JPH071206B2 - High sensitivity multi-wavelength spectrometer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is capable of spectral analysis of weak light from near the visible region to infrared such as bioluminescence, chemiluminescence, and extremely weak fluorescence due to excitation light. The present invention relates to a high sensitivity multi-wavelength spectroscope.

[Conventional technology]

In recent years, extremely weak light emission such as bioluminescence, chemiluminescence, and extremely weak fluorescence due to excitation light has attracted attention. In order to perform such a spectroscopic analysis of extremely weak light, it is desirable to perform measurement with as little light loss as possible. For that purpose, a detection system having an advantage of simultaneous photometry for measuring a large number of wavelengths at a time is preferable, which is an optical system capable of obtaining a large emission solid angle in order to increase the luminous flux utilization rate (throughput). That is, it is necessary to employ a bright optical system for both the collimator system and the condensing system, and to provide a high-sensitivity multi-wavelength spectroscope that incorporates the design concept of a polychromator that can simultaneously perform multi-wavelength spectrum analysis without performing wavelength scanning. However, no conventional spectroscopic device satisfies this requirement. Since a conventional spectroscope using a diffraction grating is basically a monochromator, an entrance slit and an exit slit are indispensable, and therefore wavelength scanning is necessary, at which time light other than the exit slit is discarded. Therefore, there is no advantage of simultaneous photometry. Further, since the one-dimensional or two-dimensional light distribution detector for detecting the spectral distribution is not arranged on the exit surface, simply removing the exit slit and attaching the detector causes problems of focal point and aberration. There is a problem,
It doesn't work. Since the collimator system and the condensing system use the reflecting mirror off-axis, the spectrum line image is bent due to aberration, the F-number cannot be reduced so much, and there is a limit to the brightness of the spectroscope. Those with F = 3 or less have not been put to practical use. A F = 1 spectroscope has recently been developed using a parabolic mirror as the reflecting mirror of such a conventional spectroscope. However, since the condenser mirror (parabolic mirror) is used off-axis, the spectral line image is bent and a one-dimensional or two-dimensional optical distribution detector is placed to obtain an accurate spectral distribution. In addition to the big problem that the detector is difficult to use, it is necessary to cool the detection surface because the detector is used with high sensitivity. There is the problem of having to increase the focal length of the parabolic mirror for focusing, which results from having to place a relatively thick vacuum chamber for heat insulation in front of the surface.
Furthermore, a polychromator using an arrayed detector as a detector using a concave diffraction grating has recently been sold,
Since the diameter and the radius of curvature of the concave diffraction grating are limited, the brightness is limited and insufficient. On the other hand, for spectroscopic analysis of extremely weak light emission, it has been proposed to use static interferometry using a three-screen common-pass interferometer, a square common-pass interferometer, a birefringent polarization interferometer, etc. As a result of the examination, it was doubtful that the area of the surface of the luminescent sample could be taken and that it was brighter than the spectroscope. In addition, these interferometers use a brighter optical system than the conventional spectroscope, but this is because a brighter lens is used instead of a mirror, and the characteristics of the interferometer are Absent. Under the present circumstances where the width of the detector array is smaller than the width of the diffraction grating, the size of these widths determines the resolution of each spectroscopic system. From the point of view of energy, in the case of a spectroscope, widening the width of the entrance slit makes the energy worse, but the energy can be earned.
This cannot be done with static interferometry.

[Problems to be Solved by the Invention]

As described above, depending on the conventional spectroscope or spectroscopic method,
It has been difficult to obtain spectroscopic analysis of extremely weak light such as bioluminescence, chemiluminescence, and extremely weak fluorescence due to excitation light, and particularly to simultaneously obtain multi-wavelength spectral distribution.

Therefore, an object of the present invention is to overcome the above-mentioned drawbacks of the conventional spectroscope or the spectroscopic method, to obtain a very bright and compact spectral distribution of extremely weak light such as bioluminescence, chemiluminescence, and extremely weak fluorescence due to excitation light. It is an object of the present invention to provide a high-sensitivity multi-wavelength spectroscopic device based on the design concept of a polychromator that can perform wavelength scanning or simultaneously obtain.

[Means for Solving the Problems]

One of the high-sensitivity multi-wavelength spectroscopic devices of the present invention is an optical system that limits incident light to a point-like or linear form and emits light emitted from a point-like or linear emitting end of the optical system as a focal point. A bright collimator lens that takes in and collimates it, a reflection diffraction grating that diffracts the light that is collimated by the collimator lens and is incident at an angle to the normal line, and a reflection type A spectroscope composed of an imaging lens for forming parallel light separated by a diffraction grating on the image plane as a spectral image, and a high-sensitivity one-dimensional or two-dimensional photodetector arranged on the image plane of the imaging lens. A blade diffraction grating is used as a reflection-type diffraction grating for the spectral detection of extremely weak natural luminescence such as bioluminescence and chemiluminescence, and each component of the spectroscope is made into a spectral image of the -1st-order diffracted light. Distributable as It is characterized in that the.

Another high-sensitivity multi-wavelength spectroscopic device is an optical system that limits incident light to a point-shaped or line-shaped emission, and a point-shaped or linear emission end of this optical system is used as a focal point to emit light emitted from the optical system. A bright collimator lens that takes in and collimates it, a reflection diffraction grating that diffracts the light that is collimated by the collimator lens and is incident at an angle to the normal line, and a reflection type A spectroscope composed of an imaging lens for forming parallel light separated by a diffraction grating on the image plane as a spectral image, and a high-sensitivity one-dimensional or two-dimensional photodetector arranged on the image plane of the imaging lens. The blazed diffraction grating is used as a reflection-type diffraction grating for the spectral detection of extremely weak light emission by excitation light such as Raman scattering and fluorescence, and each constituent element of the spectroscope is converted into a + 1st-order diffracted light as a spectral image. Take out It is characterized in that arranged in ability.

In these cases, a slit or a pinhole can be used as an optical system that limits the incident light to a point or line shape and emits it.

[Action]

An optical system that limits the incident light to a point-shaped or linear shape and makes the light from the sample or its image enter the collimator lens as a point-shaped or linear light source, and the collimator lens leaks the light from the sample or its image. Instead, they are made into parallel rays having a high degree of parallelism and are incident on the reflection type diffraction grating at an angle with respect to the normal line. Therefore, the reflection type diffraction grating sufficiently exhibits its resolution and also disperses extremely weak light. Further, since the reflection type diffraction grating can be arranged in close proximity to the collimator lens and the imaging lens, the device can be downsized. And as a collimator lens and an imaging lens,
Since a bright lens whose F number is as small as possible can be used, it is possible to sufficiently increase the brightness of the entire device that is a composite system of both lenses, and combine it with a high-sensitivity one-dimensional or two-dimensional photodetector. Thus, bioluminescence, chemiluminescence, simultaneous multi-wavelength analysis of extremely weak light such as extremely weak fluorescence due to excitation light becomes possible, in particular, bioluminescence, chemiluminescence, living organisms utilizing extremely weak fluorescence due to excitation light, etc., It will be effective as a research tool for trace components.

In particular, in the case where each component of the spectroscope is arranged so that -1 dimensional diffracted light can be taken out as a spectral image, the imaging lens forms a larger amount of diffracted light with less loss, so bioluminescence, chemiluminescence It is suitable for spectral detection of extremely weak spontaneous emission such as.

On the other hand, when each component of the spectroscope is arranged so that the + 1st-order diffracted light can be taken out as a spectral image, stray light does not hide the signal light and the resolution is higher, so that Raman scattering, fluorescence, etc. It is suitable for spectroscopic detection of extremely weak light emission by excitation light.

〔Example〕

In order to perform spectroscopic analysis of extremely weak light such as bioluminescence, chemiluminescence, and extremely weak fluorescence due to excitation light, it is necessary to select an optical system so that as much light as possible from the light emitting point of the sample enters the spectroscopy system. There is. That is, it is necessary for the optical system to maximize the solid angle at which the starting point of extremely weak light emission is expected. On the other hand, the spectral line image dispersed by the spectroscopic system should be formed as linearly as possible. As an optical system satisfying such requirements, at present, there is only an optical lens having a small F number, which is a combination of optical glass lenses. As for the optical lens, an F-number of 1 or less without aberration can be easily obtained. Therefore, in the present invention, such an optical lens having a small F number is used. Then, a reflection type diffraction grating is used as a spectroscopic system that disperses the light beam collimated by the optical lens, and a bright optical lens is used to form an image of the diffracted light to give a spectrum distribution image. ,
A high-sensitivity one-dimensional or two-dimensional photodetector for electrically detecting a spectrum intensity distribution image is arranged on the image plane to detect the light intensity of each wavelength at the same time.

FIG. 1 shows a basic form of a high-sensitivity multi-wavelength spectroscopic device of the present invention. This device has an incident slit 2 as an optical system for limiting the measurement point on the sample S to a point or a line, and the position of the incident slit 2 as a focal point. A collimator lens 3 having a small F number, a reflection diffraction grating 4 for diffracting and splitting light that is collimated by the collimator lens 3 and is incident at an angle with respect to a normal line; A spectroscope 1 including an imaging lens 5 for forming a parallel image on the image plane P as a spectral image of the parallel light split by the reflection type diffraction grating 4;
It is composed of a high-sensitivity one-dimensional or two-dimensional photodetector 6 arranged on the spectral image plane. Reflective diffraction grating 4
Is configured to be rotationally adjustable about the point C as shown by the arrow in order to adjust the detection spectrum range.

In such a spectroscopic device, if the grating spacing of the diffraction grating 4 is d, the incident angle to the diffraction grating 4 is i, the diffraction angle from the diffraction grating 4 is β, the wavelength is λ, and the diffraction order is m. , Sin i + sin β = mλ / d, the extremely weak incident light from the sample S is diffracted and a spectrally dispersed image is formed on the highly sensitive one-dimensional or two-dimensional photodetector 6. Therefore, by analyzing the output from the high-sensitivity one-dimensional or two-dimensional photodetector 6 and obtaining the coordinates of the image and the image intensity at that point, bioluminescence,
It is possible to simultaneously measure the spectral characteristics of extremely weak light emission from an object exhibiting extremely weak fluorescence due to chemiluminescence or excitation light. By the way, in the above formula, a basic type (-1st-order grazing incidence spectroscopic type) in which the imaging lens 5 and the high-sensitivity one-dimensional or two-dimensional photodetector 6 are arranged so as to satisfy the relation of m = -1, There is a basic type (+ 1st-order grazing incidence spectroscopic type) in which the imaging lens 5 and the high-sensitivity one-dimensional or two-dimensional photodetector 6 are arranged so as to satisfy the relationship of m = + 1. FIG. 2 (a) shows the -1st-order grazing incidence spectral type, and FIG. 2 (b) shows the +1 grazing incidence spectral type. In these cases, a blazed diffraction grating is used as the reflection type diffraction grating 4 and is arranged as illustrated.

Consider the relationship between the diameters of the collimator lens 3 and the imaging lens 5 in the -1st-order grazing incidence spectroscopic type of FIG. 2A and the + 1st-order grazing incidence spectroscopic type of FIG. 2B. FIG. 3 (a) is an optical path diagram for studying the -1st-order grazing incidence spectral type. The diameter D _i of the collimator lens 3, the width of the diffraction grating is 1, the diffraction angle of the central wavelength is β _ce , If the diameter of the imaging lens 5 is D _o , D _i = lcos i D _o = lsin (2 / π−β _ce ) = lcos β _ce By the way, in this type, light effectively reaches the photodetector 6. Therefore, since i <β _ce , it is necessary to select the aperture of the imaging lens 5 so as to satisfy the condition of D _i > D _o . Similarly, when the + 1st-order grazing incidence spectroscopic type shown in FIG. 3 (b) is examined, D _i = lcos i D _o = lcos β _{ce In} this case, the light effectively reaches the photodetector 6. Since i <β _ce , it is necessary to select the aperture of the imaging lens 5 so as to satisfy the condition of D _i <D _o . Based on this examination, which type should be selected according to the type of light to be separated is examined. −
In the first-order grazing incidence spectroscopic type, as shown in FIG. 3 (a), the blazed diffraction grating has to be arranged so that the incident light also strikes the short diffractive surface, so that diffracted light is generated from this surface. Stray light increases background light. On the other hand, in the + 1st-order grazing incidence spectroscopic type, as shown in FIG. 3 (b), the diffraction grating is arranged so that light does not strike the short diffraction surface of the blazed diffraction grating.
Although stray light does not occur, the aperture of the imaging lens 5 needs to be larger than that of the collimator lens 3 as described above.
However, in the high sensitivity multi-wavelength spectroscopic device of the present invention,
Since the diameter of the collimator lens 3 is as large as possible, it is difficult to use a lens having a larger diameter as the imaging lens. Therefore, it can be said that the + 1st-order grazing incidence spectroscopic type has large loss when the collimator lens 3 having a diameter of about the same is used as the imaging lens 5. As described above, it can be said that the -1st-order grazing incidence spectroscopic type is suitable for the spectral detection of extremely weak spontaneous luminescence such as bioluminescence and chemiluminescence. On the other hand, in the spectroscopy of extremely weak light emission due to excitation light such as Raman scattering and fluorescence, which is significantly affected by stray light, the stray light does not hide the signal light, although there is some loss. It can be said that things are more suitable. As a matter of course, in designing the lens, if the collimator lens, the aperture of the imaging lens, and the F number can be freely realized, for the spectral detection of extremely weak spontaneous emission such as bioluminescence and chemiluminescence, It can be said that the + 1st-order grazing incidence spectral type is more excellent. Also, when it is necessary to improve the resolution, the + 1st-order grazing incidence spectroscopic type is preferable.

Now, with such a high-sensitivity multi-wavelength spectrometer, the sample S
When the light from is spectrally analyzed, as shown in FIG. 1, since the diffracted light emitted from the imaging lens 5 includes light such as −1st order light and + 1st order light in addition to the 0th order light, As described above, the imaging lens 5 is arranged so that the center wavelength of the diffracted light of an appropriate order comes to the center of the highly sensitive one-dimensional or two-dimensional photodetector 6.
And the angle of the diffraction grating 4 is adjusted.

In this case, as an optical system for limiting the measurement points on the sample S to a point shape or a linear shape, instead of the entrance slit 2, light from a minute area of the sample S or an area having some extent of spread is changed to a point shape or a line shape. You may use what can be taken out in a linear form. For example, as in the high-sensitivity multi-wavelength spectroscope shown in FIG. 4, using an optical concentrator 2b that collects the light from the sample S through a light collection window and emits the light to a point-shaped or linear emission end. Good. It may also be a pinhole. As the collimator lens 3 and the imaging lens 5, not only a lens having a small F number, which is a spherical lens, but also an aspherical lens or a Fresnel lens may be used.

By the way, as a modification of the basic type shown in FIG. 1, a spectroscopic device in which a collimator lens and an imaging lens are combined into one lens is conceivable. As shown in FIG. 5 (a), a collimator / imaging lens 7 with a small F number is arranged in parallel in front of the reflection type diffraction grating 4, and the entrance slit 2 is positioned at the focal point of this lens 7. The high-sensitivity one-dimensional or two-dimensional photodetector 6 is arranged at the image position of the diffracted light of the diffraction grating 4 and the lens 7 is used to vertically inject light from the sample (vertical incidence spectroscopic type). The positions of the entrance slit 2 and the high-sensitivity one-dimensional or two-dimensional photodetector 6 may be exchanged so that the light from the sample is incident obliquely as shown in FIG. 5 (b). (Gradient incidence spectroscopic type). The grazing incidence spectroscopic type shown in (b) of the figure is superior to the normal incidence spectroscopic type shown in (a) of the figure in angular resolution of diffracted light.
The normal incidence spectroscopic type is excellent.

Now, as the high-sensitivity one-dimensional or two-dimensional photodetector 6, as shown in FIG. 6, a combination of a two-dimensional photon counter and a low afterimage vidicon (VIMS), photon counting as shown in FIG. Type image measuring device (PIAS), array photodetector in which diode photodetectors are arranged in an array, CCD, etc. are included.

A brief explanation of VIMS and PIAS in this is
In the figure, the photons incident on the photocathode 22 of the two-dimensional photon counter 21 are converted into photoelectrons, and these photoelectrons enter the microchannel plate (MCP) 25 connected in two stages through the mesh 23 and the electron lens 24 and are amplified. Thus, a bright spot is formed by hitting the fluorescent surface 26 of the emission surface. This bright spot is imaged on the photocathode of the low afterimage vidicon 28 by the lens 27, and the two-dimensional position of the bright spot corresponding to the photon is obtained as a pulse signal from the output of the vidicon 28, so the distribution of this bright spot is obtained. As a result, an extremely weak light spectrum distribution image is obtained.

In the PIAS of FIG. 7, the configuration from the photocathode 22 to the MCP25 is similar to that of FIG. 6 (though the MCP25 of FIG. 7 is a three-stage connection), and the electrons emitted from the MCP25. The group enters a silicon semiconductor position detector (PSD) 29 arranged thereafter, is further amplified by the electron impact effect, and is output from PSD 29 as a pulse signal. The PSD29 is a charge distribution type position detector that has four signal output electrodes 30 around it, and the charges generated inside the PSD29 pass through the resistive layer on the surface and are distributed to these four electrodes 30 according to their generation positions. Will be distributed. As a result, the signal corresponding to the barycentric position of the electron group incident on the PSD 29, that is, the bright spot position, has four electrodes.
Obtained from 30. The pulse signal obtained from the PSD 29 is amplified by the amplifier 32 and then guided to the position calculation device 31. Here, these pulse signals are integrated by the integrator circuit 33 so that each electrode 30
Find the amount of charge from. Next, these signals are led to the adder / subtractor circuit 34, led to the divider 36 via the window gate 35, converted into position signals, AD-converted by the AD converter 37, and output. The output signal is processed to obtain the distribution of bright spots, and an extremely weak light spectrum distribution image can be obtained. The sixth
In FIG. 7 and FIG. 7, reference symbol _Lo indicates an objective lens that forms an incident photon (arrow) on the photocathode 12.

A high-sensitivity multi-wavelength spectroscopic system incorporating the high-sensitivity multi-wavelength spectroscopic device of the present invention shown in FIG. 1 will be described. As shown in FIG. 8 (a), the spectroscope 1 shown in FIG. Is placed so that it is on the upper side, and the sample S placed in the sample chamber 10 with a temperature control device is placed on the upper side of the slit so as to be in direct contact therewith, and the spectral distribution image of the weak light from the sample S is enhanced. The sensitivity is detected by the one-dimensional or two-dimensional photodetector 6. In the figure, reference numeral 8 indicates a cylindrical lens for compressing the spectral image in the direction of its bright line and making it enter the detector 6, and reference numeral 9 indicates an angle adjusting mechanism of the diffraction grating of the spectroscope 1. Next, FIG. 8B shows a case in which the sample S is not directly brought into contact with the spectroscope 1 but is arranged via the condenser lens 11. In this case, a Fresnel lens is used as the condenser lens 11, but it is obvious that a normal spherical lens system may be used. The condensing lens 11 has the same or smaller F number as the collimator lens 3 of the spectroscope 1, and the converging angle of the light condensed from the condensing lens 11 is the light receiving angle of the collimator lens 3. You have to make it above. By the way, the arrangements of FIGS. 8 (a) and 8 (b) show the arrangements for splitting the light emitted to the lower side of the sample, but regarding the case of splitting the light emitted to the upper side or the side of the sample, Spectrometer 1 according to their direction
It is clear that it is sufficient to arrange such as.

In the above, it was considered that the spectroscope should be used in only one stage, but the spectroscope is not limited to this, and the spectroscopes may be arranged in two or more stages, and the angular dispersion may be added several times using diffracted light. The distributed array can also improve the overall resolution. Of course, a difference variance array can also be used. The ninth example of the configuration of the high-sensitivity multiplex multi-wavelength spectrometer of the present invention
Shown in the figure. In Figure (a) is a second view of (a) - are arranged Tsugihasu incident spectroscope spectroscope 1 ₁ to 1 ₄ in four stages in series, which is configured into a square as a whole, also (b) The second one
Figure (b) are arranged +1 Tsugihasu incidence spectroscope spectroscope 1 ₁ to 1 ₄ in four stages in series, which is configured into a square as a whole,
In the case of (c), the + 1st-order grazing incidence spectroscopic type spectrometers 1 ₁ to 1 ₃ are used.
It is constructed by arranging in a stepwise series. The number of stages is not limited to the above. Further, the -1st-order grazing incidence spectral type and the + 1st-order grazing incidence spectral type may be used in combination.

〔The invention's effect〕

As described above, the high-sensitivity multi-wavelength spectroscopic device of the present invention includes an optical system 2 that emits incident light by limiting it to a point or line shape, a collimator lens 3 having a small F number, a reflective diffraction grating 4, and an image formation. Lens 5, high-sensitivity one-dimensional or two-dimensional photodetector 6
Is a multi-wavelength spectrometer having bioluminescence, chemiluminescence,
In the spectroscopic analysis of the extremely weak light from the sample S exhibiting the extremely weak fluorescence due to the excitation light, the following excellent action is realized. That is, since the optical system 2 that emits the incident light in a point-shaped or line-shaped limited manner causes the light from the sample S to be incident on the collimator lens 3 as a point-shaped or linear light source, the collimator lens 3 is emitted from the sample S. The light is made into parallel rays having a high degree of parallelism without leakage, and is made incident on the reflection type diffraction grating 4 at an angle with respect to the normal line. Therefore, the reflection type diffraction grating 4 sufficiently exhibits its resolution and disperses extremely weak light. Further, since the collimator lens 3 and the imaging lens 5 can be arranged in close proximity to the reflection type diffraction grating 4, the device can be downsized. The most important effect is that since a bright lens having an F number as small as possible can be used as the collimator lens 3 and the imaging lens 5, the overall brightness of the device that is a combination system of both lenses can be increased. It can be made large enough and has high sensitivity of one dimension or two.
By combining it with the three-dimensional photodetector 6, it becomes possible to simultaneously perform multi-wavelength analysis of extremely weak light such as bioluminescence, chemiluminescence, and extremely weak fluorescence due to excitation light, which has been difficult in the past. It is effective as a means for studying living organisms and trace components using extremely weak fluorescence due to excitation light.

In particular, when each component of the spectroscope is arranged so that the -1st-order diffracted light can be taken out as a spectral image, the imaging lens forms a larger amount of diffracted light with less loss, so that bioluminescence, chemiluminescence It is suitable for spectral detection of extremely weak spontaneous emission such as.

On the other hand, when each component of the spectroscope is arranged so that the + 1st-order diffracted light can be taken out as a spectral image, stray light does not hide the signal light and the resolution is higher, so that Raman scattering, fluorescence, etc. It is suitable for spectroscopic detection of extremely weak light emission by excitation light.

[Brief description of drawings]

FIG. 1 is an optical layout diagram of one embodiment of the high-sensitivity multi-wavelength spectroscopic device of the present invention, and FIG. 2 is a diagram of the high-sensitivity multi-wavelength spectroscopic device 2 of FIG.
FIG. 3 is an optical layout diagram for considering the basic types of FIG. 2, FIG. 4 is an optical layout diagram of another embodiment, and FIG. 5 is a modification of FIG. Optical layout, 6th
The figure is a cross-sectional view of a combination of a two-dimensional photon counter and a low afterimage vidicon used in the high-sensitivity multi-wavelength spectrometer of the present invention,
FIG. 7 is a cross-sectional view of another photon counting type image measuring device, FIG. 8 is a cross-sectional view of a high-sensitivity multi-wavelength spectroscopic system incorporating the high-sensitivity multi-wavelength spectroscopic device of the present invention of FIG. 1, and FIG. 9 is It is an optical layout of the high sensitivity multi-wavelength spectroscope of the present invention. 1,1 ₁ to 1 _4: spectrometer 2: entrance slit, 2b: light concentrators, 3: collimator lens, 4: reflection grating, 5: imaging lens, 6: high-sensitivity one-dimensional or two-dimensional Photodetector, 7: Collimator / imaging lens, 8: Cylindrical lens, 9: Angle adjustment mechanism, 10: Sample chamber with temperature control device, 11: Focusing lens, 21: Two-dimensional photon counter, 22: Photocathode,
23: Mesh, 24: Electron lens, 25: Micro channel plate (MCP), 26: Phosphor screen, 27: Lens, 28: Low afterimage vidicon, 29: Silicon semiconductor position detector (PSD), 30: Signal output electrode, 31: Position calculation device, 32: Amplifier, 33: Integration circuit, 34: Addition / subtraction circuit, 35: Window gate, 36: Divider, 3
7: AD converter, S: sample, _Lo : objective lens

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshiyuki Nagoshi, 23-21, Kasumi-cho, Yagiyama, Taishiro-ku, Sendai-shi, Miyagi (72) Inventor, Fumio Inaba 1-1-13-1, Minami Yagi, Taishiro-ku, Sendai-shi, Miyagi

Claims (3)

[Claims] 1. An optical system for limiting incident light to be emitted in a point-like or linear shape, and a bright collimator for making a point-like or linear emitting end of the optical system a focal point and taking in light emitted therefrom to be parallel. Reflective diffraction grating that diffracts light that is collimated by a lens and a collimator lens and that is incident at an angle to the normal line, and parallel light that is dispersed by the reflective diffraction grating Is composed of a spectroscope consisting of an imaging lens for forming a spectral image on the image plane and a high-sensitivity one-dimensional or two-dimensional photodetector arranged on the image plane of the imaging lens. For spectral detection of extremely weak spontaneous emission such as light emission, a blazed diffraction grating is used as a reflection type diffraction grating, and each component of the spectroscope is arranged so that -1st-order diffracted light can be extracted as a spectral image. Characterized by high Every time multi-wavelength spectroscopic apparatus. 2. An optical system that emits incident light by limiting it to a point-like or linear form, and a bright collimator that makes the point-like or line-like exit end of this optical system the focal point and takes in the light emitted therefrom and collimates it. Reflective diffraction grating that diffracts light that is collimated by a lens and a collimator lens and that is incident at an angle to the normal line, and parallel light that is dispersed by the reflective diffraction grating It is composed of a spectroscope consisting of an imaging lens that forms a spectrum image on the image plane, and a high-sensitivity one-dimensional or two-dimensional photodetector arranged on the image plane of the imaging lens. Raman scattering, fluorescence For spectroscopic detection of extremely weak light emission due to excitation light such as, a blazed diffraction grating is used as a reflection type diffraction grating, and each constituent element of the spectroscope is set to +1.
A high-sensitivity multi-wavelength spectroscope characterized by being arranged so that the next diffracted light can be extracted as a spectral image. 3. The high-sensitivity multi-wavelength spectroscope according to claim 1, wherein a slit or a pinhole is used as an optical system for limiting the incident light to be emitted in a point or line shape.