JPH07122660B2 - Semiconductor device tester test signal transmission method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Overview] The present invention relates to a method of transmitting a test signal of a semiconductor device tester for performing an electrical characteristic test of a semiconductor device such as an IC or an LSI, and various tests output from the semiconductor device tester. The signal can be only a test signal consisting of a single signal format, so that the circuit configuration of this type of semiconductor device tester can be simplified and the electrical characteristics test of semiconductor devices can be performed with an inexpensive tester. The test signal output terminal of this semiconductor device tester is used to create and output all test signals output from the semiconductor device tester with a signal waveform consisting of a single predetermined signal format. Apply the test signal output from the semiconductor device tester between the specific input terminals that should perform the waveform conversion of the semiconductor device to be tested for electrical characteristics. A waveform conversion circuit for converting a waveform into a test signal having a fixed signal format is connected, and the test signal output from the semiconductor device tester is converted into a test signal having a specific signal format by the waveform conversion circuit and the semiconductor is converted. It is configured to be applied to the input terminal of the device.

[Industrial application field]

The present invention relates to a method of transmitting a test signal of a semiconductor device tester for performing an electrical characteristic test of a semiconductor device such as IC and LSI.

[Conventional technology]

Conventionally, the electrical characteristic test of semiconductor devices such as IC and LSI has been performed by the method shown in FIG.

That is, 41 is a semiconductor device tester for performing an electrical characteristic test of a semiconductor device 42 such as IC, LSI,
A test signal generator 43 for generating various test signals to be applied to each input terminal of the semiconductor device to be tested and a comparator 44 for measuring electrical characteristics are provided inside the test signal generator. Test signal output terminal of generator 43
Various test signals output from 45 ₁ to 45 m are given to predetermined input terminals of the semiconductor device 42 as the DUT, for example, the clock terminal CLK, the clear terminal CR, the data input terminals DI _{0 to} DIn, and at this time, for example, The electrical characteristics of the semiconductor device 42 are tested by comparing the data output from the data output terminals DO _{0 to} DOn of the semiconductor device 42 with a reference value in the comparator 44 of the semiconductor device testing machine 41.

In the conventional electrical characteristic test described above, a test signal having a specific signal format corresponding to the function of each input terminal of the semiconductor device 42 to be subjected to the electrical characteristic test, for example, a fifth signal
A semiconductor device tester 41 is used to input the test signal composed of the NRZ signal shown in the figure or the test signal composed of the RZ signal shown in FIG.
Of the semiconductor device 42. In the case of the above-mentioned FIG. 4 example, the data input terminal DI of the semiconductor device 42 must be generated by the test signal generator 43 of FIG. _{1 to} DIn of Fig. 6
A test data signal made up of an NRZ signal is given, and a test clock signal made up of an RZ signal and a clear signal are given to the clock terminal CLK and the clear terminal CR, respectively.

[Problems to be solved by the invention]

As described above, when testing the electrical characteristics of this type of semiconductor device, it is necessary to provide a test signal of a specific signal format in accordance with the function of each input terminal of the semiconductor device. Therefore, conventionally, there is a problem that the circuit configuration of the semiconductor device tester becomes complicated and expensive because it is necessary to generate a test signal in a signal format corresponding to the function of the input terminal of the semiconductor device.

INDUSTRIAL APPLICABILITY The present invention can make only various test signals output from a semiconductor device tester into a test signal having a single signal format, simplify the circuit configuration of this type of semiconductor device tester, and perform an inexpensive test. The purpose of the present invention is to enable an electrical characteristic test of a semiconductor device by a machine.

[Means for solving problems]

As shown in the principle of the present invention in FIG. 1, all test signals output from the semiconductor device tester 1 are created and output by a signal waveform having a predetermined single signal format, and this semiconductor device test is performed. Test signal output terminal of machine
Waveform of a test signal output from the above semiconductor device tester into a test signal of a predetermined signal format between a specific input terminal to be subjected to waveform conversion of the semiconductor device 42 to be subjected to electrical characteristic test with 2 ₁ , ... 2 m Waveform conversion circuit for conversion 3 ₁ , 3 ₂
The test signal output from the semiconductor device tester is converted into a test signal having a specific signal format by the waveform conversion circuit and applied to the input terminal of the semiconductor device.

[Work]

When a test signal having a single signal format, for example, a clock signal made of an NRZ signal and a clear signal are output to the test signal output terminals 2 ₁ and 2 ₂ of the test signal generator 4 of the semiconductor device tester 1, the test signal is output. The waveform conversion circuits 3 ₁ and 3 ₂ connected to the output terminals 2 ₁ and 2 ₂ provide the clock signal and the clear signal as a test signal having a predetermined signal format according to the functions of the input terminals CLK and CR of the semiconductor device 42, for example, The waveform of the RZ signal is converted into a clock signal and a clear signal, and the waveform-converted test signal is applied to the corresponding clock terminal CLK and clear terminal CR of the semiconductor device 42.

On the other hand, to the data input terminals DI _{1 to} DIn of the semiconductor device 42, the test signal output from the test signal generator 4 of the semiconductor device tester 1, for example, the data signal composed of the NRZ signal described above is directly subjected to no waveform conversion. Is entered.

The semiconductor device 42 receives each of the test signals and executes an internal process corresponding to the test signal, and sends the process result at that time to the comparator 5 of the semiconductor device tester 1 from the data output terminals DO _{1 to} DOn, and the comparator 5 5 compares the data with a reference value to determine the electrical characteristics of the semiconductor device 42.

〔Example〕

FIG. 3 shows an embodiment of the present invention, a semiconductor device testing machine.
All test signals such as clock signal, clear signal and data signal output from 21 are shown in Fig. 5 NRZ
This is an example of the case where it is created from signals, and the semiconductor device tester 21 has a test signal output terminal 22 ₁ and a semiconductor device 42.
Between the clock terminal CLK, and between the clear terminal CR of the test signal output terminal 22 ₂ and the semiconductor device 42 of the semiconductor device tester 21, the signal comprising a clock signal and a clear signal consisting of the NRZ signal from the RZ signal Waveform conversion circuits 23 ₁ and 23 ₂ for waveform conversion are connected.

Each of the waveform conversion circuits 23 ₁ and 23 ₂ is composed of a two-input type exclusive OR circuit 26 and a pulse delay buffer circuit 27, and one input terminal of the exclusive OR circuit 26 is a semiconductor device. The test signal output from the tester 21 is directly input, and the test signal is input to the other input terminal via the pulse delay buffer circuit 27.

The operation of the above embodiment will be described with reference to the time chart of FIG. 3. Now, the clock signal composed of the NRZ signal shown in FIG. 3A from the test signal output terminal 22 ₁ of the semiconductor device tester 21 is waveform-converted. Given to circuit 23 ₁ , this NRZ
The clock signal composed of signals is input to one input terminal of the exclusive OR circuit 26 and also to the pulse delay buffer circuit 27.

The buffer circuit 27 delays the inputted clock signal by a predetermined constant delay time τ as shown in FIG. 3 (b), and supplies the delayed output to the other input terminal of the exclusive OR circuit 26.

The exclusive OR circuit 26 performs an exclusive OR operation between the two signals, the directly input clock signal and the delayed clock signal input via the buffer circuit 27,
As shown in FIG. 6C, the input clock signal composed of the NRZ signal is waveform-converted into the RZ signal, and the converted output is given to the clock terminal CLK of the semiconductor device 42.

Similarly, the clear signal composed of the NRZ signal output from the test signal output terminal 22 ₂ of the semiconductor device tester 21 is also waveform-converted into the RZ signal in the waveform conversion circuit 23 ₂ and input to the clear terminal CR of the semiconductor device 42.

On the other hand, the test signal output terminal 22 of the semiconductor device testing machine 21
Data signal consisting of NRZ signal output from _{3 to} 22m is RZ
Semiconductor device as it is without waveform conversion to signal
Input to 42 data input terminals DI _{0 to} DIm.

The semiconductor device 42 is the semiconductor device testing machine described above.
The internal processing is executed according to the test signal given from 21, and the processed data at that time is sent from the output terminals DO _{0 to} DOn to the comparator 25, and compared with the reference value to compare the semiconductor data with the semiconductor vice 42 in the conventional manner. Measure electrical properties.

The pulse width W of the waveform-converted RZ signal shown in FIG. 3C can be freely adjusted by changing the delay time τ of the buffer circuit 27 in the waveform conversion circuits 23 ₁ and 23 ₂ .

〔The invention's effect〕

According to the present invention, all the test signals output from the semiconductor device tester can be only test signals of a single signal format, which simplifies the circuit configuration of the semiconductor device tester and enables inexpensive device testing. The special effect that the electric characteristic test of the semiconductor device can be performed by the machine is achieved.

[Brief description of drawings]

FIG. 1 is a diagram showing the principle of the present invention, FIG. 2 is a diagram showing one embodiment of the present invention, FIG. 3 is a time chart for explaining the operation of the above embodiment, and FIG. 4 is a conventional example. FIG. 5 is a waveform diagram of the NRZ signal, and FIG. 6 is a waveform diagram of the RZ signal. Reference numeral 1 is a semiconductor device tester, 2 _{1 to} 2 m are test signal output terminals, 3 ₁ and 3 ₂ are waveform conversion circuits, and 42 is a semiconductor device.

Claims (1)

[Claims] 1. A test signal output terminal of this semiconductor device tester, wherein all test signals output from the semiconductor device tester (1) are created and output by a signal waveform having a predetermined single signal format. The test signal output from the semiconductor device tester has a predetermined signal format between (2 ₁ , ..., 2 m) and a specific input terminal for waveform conversion of the semiconductor device (42) to be tested for electrical characteristics. Connect the waveform conversion circuit (3 ₁ , 3 ₂ ) that converts the waveform to the test signal,
The test signal output from the semiconductor device tester is converted into a test signal having a specific signal format by the waveform conversion circuit and applied to the input terminal of the semiconductor device. Test signal transmission method.