JPH0691136B2 - Probe device with automatic probe card exchange function - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Industrial field of application) The present invention relates to a probe device with a probe card automatic exchange function.

(Prior Art) Generally, a large number of electrodes are arranged in an electronic component such as a semiconductor integrated circuit, and a probe device is used for the inspection thereof. In the inspection by this probe device, the probe needle tip array mounted on the probe card is connected to the electrode terminal array of the IC chip of the device under test, and the IC chip is inspected in this connection state. The connection between each probe needle and each electrode pad is performed by an operator while observing a magnifying glass, for example, a microscope, to move and position the object to be inspected, and then inspect the object to be inspected in a continuous automatic process. . However, the probe card needs to be replaced for each type of product to be inspected. As such a probe card replacement means, the probe card is unloaded from the storage portion and automatically transported from above to the probe card installation position. Since the automatic replacement function of the probe card is installed in the probe device in this way, the installation position of the column supporting the microscope is limited to the front side of the probe device that does not hinder the transport of the probe card.

Further, the above-mentioned microscope is configured to be rotatable around a column, and is used by installing it above the probe card as needed, but when the probe card is automatically replaced, it hinders the transportation of the probe card. The support was rotated around the center and retracted above the operation panel on the front side of the probe device.

(Problems to be Solved by the Invention) However, since the retracted position of the microscope is not accurately specified and the lock mechanism is not installed, the retracted position becomes ambiguous. If you perform automatic probe card replacement without completely retracting the microscope in this way, the microscope and probe card will come into contact with each other, causing adverse effects. Or the microscope may be damaged. Furthermore, even if the microscope is completely retracted, the lock mechanism is not installed, so even if a slight shock is applied, the microscope moves, which hinders automatic replacement of the probe card.

The present invention has been made to improve the above-mentioned points, and the retracted position of the enlarging mechanism can be easily confirmed by soft-locking the enlarging mechanism at a predetermined position outside the probe card automatic exchange work area. In addition, the present invention provides a probe device with a probe card automatic exchange mechanism, which has an effect that the probe card can be automatically exchanged safely.

[Structure of Invention]

(Means for Solving the Problems) The present invention relates to a rotation of the probe card, which is enlarged when the probe card of the probe apparatus for measuring the position by connecting the stylus and the electrode pad mounted on the probe card is measured. (EN) A probe device with a probe card automatic exchange function, characterized in that the probe device with an automatic exchange function is provided with a means for soft-locking an enlargement mechanism which is attached as much as possible at a predetermined position outside the exchange work area.

(Function and effect) By soft-locking the expansion mechanism at a predetermined position outside the probe card automatic exchange area, it is possible to easily confirm the retracted safety position of the expansion mechanism and safely perform automatic probe card exchange. effective.

(Embodiment) Next, an embodiment of the probe device with a probe card automatic exchange function of the present invention will be described with reference to the drawings.

The configuration of this device is mainly composed of a probe section (1) and a probe card automatic exchange section (2). The prober unit (1) installs, for example, 25 inspected objects such as semiconductor wafers (4) at a predetermined interval in the cassette (3). The cassette (3) accommodating the wafer (4) is loaded into the cassette accommodating portion (5). The wafers (4) are taken out from the storage section (5) one by one, and a preliminary positioning stage (6) is provided.
Transport to. The preliminary positioning stage (6) is rotated to perform preliminary positioning to an accuracy of about ± 1 ° with reference to the orientation flat of the wafer (4), and then the wafer (4)
Are transported to the inspection stage (7). In order to accurately position the wafer (4) transferred to the inspection stage (7), a pattern recognition mechanism using a CCD camera or a recognition mechanism using a laser is installed. After accurately positioning the scribe line of the wafer (4) using this recognition mechanism as a reference, the probe needle (9) of the probe card (8) is soft-touched on the wafer (4) and the wafer (4) is automatically moved. ) Electrical characteristics. When performing the inspection process of the semiconductor wafer (4) by the prober unit (1) having such a continuous automatic inspection function, since the electrode pad pattern is different for each type of the semiconductor wafer (4), the electrode of that type is used. It is necessary to replace the probe card (8) corresponding to the pad. Next, the probe card automatic exchange section (2) will be described. Adjust the position of the probe card (8) in advance and screw the insert ring (10).
The insert rings (10) are provided at appropriate intervals to accommodate, for example, a stocker (11) capable of accommodating six models. At this time, it is preferable that each probe card (8) be of a different type corresponding to each inspection target type. Further, when the insert ring (10) holding each probe card (8) is housed in the stocker (11), a positioning mechanism is provided for each of the mounting portions (12) that abut the insert ring (10) on a part thereof. Provide and position accurately. The probe card (8) thus positioned is selectively transported by the insert ring (10) from the stocker (11) to the probe card installation position (13) of the prober unit (1) by a transport mechanism (not shown). For this transportation, after inserting the insert ring (10) housed in the stocker (11) horizontally at a predetermined interval,
The insert ring (10) is vertically lowered from above to the probe card installation position (13) to accurately install the probe card (8) held by the insert ring (10).

Further, the operator needs to perform a teaching operation every time the type of the probe card (8) is changed. This teaching operation means that the operator monitors a magnifying mechanism such as a microscope (14) to adjust the alignment between the electrode pad arrangement pattern of the semiconductor wafer (4) and the tip arrangement pattern of the probe needle (9) of the probe card (8). While operating the switches on the operation panel (15). The microscope (1
4) is attached to the arm (17) that can rotate around the column (16), and it interferes with the transfer of the probe card (8) during the automatic replacement of the probe card. Operation panel (15) provided on the front surface of the prober unit (1) at a predetermined position
A soft lock mechanism (18) is used to secure the upper part flexibly. The soft lock mechanism (18) has a structure in which a slide plate (19) is fixed to, for example, a column (16) of a column as shown in FIG. The above-mentioned probe card automatic exchange work area means the inside of the outer end of the action trajectory of the probe card when the probe card is exchanged by the robot arm. Bearings (20) are installed opposite to each other with the slide plate (19) interposed therebetween. A spacer (21) is provided to maintain the distance between the bearings (20). With the above-described configuration, the arm (17) holding the microscope (14) can be rotated around the pillar (16). From the surface of this arm (17), attach the spring blanker (22) to the spacer (2
Pass through 1) and make contact with the slide plate (19). As shown in FIG. 3, the spring blanker (22) has a ball (23) at its tip, and a spring (24) is installed so as to press the ball (23). The ball (23) presses the slide plate (19) by this spring pressure, but the slide plate (19) has a lock portion (25) formed at a predetermined position. The lock portion (25) is a groove corresponding to the ball (23) of the spring blanker (22).
Next, the operation of the soft lock mechanism (18) will be described.

An arm (17) holding a microscope (14) is rotated by a bearing (20) with a support (16) fixed. At this time, the spring blanker (22) attached to the arm (17) has a slide plate (19) fixed to the column (16) with the ball (23) at the tip pressed by the spring (24). Abutting on top. While rotating the arm (17), the ball (23) of the spring blanker (22) slides into the slide plate (19).
When abutting on the lock part (25), the ball (23) is pushed out by the pressing force of the spring (24) and fixed to the lock part (25). This fixing does not forcibly stop the rotation of the arm (17), but it is possible to restart the rotation again with a small force by fixing the arm (17) flexibly.

In addition, the strength of the fixing is the spring blanker (22).
It can be adjusted by changing the elastic force of the spring (24).

As described above, since the microscope (14) is provided with the soft lock mechanism (18) and the soft lock can be performed above the operation panel (15), the microscope (9) during the inspection of the inspection object and the automatic transfer of the probe card. Since the retracted position can be easily recognized and it is not completely fixed, the microscope can be smoothly rotated again.

The present invention is not limited to the above embodiment, and any mechanism may be used as long as it can softly lock the microscope for enlarging the object to be inspected at a predetermined position. Furthermore, any device using a microscope can be used. Furthermore, even if the position to apply the soft lock is not on the operation panel,
For automatic transportation of probe cards and operator passages,
Any position may be used as long as it does not stick out and does not interfere with each other.

In the above embodiment, an example in which the enlargement mechanism is supported by the rotating arm has been described, but either the telescopic arm or the arm having both functions may be supported.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a probe device with a probe card automatic exchange function for explaining an embodiment of the present invention, FIG. 2 is an explanatory diagram for holding the microscope of FIG. 1, and FIG. 3 is a diagram of FIG. It is a principal part enlarged view of a soft lock mechanism. 1 …… Prober part 2 …… Probe card automatic exchange part 8 …… Probe card, 14 …… Microscope 16 …… Stands, 17 …… Arm 18 …… Soft lock mechanism, 19 …… Slide plate 22 …… Spring blanker 23 …… Ball, 24 …… Spring 25 …… Lock part

Claims (1)

[Claims] 1. A magnifying function rotatably attached to an electrode pad in an automatic replacement of a probe card of a probe device for positioning and connecting a stylus attached to a probe card and an electrode pad for measurement. And a probe device with a function for automatically replacing a probe card, comprising means for applying a soft lock at a predetermined position outside the replacement work area.