JPH07117406B2 - Shape measurement method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Field of Use of the Present Invention> The present invention relates to shape measurement in which a surface shape of an object is measured while moving a measurement point on the surface of the object according to a preset measurement program. Regarding the method.

<Prior Art> This type of device requires an operation for presetting what kind of measurement is to be performed on an object to be measured. In the conventional device, a desired operation is selected from a plurality of types of measurement items stored in advance. Select one to perform the measurement, or configure the measurement program suitable for the measurement item by combining the pre-programmed and coded elements of the measurement operation and the measurement operation while considering the measurement sequence. The desired measurements were made.

<Problems to be Solved by the Invention> However, in such a measurement method, it is possible to measure only prepared measurement items, which is poor in versatility, and
There is a problem that a person skilled in program creation is required as an operator.

An object of the present invention is to provide a shape measuring method that solves this problem.

<Means for Solving the Problems> In order to solve the above problems, the shape measuring method of the present invention includes a step of displaying a plurality of measurement types that can be set for a surface to be measured and selecting an arbitrary measurement type. And a step of displaying the types of measurement routes that can be set for the selected measurement type and arbitrarily selecting one of the types of the displayed measurement routes, and the selected measurement type and measurement route Displaying a measurement standard that can be set for a combination with a type and arbitrarily selecting one of the displayed measurement standards, and moving the measurement point according to the selected measurement type and measurement route type. The measurement items are set by the steps of setting the necessary measurement conditions for the measurement and the steps of setting the coordinate elements of the measurement route necessary for the type of the selected measurement route. The shape of the surface to be measured is measured according to a measurement program that is automatically edited based on the information.

<Operation> Since this is done, one measurement item can be set by selectively setting the desired measurement type, measurement route type, measurement standard, measurement condition, and coordinates of the measurement route, and based on the set measurement item. The shape of the surface to be measured is measured in accordance with the automatically edited measurement program.

<Embodiment of the present invention> (Figs. 1 to 12) One embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing an overall configuration of a shape measuring apparatus to which an embodiment of the present invention is applied.

In the figure, 10 is a measurement mechanism section, and X- is on the base 11.
A Y stage 12 is provided, and a mounting table 5 for mounting an object to be measured is fixed on the XY stage 12.

The X stage 12a is configured to move the mounting table 5 in the left-right direction (in FIG. 1), and the Y stage 12b is configured to move the mounting table 5 in a direction orthogonal to the X stage 12a.

Further, on the Y stage 12b, an X position detecting base 12c for detecting the amount of movement of the X stage 12a from the reference position (reference origin of the mounting table) is provided, and the Y stage 12b is similarly provided on the side of the Y stage 12b. A Y position detector 12d for detecting the amount of movement of is provided.

A vacuum device 13 sucks air from the suction holes 7 (FIG. 2) of the mounting table 5.

Reference numeral 14 denotes an optical sensor section arranged above the XY stage 12, which receives a light projecting section 14a for irradiating the mounting table 5 with a light beam and its reflected light, and performs a displacement corresponding to a change in height of an irradiation point. It is composed of a light receiving detector 14b that outputs a signal.

This displacement signal changes according to the distance from the optical sensor unit 14 to the irradiation point, and the distance calculated based on this signal is measured from the optical sensor unit 14 to the origin of the XY plane of the mounting table 5. By subtracting from the height, the height of the origin of the irradiation point is obtained.

A monitor camera 15 that enlarges the vicinity of the irradiation point and outputs an image is integrated with the optical sensor unit 14.

Reference numeral 16 is a Z stage that moves the optical sensor unit 14 in the Z direction orthogonal to the XY stage 12, and is an XY stage.
Both the 12 and Z stage 16 are controlled to move by the XYZ drive unit 17.

Reference numeral 18 denotes a monitor television that displays the video signal from the monitor camera on the screen.

Reference numeral 19 denotes a manual operation unit that moves the XY stage 12 independently by directly inputting a movement signal to the XYZ drive unit 17.

Reference numeral 20 denotes a measurement control unit configured by a computer, which gives a movement signal to each stage from the XYZ drive unit 17 according to a set measurement program, and based on a displacement signal from the light reception detection unit 14b of the optical sensor unit 14. The height of the measurement point of the object to be measured in the Z direction is calculated to determine the shape.

As shown in FIG. 2, the measurement control unit 20 controls the XY stage 12, the Z stage 16, etc. with a predetermined lower left position of the mounting table 5 as a reference origin (0, 0, 0) of absolute coordinates. ing.

On this mounting table 5, three guide members 6 are attached so that nine objects to be measured are mounted in a predetermined mounting location E1 to E9 in a 3 × 3 arrangement. The lower left corner (in FIG. 2) of E1 to E9 is cut out in a circular shape in order to avoid burrs and the like of the object to be measured.

The reference positions of the objects to be measured placed on the respective mounting locations E1 to E9 are set to the positions R1 to R9 corresponding to the center of the corners, and the intervals of the positions R1 to R9 in the X direction are Xp and Y directions. The interval is set to Yp, and the coordinate position of the position R7 from the reference origin is set to (X1, Y1).

The irradiation position B of the light beam from the optical sensor 14 is set to the third position.
As shown in the figure, the measurement controller 20 is located approximately in the center of the XY stage 12 and the initial position of the mounting table 5 (the position before the start of measurement) is such that the upper left corner receives this light beam.
When the coordinate data of (0, 0, 0) is set by the measurement control unit 20, for example, the table 5 is always controlled by
When the mounting table 5 is moved so that the reference origin (the lower left corner) of is coincident with the irradiation position B of the light beam and the coordinate data of (0, Yh, Zm) is set, the optical sensor 14 is set to the maximum height. It is pulled up to Zm and the mounting table 5 moves to the initial position shown in FIG.

FIG. 4 is a diagram showing the configuration of the measurement control unit 20.

In FIG. 4, 21 is an input operation section for inputting and setting measurement items and measurement parameters by key operation, 22 is a measurement program edited according to the set measurement items, and the XY stage is according to the measurement program. This is a processing unit that controls the movements of the Z stage 12 and the Z stage 16 and receives the displacement signal from the optical sensor unit 14 to perform the arithmetic processing necessary for the measurement.

Reference numeral 23 denotes a display unit that displays measurement items, measurement route settings, measurement results, and the like.

FIGS. 5 (a) and 5 (b) are flowcharts showing the processing procedure in the measurement control unit 20 for setting the measurement items for the object to be measured, and the arrangement information of the object to be measured and the object to be measured. It is assumed that the outer shape information has been input in advance.

First, the measurement type name (warp, undulation, parallelism, etc.) stored in advance in the memory of the processing unit 22 is displayed on the display unit 23, and the desired (for example, parallelism) measurement type is operated by the operation of the input operation unit 21. Is selected and the measurement type is stored (steps 1 to 3).

Next, as shown in FIG. 6, from the memory of the processing unit 22 in which the types of measurement routes that can be set for each measurement type are stored in advance, the types of measurement routes corresponding to the measurement types selected in the above step. The name (for example, multiple points, multiple lines) is read and displayed (step 4).

When a desired (multipoint) type is selected from the displayed types of measurement routes by operating the input operation unit 21, the type of the selected measurement route is stored (steps 5 and 6).

Next, as shown in FIG. 7, the measurement type and the measurement route type selected in the above step are stored in the memory in which the measurement criteria that can be set for each combination of the measurement type and the measurement route type are stored in advance. The measurement reference name (datum, stage) for the combination of and is read and displayed (step 7).

Here, for straightness, flatness, parallelism, etc., the measurement reference is stored only for the measurement type regardless of the selection result of the type of the measurement route.

Next, when a desired (datum) metric is selected from the displayed metrics, the selected metric is stored (steps 8 and 9).

Next, the measurement route name selected in the previous step and the measurement condition name required for the measurement type are displayed, for example, as shown in FIG. 8, and when the value is input and set from the input operation unit 21, the measurement condition is changed. It is stored (steps 10 to 12).

Next, the outer shape of the object to be measured is displayed based on the previously input outer shape information of the object to be measured, and the input of the measurement route is instructed (step 13).

The element position of the measurement route on the surface of the object to be measured input by the operation of the input operation unit 21 is converted into coordinate data and stored (step 14).

In this memory, the point coordinates are stored as points of the measurement route, and the coordinates of the start point and the end point are stored as elements of the measurement route when the measurement route is a line.

When positioning the measurement route using the input operation unit 21,
The XY stage 12 also moves in conjunction, and the measurement route is displayed on the monitor TV (step 15).

When all the element positions of the measurement route are input and the A route registration command is input, as a first check, it is determined whether the coordinate position of this route is geometrically consistent with the type of the measurement route, If they are inconsistent, an error message is displayed and an instruction to re-enter the measurement route is displayed (steps 16-18).

Note that, for example, for the actual element coordinates input when the type of the measurement route is "one side", the first check is performed by the processing shown in FIG.

That is, from the input coordinate element, the number of elements is determined to be insufficient based on whether the number of points is 2 or more or the number of lines is 1 or more. If the number of elements is insufficient, an error or the number of points If is 2 or the number of lines is 1, it is determined to be OK.

When the number of input points is 2 or more or the number of lines is 1 or more, the straight line determined by the first two input points or line segments is set to 1, and other point coordinates are on the straight line l. Depending on whether it is OK or not, it is judged as OK or error.

If the first check is OK, the element coordinates of the input measurement route are registered and stored as the A route, and the second check is performed when the measurement reference selected in the previous step is not "datum" (fifth check). Figure (b) steps 19 to 20).

If Datum was selected in the previous step,
The input of the reference measurement route is instructed, and the element coordinates of the input measurement route are registered as the B route.
Is checked (steps 22 and 23).

The second check is to check whether the total number of measurement points when executing the measurement of the registered A route and B route under the measurement conditions input and set in the previous step is within the memory capacity. , If it is a point route, the number of input points is determined.If it is a line route, it is determined whether the number obtained by dividing the line length by the measurement pitch is within the memory capacity. If it exceeds the capacity, an error is displayed and the measurement condition or measurement route A change command is output (step 24).

If the second check results in OK, the measurement routes A and B determine whether the planar feature is a linear feature, and the determination result is stored in a form corresponding to the measurement route (step
twenty five).

Note that this determination is similar to the processing procedure of FIG.

When the above processing procedure is completed, the information necessary for one measurement item as shown in FIG. 10 is set and stored in the memory of the processing unit 22, for example.

The measurement items set as described above are the measurement mechanism unit 10
Is automatically edited as a measurement program suitable for the operation format of, and measurement is performed in accordance with the processing procedure shown in FIG. 11, for example.

This flowchart shows the case where the measurement route is a point, and when the measurement start command is input, the optical sensor unit 14
Is set to 8 and the value n indicating the order of the measurement point coordinates is initialized to 1 (steps 1 to 3).

Next, the XY stage 12 is driven to move the measurement point to the nth coordinate position of the measurement route, and the height of the surface of the object to be measured is continuously detected eight times (steps 4 and 5). .

Next, the average value Z of the height data of eight times is calculated, and this value is stored as one measurement data together with the XY coordinates of this measurement point, and then the value of n is the number of elements of the measurement route. It is discriminated whether or not has reached, and when it has not reached, n is incremented by 1 and the process returns to step 4 (steps 6 to 8).

In this way, the height data of all the measurement points of the measurement route are stored.

If "Datum" is selected as the measurement standard, B
The route is measured by the same process as described above.

The shape determination is performed on the measurement data obtained as described above with respect to the measurement reference.

For example, suppose that measurement data obtained by measuring "warp of one side" with reference to "both ends" is obtained as shown in FIG. 12 (a), points S at both ends are measured as shown in FIG. 12 (b). The straight line connecting E is determined as the reference line L1, and the distance R between the reference line L1 and the straight line L2 that is parallel to the reference line L1 and is in contact with the curve of the measurement data as shown in FIG. Store and display as measurement result.

When “specified point” is selected as the measurement reference, the shape determination according to the measurement type is performed with reference to the straight line connecting the two input specified points or the plane determined by the three input specified points. If "Self" is selected,
The shape determination is performed with reference to a straight line or a plane calculated from the shape data itself by the least square method.

In the case of "datum", the straight line or plane calculated from the shape data of the B route by the method of least squares is used as a reference, and in the case of "stage", the XY stage or mounting surface is used as a reference plane.

The processing unit 22 stores in advance the calculation of the shape determination defined by the JIS standard, and the predetermined shape determination is performed by the calculation method corresponding to the type of measurement and the type of measurement route.

<Other Embodiments of the Present Invention> In the above embodiments, the case where one type of measurement item is set for the measurement surface has been described, but a plurality of types of measurement items are set for one measurement surface. In this case, a plurality of types of measurement items may be set by repeating the above-mentioned input procedure.

<Effects of the Present Invention> As described above, according to the shape measuring method of the present invention,
Input what measurement (measurement type), what measurement (measurement route type), what is the reference (measurement standard), what condition (measurement condition), and where (measurement route) is to be performed. By setting, the desired measurement can be started, and even those unfamiliar with program creation can easily perform the measurement.

Moreover, since each input can be set with a degree of freedom that is possible with respect to the setting in the previous step, the types of measurement items are abundant and the versatility can be greatly enhanced.

[Brief description of drawings]

FIG. 1 is a diagram showing an overall configuration of a shape measuring apparatus to which the present invention is applied, FIG. 2 is a plan view showing a part of FIG. 1, and FIG. 3 is a schematic plan view showing the arrangement of FIG. Is. FIG. 4 is a block diagram showing the main part of FIG. 1, FIGS. 5 (a) and 5 (b) are flowcharts showing the processing procedure of the main part of FIG. 4, and FIG. 6 is stored in the memory in the processing part. FIG. 7 is a correspondence diagram showing the type names of the measurement routes for the measured types, and FIG. 7 is a correspondence diagram showing the measurement reference names for the combinations of the measurement types and the types of the measurement routes. FIG. 8 is a diagram showing an example of a display in the processing procedure of FIGS. 5 (a) and 5 (b), and FIG. 9 is a flowchart showing a part of FIGS. 5 (a) and 5 (b) in detail. FIG. 10 is a memory diagram showing the processing results of FIGS. 5 (a) and 5 (b). FIG. 11 is a flowchart showing the processing procedure of measurement, FIG.
(A), (b), (c) is a figure for demonstrating an example of the processing procedure of shape measurement from measurement data. 10 …… Measurement mechanism section, 12 …… XY stage, 14 …… Optical sensor section, 16 …… Z stage, 20 …… Measurement control section, 21 ……
Input operation part, 22 …… Processing part, 23 …… Display part.

Claims (1)

[Claims] 1. The shape of the surface to be measured by moving the object to be measured and the sensor relative to each other in accordance with the input and set measurement item information and detecting the displacement of the measurement point on the surface to be measured in a predetermined direction by the sensor. In the shape measuring method for measuring, a step of displaying a plurality of measurement types that can be set for the surface to be measured and selecting an arbitrary measurement type, and a measurement route that can be set for the selected measurement type A step of displaying the type and arbitrarily selecting one of the displayed measurement route types, and displaying and displaying a measurement standard that can be set for the combination of the selected measurement type and the measurement route type are displayed. Arbitrarily selecting one of the measurement criteria, and setting the measurement conditions necessary for the movement of the measurement point according to the selected measurement type and measurement route type, The measurement item is set by the step of setting the coordinate elements of the measurement route necessary for the selected measurement route type, and the surface to be measured according to the measurement program that is automatically edited based on the information selected and set in each step. A shape measuring method characterized in that the shape is measured.