JPH0712689B2 - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPH0712689B2 JPH0712689B2 JP61010665A JP1066586A JPH0712689B2 JP H0712689 B2 JPH0712689 B2 JP H0712689B2 JP 61010665 A JP61010665 A JP 61010665A JP 1066586 A JP1066586 A JP 1066586A JP H0712689 B2 JPH0712689 B2 JP H0712689B2
- Authority
- JP
- Japan
- Prior art keywords
- heating resistor
- thermal head
- value
- resistor
- electric conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/335—Structure of thermal heads
Landscapes
- Electronic Switches (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は感熱記録を行うために使用されるサーマルヘッ
ドに関し、より詳細にはサーマルヘッドの発熱抵抗体の
改良に関するものである。Description: TECHNICAL FIELD The present invention relates to a thermal head used for thermal recording, and more particularly to improvement of a heating resistor of the thermal head.
（従来の技術） 従来のサーマルヘッドは、通常、アルミナ等の電気絶縁
性の材料から成る基板上に窒化タンタル（Ta2N）から成
る発熱抵抗体とアルミニウム（Al）、金（Au）、銅（C
u）等の金属から成る電気導体を順次積層した構造を有
しており、電気導体を介して発熱抵抗体に一定電力を印
加し、発熱抵抗体にジュール発熱を起こさせることによ
ってサーマルヘッドとして機能する。(Prior Art) A conventional thermal head is usually a heating resistor made of tantalum nitride (Ta 2 N) and aluminum (Al), gold (Au), copper on a substrate made of an electrically insulating material such as alumina. (C
It has a structure in which electric conductors made of metal such as u) are sequentially laminated, and functions as a thermal head by applying constant power to the heating resistor via the electric conductor and causing Joule heat generation in the heating resistor. To do.
尚、この従来のサーマルヘッドは発熱抵抗体及び電気導
体が感熱記録紙もしくは熱転写リボンとの接触により摩
耗するのを防止するために、また大気中の酸素が接触し
て酸化するのを防止するために発熱抵抗体及び電気導体
の外表面には酸化シリコン（SiO2）と五酸化タンタル
（Ta2O5）から成る保護膜が被着形成されている。This conventional thermal head is used to prevent the heating resistor and the electric conductor from being worn due to contact with the thermal recording paper or the thermal transfer ribbon, and to prevent the oxygen in the atmosphere from contacting and oxidizing. In addition, a protective film made of silicon oxide (SiO 2 ) and tantalum pentoxide (Ta 2 O 5 ) is formed on the outer surfaces of the heating resistor and the electric conductor.
しかし乍ら、この従来のサーマルヘッドでは、発熱抵抗
体を構成する窒化タンタルの比抵抗が約250μΩcmと比
較的小さく、発熱抵抗体を瞬時に所望温度に発熱させる
ためには必然的に発熱抵抗体に大電流を流さなければな
らず、大電流用電源を必要とする欠点を有していた。However, in this conventional thermal head, the specific resistance of the tantalum nitride constituting the heating resistor is relatively small, about 250 μΩcm, and the heating resistor is inevitably inevitably heated to the desired temperature instantly. It had a drawback that a large current had to be supplied to it and a power supply for a large current was required.
そこでこの従来のサーマルヘッドの上記欠点を解消する
ために発熱抵抗体をTixSiyOz（ただしｘ＋ｙ＋ｚ＝１、
ｘ＝0.1〜0.3、ｙ＋ｚ＝0.7〜0.9、ｙ≠０、ｘ≠０）で
構成し、比抵抗を大となした長期間にわたり安定した印
字が得られるサーマルヘッドを本出願人は先に提案し
た。Therefore, in order to eliminate the above-mentioned drawbacks of the conventional thermal head, a heating resistor is set to TixSiyOz (where x + y + z = 1,
The applicant of the present invention previously proposed a thermal head which is configured with x = 0.1 to 0.3, y + z = 0.7 to 0.9, y ≠ 0, x ≠ 0), and which can obtain stable printing for a long period of time with a large specific resistance. did.
しかし乍ら、このサーマルヘッドは発熱抵抗体に大きな
電力を印加し、より速く高温となして高速印字に対応さ
せた場合、発熱抵抗体に結晶化がおこり、その抵抗値が
高温時でバラツキ、印字不良を発生するという欠点を有
していた。However, when this thermal head applies a large amount of power to the heating resistor to raise the temperature faster to support high-speed printing, the heating resistor is crystallized and its resistance value varies at high temperatures. It has a drawback that it causes printing defects.
（発明の目的） 本発明者等は上記諸欠点に鑑み種々実験した結果、発熱
抵抗体としてTaxSiyOz（30≦ｘ≦40、10≦ｙ≦20、40≦
ｚ≦60）を用いると比抵抗が大で、かつ高温時での抵抗
値のバラツキが少なく、しかもアルミニウム、銅から成
る電気導体となじみの良い発熱抵抗体が得られることを
知見した。(Object of the Invention) As a result of various experiments conducted by the present inventors in view of the above-mentioned drawbacks, as a heating resistor, TaxSiyOz (30 ≦ x ≦ 40, 10 ≦ y ≦ 20, 40 ≦
It has been found that when z ≦ 60) is used, a heat generating resistor having a large specific resistance and a small variation in the resistance value at high temperature and having good compatibility with an electric conductor made of aluminum or copper can be obtained.
本発明は上記知見に基づき、発熱抵抗体の材料として比
抵抗が大きく、かつ高温時での抵抗値のバラツキが少な
い材料をを用い、かつ該発熱抵抗体に接合される電気導
体として発熱抵抗体となじみの良い金属材料を用いるこ
とによって、大電力を印加し、高速印字を行ったとして
も印字ムラを生じることなく、長期間にわたって安定し
た印字が得られる信頼性の高いサーマルヘッドを提供す
ることをその目的とするものである。Based on the above findings, the present invention uses a material having a large specific resistance and a small variation in resistance value at a high temperature as a material of the heating resistor, and the heating resistor is used as an electric conductor joined to the heating resistor. To provide a highly reliable thermal head that can obtain stable printing for a long period of time without causing uneven printing even when high power is applied and high-speed printing is performed by using a metal material that is familiar to the user. Is the purpose.
（問題点を解決するための手段） 本発明のサーマルヘッドは、絶縁基板上に、TaXSiYO
Z（ただし、30≦Ｘ≦40、10≦Ｙ≦20、40≦Ｚ≦60）か
ら成る発熱抵抗体と、該発熱抵抗体に接合した状態でア
ルミニウムもしくは銅から成る電気導体とを取着して成
ることを特徴とするものである。(Means for Solving Problems) A thermal head according to the present invention comprises a Ta X Si Y 2 O film on an insulating substrate.
Attach a heating resistor made of Z (however, 30 ≦ X ≦ 40, 10 ≦ Y ≦ 20, 40 ≦ Z ≦ 60) and an electric conductor made of aluminum or copper in a state of being bonded to the heating resistor. It is characterized by consisting of.
本発明のサーマルヘッドの発熱抵抗体に使用されるタン
タル（Ta）は発熱抵抗体に導電性を付与し、所定の比抵
抗をもたすとともに発熱抵抗体の耐熱性を向上させ高温
時での抵抗値のバラツキを抑制するための成分であり、
タンタル（Ta）の原子％であるｘ値がｘ＜30であると所
望の前記性質は付与されず、またｘ＞40であると発熱抵
抗体の比抵抗が小となり発熱抵抗体を所望の温度に発熱
させることができないことからｘ値は30≦ｘ≦40の範囲
に特定される。The tantalum (Ta) used for the heating resistor of the thermal head of the present invention imparts conductivity to the heating resistor, has a predetermined specific resistance, and improves the heat resistance of the heating resistor to improve the heat resistance at high temperature. It is a component to suppress variations in resistance value,
If the x value, which is the atomic% of tantalum (Ta), is x <30, the desired properties are not imparted, and if x> 40, the specific resistance of the heating resistor becomes small and the heating resistor is heated to a desired temperature. The x value is specified in the range of 30 ≦ x ≦ 40 because it cannot generate heat.
またシリコン（Si）は発熱抵抗体に所定の比抵抗をもた
すための成分であり、シリコン（Si）の原子％であるｙ
値がｙ＜10あるいはｙ＞20であると所望の前記性質は付
与されず、発熱抵抗体を所望の温度に発熱させることが
できないことからｙ値は10≦ｙ≦20の範囲に特定され
る。Silicon (Si) is a component for giving the heating resistor a predetermined specific resistance, and is an atomic% of silicon (Si) y.
If the value is y <10 or y> 20, the desired properties are not imparted, and the heating resistor cannot be heated to a desired temperature. Therefore, the y value is specified within the range of 10 ≦ y ≦ 20. .
更に、酸素（Ｏ）は発熱抵抗体に所定の比抵抗をもたす
とともに発熱抵抗体とアルミニウムもしくは銅から成る
電気導体との密着性を向上させるための成分であり、酸
素（Ｏ）の原子％であるｚ値がｚ＜40であると所望の前
記性質は付与されず、またｚ＞60であると発熱抵抗体に
電力が印加されると該抵抗値が熱損し、サーマルヘッド
として機能を喪失することからｚ値は40≦ｚ≦60の範囲
に特定される。Further, oxygen (O) is a component for imparting a predetermined specific resistance to the heating resistor and improving the adhesion between the heating resistor and the electric conductor made of aluminum or copper. %, The desired property is not imparted when the z value is z <40, and when z> 60, the resistance value is thermally lost when power is applied to the heating resistor, and the function as a thermal head is obtained. Due to the loss, the z value is specified in the range of 40 ≦ z ≦ 60.
（実施例） 次に、本発明を添付図面に示す実施例に基づき詳細に説
明する。(Example) Next, the present invention will be described in detail based on an example shown in the accompanying drawings.
第１図は本発明のサーマルヘッドの一実施例を示し、１
はアルミナ等の電気絶縁材料から成る基板である。FIG. 1 shows an embodiment of the thermal head of the present invention.
Is a substrate made of an electrically insulating material such as alumina.
前記絶縁基板１上には発熱抵抗体２が取着されており、
該発熱抵抗体２上には電気導体３が取着されている。A heating resistor 2 is attached on the insulating substrate 1,
An electric conductor 3 is attached on the heating resistor 2.
前記発熱抵抗体２はTaxSiyOz（30≦ｘ≦40、10≦ｙ≦2
0、40≦ｚ≦60）から成り、該発熱抵抗体２はタンタル
（Ta）とシリコン（Si）と酸素（Ｏ）の原子％を変更す
ることによって発熱抵抗体２の比抵抗を300〜3000μΩc
mとなすことができる。The heating resistor 2 is a TaxSiyOz (30 ≦ x ≦ 40, 10 ≦ y ≦ 2
0, 40 ≦ z ≦ 60), and the heating resistor 2 has a specific resistance of 300 to 3000 μΩc by changing atomic% of tantalum (Ta), silicon (Si) and oxygen (O).
Can be m.
前記発熱抵抗体２は所定の電気抵抗を有しているため、
一定の電力が印加された場合、ジュール発熱を起こし、
印字に必要な温度、例えば300〜500℃の温度に発熱す
る。Since the heating resistor 2 has a predetermined electric resistance,
When a constant power is applied, Joule heat is generated,
It generates heat at a temperature required for printing, for example, a temperature of 300 to 500 ° C.
尚、前記発熱抵抗体２の比抵抗はTaxSiyOzのｘ値、ｙ値
及びｚ値を変えることによって任意の値に調整すること
ができるため発熱抵抗体２の発熱温度を所望の値に調整
でき、サーマルヘッドの適用範囲を広くすることが可能
となる。Since the specific resistance of the heating resistor 2 can be adjusted to any value by changing the x value, y value and z value of TaxSiyOz, the heating temperature of the heating resistor 2 can be adjusted to a desired value. The application range of the thermal head can be widened.
また、前記発熱抵抗体２は、該抵抗体２を構成するTaxS
iyOz（30≦ｘ≦40、10≦ｙ≦20、40≦ｚ≦60）の比抵抗
が300〜3000μΩcmと大きいことから大電流電源を不要
として発熱抵抗体２を所望の温度に発熱させることがで
きる。Further, the heating resistor 2 is the TaxS that constitutes the resistor 2.
Since the specific resistance of iyOz (30 ≦ x ≦ 40, 10 ≦ y ≦ 20, 40 ≦ z ≦ 60) is as large as 300 to 3000 μΩcm, it is possible to heat the heating resistor 2 to a desired temperature without requiring a large current power supply. it can.
更に、前記発熱抵抗体２は比抵抗が大きいことから、そ
の膜厚を薄くすることによって抵抗体２の抵抗値を上げ
る必要は一切なく、すべての発熱抵抗体２の膜厚を実質
的に均一となし得る厚みとなすことができる。これによ
ってすべての発熱抵抗体２はその抵抗値が実質的に同一
となり、各抵抗体２のジュール発熱量を均等として印字
品質を極めて優れたものと成すことも可能となる。Further, since the heating resistors 2 have a large specific resistance, it is not necessary to increase the resistance value of the resistors 2 by making the film thickness thin, and the film thickness of all the heating resistors 2 is substantially uniform. The thickness can be set as follows. As a result, the resistance values of all the heating resistors 2 become substantially the same, and it is possible to make the Joule heat generation amount of each resistor 2 uniform and to achieve excellent printing quality.
特に、発熱抵抗体２の膜厚200〜1000Åとしておくとす
べての発熱抵抗体２が発生するジュール発熱量を実質的
に同一となすことができることから膜厚は200〜1000Å
の範囲とすることが好ましい。In particular, if the film thickness of the heating resistors 2 is set to 200 to 1000Å, the Joule calorific values generated by all the heating resistors 2 can be made substantially the same, so the film thickness is 200 to 1000Å
It is preferable to set it as the range.
また更に、前記発熱抵抗体２は耐熱性に優れており、抵
抗体２を高温として高速印字に対応させたとしても、抵
抗体２はその抵抗値にバラツキを生じることがなく、印
字品質を極めて優れたものとなすこともできる。Furthermore, the heat generating resistor 2 has excellent heat resistance, and even if the resistor 2 is set to a high temperature to support high speed printing, the resistor 2 does not cause variations in its resistance value and print quality is extremely high. It can also be an excellent one.
前記発熱抵抗体２上の電気導体３はアルミニウム（Al）
もしくは銅（Cu）から成り、該電気導体３は発熱抵抗体
２にジュール発熱を起こさせるための電力を印加する。The electric conductor 3 on the heating resistor 2 is aluminum (Al)
Alternatively, it is made of copper (Cu), and the electric conductor 3 applies electric power for causing Joule heat generation to the heating resistor 2.
前記発熱抵抗体２の材料であるTaxSiyOz（30≦ｘ≦40、
10≦ｙ≦20、40≦ｚ≦60）は電気導体３の材料であるア
ルミニウム（Al）、銅（Cu）等となじみが良く、両者は
強固に接合することから作動時等において外力が印加さ
れたとしも発熱抵抗体２と電気導体３との間には剥離を
発生することはない。TaxSiyOz (30 ≦ x ≦ 40, which is the material of the heating resistor 2
10 ≤ y ≤ 20, 40 ≤ z ≤ 60) is well compatible with aluminum (Al), copper (Cu), etc., which are the materials of the electric conductor 3, and both are firmly joined, so external force is applied during operation. Even if it is done, peeling does not occur between the heating resistor 2 and the electric conductor 3.
尚、前記TaxSiyOz（30≦ｘ≦40、10≦ｙ≦20、40≦ｚ≦
60）から成る発熱抵抗体２はｘ値を33〜36、ｙ値を13〜
17、ｚ値を47〜55とすると発熱抵抗体の抵抗値のバラツ
キを皆無として約400℃の温度にジュール発熱させるこ
とができ印字品質を極めて良好となすとともに電気導体
３との接合強度も大となることからｘ値は33〜36、ｙ値
は13〜17、ｚ値は47〜55とすることが好ましい。Incidentally, the TaxSiyOz (30 ≦ x ≦ 40, 10 ≦ y ≦ 20, 40 ≦ z ≦
The heat generating resistor 2 consisting of 60) has an x value of 33 to 36 and ay value of 13 to 36.
When the z value is 17 to 55, there is no variation in the resistance value of the heating resistor, Joule heat can be generated at a temperature of about 400 ° C, and the printing quality is extremely good and the joint strength with the electric conductor 3 is large. Therefore, it is preferable that the x value is 33 to 36, the y value is 13 to 17, and the z value is 47 to 55.
また、前記発熱抵抗体２及び電気導体３上には該発熱抵
抗体２等が感熱紙との接触により摩耗するのを防止する
ために耐摩耗性に優れた五酸化タンタル（Ta2O5）等か
ら成る保護膜４が形成されている。Further, tantalum pentoxide (Ta 2 O 5 ) having excellent wear resistance is provided on the heating resistor 2 and the electric conductor 3 in order to prevent the heating resistor 2 and the like from being worn due to contact with thermal paper. A protective film 4 made of, for example, is formed.
前記発熱抵抗体２には例えば後述するスパッタリング法
によって形成され、また電気導体３及び保護膜４は従来
周知の真空蒸着法あるいはスパッタリング法によって形
成される。The heating resistor 2 is formed by, for example, a sputtering method described later, and the electric conductor 3 and the protective film 4 are formed by a conventionally known vacuum deposition method or sputtering method.
前記発熱抵抗体２をスパッタリング法によって形成する
場合には、まず真空度１×10-3〜５×10-3Torrの低圧容
器を準備するとともに該容器内にアルゴンと酸素を注入
し、アルゴンと酸素の混合雰囲気を作る。次に前記容器
内に硅化タンタル（TaSi）から成るターゲットを配し、
該ターゲットにアルゴンイオンを衝突させて硅化タンタ
ル（TaSi）を飛散させるとともにその一部を雰囲気中の
酸素（Ｏ）と反応させTaxSiyOzを作成する。そして最後
に、前記TaxSiyOzをアルミナ等の基板表面に被着させる
ことによって基板上に発熱抵抗体が形成される。When the heating resistor 2 is formed by the sputtering method, first, a low-pressure container having a vacuum degree of 1 × 10 −3 to 5 × 10 −3 Torr is prepared, and argon and oxygen are injected into the container to remove argon. Create a mixed atmosphere of oxygen. Next, a target made of tantalum silicide (TaSi) is placed in the container,
Argon ions are made to collide with the target to scatter tantalum silicate (TaSi) and a part of it is reacted with oxygen (O) in the atmosphere to form TaxSiyOz. Finally, the heating resistor is formed on the substrate by depositing TaxSiyOz on the substrate surface such as alumina.
尚、前記スパッタリング法により発熱抵抗体を基板表面
に形成する場合、基板の温度を200〜500℃の温度となる
ように加熱しておくと基板と発熱抵抗体との密着性を向
上せしめることが可能となり基板を200〜500℃に加熱し
ておくことが望ましい。また、発熱抵抗体の成膜速度は
通常100Å/mm程度で行われる。When the heating resistor is formed on the substrate surface by the sputtering method, heating the substrate to a temperature of 200 to 500 ° C. may improve the adhesion between the substrate and the heating resistor. It will be possible to heat the substrate to 200-500 ℃. Further, the film forming rate of the heating resistor is usually about 100Å / mm.
（実験例） 次に、本発明の実施例品及び従来例品の各種実験結果に
ついて説明する。(Experimental Example) Next, various experimental results of the example product of the present invention and the conventional example product will be described.
まず、第１図に示す断面のサーマルヘッドにおいて、下
記第１表に示す組成の抵抗体を使用して幅100μｍ、長
さ200μｍ、抵抗値1000Ωの発熱抵抗体試料を作成し
た。First, in the thermal head having the cross section shown in FIG. 1, a heating resistor sample having a width of 100 μm, a length of 200 μm and a resistance value of 1000 Ω was prepared by using the resistors having the compositions shown in Table 1 below.
尚、表中試料Ｆ及びＧは本発明品と比較するための比較
試料であり、試料Ｆは従来の窒化タンタル（Ta2N）を抵
抗体として使用したもの、試料Ｇは本出願人が先に提案
したTaxSiyOzを抵抗体として使用したものである。In the table, Samples F and G are comparative samples for comparison with the product of the present invention, Sample F uses conventional tantalum nitride (Ta 2 N) as a resistor, and Sample G is the applicant of the present invention. It uses the TaxSiyOz proposed in 1. as a resistor.
次に、これら各試料についてパルス幅1.0msパルス周期1
0msで電力を印加し、その電力の大きさに対応する発熱
抵抗体の抵抗値のバラツキを調べるステップストレステ
ストを行った。その結果を第２図に示す。 Next, for each of these samples, pulse width 1.0 ms, pulse period 1
A step stress test was conducted in which electric power was applied for 0 ms and the variation in the resistance value of the heating resistor corresponding to the electric power was examined. The results are shown in FIG.
この結果から従来品である窒化タンタル（Ta2N）を発熱
抵抗体として使用したものは1.4〔W/dot）〕の印加電力
で、またTixSiyOz（ただし、ｘ＋ｙ＋ｚ＝１、ｘ＝0.1
〜0.3、ｙ＋ｚ＝0.7〜0.9、ｙ≠０、ｚ≠０、）を発熱
抵抗体として使用したものは1.5〔W/dot〕の印加電力で
抵抗値に大きなバラツキを生じ、印加品質が低下してし
まうのに対し本発明組成範囲内のTaxSiyOz（30≦ｘ≦4
0、10≦ｙ≦20、40≦ｚ≦60）を使用したものは2.3〔W/
dot〕の印加電力まで抵抗値に大きな変化はなく印字品
質を高いものになし得ることが判る。From this result, the conventional tantalum nitride (Ta 2 N) used as a heating resistor has an applied power of 1.4 [W / dot]] and TixSiyOz (where x + y + z = 1 and x = 0.1).
~ 0.3, y + z = 0.7 to 0.9, y ≠ 0, z ≠ 0) is used as the heating resistor, the resistance value greatly varies with the applied power of 1.5 [W / dot], and the applied quality deteriorates. On the other hand, within the composition range of the present invention, TaxSiyOz (30 ≦ x ≦ 4
0, 10 ≦ y ≦ 20, 40 ≦ z ≦ 60) is 2.3 [W /
It can be seen that there is no great change in the resistance value up to the applied power of [dot] and the printing quality can be made high.
（発明の効果） かくして、本発明のサーマルヘッドによれば、発熱抵抗
体の材料として比抵抗の高いTaxSiyOz（30≦ｘ≦40、10
≦ｙ≦20、40≦ｚ≦60）を用い、かつ、発熱抵抗体に接
合される電気導体としてアミルニウムもしくは銅を用い
たことにより、大電流電源を不要として発熱抵抗体を所
望の温度に発熱させることができ、また発熱抵抗体の抵
抗値を膜厚を薄くしたり、膜幅を細くしたりすることな
く大となすことができ、膜厚を均一として、すべての発
熱抵抗体の抵抗値を実質的に同一となし、印字濃度にバ
ラツキのない極めて高印字品質のサーマルヘッドが得ら
れ、さらには発熱抵抗体と電気導体とを強固に接合し、
作動時等において外力が印加されても発熱抵抗体と電気
導体との間に剥離が発生するのを皆無となすことができ
る。(Effects of the Invention) Thus, according to the thermal head of the present invention, TaxSiyOz (30 ≦ x ≦ 40, 10) having a high specific resistance as a material of the heating resistor is used.
≤ y ≤ 20, 40 ≤ z ≤ 60), and by using amylnium or copper as the electrical conductor to be joined to the heating resistor, the heating resistor is heated to the desired temperature without the need for a large current power supply. In addition, the resistance value of all the heating resistors can be made large without making the film thickness thin or making the film width thin. Is substantially the same, and a thermal head of extremely high printing quality with no variation in printing density can be obtained, and furthermore, the heating resistor and the electric conductor are firmly joined,
Even if an external force is applied during operation, peeling between the heating resistor and the electric conductor can be completely eliminated.
また、発熱抵抗体の高温時における抵抗値のバラツキが
少ないことから発熱抵抗体に高電力を印加して高温とな
す高温印字用のサーマルヘッドに好適に使用でき、かつ
その印字品質も極めて高いものとなすことができる。Further, since there is little variation in the resistance value of the heating resistor at high temperature, it can be suitably used for a thermal head for high-temperature printing in which high power is applied to the heating resistor to raise the temperature, and its printing quality is also extremely high. You can
第１図は本発明のサーマルヘッドの要部断面図、第２図
は本発明実施例品及び従来例品のステップストレステス
トの結果を示す特性図である。 １……絶縁基板、２……発熱抵抗体 ３……電気導体FIG. 1 is a sectional view of a main part of a thermal head of the present invention, and FIG. 2 is a characteristic diagram showing the results of a step stress test of an example product of the present invention and a conventional example product. 1 ... Insulating substrate, 2 ... Heating resistor 3 ... Electric conductor
Claims (1)
≦40、10≦Ｙ≦20、40≦Ｚ≦60）から成る発熱抵抗体
と、該発熱抵抗体に接合した状態でアルミニウムもしく
は銅から成る電気導体とを取着して成るサーマルヘッ
ド。1. A Ta X Si Y O Z (where 30≤X
≦ 40, 10 ≦ Y ≦ 20, 40 ≦ Z ≦ 60) and a thermal head formed by attaching an electric conductor made of aluminum or copper in a state of being bonded to the heating resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61010665A JPH0712689B2 (en) | 1986-01-20 | 1986-01-20 | Thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61010665A JPH0712689B2 (en) | 1986-01-20 | 1986-01-20 | Thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62167056A JPS62167056A (en) | 1987-07-23 |
| JPH0712689B2 true JPH0712689B2 (en) | 1995-02-15 |
Family
ID=11756535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61010665A Expired - Lifetime JPH0712689B2 (en) | 1986-01-20 | 1986-01-20 | Thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0712689B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3320825B2 (en) * | 1992-05-29 | 2002-09-03 | 富士写真フイルム株式会社 | Recording device |
| US5831648A (en) * | 1992-05-29 | 1998-11-03 | Hitachi Koki Co., Ltd. | Ink jet recording head |
| US5896154A (en) * | 1993-04-16 | 1999-04-20 | Hitachi Koki Co., Ltd. | Ink jet printer |
| US5666140A (en) * | 1993-04-16 | 1997-09-09 | Hitachi Koki Co., Ltd. | Ink jet print head |
| JP3194465B2 (en) * | 1995-12-27 | 2001-07-30 | 富士写真フイルム株式会社 | Inkjet recording head |
| JP4925535B2 (en) * | 2001-09-27 | 2012-04-25 | 京セラ株式会社 | Thermal head |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4853292A (en) * | 1971-11-08 | 1973-07-26 | ||
| JPS598231B2 (en) * | 1976-03-11 | 1984-02-23 | 松下電器産業株式会社 | Thermal head for thermal recording |
| JPS5311037A (en) * | 1976-07-19 | 1978-02-01 | Toshiba Corp | Thin film thermal head |
| JPS5761581A (en) * | 1980-10-01 | 1982-04-14 | Toshiba Corp | Method of manufacture of thermal printing head |
| JPS5761582A (en) * | 1980-10-01 | 1982-04-14 | Toshiba Corp | Thermal printing head method of manufacutre thereof |
| JPS591276A (en) * | 1982-06-25 | 1984-01-06 | Mitsubishi Electric Corp | Thermal head |
-
1986
- 1986-01-20 JP JP61010665A patent/JPH0712689B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62167056A (en) | 1987-07-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |