamond and CBN in a metal plating phase made of Ni, Co or their alloys.
It is a ring-shaped plate of several hundreds of μm, sandwiched between a pair of mounting flanges 2 and 2 arranged on both sides, and fixed by a nut 3 to a grindstone shaft 4 rotating around its axis. Be used.

By the way, in the production of such a conventional electroformed thin blade grindstone, first, on the surface of the substrate made of stainless steel, Ni-based, in which superabrasive grains such as diamond are dispersed, Co-based, or an electrical base containing these alloys, etc. Electric plating is performed using a plating solution to form a grindstone layer in which the superabrasive grains are dispersed in the metal plating phase made of Ni or the like, and then the grindstone obtained after peeling the grindstone layer from this substrate is obtained. A method of obtaining the electroformed thin blade grindstone 1 by forming a layer into a circular grindstone shape by punching or the like is adopted.

Here, in the above conventional manufacturing method, the Ni formed
Since it is important to suppress the internal stress in the metallic plating phase composed of, for example, a small amount, a primary brightener composed of a compound containing sulfur such as Satsukaline Na is added to the above electrical plating solution. In this case, the primary brightening agent added to the electroplating solution causes the sulfur contained therein to be decomposed and produced during electroplating and co-deposits in the metal plating phase. In the electroformed thin blade grindstone 1, the hardness of the metallic plating phase is increased to Hv = 550 to 650, mainly due to the influence of the above-described eutectoid amount of sulfur of about 0.01 to 0.3 wt%. There is an advantage that mechanical strength and rigidity are increased, and therefore even a very thin wall can be put to practical use.

[Problems to be Solved by the Invention] However, in the above-mentioned conventional electroformed thin blade grindstone, since the hardness of the metal plating phase is high, even if the superabrasive grains involved in cutting are worn away, the metal plating phase Wear rate is slow, and thus the protrusion of superabrasive grains, which should be newly involved in cutting, becomes slow. As a result, the so-called self-generated effect is not smoothly performed and its sharpness decreases over time, and in extreme cases, there is a possibility that the cutting resistance increases and bending occurs in the electroformed thin blade grindstone itself. .

Therefore, the inventors of the present application, as a result of repeated studies to solve the drawbacks of the conventional electroformed thin blade grindstone, are selected from the above Ni, Co and their alloys formed by electric plating. When the metallic powder phase is heated to 200 ° C or higher, the metallic powder phase softens due to the effect of the above-mentioned sulfur contained inside, and at the same time, Ni-S intermetallic compound is formed at the crystal grain boundary to cause brittleness. We have come to the knowledge that it will turn into.

[Object of the Invention] The present invention has been made based on the above findings, and it is an object of the present invention to provide an electroformed thin-edged grindstone having a smooth autogenous action and excellent sharpness, and a method for manufacturing the same.

[Means for Solving Problems] The electroformed thin blade grindstone and the method for manufacturing the same according to the present invention have superabrasive grains dispersed therein, and 0.01 to 0.3% by weight of sulfur relative to the total weight.
Including Ni, Co and metal plating phase selected from alloys thereof, at least the outer peripheral portion of this metal plating phase,
By heat-treating at a temperature of 200 ° C. or higher, the metal plating phase in that portion has a recrystallized structure.

[Operation] In the electroformed thin blade grindstone having the above-mentioned configuration, the metal plating phase selected from Ni, Co and alloys thereof in which superabrasive particles are dispersed is heated to 200 ° C. or higher to be contained inside. Due to the influence of sulfur, the metallic plating phase is softened, and Ni-S intermetallic compound is further formed in the grain boundaries to make it brittle, resulting in wear of the metallic plating phase during cutting. Are promoted and their self-reliance is improved.

[Embodiment] An embodiment of the electroformed thin blade grindstone of the present invention and a method for manufacturing the same will be specifically described below.

In the electroformed thin blade grindstone of this example, diamond and CBN
Etc. superabrasive grains are dispersed, and sulfur is 0 based on the total weight.
0.05% of the peripheral part, which is the cutting edge part, of the metallic plating phase selected from Ni, Co and their alloys containing 01 to 0.3% by weight.
The range of up to 3.0 mm is formed by the recrystallized structure of the metallic plating phase.

The method for manufacturing the electroformed thin blade grindstone will be specifically described below.

First, after masking the surface of a stainless steel substrate that has been subjected to a process of peeling off the metal to be plated, leaving a portion that is the prototype shape of the grindstone, a cleaning process such as degreasing is performed. Next, on the surface of this substrate, using an electric plating solution containing sulfur and Ni group and Co group in which superabrasive particles such as diamond are dispersed, the superabrasive particles are dispersed in the Ni-Co alloy plating phase. A grindstone layer having a thickness dimension of several tens μm to several hundreds μm is formed.

Next, after the substrate on which the grindstone layer has been formed in this way is washed with water including brushing, the grindstone layer is peeled off from this substrate. Then, the obtained grindstone layer is formed into a circular grindstone shape by punching or the like and further processed into a perfect circle. Then, in the thin disk-shaped electroformed grindstone obtained in this manner, a heat treatment is applied to a portion of 0.05 to 3.0 mm from the outer periphery which is the cutting edge portion by an electric discharge machine, and the structure is recrystallized to Obtain an electroformed thin blade grindstone. Here, the temperature of the heat treatment needs to be set to 200 ° C. or higher. That is, if the heat treatment temperature is less than 200 ° C., the recrystallization of the metal plating phase is not sufficiently performed, and the required softening and embrittlement effects of the metal plating phase cannot be obtained.

Then, according to such an electroformed thin blade grindstone, since the outer peripheral portion which is the cutting edge portion is formed by the metal plating phase having a recrystallized structure, the metal plating phase of this portion is softened and brittle, As a result, the wear removal of the metal plating phase is promoted during cutting, and new superabrasive grains are projected smoothly. As a result, since the self-reliance can be improved, the sharpness does not deteriorate over time, and thus excellent cutting performance can be obtained.

Further, in the electroformed thin blade grindstone, it is possible to obtain an excellent sharpness because it is softened by recrystallizing only the metal plating phase of the cutting edge portion involved in cutting, and further the main body portion not involved in cutting Since it can maintain high rigidity as it is, it can also be used for machining that requires severe cutting conditions such as deep cutting and high-speed feed cutting.

Moreover, since the electric discharge machining is used for the heat treatment of the metal plating phase, the heat treatment can be locally performed without affecting other portions. Therefore, for example, when the heat treatment is applied to the outer peripheral portion of the small-diameter thin blade wheel within the range of 0.1 mm width, it is possible to recrystallize the above-mentioned metallic plating phase in a required range according to each application.

Incidentally, in the description of the above-mentioned examples, although the re-crystallized structure was subjected to the heat treatment to the metal plating phase within the range of 0.005 to 3.0 mm of the outer peripheral portion to be the cutting edge, it is not limited to this, but of the soft material. In the case of those used for cutting, those having an outer diameter or a small diameter, etc., the entire metal plating phase may be subjected to heat treatment for recrystallization.

[Example] An electroformed thin blade grindstone (outer diameter: 7) in which diamond (particle size: 20/30 μm) is dispersed as superabrasive particles in a metallic plating phase made of Ni
6.2φ, inner diameter: 40φ, thickness: 0.20 mm) were prepared.

Then, from these electroformed thin blade grindstones, the electroformed thin blade grindstone A according to the present invention was heat-treated at 300 ° C. for 2 hours in an inert gas atmosphere only within the range of 2.0 mm of the outer peripheral portion to be the blade tip, Electroformed thin blade grindstone B according to the present invention, which has been heat-treated by electric discharge machining only within the range of 0.1 mm of the outer peripheral portion, which is a conventional electroformed thin blade grindstone without any heat treatment, and the above three types of electroformed thin blade I made a whetstone.

Then, using these three types of electroformed thin blade grindstones, the single crystal ferrite was wet-cut under the following cutting conditions.

Peripheral speed: 1500 mm / min, Depth of cut: 2.0 mm Feed: 50 mm / min, As a result of the above cutting process, the electroformed thin blade grindstones A and B according to the present invention are different from the conventional electroformed thin blade grindstone at the start of cutting. Cutting resistance of 20%, and the increasing amount of cutting resistance over time is 50% (electroformed thin blade grindstone A), 60%
(Same as above, B) It was confirmed to decrease.

[Effects of the Invention] As described above, the electroformed thin blade grindstone of the present invention and the method for manufacturing the same are composed of Ni, Co and alloys thereof in which superabrasive grains are dispersed and which contains 0.01 to 0.3% by weight of sulfur relative to the total weight. In the metal plating phase selected from the above, at least the outer peripheral portion of the metal plating phase is subjected to a heat treatment at a temperature of 200 ° C. or higher to form a recrystallized structure in the metal plating phase of that portion, so that the metal of the portion is Since the beetle phase can be softened and embrittled, and the self-propelling action can be smoothly performed, excellent sharpness can be obtained over a long period of time.

[Brief description of drawings]

The figure is a schematic side sectional view showing a conventional electroformed thin blade grindstone fixed to a grindstone shaft. 1 ... Electroformed thin blade grindstone.

Claims (3)

[Claims] 1. Sulfur is 0.01 to 0.3% by weight based on the total weight.
Including Ni, in the metal plating phase selected from Co and their alloys, in a thin plate-shaped electroformed thin blade grindstone formed by dispersing superabrasive grains, at least the outer peripheral portion of the metal plating phase and a recrystallized structure An electroformed thin blade whetstone that is characterized. 2. Ni or Co in which sulfur is co-deposited on a substrate in an electroplating solution containing an organic compound containing sulfur.
And while forming a metal plating phase selected from these alloys to form a grindstone layer dispersed in the superabrasive grains in this metal plating phase, then after removing the substrate to form a thin plate-shaped grindstone, A method for producing an electroformed thin blade grindstone, characterized in that at least the outer peripheral part of this grindstone is subjected to a heat treatment at a temperature of 200 ° C. or higher to form at least the outer peripheral part of this grindstone with a recrystallized structure. 3. The method for producing an electroformed thin blade grindstone according to claim 2, wherein the heat treatment is electric discharge machining or laser machining.