JPH07100602B2 - Ozone generator - Google Patents
Ozone generatorInfo
- Publication number
- JPH07100602B2 JPH07100602B2 JP62272400A JP27240087A JPH07100602B2 JP H07100602 B2 JPH07100602 B2 JP H07100602B2 JP 62272400 A JP62272400 A JP 62272400A JP 27240087 A JP27240087 A JP 27240087A JP H07100602 B2 JPH07100602 B2 JP H07100602B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- electrode
- cooling liquid
- ozone
- ozone generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims description 44
- 239000000110 cooling liquid Substances 0.000 claims description 42
- 238000001816 cooling Methods 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 10
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 8
- 229910052731 fluorine Inorganic materials 0.000 claims description 8
- 239000011737 fluorine Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 239000011800 void material Substances 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008016 vaporization Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/70—Cooling of the discharger; Means for making cooling unnecessary
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【発明の詳細な説明】 〔発明の目的〕 （産業上の利用分野） 本発明は、オゾン発生装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to an ozone generator.
（従来の技術） 一般に、オゾンの生成は、空気又は酸素を含有するガス
の中で、無声放電又は紫外線を用いる方法がある。特
に、無声放電を用いる方法は、オゾンの生成効率が高い
ので、従来よく使われていた。(Prior Art) Generally, ozone can be generated by using silent discharge or ultraviolet light in a gas containing air or oxygen. In particular, the method using silent discharge has been used frequently because of its high ozone generation efficiency.
この無声放電を用いる方法は、少くとも酸素を含有する
ガスの通路に、誘電体を介して一対の電極を設け、この
電極に高圧電源を接続して電極間に電圧を印加すること
により放電し、前記少くとも酸素を含有するガスをオゾ
ン化するものである。この場合、電極に与えられた電気
エネルギのうち約95％が熱に変換され、この熱により電
極の温度が上昇する。また、通路内のオゾン化する放電
部分にも大量の熱が発生し、この熱によりオゾンが分解
されてオゾン発生効率は低下する。The method using this silent discharge provides a pair of electrodes through a dielectric in a passage of gas containing at least oxygen, and a high-voltage power supply is connected to these electrodes to apply a voltage between the electrodes to perform discharge. The gas containing at least oxygen is ozonized. In this case, about 95% of the electric energy given to the electrode is converted into heat, and this heat raises the temperature of the electrode. Further, a large amount of heat is also generated in the discharge portion of the passage where ozone is generated, and this heat decomposes ozone to lower the ozone generation efficiency.
そこで、電極の一方を空気で、他方を水で冷却し、オゾ
ンの生成効率を向上する技術が、特公昭52−35351号，
特開昭51−132191号，特開昭51−145489号公報に開示さ
れている。Therefore, a technique for improving the ozone generation efficiency by cooling one of the electrodes with air and the other with water is disclosed in Japanese Examined Patent Publication No. 52-35351.
It is disclosed in JP-A-51-132191 and JP-A-51-145489.
しかし、上記特公昭52−35351号，特開昭51−132191
号，特開昭51−145489号公報に開示される技術では、絶
縁性を確保することが難しく、高圧電源による絶縁破壊
等の事故を防止することが困難であった。また、電極の
冷却が十分に行なわれておらず、オゾンの生成効率もそ
れ程向上したとは言えなかった。However, JP-B-52-35351 and JP-A-51-132191
However, with the technology disclosed in Japanese Patent Laid-Open No. 51-145489, it is difficult to ensure insulation and it is difficult to prevent accidents such as dielectric breakdown due to a high-voltage power supply. Further, the electrode was not sufficiently cooled, and it could not be said that the ozone generation efficiency was improved so much.
よって、これらの問題点を解決する為に、両電極を絶縁
性のよくない水を使用して冷却しても、その絶縁性を確
保しながら水の秀れた冷却能力を利用する技術が特開昭
61−215202号に開示されている。Therefore, in order to solve these problems, even if both electrodes are cooled by using water with poor insulation, a technology that utilizes the excellent cooling capacity of water while ensuring the insulation is a special feature. Kaisho
No. 61-215202.
（発明が解決しようとする問題点） しかしながら、上記特開昭62−215202号に開示される技
術では、片方の電極を高純度アルミナ製誘電体に埋設し
て絶縁性を確保しているが、一般に誘電体に使われるガ
ラスや高純度アルミナで構成されるセラミックは、圧力
や衝撃で破損しやすいので、誘電体が破損した場合に絶
縁性を喪失し、オゾン発生装置のみならず、このオゾン
発生装置を使用している設備全体の故障を生じるという
問題があった。(Problems to be Solved by the Invention) However, in the technique disclosed in Japanese Patent Laid-Open No. 62-215202, one electrode is embedded in a high-purity alumina dielectric to ensure insulation. Glass, which is generally used for dielectrics, and ceramics, which are composed of high-purity alumina, are easily damaged by pressure or impact, so if the dielectric is damaged, the insulation is lost, and not only the ozone generator but also ozone There is a problem in that the entire equipment using the device is broken.
本発明は、上記点に対処してなされたもので、オゾンの
発生効率を著しく向上させるオゾン発生装置を提供する
ものである。The present invention has been made in consideration of the above points, and provides an ozone generator that significantly improves the ozone generation efficiency.
（問題点を解決するための手段） 本発明は、対向配置した高圧電極と接地電極間に電圧を
印加してオゾンを発生するオゾン発生装置において、前
記接地電極の前記高圧電極と対向する面に誘電体を設け
ると共に、前記両電極の背面側にそれぞれ電極冷却部を
設け、これら電極冷却部に冷却液を強制循環する一つの
冷却液循環系を設けたことを特徴とする。(Means for Solving the Problems) The present invention relates to an ozone generator for generating ozone by applying a voltage between a high voltage electrode and a ground electrode which are arranged to face each other, and a surface of the ground electrode facing the high voltage electrode. In addition to providing a dielectric, electrode cooling parts are provided on the back sides of both electrodes, and one cooling liquid circulation system for forcibly circulating the cooling liquid is provided in these electrode cooling parts.
（作 用） 本発明のオゾン発生装置では、電気的に絶縁性を有する
冷却液を用いたことで、電圧を印加する電極を直接冷却
できるので冷却能力が著しく向上する。また、同一冷却
液を用いてひとつの循環系で両電極の冷却を行なえるの
で、装置を非常にコンパクトにすることができる。そし
て、例えば冷却液に弗素系不活性液体を用いて、この冷
却液を気化させながら電極の冷却を行うと、電極の熱を
気化熱として奪うことができるので、より冷却能力が向
上し、オゾンの発生効率が著しく向上する。(Operation) In the ozone generator of the present invention, since the cooling liquid having an electrically insulating property is used, the electrode to which the voltage is applied can be directly cooled, so that the cooling capacity is remarkably improved. Further, since both electrodes can be cooled by one circulation system using the same cooling liquid, the device can be made very compact. If, for example, a fluorine-based inert liquid is used as the cooling liquid and the electrode is cooled while the cooling liquid is vaporized, the heat of the electrode can be taken away as vaporization heat, so that the cooling capacity is further improved and the ozone The generation efficiency of is significantly improved.
また、誘電体等が破損したり、その他の理由により冷却
液が漏れたとしても電気的絶縁性には影響を生じないの
で、オゾン発生装置やこのオゾン発生装置を使用してい
る設備全体の故障等の発生を防止することができる。In addition, even if the dielectric etc. is damaged or the coolant leaks due to other reasons, it does not affect the electrical insulation, so failure of the ozone generator and the entire equipment using this ozone generator will occur. And the like can be prevented.
（実施例） 以下、本発明のオゾン発生装置の実施例を図面を参照し
て説明する。(Example) Hereinafter, the Example of the ozone generator of this invention is described with reference to drawings.
絶縁性のケース（１）内に、内部に冷却液が循環する様
な高圧電極冷却部（２）を備えた平面状高圧電極（３）
と、この高圧電極（３）に空隙（４）とセラミック製誘
電体（５）を介して対向し、内部に冷却液が循環する様
な接地電極冷却部（６）を備えた平面状接地電極（７）
が設けられている。A planar high-voltage electrode (3) provided with a high-voltage electrode cooling part (2) in which a cooling liquid circulates inside an insulating case (1).
And a planar ground electrode having a ground electrode cooling part (6) facing the high-voltage electrode (3) via a void (4) and a ceramic dielectric (5) and allowing a cooling liquid to circulate inside. (7)
Is provided.
そして、空隙（４）と誘電体（５）を介して対向して放
電領域を形成した高圧電極（３）と接地電極（７）の間
に、少なくとも酸素を含んだガスを供給するガス供給口
（８）が設けられており、前記ガス供給口（８）はガス
流量調節器（９）を介して酸素供給源（10）に接続され
ている。また、ガス供給口（８）対向部には、少くとも
オゾンを含んだガスを放出可能なガス出口（11）が設け
られている。A gas supply port for supplying a gas containing at least oxygen between the high-voltage electrode (3), which has formed a discharge region in opposition to the void (4) via the dielectric (5), and the ground electrode (7). (8) is provided, and the gas supply port (8) is connected to an oxygen supply source (10) via a gas flow rate controller (9). Further, a gas outlet (11) capable of discharging a gas containing at least ozone is provided at a portion facing the gas supply port (8).
この高圧電極（３）と接地電極（７）に電圧を印加する
如く高圧電源（12）が接続設置されている。A high voltage power source (12) is connected and installed so as to apply a voltage to the high voltage electrode (3) and the ground electrode (7).
また、高圧電極冷却部（２）及び接地電極冷却部（６）
に設けられた冷却液入口（13）と冷却液出口（14）に、
循環ポンプ（15）と冷却液タンク（16）が、絶縁性のホ
ースで接続設置されていて、ひとつの循環系により同一
の絶縁性を有する冷却液例えば弗素系不活性液体で高圧
電極（３）と接地電極（７）を循環冷却可能に構成され
ている。Also, the high voltage electrode cooling unit (2) and the ground electrode cooling unit (6)
The cooling liquid inlet (13) and the cooling liquid outlet (14) provided in
The circulation pump (15) and the cooling liquid tank (16) are connected and installed by an insulating hose, and the cooling liquid having the same insulating property by one circulation system, for example, a fluorine-based inert liquid, is used as the high-voltage electrode (3). And the ground electrode (7) can be circulated and cooled.
次に、上述したオゾン発生装置によるオゾンの発生方法
を説明する。Next, a method of generating ozone by the ozone generator described above will be described.
まず、冷却液タンク（16）内の電気的に絶縁性を有する
冷却液例えば弗素系不活性液体であるフロリナート（商
品名:3M社製）等を循環ポンプ（15）で循環する。この
循環ポンプ（15）で送出した冷却液は冷却液入口（13）
より高圧電極冷却部（２）及び接地電極冷却部（６）に
循環し、高圧電極（３）及び接地電極（７）の放電領域
以外の電極の部分例えば内部を冷却する。この冷却後の
冷却液を冷却液出口より冷却液タンク（16）に送り、再
び循環ポンプで循環する。First, an electrically insulating cooling liquid in the cooling liquid tank (16), for example, Fluorinert (trade name: manufactured by 3M), which is a fluorine-based inert liquid, is circulated by the circulation pump (15). The cooling liquid sent out by this circulation pump (15) is the cooling liquid inlet (13).
It is circulated to the high-voltage electrode cooling part (2) and the ground electrode cooling part (6) to cool the electrode parts other than the discharge regions of the high-voltage electrode (3) and the ground electrode (7), for example, the inside. The cooled cooling liquid is sent from the cooling liquid outlet to the cooling liquid tank (16) and circulated again by the circulation pump.
そして、冷却状態の高圧電極（３）及び接地電極（７）
に高圧電源（12）で例えば周波数１〜10KHz電圧１〜10K
V程度の高電圧を印加する。この時、酸素供給源（10）
とガス流量調節器（９）で所望の流量が例えば０〜20S
/min程度の少くとも酸素を含んだガスを、ガス供給口
（８）から空隙（４）に流す。ここで、電圧を印加した
両電極（3,7）の間に誘電体（５）と空隙（４）を設け
た放電領域で生ずる無声放電により、オゾンが発生し、
ガス出口（11）より図示しないオゾンを用いた処理部に
オゾンを含んだガスが送られる。Then, the cooled high-voltage electrode (3) and the ground electrode (7)
High-voltage power supply (12), for example, frequency 1-10KHz voltage 1-10K
Apply a high voltage of approximately V. At this time, oxygen source (10)
And the desired flow rate with the gas flow controller (9) is 0-20S
A gas containing at least oxygen of about / min is flown from the gas supply port (8) into the void (4). Here, ozone is generated by the silent discharge generated in the discharge region where the dielectric (5) and the void (4) are provided between the electrodes (3, 7) to which the voltage is applied,
A gas containing ozone is sent from a gas outlet (11) to a processing unit using ozone not shown.
なお、生成されたオゾンの寿命は温度に依存し、第２図
に示す様に、温度が高くなるとオゾンの寿命は急激に短
くなる。このため、発熱体である両電極（3,7）付近の
温度を十分に下げる必要があり、両電極冷却部（2,6）
内の冷却液を例えば10℃以下程度とするのが望ましい。The life of the ozone generated depends on the temperature, and as shown in FIG. 2, the life of the ozone sharply shortens as the temperature rises. For this reason, it is necessary to sufficiently lower the temperature near both electrodes (3, 7) that are heating elements, and both electrode cooling parts (2, 6)
It is desirable that the cooling liquid in the inside is, for example, about 10 ° C. or less.
ここで、上述したオゾン発生装置の各電極（3,7）の冷
却を、絶縁性の液体の弗素系不活性液体であるフロリナ
ート（商品名:3M社製）を用いて冷却液入口（13）の冷
却液温度を１〜２℃程度で冷却液流量を0.5/min程度
とした場合と、高圧電極（３）を圧縮空気による空冷で
圧縮空気温度を23℃程度で圧縮空気流量を20/min程度
にして接地電極（７）を水による液冷で水温を23℃程度
で冷却水流量を0.5/min程度とした場合の、供給する
酸素流量と発生するオゾン濃度の関係を第３図に示す。
第３図からわかるように、酸素流量が少ない場合は、発
生するオゾン濃度に顕著な差がみられる。これは、両電
極（3,7）を冷却する能力の違いを示しているのと同じ
であり、電気的に絶縁性を有する冷却液を用いると、両
電極（3,7）を直接液体によって冷却可能となり冷却能
力が著しく向上する。また、冷却液が漏れたとしても事
故等の発生を防止できる。さらに、同一の冷却液をひと
つの循環系で処理できることにより装置のコンパクト化
を実現できる。Here, for cooling the electrodes (3, 7) of the ozone generator described above, a coolant inlet (13) is used by using Fluorinert (product name: 3M), which is an insulating liquid fluorine-based inert liquid. The cooling liquid temperature is about 1 to 2 ° C and the cooling liquid flow rate is about 0.5 / min, and the high pressure electrode (3) is air-cooled with compressed air. The compressed air temperature is about 23 ° C and the compressed air flow rate is 20 / min. Figure 3 shows the relationship between the flow rate of oxygen supplied and the concentration of ozone generated when the ground electrode (7) is liquid-cooled with water and the water temperature is about 23 ° C and the cooling water flow rate is about 0.5 / min. .
As can be seen from FIG. 3, when the oxygen flow rate is low, a remarkable difference is observed in the generated ozone concentration. This is the same as showing the difference in the ability to cool both electrodes (3, 7), and when a cooling liquid having an electrically insulating property is used, both electrodes (3, 7) are directly exposed to liquid. Cooling becomes possible and the cooling capacity is significantly improved. Further, even if the coolant leaks, it is possible to prevent an accident or the like from occurring. Further, since the same cooling liquid can be processed by one circulation system, the device can be made compact.
また、冷却液に弗素系不活性液体を用いて、冷却液を気
化させながら、電極の熱を気化熱として奪うと、より効
率の向上した冷却を行うことができる。この実施例を第
４図に示す。本実施例では、冷却液の循環系の途中に、
凝縮器（21）と減圧ポンプ（22）を設け、凝縮器（21）
内の冷却液が気化したガスを、一部減圧ポンプ（22）で
排出することにより、冷却液の圧力を下げて、冷却液が
各電極冷却部（2,6）で気化する状態で冷却が行えるの
で、各電極（3,7）は気化熱による熱を奪われて冷却効
率が向上する。そして、冷却液が気化したガスは、一部
減圧ポンプ（22）で排出され、他は、凝縮器（21）で液
化され、冷却液タンク（16）に回収される。Further, when a fluorine-based inert liquid is used as the cooling liquid and the heat of the electrode is removed as the heat of vaporization while vaporizing the cooling liquid, more efficient cooling can be performed. This embodiment is shown in FIG. In this embodiment, in the middle of the cooling liquid circulation system,
The condenser (21) and the decompression pump (22) are installed, and the condenser (21)
The gas in which the cooling liquid inside has been vaporized is partially discharged by the decompression pump (22) to lower the pressure of the cooling liquid, and cooling is performed in the state where the cooling liquid is vaporized in each electrode cooling unit (2, 6). Since this can be done, the respective electrodes (3, 7) are deprived of the heat due to the heat of vaporization to improve the cooling efficiency. Then, the gas obtained by vaporizing the cooling liquid is partially discharged by the decompression pump (22), and the other gas is liquefied by the condenser (21) and collected in the cooling liquid tank (16).
上記実施例の冷却液は、弗素系不活性液体を用いて説明
したが、電気的に絶縁性を有する冷却液であれば何でも
よい。Although the cooling liquid of the above-described embodiment is described by using the fluorine-based inert liquid, any cooling liquid having an electrically insulating property may be used.
また、上記実施例では高圧電極（３）と接地電極（７）
を同一の冷却液循環系で構成して同時に冷却する様に説
明したが、冷却液は高圧電極（３）側を流した後接地電
極（７）側を循環させてもよく、その逆でもよいことは
言うまでもない。In the above embodiment, the high voltage electrode (3) and the ground electrode (7) are used.
Although the same cooling liquid circulation system is used for simultaneous cooling, the cooling liquid may be circulated on the high voltage electrode (3) side and then on the ground electrode (7) side, or vice versa. Needless to say.
上記実施例の各電極（3,7）間の放電は、電極の間に誘
電体（５）と空隙（４）を設けた無声放電で説明した
が、オゾンを発生する為の放電ならよく、コロナ放電で
もグロー放電でもよい。The discharge between the electrodes (3, 7) in the above embodiment is described as the silent discharge in which the dielectric (5) and the gap (4) are provided between the electrodes, but any discharge for generating ozone may be used. Corona discharge or glow discharge may be used.
以上述べたようにこの実施例によれば、空隙（４）と誘
電体（５）を介して対向し放電領域を形成した高圧電極
（３）と接地電極（７）の内部を、電気的に絶縁性を有
する弗素系不活性液体等同一の冷却液で冷却するひとつ
の循環系を用いたので、効率のよい冷却ができ、装置の
コンパクト化を実現でき、オゾンの発生効率を著しく向
上させことができる。As described above, according to this embodiment, the insides of the high voltage electrode (3) and the ground electrode (7), which face the void (4) through the dielectric (5) and form the discharge region, are electrically connected. Uses a single circulating system that cools with the same cooling liquid such as fluorine-based inert liquid that has insulating properties, so efficient cooling can be achieved, the device can be made compact, and ozone generation efficiency can be significantly improved. You can
以上説明したように本発明によれば、オゾン発生器の電
極の冷却効率を向上させることにより、オゾンの発生効
率を顕著に向上させることができ、コンパクトで、高電
圧の使用による事故を防止した。As described above, according to the present invention, by improving the cooling efficiency of the electrodes of the ozone generator, it is possible to significantly improve the ozone generation efficiency, and it is possible to prevent accidents due to the use of high voltage, which is compact. .
第１図は本発明のオゾン発生装置の一実施例を説明する
ための構成図、第２図は第１図装置によりオゾンを発生
した場合のオゾンの半減期を示す図、第３図は第１図装
置の冷却の効果を説明する図、第４図は第１図の他の実
施例を説明するための構成図である。 図において、 ２……高圧電極冷却部、３……高圧電極 ４……空隙、５……誘電体 ６……接地電極冷却部、７……接地電極FIG. 1 is a configuration diagram for explaining an embodiment of the ozone generator of the present invention, FIG. 2 is a diagram showing a half-life of ozone when ozone is generated by the device of FIG. 1, and FIG. 1 is a diagram for explaining the effect of cooling the apparatus, and FIG. 4 is a configuration diagram for explaining another embodiment of FIG. In the figure, 2 ... High-voltage electrode cooling part, 3 ... High-voltage electrode 4 ... Void, 5 ... Dielectric 6 ... Ground electrode cooling part, 7 ... Ground electrode
Claims (4)
を印加してオゾンを発生するオゾン発生装置において、 前記接地電極の前記高圧電極と対向する面に誘電体を設
けると共に、前記両電極の背面側にそれぞれ電極冷却部
を設け、これら電極冷却部に冷却液を強制循環する一つ
の冷却液循環系を設けたことを特徴とするオゾン発生装
置。1. An ozone generator for generating ozone by applying a voltage between a high-voltage electrode and a ground electrode, which are arranged to face each other, wherein a dielectric is provided on a surface of the ground electrode facing the high-voltage electrode, and both electrodes are provided. An ozone generator, wherein an electrode cooling part is provided on each of the back surfaces of the electrodes, and one cooling liquid circulation system for forcibly circulating the cooling liquid is provided in these electrode cooling parts.
体であることを特徴とする特許請求の範囲第１項記載の
オゾン発生装置。2. The ozone generator according to claim 1, wherein the cooling liquid is a fluorine-based inert liquid having an insulating property.
行うことを特徴とする特許請求の範囲第１項記載のオゾ
ン発生装置。3. The ozone generator according to claim 1, wherein the cooling is performed in a state where the cooling liquid is vaporized in the cooling section.
とにより形成することを特徴とする特許請求の範囲第１
項記載のオゾン発生装置。4. The vaporized state is formed by lowering the pressure of the cooling liquid.
The ozone generator according to the item.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62272400A JPH07100602B2 (en) | 1987-10-28 | 1987-10-28 | Ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62272400A JPH07100602B2 (en) | 1987-10-28 | 1987-10-28 | Ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01115804A JPH01115804A (en) | 1989-05-09 |
| JPH07100602B2 true JPH07100602B2 (en) | 1995-11-01 |
Family
ID=17513370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62272400A Expired - Fee Related JPH07100602B2 (en) | 1987-10-28 | 1987-10-28 | Ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07100602B2 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513715A (en) * | 1974-06-28 | 1976-01-13 | Hitachi Ltd | FUOOKASUKAIRO |
| JPS53102889A (en) * | 1977-02-19 | 1978-09-07 | Hitachi Ltd | Ozone generator |
| JPS54134090A (en) * | 1978-04-11 | 1979-10-18 | Mitsubishi Electric Corp | Ozone generator |
| JPS5824896U (en) * | 1981-08-05 | 1983-02-17 | 株式会社田村電機製作所 | emergency notification device |
| JPS61215202A (en) * | 1985-03-20 | 1986-09-25 | Senichi Masuda | Ozonizer |
| JPH0196001A (en) * | 1987-10-07 | 1989-04-14 | Sumitomo Precision Prod Co Ltd | Cooling device for ozone generator |
-
1987
- 1987-10-28 JP JP62272400A patent/JPH07100602B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01115804A (en) | 1989-05-09 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |