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JPH07113682B2 - Lens that does not easily attach dirt - Google Patents
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JPH07113682B2 - Lens that does not easily attach dirt - Google Patents

Lens that does not easily attach dirt

Info

Publication number
JPH07113682B2
JPH07113682B2 JP62048356A JP4835687A JPH07113682B2 JP H07113682 B2 JPH07113682 B2 JP H07113682B2 JP 62048356 A JP62048356 A JP 62048356A JP 4835687 A JP4835687 A JP 4835687A JP H07113682 B2 JPH07113682 B2 JP H07113682B2
Authority
JP
Japan
Prior art keywords
film
lens
water
antireflection film
easily attach
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62048356A
Other languages
Japanese (ja)
Other versions
JPS63214701A (en
Inventor
博之 杉村
晴彦 藤澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62048356A priority Critical patent/JPH07113682B2/en
Publication of JPS63214701A publication Critical patent/JPS63214701A/en
Publication of JPH07113682B2 publication Critical patent/JPH07113682B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Surface Treatment Of Optical Elements (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、汚れが付着しにくいカメラ・メガネ等のレン
ズに関するものである。
TECHNICAL FIELD The present invention relates to a lens of a camera, glasses, or the like which is less likely to be stained.

〔従来の技術〕[Conventional technology]

カメラ・メガネ等のレンズは、通常、表面及び/又は反
射防止膜が設けられている。
Lenses such as cameras and glasses are usually provided with a surface and / or an antireflection film.

〔発明・考案が解決しようとする問題点〕[Problems to be solved by inventions / inventions]

この反射防止膜には、TiO2、SiO2等の酸化物の薄膜(例
えば真空蒸着、スパッタリングによる薄膜)の単層又は
多層構造が多く用いられ、親水性の表面を形成するた
め、表面が汚れが付着し易くそのため、例えば水ヤケす
るという問題点があった。水ヤケとは表面に水滴を垂し
て乾燥すると、シミのようなマークが残る現象を言う。
For this antireflection film, a single layer or a multilayer structure of a thin film of an oxide such as TiO 2 or SiO 2 (for example, a thin film formed by vacuum deposition or sputtering) is often used. Since a hydrophilic surface is formed, the surface is contaminated. Therefore, there is a problem that, for example, water stains occur. Water bleeding is a phenomenon that marks like marks remain when water drops are dripped on the surface and dried.

〔問題点を解決する為の手段〕[Means for solving problems]

本発明ではかかる問題点を改良するため、反射防止膜の
表面を主として炭素からなる硬質膜で被覆した。
In the present invention, in order to improve such a problem, the surface of the antireflection film is coated with a hard film mainly made of carbon.

〔作用〕[Action]

本発明で用いられる炭素質硬質膜はプラズマCVD法やイ
オンプレーティング法、イオンビーム法、スパッタ法に
よって形成され、この膜は次の性質を有する。
The carbonaceous hard film used in the present invention is formed by the plasma CVD method, the ion plating method, the ion beam method, and the sputtering method, and this film has the following properties.

厚さ1μmのとき、ビッカース硬度1000以上 主として炭素からできて、水素又はフッ素を含むこ
とも可 非晶質又は多結晶質又は両者の複合(混合) 被覆後のレンズは撥水性の大きい表面が得られるため、
水やけが防止される。
When the thickness is 1 μm, Vickers hardness is 1000 or more. Mainly made of carbon and may contain hydrogen or fluorine. Amorphous or polycrystalline or a mixture of both (coated) The coated lens has a highly water repellent surface. Because
Drainage is prevented.

十分な水や防止効果を得るには、表面と純水の接触角が
50゜以上あることが必要であった。
To obtain sufficient water and preventive effect, the contact angle between the surface and pure water should be
It was necessary to be at least 50 °.

炭素膜の厚さがあまり厚くなると反射防止膜の反射防止
効果がそこなわれるため膜厚200Å以下にすることが必
要で、好ましくは100Å以下である。
If the carbon film becomes too thick, the antireflection effect of the antireflection film will be impaired, so the film thickness needs to be 200 Å or less, and preferably 100 Å or less.

また最低必要な膜厚は、膜の成造条件によって異なる。
膜厚を0からしだいに増加させて親水性の表面が撥水性
になった時、すなわち純水との接触角が50゜以上になる
膜厚が最低限必要な膜厚である。
The minimum required film thickness depends on the film forming conditions.
When the film thickness is gradually increased from 0 to make the hydrophilic surface water repellent, that is, the film thickness at which the contact angle with pure water is 50 ° or more is the minimum required film thickness.

〔実施例〕〔Example〕

第1図は、本実施例にかかるメガネレンズの垂直断面を
示す概念図であり、CR−39プラスチックレンズ1とそれ
を被覆する硬質ポリシロキサン系ハードコート層2、そ
の上に形成された反射防止膜3、更にその上に形成され
た「主として炭素からなる硬質薄膜(炭素質膜)」4か
らなる。
FIG. 1 is a conceptual diagram showing a vertical cross section of a spectacle lens according to this example. A CR-39 plastic lens 1, a hard polysiloxane hard coat layer 2 for covering the same, and an antireflection film formed thereon. A film 3 and a "hard thin film (carbonaceous film) 4 mainly composed of carbon" 4 formed thereon.

第2図は、この炭素質膜4を形成するのに使用したプラ
ズマCVD装置である。
FIG. 2 shows a plasma CVD apparatus used to form the carbonaceous film 4.

真空に排気できるチャンバー5に、電極6が取り付けら
れており、その上に「ハードコート層2と反射防止膜3
の形成されたレンズ7」が置かれる。電極6は内部に冷
却水8を流せるようになっていて、側面と裏面は絶縁体
9で覆われている。流量調節バルブ14より反応ガスを導
入し、RF電源11より電力を供給し、プラズマを発生させ
成膜する。
An electrode 6 is attached to a chamber 5 that can be evacuated to a vacuum, and a "hard coat layer 2 and an antireflection film 3" are formed on the electrode 6.
The formed lens 7 "is placed. The electrode 6 is configured so that cooling water 8 can flow inside, and the side surface and the back surface are covered with an insulator 9. A reaction gas is introduced from the flow rate control valve 14 and electric power is supplied from the RF power source 11 to generate plasma and form a film.

この成膜条件を表1に示す。The film forming conditions are shown in Table 1.

これにより形成された炭素質膜4は、厚さが約50Å、成
膜後の純水との接触角は約88゜であった。
The carbonaceous film 4 thus formed had a thickness of about 50Å, and the contact angle with pure water after film formation was about 88 °.

なお、使用した反射防止膜3の構造を第3図に示す。The structure of the antireflection film 3 used is shown in FIG.

〔比較例〕[Comparative example]

前記実施例のレンズから炭素質膜4を除外したものであ
り、その垂直断面を第4図に示す。
The carbonaceous film 4 is excluded from the lens of the above embodiment, and its vertical section is shown in FIG.

〔試験例〕[Test example]

実施例と比較例のレンズに水滴をたらして水ヤケの発生
度を比較した、比較例では90%のレンズで水ヤケが発生
したが、実施例では0%だった。
Water droplets were dropped on the lenses of the example and the comparative example to compare the degree of occurrence of water blush. In the comparative example, 90% of the lenses produced water blush, but in the example, it was 0%.

SIMS(2次イオン質量分析)にて上記の膜を分析したと
ころC、F、H、Si、Oが検出された。またこのうち、
SiとOは反射防止膜の最上層にシリコン酸化物を用いて
いるので、下地からのSi、Oも検出された。
When the above film was analyzed by SIMS (secondary ion mass spectrometry), C, F, H, Si and O were detected. Also, of these,
Since Si and O use silicon oxide as the uppermost layer of the antireflection film, Si and O from the base were also detected.

〔発明の効果〕〔The invention's effect〕

以上のとおり、本発明によれば、撥水性の表面を得るこ
とができるので、水ヤケ防止の効果がある。又、防曇効
果も期待できる。
As described above, according to the present invention, since a water-repellent surface can be obtained, there is an effect of preventing water stain. Also, an antifogging effect can be expected.

【図面の簡単な説明】[Brief description of drawings]

第1図は、本発明の実施例にかかるレンズの垂直断面を
示す概念図である。 第2図は、実施例で炭素質膜4を形成するのに使用した
プラズマCVD装置の構成を説明する概念図である。 第3図は、実施例のレンズに使用した反射防止膜3の垂
直断面構造を示す概念図である。 第4図は、従来のレンズの垂直断面を示す概念図であ
る。 〔主要部分の符号の説明〕 1……CR−39プラスチックレンズ 2……ハードコート層 3……反射防止膜 4……主として炭素からなる硬質膜 5……真空チャンバー 6……電極 7……レンズ 8……冷却水 9……絶縁体 10……整合回路 11……RF電源(13.56MHz) 12……CH4ガス 13……CF4ガス 14……流量調節バルブ
FIG. 1 is a conceptual diagram showing a vertical cross section of a lens according to an example of the present invention. FIG. 2 is a conceptual diagram illustrating the configuration of the plasma CVD apparatus used to form the carbonaceous film 4 in the examples. FIG. 3 is a conceptual diagram showing a vertical sectional structure of the antireflection film 3 used in the lens of the example. FIG. 4 is a conceptual diagram showing a vertical section of a conventional lens. [Explanation of symbols of main parts] 1 ... CR-39 plastic lens 2 ... hard coat layer 3 ... antireflection film 4 ... hard film mainly made of carbon 5 ... vacuum chamber 6 ... electrode 7 ... lens 8 …… Cooling water 9 …… Insulator 10 …… Matching circuit 11 …… RF power supply (13.56MHz) 12 …… CH 4 gas 13 …… CF 4 gas 14 …… Flow control valve

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】反射防止膜を有するレンズにおいて、 前記反射防止膜の上に水ヤケ防止層を有し、前記水ヤケ
防止層が水素とフッ素と含有する硬質炭素薄膜で、前記
硬質炭素薄膜の表面が純水に対する接触角が50度以上で
あることを特徴とする汚れが付着しにくいレンズ。
1. A lens having an antireflection film, comprising a water stain prevention layer on the antireflection film, wherein the water stain prevention layer is a hard carbon thin film containing hydrogen and fluorine. A lens whose surface has a contact angle with pure water of 50 degrees or more and is unlikely to adhere to dirt.
JP62048356A 1987-03-03 1987-03-03 Lens that does not easily attach dirt Expired - Fee Related JPH07113682B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62048356A JPH07113682B2 (en) 1987-03-03 1987-03-03 Lens that does not easily attach dirt

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62048356A JPH07113682B2 (en) 1987-03-03 1987-03-03 Lens that does not easily attach dirt

Publications (2)

Publication Number Publication Date
JPS63214701A JPS63214701A (en) 1988-09-07
JPH07113682B2 true JPH07113682B2 (en) 1995-12-06

Family

ID=12801077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62048356A Expired - Fee Related JPH07113682B2 (en) 1987-03-03 1987-03-03 Lens that does not easily attach dirt

Country Status (1)

Country Link
JP (1) JPH07113682B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2598520B1 (en) * 1986-01-21 1994-01-28 Seiko Epson Corp MINERAL PROTECTIVE FILM
US5783299A (en) * 1986-01-21 1998-07-21 Seiko Epson Corporation Polarizer plate with anti-stain layer
US5759643A (en) * 1987-01-16 1998-06-02 Seiko Epson Corporation Polarizing plate and method of production
GB9420089D0 (en) * 1994-10-05 1994-11-16 Applied Vision Ltd Coatings for optical lens having low surface energy properties
JP2006133421A (en) * 2004-11-04 2006-05-25 Seiko Epson Corp Optical element

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797159B2 (en) * 1986-10-01 1995-10-18 キヤノン株式会社 Multi-layer mirror for soft X-ray / VUV

Also Published As

Publication number Publication date
JPS63214701A (en) 1988-09-07

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