JPH07120632B2 - Jig with wheels for semiconductor wafer processing - Google Patents

Description

TECHNICAL FIELD The present invention relates to a jig with wheels used when a semiconductor wafer is subjected to a diffusion furnace treatment or the like.

[Prior Art] Conventionally, since a semiconductor wafer (hereinafter, simply referred to as a “wafer”) is subjected to a diffusion furnace treatment or the like, a wheeled curing device for directly or indirectly mounting a plurality of wafers and carrying the wafer into or out of a furnace core tube or the like is used. As a tool, there are JP-A-56-42333 and JP-A-60-14251.
Those disclosed in U.S. Pat. No. 3 or U.S. Pat. No. 3,705,714 are known.

As shown in FIG. 2, the former jigs with wheels described in JP-A-56-42333 and JP-A-60-142513 mount a plurality of wafers (not shown) directly or indirectly. A rectangular parallelepiped bearing block 2 is integrally provided at both ends (only one end is shown in the figure) of a jig body 1 having an arcuate cross section to be placed, and an axle 4 is inserted into a shaft hole 3 penetrating the bearing block 2. The wheels 5 are fitted around both ends of the axle 4, the wheel retainers 6 for preventing the wheels 5 from falling off are fitted on the axle 4, and the wheel retainers 6 are fixed to the axle 4 by pins 7. A box-shaped cover 8 that covers the wheels 5 and the like is mounted on the bearing block 2.

Further, the latter U.S. Pat.No. 3,705,714 discloses a jig with wheels, in which the wheel and the axle are integrally formed, and the smoothly ground axle is rotatably engaged with bearing grooves provided at the lower ends of the jig body. Is configured.

[Problems to be Solved by the Invention] However, since the former jig with wheels is made up of a large number of constituent members, high precision is required for processing each constituent member. If the processing accuracy of each component is not high, rattling will occur when combined, and the straightness when moving in and out of the furnace core tube will decrease, the friction between the furnace core tube and the wheel will increase, and dust will be generated. There is a problem that occurs.

Further, although the box-shaped cover 8 prevents the scattering of dust, the contact area between the constituent members is large, the amount of dust generated is large, and the effect of the box-shaped cover 8 is small.

Further, although acid cleaning or the like is performed as a pretreatment such as a wafer diffusion furnace treatment, there is a problem that cleaning is complicated due to its complicated structure.

Further, according to the latter jig with wheels, since the wheel and the axle are integrated, the problem of straightness is reduced, but the contact area between the axle and the jig body is large, so that dust is increased. There's a problem.

Therefore, the present invention is to provide a wheel-equipped jig for wafer processing, which has excellent straightness, can reduce dust generation, and can be easily cleaned.

[Means for Solving the Problems] In order to solve the above problems, the present invention provides a jig main body for directly or indirectly mounting a plurality of wafers, and a bottom wall provided at both ends of the jig main body. A box-shaped bearing housing having an opening in the wheel, and wheels integrally provided near both ends of the axle. At least both wheels and the axle between them are housed in the bearing housing, and both ends of the axle are interposed. A wheel unit rotatably supported in the bearing housing, and a wheel drop-off prevention plate detachably provided on the bottom wall, and each constituent member made of quartz glass, SiC quality material, or Si-SiC quality material. Is.

[Operation] Since the jig of the present invention is a wheel unit in which the wheel and the axle are integrated, rattling does not occur in the wheel, and the contact between the wheel unit and the bearing housing does not affect the axle and the bearing portion. The contact area between the two is extremely small because it is performed only between the two. In addition, there are only three parts involved in running, namely the bearing housing, axle unit, and wheel fall-out prevention plate,
The structure has a simple structure, and the wheel unit is housed in the bearing housing through the opening in the bottom wall of the bearing housing to engage the axle with the axle bearing, and the wheel dropout prevention plate is provided on the side wall or bottom wall. The running portion is assembled by inserting the wheel unit into the bearing housing, and the wheel unit is removed by pulling out the wheel drop-off prevention plate.

[Embodiment] An embodiment of the present invention will be described below with reference to FIG.

In the figure, 10 is a jig main body that directly or indirectly supports a plurality of wafers (not shown). The jig main body 10 is provided, for example, with quartz glass or a material of SiC quality or Si-SiC quality in an arc cross section. Has been. A box-shaped bearing housing 11 made of the same material as the jig body 10 is integrally provided at both ends (only one end is shown in the drawing) of the jig body 10.
The bearing housing 11 is for accommodating a wheel unit which will be described later, and has an H-shaped opening portion 12 provided on the bottom wall thereof, and U-shaped bearing portions at the lower portions of opposite side walls. 13 are provided.

In the bearing housing 11, a wheel unit 16 integrally provided with wheels 15 near both ends of an axle 14 having a length substantially equal to the width of the bearing housing 11 can be taken out from the opening 12 of the bottom wall. It is housed, and both ends of the axle 14 are rotatably engaged with bearings 13 on both side walls. Then, the wheel unit 16 housed in the bearing housing 11
Is behind the bearing housing 11 (left in FIG. 1)
The wheel drop-off prevention plate 18 is detachably inserted from a rectangular opening 17 provided at the lower part of the side wall of the wheel so as to prevent the wheel fall-off prevention plate 18 from falling off. Therefore, a convex portion 19 that engages with a part of the opening 12 of the bottom wall is provided.

The wheel unit 16 and the wheel slip-out prevention plate 18 are made of the same material as that of the jig body 10 as with the bearing housing 11.

The wheel unit 16 is manufactured by grinding the axle 14 from a bar material having an outer diameter substantially the same as the outer diameter of the wheel 15 by grinding, or separately forming the axle 14 and the wheel 15 as an integral body by bonding. To be done.

The jig with wheels configured as described above accommodates the wheel unit 16 in the bearing housing 11 through the opening 12 in the bottom wall, engages both ends of the wheel 14 with the bearings 13 in both side walls, and opens the side wall. 17
Insert the wheel dropout prevention plate 18 into the bearing housing 11 from
Moreover, the assembly of the running portion is completed by engaging the convex portion 19 with the opening portion 12 of the bottom wall, and the wheel dropout prevention plate is reversed in the reverse order of the above procedure.
The running portion is disassembled by pulling out 18 and taking out the wheel unit 16.

The present invention is not limited to the above-described embodiment, and for example, the bearing portion may be an arch-shaped member provided on the bottom wall in the bearing housing to rotatably support the axle. Further, the shape and mounting method of the wheel slip-off prevention plate can be selected appropriately.

[Effects of the Invention] As described above, according to the present invention, since the wheel unit in which the wheel and the axle are integrated is used and rattling does not occur in the wheel, the straightness can be improved, and the wheel and the furnace core pipe can By reducing the friction with the furnace wall, it is possible to reduce the generation of dust due to the contact between the wheels and the furnace wall. Further, since the contact area between the wheel unit and the bearing housing is extremely small, the dust generated by the contact between the two can be significantly reduced, and the entire wheel unit is housed in the bearing housing. The dust can be prevented from scattering in the furnace core tube and the wafer can be prevented from being adversely affected.
Furthermore, since the number of constituent members of the traveling portion is small and the structure is simple, the traveling portion can be easily assembled, disassembled and washed.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a jig with wheels according to the present invention, and FIG. 2 is an exploded perspective view of a conventional jig with wheels. 10 …… Jig body, 11 …… Bearing housing 12 …… Opening part, 13 …… Bearing part 14 …… Axle, 15 …… Wheel 16 …… Wheel unit, 17 …… Opening part 18 …… Wheel fall prevention plate , 19 …… Convex

Claims (1)

[Claims] 1. A jig main body for directly or indirectly mounting a plurality of semiconductor wafers, a box-shaped bearing housing provided at both ends of the jig main body and having openings in a bottom wall, and both end portions of an axle. Wheels are integrally provided in the vicinity, and at least both wheels and an axle therebetween are housed in the bearing housing,
In addition, the wheel unit is rotatably supported by the bearing housing via both ends of the axle, and the wheel drop-off prevention plate detachably provided on the bottom wall, and each component is made of quartz glass, SiC quality or Si. -A jig with wheels for processing semiconductor wafers, characterized by being made of a material of SiC quality.