JPH07101722B2 - Airtight component with light transmitting window - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an airtight component having a light transmitting window.

(Prior Art) In a semiconductor laser device, an optical communication device, and the like, a component having a light transmission window in a light transmission path is used. In these parts, a light transmissive window made of glass or the like is usually hermetically sealed to a metal base material. As the metal base material, one having a thermal expansion coefficient similar to that of the glass used for the light transmitting window is preferably used,
Iron-nickel-cobalt alloys are commonly used.

Further, the conventional method for sealing the light transmitting window to the metal base material is to form a metal oxide film in advance on the metal base material for the purpose of improving the leakability with the low melting point glass, This is a method of glazeing a low melting point glass on a sealing portion on the film and sealing the light transmitting window to a metal frame using the low melting point glass.

(Problems to be Solved by the Invention) By the way, iron-nickel-cobalt alloy used as a base material for attaching a light-transmitting window in an airtight part having a light-transmitting window is expensive and difficult to process with a difficult-to-cut material. The nickel-cobalt alloy is used only in the sealing part of the base material for sealing the light-transmitting window, and the sealing part is bonded to the metal base to form a support. It is considered to use a mild steel material that can be easily attached by laser welding or the like.

However, when the sealing portion of the iron-nickel-cobalt alloy and the metal substrate are joined by silver brazing or silver brazing, the working temperature of brazing (about 800
(° C) is higher than the working temperature (about 500 ° C) for sealing the light-transmissive window with the low-melting glass, the low-melting glass will be deteriorated when the light-transmissive window is sealed to the sealing portion and then brazed.

Further, when the light transmitting window is sealed after brazing the sealing portion and the metal substrate, the brazing is generally performed in a reducing atmosphere, so that the metal oxide film provided on the sealing portion is not brazed. At that time, it is reduced, and the adhesion between the low melting point glass and the sealing portion is hindered.

INDUSTRIAL APPLICABILITY As described above, the present invention provides a light-tight component that has conventionally been sealed with a light-transmitting window using an iron-nickel-cobalt alloy as a base material, has good workability, and can be easily attached to an external frame or the like. An object is to provide an airtight component having a transparent window.

(Means for Solving the Problems) In order to achieve the above object, the present invention has the following configuration.

That is, the light-transmissive window is sealed by the low-melting glass through the hard glass fused to the opening peripheral edge, at one opening peripheral edge of the through hole provided in the sealing member made of iron-nickel-cobalt alloy, The other opening peripheral edge of the sealing member is joined to one opening peripheral edge of the through hole provided in the metal base made of mild steel by a brazing material having a melting point higher than that of the low melting point glass. Corrosion-resistant plating is applied to the exposed surface of the.

Further, the brazing material is made of silver brazing or silver.

(Operation) Since the airtight component having the light-transmitting window according to the present invention is formed by brazing the light-transmitting window sealing member made of iron-nickel-cobalt alloy on the metal base, the glass-made light-transmitting window is sealed. The coefficient of thermal expansion can be matched with that of the member, and the workability of the base material can be improved by using a metal base made of mild steel, and the metal base can be easily attached to an external frame by laser welding or the like. Therefore, it can be provided as an airtight part that can be easily handled such as mounting.

(Examples) Hereinafter, preferred examples of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows a sectional view of an embodiment of an airtight component having a light transmitting window according to the present invention. In the figure, 10 is a sealing member formed in the shape of a thin flat plate having a through hole through which light passes.
The sealing member 10 is made of iron-nickel-cobalt alloy for sealing the light transmitting window 12. Reference numeral 12 is a glass light transmission window sealed to one opening peripheral edge of the through hole provided in the sealing member 10.

Reference numeral 14 is a hard glass that is welded to one peripheral edge of the opening of the sealing member 10. The light transmission window 12 is sealed with a low melting point glass 16 via a hard glass 14 welded to the peripheral edge of the opening of the sealing member 10.

18 is a metal substrate made of mild steel. The sealing member 10 is joined to one opening peripheral edge of the through hole provided in the metal base 18 by silver brazing. 20 is a silver brazing part. Reference numeral 22 denotes a frame to which the metal base 18 is attached, which supports the metal base 18 by laser welding the outer peripheral side surface of the metal base 18. The metal base 18 is mild steel that is easily laser-welded and the like, and can be easily attached to an external frame or the like, and the light transmission window 12 sealed to the sealing member 10 is distorted by interposing the metal base 18. It becomes possible to attach it to the frame without giving it.

The airtight component having the light transmitting window of the present embodiment is characterized in that the sealing member 10 is brazed to the metal base 18 by silver brazing as described above, and the following method may be used for its manufacture.

First, the sealing member 10 made of iron-nickel-cobalt alloy
Is heated in an atmosphere containing oxygen to form a metal oxide film on the entire surface of the sealing member 10.

Next, the light transmitting window of the sealing portion 10 on which the metal oxide film is formed
A hard glass powder kneaded with a solvent is applied to the site where 12 is sealed, and is calcined to volatilize the organic component and weld it to the sealing unit 10. As a result, the hard glass firmly adheres to the metal oxide film and the familiar sealing member 10.

As the hard glass used here, a glass having a high melting point that can withstand the temperature of silver brazing to be performed in a later step and having excellent chemical resistance that is unlikely to be deteriorated by a processing solution such as a plating solution when performing corrosion resistant plating is used. As the hard glass, for example, borosilicate glass is used.

Next, the sealing member 10 is subjected to corrosion resistant plating. At this time, a predetermined corrosion resistant plating is also applied to the metal base 18 formed separately.

When plating the sealing member 10, acid treatment is performed in advance to remove the metal oxide film on the surface of the sealing member 10.

Next, the sealing member 10 and the metal substrate 18 are brazed with silver in a reducing atmosphere.

Next, Pb on the hard glass 14 fused on the sealing member 10.
A low-melting glass powder such as OB ₂ O ₃ system is kneaded and applied as a solvent, and calcined to volatilize an organic component for glaze.

Finally, the plate glass for the light transmitting window is placed on the sealing member 10, and the light transmitting window 12 is sealed to the sealing member 10 by heating to a temperature at which the low melting point glass is melted.

In this way, the sealing member 10 is pre-welded with the hard glass 14 and then the sealing member 10 is silver brazed to the metal substrate 18, and then the light-transmitting window 12 is sealed by using the low-melting glass 16. According to this, there is an advantage that the hard glass 14 is not attacked by the chemical resistance even when the sealing member 10 is immersed in the plating pretreatment liquid or the plating liquid, and the hard glass 14 is not deteriorated by the heat resistance during silver brazing. is there. Further, since the light-transmissive window 12 is sealed after silver brazing, the low-melting glass that seals the light-transmissive window 12 is not deteriorated by the plating solution or silver brazing,
The light transmission window 12 is firmly and airtightly sealed.

It is not always necessary to perform the corrosion-resistant plating by the above method before silver brazing. Prior to silver brazing, a treatment for removing only the metal oxide film of the sealing member 10 unsuitable for silver brazing is performed, and after silver brazing, the light transmission window is sealed using a low-melting glass, and then, Corrosion-resistant plating may be applied to the sealing member 10 and the metal base 18, that is, the entire metal frame.

(Effects of the Invention) As described above, the airtight component having the light transmitting window according to the present invention has the thermal expansion coefficient of the light transmitting window and the sealing member by using the iron-nickel-cobalt alloy as the sealing member. In addition to being able to achieve matching, the use of mild steel for the metal substrate that is formed separately from the sealing member allows machining such as cutting compared to when the entire substrate is made of iron-nickel-cobalt alloy. This can be easily done, and even when the airtight component is attached to an external frame or the like, it can be easily attached by laser welding the metal substrate. In addition, since the light transmitting window is sealed through the hard glass, it is possible to provide a hermetically sealed component having excellent airtightness by using a base material formed by brazing a metal base material different from the sealing member. And so on.

[Brief description of drawings]

FIG. 1 is a sectional view showing a state in which an airtight component having a light transmission window according to the present invention is attached to a frame. 10 …… Seal member 12 …… Light transmission window 14 …… Hard glass 16 …… Low melting point glass 18 …… Metal substrate 20 …… Silver brazing part 22 …… Frame body

Claims (2)

[Claims] 1. A light-transmitting window is sealed with a low-melting glass through a hard glass fused to one opening peripheral edge portion of a through hole provided in a sealing member made of an iron-nickel-cobalt alloy. The sealing member is joined to the opening peripheral edge of one of the through holes provided in the metal base made of mild steel, and the other opening peripheral edge of the sealing member is joined by a brazing material having a melting point higher than that of the low melting point glass. And an airtight component having a light transmitting window, characterized in that the exposed surface of the metal substrate is plated with corrosion resistant. 2. A hermetic component having a light-transmitting window according to claim 1, wherein the brazing material is silver brazing or silver.