JPH0351296B2 - - Google Patents
Info
- Publication number
- JPH0351296B2 JPH0351296B2 JP16831385A JP16831385A JPH0351296B2 JP H0351296 B2 JPH0351296 B2 JP H0351296B2 JP 16831385 A JP16831385 A JP 16831385A JP 16831385 A JP16831385 A JP 16831385A JP H0351296 B2 JPH0351296 B2 JP H0351296B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- melting point
- window
- low melting
- point glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 75
- 238000002844 melting Methods 0.000 claims description 47
- 230000008018 melting Effects 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000000126 substance Substances 0.000 claims description 6
- 239000005388 borosilicate glass Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 description 20
- 239000007788 liquid Substances 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
- G11C16/18—Circuits for erasing optically
Landscapes
- Optical Elements Other Than Lenses (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は主として半導体装置に用いるウインド
ウキヤツプに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention mainly relates to a window cap used in a semiconductor device.
（従来の技術およびその問題点）
半導体レーザー装置、固体撮像装置等において
は、光の通路に光透過用窓を設けたウインドウキ
ヤツプにて素子を気密に封じている。該ウインド
ウキヤツプは金属枠に低融点ガラスでガラス等か
ら成る光透過用窓（以下ガラス窓と略記する）を
封着する構造を成し、金属枠には耐蝕性を向上さ
せるべく、ニツケルあるいは金等の耐蝕めつきが
施される。(Prior Art and its Problems) In semiconductor laser devices, solid-state imaging devices, and the like, elements are hermetically sealed with a window cap in which a light transmission window is provided in a light path. The window cap has a structure in which a light transmitting window (hereinafter abbreviated as glass window) made of low melting point glass is sealed to a metal frame, and the metal frame is coated with nickel or gold to improve corrosion resistance. Corrosion-resistant plating is applied.
このウインドウキヤツプの製法には、従来から
上記の耐蝕めつきを施す工程順の相違に基づく２
種類の方法がある。 The manufacturing method for this window cap has traditionally been based on two methods based on the difference in the process order of applying the above-mentioned corrosion-resistant plating.
There are different methods.
その１つの方法は、金属枠の封着部に低融点ガ
ラスを溶着し、次いで該低融点ガラスによつてガ
ラス窓を封着して後、露出金属部にめつきを施す
ものである。 One method is to weld low-melting glass to the sealed portion of the metal frame, then seal the glass window with the low-melting glass, and then plate the exposed metal portion.
他の方法は、金属枠の封着部に低融点ガラスを
溶着した段階で露出金属部にめつきを施し、最後
に該低融点ガラスによつてガラス窓を封着するも
のである。 Another method is to apply plating to the exposed metal part after welding low-melting glass to the sealed part of the metal frame, and finally seal the glass window with the low-melting glass.
ところでいずれの方法によるも、金属枠への低
融点ガラスの濡れ性を向上させるため、あらかじ
め金属枠表面上に金属酸化膜を形成してこの金属
酸化膜上に低融点ガラスを溶着するようにしてい
る。 By the way, in either method, in order to improve the wettability of the low melting point glass to the metal frame, a metal oxide film is formed on the surface of the metal frame in advance, and the low melting point glass is welded onto this metal oxide film. There is.
したがつてめつきの段階では逆に露出金属部の
金属酸化膜を除去する必要がある。 Therefore, in the plating stage, it is necessary to remove the metal oxide film on the exposed metal parts.
ところで、ガラス窓表面上には反射防止膜が施
されこの反射防止膜や上記低融点ガラスはその成
分上耐薬品性にはあまり優れない。 Incidentally, an antireflection film is applied on the surface of a glass window, and the antireflection film and the above-mentioned low melting point glass do not have very good chemical resistance due to their components.
このため、前者の製法によるときは、前記の金
属酸化膜を除去する前処理液やめつき液中に半製
品を浸漬した際に、ガラス窓表面上の反射防止膜
が侵されるとう問題点がある。また低融点ガラス
表面上にはガラス窓が封着されているから、低融
点ガラス全体としての劣化は比較的に少ないが、
低融点ガラス層の側壁面は露出している関係上、
該側壁面は前処理液やめつき液に侵され、表面が
粉末化して液中または半導体装置等に組み付けた
後に剥げ落ちる等の問題点がある。 For this reason, when using the former manufacturing method, there is a problem that the anti-reflection film on the glass window surface is attacked when the semi-finished product is immersed in the pre-treatment liquid or polishing liquid for removing the metal oxide film. . In addition, since the glass window is sealed on the surface of the low-melting point glass, deterioration of the low-melting point glass as a whole is relatively small.
Since the side wall surface of the low melting point glass layer is exposed,
The side wall surface is attacked by the pretreatment liquid or the plating liquid, causing problems such as the surface turning into powder and peeling off in the liquid or after being assembled into a semiconductor device or the like.
このような異物はガラス窓に付着して透過光を
妨げたり光を反射させるため光特性が損なわれ、
製品の信頼性を低下させる原因となる。 Such foreign matter adheres to glass windows and blocks transmitted light or reflects light, impairing optical properties.
This may cause a decrease in product reliability.
また後者の方法は、低融点ガラス層を完全露出
させて前記の前処理液やめつき液中に浸漬するも
のであるため、低融点ガラスの劣化が著しい。特
に前処理液等によつて低融点ガラス中の特定の成
分が選択的にエツチングされることによつて、部
分的に融点が上昇してガラス窓の封着性を劣化さ
せるばかりか、やはり成分の選択エツチングによ
つて熱膨張係数が部分的に変化するなどして、ガ
ラス窓を封着した際に、ガラス窓に不均一な冷却
応力が作用し、ガラス窓、特にの周縁に微細なク
ラツクを発生させる問題点がある。また前処理液
やめつき液は低融点ガラスにより汚染されるため
に浴の寿命が著しく短かくなる問題がある。 Furthermore, in the latter method, the low melting point glass layer is completely exposed and immersed in the pretreatment liquid or the plating liquid, so that the low melting point glass deteriorates significantly. In particular, when certain components in the low-melting point glass are selectively etched by a pre-treatment liquid, etc., the melting point partially increases and the sealing properties of the glass window are deteriorated, and the components When the glass window is sealed, uneven cooling stress acts on the glass window due to partial changes in the coefficient of thermal expansion due to selective etching, which can cause minute cracks, especially around the periphery of the glass window. There is a problem that causes Furthermore, since the pretreatment liquid and the plating liquid are contaminated with low-melting glass, there is a problem that the life of the bath is significantly shortened.
このように、低融点ガラス層を露出させて前処
理やめつき処理をすると上記の問題点が顕著に現
われるから、低融点ガラス層上に適当なレジスト
保護膜を形成して、前処理からめつき処理を行う
ことを試みられている。 In this way, if the low melting point glass layer is exposed and subjected to pretreatment or plating treatment, the above problems will become noticeable, so it is necessary to form an appropriate resist protective film on the low melting point glass layer and perform pretreatment and plating treatment. An attempt is being made to do so.
しかしながらレジスト保護膜を低融点ガラスパ
ターンに正確に一致させて設けるのは難しく、低
融点ガラスの一部が露出すれば、底融点ガラスが
侵される前記問題点が生じ、逆にオーバー被覆す
れば金属枠にめつきが施されない部位が生じ、耐
蝕性に難点がでる。さらに、レジスト保護膜の形
成、剥離の工数が増加し、被覆や剥離も完璧には
行い難い。 However, it is difficult to provide a resist protective film that accurately matches the pattern of the low-melting point glass, and if a part of the low-melting point glass is exposed, the above-mentioned problem of corrosion of the bottom melting point glass occurs, and conversely, if it is overcoated, the metal There are parts of the frame that are not plated, which causes problems in corrosion resistance. Furthermore, the number of man-hours for forming and peeling off the resist protective film increases, and it is difficult to perform coating and peeling perfectly.
（発明の概要）
本発明は上記の種々の問題点に鑑がみてなされ
たものであり、その目的とするところは、ガラス
窓の封着性が良好であり、かつ低融点ガラスの劣
化、反射防止膜の劣化等の問題点が解決されて、
安定した特性が発揮されるウインドウキヤツプを
提供するにある。(Summary of the Invention) The present invention has been made in view of the various problems mentioned above, and its purpose is to improve the sealing properties of glass windows and to prevent the deterioration and reflection of low melting point glass. Problems such as deterioration of the preventive film have been resolved,
The objective is to provide a window cap that exhibits stable characteristics.
またその特徴は、低融点ガラスを用いて光透過
用窓を金属枠に封着したウインドウキヤツプにお
いて、前記金属枠の封着部に、低融点ガラスより
も高融点で、かつ耐薬品性の優れたガラス層を形
成し、このガラス層上に前記低融点ガラス層を形
成し、該低融点ガラスで前記光透過用窓を封着し
て成るところにある。 Another feature is that in a window cap in which a light-transmitting window is sealed to a metal frame using low-melting point glass, the sealing part of the metal frame has a material that has a higher melting point than low-melting point glass and has excellent chemical resistance. the low melting point glass layer is formed on this glass layer, and the light transmitting window is sealed with the low melting point glass.
（実施例）
以下には本発明の好適な一実施例を添付図面に
基づいて詳細に説明する。(Embodiment) A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
第１図は本発明に係るウインドウキヤツプ１０
の断面図を示す。 FIG. 1 shows a window cap 10 according to the present invention.
A cross-sectional view is shown.
図において１２は鉄−ニツケル−コバルト合金
等の金属で形成された金属枠である。金属枠１２
はハツト（帽子）状を成し、上面に透孔１４が設
けられている。 In the figure, 12 is a metal frame made of metal such as iron-nickel-cobalt alloy. metal frame 12
It has a hat shape, and a through hole 14 is provided on the top surface.
１６はガラス窓であり、透孔１４を覆つて金属
枠１２内面に、ガラス１８および低融点ガラス２
０を介して封着されている。金属枠１２の内面お
よび外面には耐蝕めつき２２が施されている。 16 is a glass window, and a glass 18 and a low melting point glass 2 are placed on the inner surface of the metal frame 12 to cover the through hole 14.
It is sealed through 0. Corrosion-resistant plating 22 is provided on the inner and outer surfaces of the metal frame 12.
続いてウインドウキヤツプ１０の製法について
説明する。 Next, a method for manufacturing the window cap 10 will be explained.
まず上記のごとく所定の形状に形成した金属枠
１２を酸素を含む雰囲気中で加熱し、金属枠１２
の全表面に金属酸化膜を形成する。 First, the metal frame 12 formed into a predetermined shape as described above is heated in an atmosphere containing oxygen.
A metal oxide film is formed on the entire surface.
次いで、ガラス窓１６を封着すべき、金属枠１
２の透孔１４周縁部にガラス１８を溶着する。 Next, the metal frame 1 to which the glass window 16 is to be sealed
Glass 18 is welded to the periphery of the through hole 14 of No. 2.
このガラス１８は低融点ガラス２０よりも高融
点で、かつ耐薬品性の優れるガラス、例えば硼珪
酸ガラスを用いる。硼珪酸ガラスを溶着するに
は、ガラス粉末を溶剤で混練し、これを透孔１４
周縁部に塗布し、溶剤を揮散させた後、約1000℃
に加熱して溶融する。これによつてガラス１８は
金属酸化膜となじみ、層状となつて金属枠１２と
完全に溶着する。 As the glass 18, a glass having a higher melting point than the low melting point glass 20 and excellent chemical resistance, such as borosilicate glass, is used. To weld borosilicate glass, glass powder is kneaded with a solvent and mixed into through holes 14.
Approximately 1000℃ after applying to the periphery and volatilizing the solvent.
Heat to melt. As a result, the glass 18 becomes compatible with the metal oxide film, forms a layer, and is completely welded to the metal frame 12.
次にこの段階で金属枠１２の露出金属部に耐蝕
めつき２２を施すのである。 Next, at this stage, a corrosion-resistant plating 22 is applied to the exposed metal portion of the metal frame 12.
すなわち、めつき前処理液に金属枠１２を浸漬
し、金属酸化膜を除去し、ニツケルめつき、ある
いは金めつき等の必要な耐蝕めつき２２を施す。 That is, the metal frame 12 is immersed in a plating pretreatment liquid, the metal oxide film is removed, and a necessary corrosion-resistant plating 22 such as nickel plating or gold plating is applied.
この場合ガラス１８は耐薬品性の優れたものを
使用いているから、めつき前処理やめつき液に侵
されることがない。 In this case, since the glass 18 is made of a material with excellent chemical resistance, it will not be attacked by the plating pretreatment or the plating solution.
この後、ガラス１８層上に、低融点ガラス粉末
を溶剤を混練したものを塗布し、溶剤を揮散させ
た後溶着する。 Thereafter, a mixture of low melting point glass powder mixed with a solvent is applied onto the 18 layers of glass, and after the solvent is volatilized, it is welded.
この場合、ガラス１８の融点は低融点ガラス２
０のそれよりも高いから、ガラス１８を溶融させ
ることなく低融点ガラス２０の溶着が行える。も
ちろんガラス１８と低融点ガラス２０との溶着は
強固である。 In this case, the melting point of the glass 18 is lower than that of the low melting point glass 2.
Since the temperature is higher than that of 0, the low melting point glass 20 can be welded without melting the glass 18. Of course, the welding between the glass 18 and the low melting point glass 20 is strong.
次いでガラス窓１６（例えば硼珪酸ガラス製）
を低融点ガラス２０上にのせて加熱すれば、低融
点ガラス２０のみが再溶融し、ガラス窓１６が気
密に封着される。 Next, a glass window 16 (for example, made of borosilicate glass)
If it is placed on the low melting point glass 20 and heated, only the low melting point glass 20 will be remelted and the glass window 16 will be hermetically sealed.
（発明の効果）
以上のように本発明に係るウインドウキヤツプ
によれば、低融点ガラスがめつき前処理液やめつ
き液に侵されておらず、ガラス粉末等が異物とし
て発生することもない。またガラス窓に施した反
射防止膜が破壊されておらず、安定した光学的特
性を発揮しうるという著効を奏するものである。(Effects of the Invention) As described above, according to the window cap according to the present invention, the low melting point glass is not attacked by the plating pretreatment liquid or the plating liquid, and glass powder and the like are not generated as foreign matter. Furthermore, the anti-reflection coating applied to the glass window is not destroyed and exhibits the remarkable effect of exhibiting stable optical characteristics.
なお本発明に係るウインドウキヤツプは半導体
装置のみならず、光フアイバーケーブルを用いる
光通信の分野等に汎用しうるものであることはも
ちろんである。 It goes without saying that the window cap according to the present invention can be used not only in semiconductor devices but also in the field of optical communication using optical fiber cables.
以上本発明につき好適な実施例を挙げて種々説
明したが、本発明はこの実施例に限定されるもの
ではなく、発明の精神を逸脱しない範囲内で多く
の改変を施し得るのはもちろんのことである。 Although the present invention has been variously explained above with reference to preferred embodiments, the present invention is not limited to these embodiments, and it goes without saying that many modifications can be made without departing from the spirit of the invention. It is.
第１図は本発明に係るウインドウキヤツプの一
例を示す断面図である。
１０……ウインドウキヤツプ、１２……金属
枠、１４……透孔、１６……ガラス窓、１８……
ガラス、２０……低融点ガラス、２２……耐蝕め
つき。
FIG. 1 is a sectional view showing an example of a window cap according to the present invention. 10...Window cap, 12...Metal frame, 14...Through hole, 16...Glass window, 18...
Glass, 20...Low melting point glass, 22...Corrosion-resistant plating.
Claims (1)
封着したウインドウキヤツプにおいて、 前記金属枠の封着部に、低融点ガラスよりも高
融点で、かつ耐薬品性の優れたガラス層を形成
し、このガラス層上に前記低融点ガラス層を形成
し、該低融点ガラスで前記光透過用窓を封着して
成るウインドウキヤツプ。 ２ 低融点ガラスよりも高融点で耐薬品性に優れ
たガラスとして硼珪酸ガラスを用いて成る特許請
求の範囲第１項記載のウインドウキヤツプ。[Scope of Claims] 1. A window cap in which a light transmitting window is sealed to a metal frame using low melting point glass, wherein the sealed portion of the metal frame has a material having a higher melting point than the low melting point glass and is chemical resistant. 1. A window cap comprising: forming a glass layer having excellent properties, forming the low melting point glass layer on this glass layer, and sealing the light transmitting window with the low melting point glass. 2. The window cap according to claim 1, which uses borosilicate glass as the glass having a higher melting point and superior chemical resistance than low melting point glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16831385A JPS6229149A (en) | 1985-07-30 | 1985-07-30 | Window cap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16831385A JPS6229149A (en) | 1985-07-30 | 1985-07-30 | Window cap |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6229149A JPS6229149A (en) | 1987-02-07 |
| JPH0351296B2 true JPH0351296B2 (en) | 1991-08-06 |
Family
ID=15865713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16831385A Granted JPS6229149A (en) | 1985-07-30 | 1985-07-30 | Window cap |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6229149A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07101722B2 (en) * | 1988-02-23 | 1995-11-01 | 新光電気工業株式会社 | Airtight component with light transmitting window |
-
1985
- 1985-07-30 JP JP16831385A patent/JPS6229149A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6229149A (en) | 1987-02-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |