JPH07119601B2 - Shape measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field of the Present Invention> The present invention relates to a shape measuring apparatus for measuring the shape of the surface of an object to be measured.

<Prior Art> A shape measuring device that measures the height of the object surface according to a predetermined measurement route and measures the warp, parallelism, etc. based on the height data in order to measure the warp, parallelism, etc. of the object surface. There was more than before.

In such a conventional shape measuring apparatus, the height of the measuring point in the Z direction is detected by a sensor while moving the measuring point on the surface of the object to be measured placed on the moving table in the XY directions. The warp, parallelism, etc. of the surface of the object to be measured are measured based on the height data, and movement control of this moving table, height data detection, and shape determination are automatically performed by computer program control. We try to increase the measurement efficiency.

For example, when the same measurement is performed on a large number of objects to be measured placed on a movable table, after measuring one surface of the object to be measured, measurement points on other surfaces of the object to be measured are measured. To perform the same measurement and perform the same operation, calculate warpage and parallelism based on the height data obtained for each measurement surface, and determine the degree of warpage and parallelism. Configured to display the results.

<Problems to be Solved by the Present Invention> However, in the above-described shape measuring apparatus, when measurement of any of the plurality of objects to be measured placed on the moving table fails, for example, the object to be measured is If there is a defect on the surface itself, or if the measured value becomes abnormal due to a problem with the mounting condition of the DUT on the moving table, restart all measurements or change the measurement program. Therefore, a very complicated work of re-measuring the object to be measured is required.

For this reason, when a large number (for example, 100) of objects to be measured are measured in one measurement, the objects to be measured are placed on the moving table very carefully, and skilled in changing the measurement program. There was a problem that a worker was always needed.

An object of the present invention is to provide a shape measuring device that solves this problem.

<Means for Solving the Problems> In order to solve the above problems, the shape measuring apparatus of the present invention includes: a type of shape measurement; measurement parameters necessary for the measurement; and measurement points defined on the surface of the object to be measured. Setting data for setting and storing the position data of each of the measurement items in advance, and 1 mounted on the movable table based on the measurement type, the measurement parameter, and the position data of each measurement item set in the setting device. Program editing means for editing and creating a measurement program defined on the surface of one object to be measured, positioning means for giving the position information of the object to be measured on the moving table to the measurement program to make absolute coordinates, and absolute coordinates A measurement execution unit that controls the movement of the movable table according to a measurement program and outputs a measurement result by a detection signal from a sensor; a unit that stores the measurement result; Re-measurement requesting means for requesting re-measurement by the measurement program by designating an arbitrary measured object placed on, and position information on the moving table of the measured object designated by the re-measurement requesting means. The measurement control unit is provided with re-measurement executing means for outputting to the positioning means and executing re-measurement on the object to be measured.

<Operation> Therefore, the measurement program for one measurement object surface is automatically edited based on the setting items set for one measurement object surface, and this measurement program is used for each measurement object on the moving table. Position information is given and absolute coordinates are given,
The measurement is performed on the object to be measured, and the measurement result is stored.

Further, when the measured object for which remeasurement is required is specified, the position information of the measured object is given to the measurement program, and the measurement for the specified measured object is executed.

<Embodiment of the present invention> (Figs. 1 to 12) One embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing the overall configuration of a shape measuring apparatus according to an embodiment of the present invention.

In the figure, 10 is a measurement mechanism section, and X- is on the base 11.
A Y stage 12 is provided, and a mounting table 1 for mounting an object to be measured is fixed on the XY stage 12.

The X stage 12a is configured to move the mounting table 1 in the left-right direction (in FIG. 1), and the Y stage 12b is configured to move the mounting table 1 in a direction orthogonal to the X stage 12a.

An X position detector 12c is provided on the Y stage 12b to detect the amount of movement of the X stage 12a from the reference position (reference origin of the mounting table). A Y position detector 12d for detecting the amount of movement of is provided.

Reference numeral 13 is a vacuum device that sucks air from the suction holes 3 (FIG. 2) of the mounting table 1.

Reference numeral 14 denotes an optical sensor portion arranged above the XY stage 12, which receives a light projecting portion 14a that irradiates the mounting table 1 with a light beam and a reflection resistance thereof, and a displacement corresponding to a change in height of an irradiation point. It is composed of a light receiving detector 14b that outputs a signal.

This displacement signal changes according to the distance from the optical sensor unit 14 to the irradiation point. The distance calculated based on this signal is the height from the optical sensor unit 14 to the origin of the XY plane of the mounting table 1. By subtracting from, the height of the irradiation point from the origin is obtained.

A monitor camera 15 that enlarges the vicinity of the irradiation point and outputs an image is integrated with the optical sensor unit 14.

Reference numeral 16 is a Z stage that moves the optical sensor unit 14 in the Z direction orthogonal to the XY stage 12, and is an XY stage.
Both the 12 and Z stage 16 are controlled to move by the XYZ drive unit 17.

Reference numeral 18 denotes a monitor television that displays the video signal from the monitor camera on the screen.

Reference numeral 19 denotes a manual operation unit that moves the XY stage 12 independently by directly inputting a movement signal to the XYZ drive unit 17.

Reference numeral 20 denotes a measurement control unit configured by a computer, which gives a movement signal to each stage from the XYZ drive unit 17 according to a set measurement program, and based on a displacement signal from the light reception detection unit 14b of the optical sensor unit 14. The height of the measurement point of the object to be measured in the Z direction is calculated to determine the shape.

As shown in FIG. 2, the measurement control unit 20 controls the XY stage 12, the Z stage 16, etc. with a predetermined lower left position of the mounting table 1 as a reference origin (0, 0, 0) of absolute coordinates. ing.

On this mounting table 1, three guide members 2 are attached so that nine objects to be measured are mounted in a predetermined mounting location E1 to E9 in a 3 × 3 arrangement. The lower left corner (in FIG. 2) of E1 to E9 is cut out in a circular shape in order to avoid burrs and the like of the object to be measured.

The reference positions of the objects to be measured placed on the respective mounting locations E1 to E9 are set to the positions R1 to R9 corresponding to the center of the corners, and the intervals of the positions R1 to R9 in the X direction are Xp and Y directions. The interval is set to Yp, and the coordinate position of the position R7 from the reference origin is set to (X1, Y1).

FIG. 3 is a diagram showing functional blocks of the measurement control unit 20.

In FIG. 3, reference numeral 21 is a first input means for inputting and setting the type of shape measurement and the measurement parameters necessary for the measurement for each item, and 22 is the input measurement type and measurement parameter. It is a first storage means for storing each measurement item.

The input means 21 is for presetting measurement items assumed for the object to be measured. For example, as in item 1 shown in FIG.
Warp measurement by side, ..... As with item N, the measurement type (warp, parallelism, etc.) and route type (2 sides, 5 points, etc.) such as warp measurement by 5 points are coded for each item and input. The values of the measurement parameters (measurement pitch, measurement speed, standard) necessary for this measurement are input and stored in the first storage means 22 for each measurement item as shown in FIG.

In this table, K1 is a symbol indicating parallelism measurement, K2 is a symbol indicating warp measurement, R1 is a symbol indicating the number of measurement routes on two sides, and R5 is a symbol indicating five measurement points.

Therefore, (K1, R1) indicates that parallelism is measured on two sides.

Reference numeral 23 is a measurement item display means for displaying a list of measurement items as shown in FIG.

Reference numeral 24 is a measurement item selection means for selecting the number of the measurement item to be performed on the measured object from the displayed measurement items.

25 is the position of the start point, end point and multipoint pattern of the measurement route for each measurement item set for one DUT,
It is a second input means for inputting a standard height value of the measured object as coordinate data from a predetermined reference position of the measured object.

Reference numeral 26 is a second storage means for storing the coordinate data input for each representative measurement item for each measurement item as shown in FIG.

27 is a third input means for inputting position information of a plurality of objects to be measured placed on the mounting table 1, such as a reference position of the mounting table, an arrangement pitch of the objects to be measured, and an arrangement number. Input settings.

28 is a third storage means for storing the position information input from the third input means 27.

Reference numeral 29 is a measured object position display means for displaying the position of the measured object on the mounting table 1 according to the position information stored in the third storage means 28.

Reference numeral 30 denotes an object to be measured selecting means for selecting an object to be measured from the objects to be measured displayed by the object position display means 29.

Reference numeral 31 is a measurement sequence selection means for selecting whether to continuously measure the object to be measured or to interrupt the measurement operation (intermittent operation) for each object.

The reference numeral 32 reads the measurement item selected by the selection operation of the measurement item selection means 24 and the measurement object selection means 30, the position information corresponding to the measurement item, and the selection information from the measurement sequence selection means 31, and measures these. The measurement program automatic editing means automatically edits the measurement program defined on the measurement surface of the object to be measured based on the information.

This measurement program automatic editing means 32, as shown in FIG. 7, is a measurement item list according to the selection operation by each selection means.
L1, the measured object list L2, the sequence data D1, and the height data D2 of the measured object are created and stored, and the measurement program is automatically edited according to the processing procedure shown in FIG.

In addition, in FIG. 7 and FIG. 8, measurement items 1, 2,
The Nth item is selected, and the mounting positions E1, E6 of the mounting table 1 are
The case where the DUT placed on E7 is selected is shown.

In FIG. 8, after the program pointer POK of the measurement item list L1, the program pointer PPO and the program memory pointer MPO of the measurement program storage means 33 are initialized, the item number indicated by POK is read and assigned to the variable KOM. (Steps 1 and 2).

After the end of reading the item number is determined, the measurement parameters of the measurement pitch PIC and the measurement speed SPD are read from the KOM-th parameter table (Fig. 5) (step 3,
4).

After the KOM-th coordinate data (FIG. 6) is read from the second storage means, a measurement program that matches the grammar of the measuring device is synthesized (steps 5 and 6).

After the synthesized program is stored in the MPO address of the measurement program storage means, the head address of this program is stored in the PPO-th management table, POK and PPO are incremented by 1, and MPO is increased.
Is updated and the process returns to step 2 (steps 7 to 9).

After this process is performed for the number of selected measurement items, when the end is determined in step 3, the end mark is written in the table indicated by PPO, and the item list L1 is sent to the measurement item switching means 34, The measured object list L2 is sent to the position calculating means 35 (steps 10 to 12).

The measurement program and the management data thus automatically edited are stored in the measurement program storage means as shown in FIG.
It is stored in 33 and the measurement is started by the measurement start signal to the position calculating means 35.

10 (a) and 10 (b) are flowcharts showing the procedure of measurement.

First, in the position calculating means 35, based on the measured object list L2 from the measurement program automatic editing means 32 and the position information from the third storage means, the reference position (any one of R1 to R9 of the measured objects in the list is measured. The coordinates (Xr, Yr) of () with respect to the reference position on the mounting table 1 are calculated. However, both n and m are 3, and the addresses (Cn, Cm) are from (1, 1) to (3,
The values are up to 3) (steps 1 to 5).

The position calculating means 35 has a measured object list L3 for remeasurement selected by the measured object selecting means 30 at the time of remeasurement in addition to the measured object list L2, and the remeasurement signal is input. If so, the coordinates based on this measured object list L3 are calculated.

Next, in the measured object positioning means 36, the position calculating means
The coordinate values Xr, Yr, Zr from 35 are measured program storage means.
A measurement program added to the coordinate information defined for the reference position of the object to be measured stored in 33 and converted into absolute coordinates is sent to the measurement control means 37, and the XY stage is moved and the optical sensor is used. The height measurement is performed based on the detection signal (steps 6 to 8).

This measurement data is stored in the measurement data storage means 40 as shown in FIG. 11 together with the measurement state table and the measurement data management table indicating whether or not this measurement has failed (steps 9 to 16).

However, the processing from step 6 to step 15 is repeated for the number of measurement items for the DUT, and substantially the same processing is performed for all the DUTs in the DUT list L2 or L3. become.

For this measurement data, the determination means 42 performs arithmetic processing of shape measurement predetermined by the measurement type,
The judgment display means 43 displays the judgment result (steps 19 and 20).

It should be noted that, for example, the DUT for which measurement has failed (in FIG.
When the measurement of (measurement object) is performed again, a remeasurement signal is input to the position calculation means 35, the sixth measurement object is selected by the measurement object selecting means, and the sixth measurement object is set in the measurement object list L3. After that, by starting the process from the portion of WKCNT = 1 in step 1 of FIG. 10, the measurement can be performed only on the measured object (sixth measured object) in the measured object list L3.

This remeasurement mode replaces step 12 in Figure 10 with the
The processing procedure (steps 40 and 41) shown in FIG. 12 is performed, only the measured data of the measured object that has been designated and measured is updated, and the measured data of the measured object that has not been remeasured remains.

<Other Embodiments of the Present Invention> In the above embodiment, the present invention is applied to a shape measuring apparatus capable of mounting a maximum of nine objects to be measured and detecting height data by an optical sensor. The present invention can be similarly applied to a shape measuring apparatus having another sensor and capable of mounting a larger number of objects to be measured.

<Effects of the Present Invention> Since the shape measuring method of the present invention is configured as described above, it does not perform the complicated and skillful work of re-measuring all the objects to be measured or changing the measurement program. Thus, remeasurement of the object to be measured can be performed very easily.

Therefore, even when a large number of DUTs are measured by one measurement, it is not necessary to place the DUTs on the moving table particularly carefully, and even an unskilled person can easily and efficiently perform the measurement. Work can be done.

[Brief description of drawings]

FIG. 1 is a diagram showing the overall configuration of a shape measuring apparatus to which the present invention is applied, FIG. 2 is a plan view showing the main parts of FIG. 1, and FIG. 3 is a functional block diagram of the main parts of FIG. Is. FIG. 4 is a diagram showing a measurement pattern for a measurement item, FIG. 5 is a diagram showing measurement parameters stored in the main part of FIG. 3, and FIG. 6 is a diagram showing measurement position data stored in the main part of FIG. FIG. FIG. 7 is a diagram showing a storage list for the selection operation of FIG. 3, FIG. 8 is a flowchart showing the processing procedure of the main part of FIG. 3, and FIG. 9 is a memory diagram showing the processing result of FIG. , First
10 (a) and 10 (b) are flowcharts showing the processing procedure of the main part of FIG. 3, and FIG. 11 is a memory diagram showing the processing results of FIG. FIG. 12 is a flowchart showing a part of the processing procedure at the time of re-measurement in one embodiment. 20 ... Measurement control unit, 21 ... First input means, 22 ... First
Storage means 24 ... Measurement item selection means 25 ... second input means 26 ... second storage means 27 ... third input means 28 ... third storage means 30 ... ... Means for selecting objects to be measured,
31 …… Measurement sequence selection means, 32 …… Measurement program automatic editing means, 33 …… Measurement program storage means, 35 ……
Position calculation means, 36 ... Measured object positioning means, 37 ... Measurement control means, 40 ... Measured data storage means.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasuhisa Nakamichi 5-1027 Minamiazabu, Minato-ku, Tokyo Anritsu Co., Ltd. (72) Inventor Takayuki Seki 5-1027 Minamiazabu, Minato-ku, Tokyo Henri Incorporated (72) Inventor Hiroyuki Sato 5-1027 Minamiazabu, Minato-ku, Tokyo Anritsu Incorporated (56) Reference JP-A 61-213615 (JP, A)

Claims (1)

[Claims] 1. A moving table for moving an object to be measured in XY directions, a sensor for detecting a height change of a measuring point on the surface of the object to be measured, and a moving control of the moving table to move the object on the surface to be measured. In a shape measuring device having a measurement control unit that moves a measuring point and measures the shape of the surface of an object to be measured based on a detection signal from the sensor, the type of shape measurement, the measurement parameters necessary for the measurement, and the object Setting means for setting and storing the position data of the measurement points defined on the surface of the object to be measured in advance for each measurement item, based on the measurement type, measurement parameter and position data for each measurement item set in the setting means, Program editing means for editing and creating a measurement program defined on the surface of one object to be measured placed on the movable table, and absolute position information of the object to be measured on the movable table is given to the measurement program. seat Positioning means to mark, according to the measurement program in absolute coordinates, the movement of the movable table is controlled, the measurement execution means for outputting the measurement result by the detection signal from the sensor, the means for storing the measurement result, Remeasurement requesting means for requesting remeasurement by the measurement program by designating an arbitrary measured object placed on a movable table, and a position on the movable table of the measured object specified by the remeasurement requesting means The shape measuring apparatus, wherein the measurement control section includes remeasurement executing means for outputting information to the positioning means and executing remeasurement on the object to be measured.