JPH0722169B2 - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPH0722169B2 JPH0722169B2 JP61029313A JP2931386A JPH0722169B2 JP H0722169 B2 JPH0722169 B2 JP H0722169B2 JP 61029313 A JP61029313 A JP 61029313A JP 2931386 A JP2931386 A JP 2931386A JP H0722169 B2 JPH0722169 B2 JP H0722169B2
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- electrode
- chip
- package base
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
- H10W72/07554—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in dispositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/547—Dispositions of multiple bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/701—Tape-automated bond [TAB] connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/853—On the same surface
- H10W72/871—Bond wires and strap connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Wire Bonding (AREA)
Description
【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は半導体装置に係り、特に半導体チップのパッケ
ージへの実装構造に関する。The present invention relates to a semiconductor device, and more particularly, to a mounting structure of a semiconductor chip on a package.
(従来の技術) 半導体集積回路は近年ますます高集積化されている。こ
れに伴い、半導体チップを収容するパッケージも大型化
し、パッケージ上の電極数が300にも及ぶものが現われ
ている。(Prior Art) Semiconductor integrated circuits have become highly integrated in recent years. Along with this, a package that accommodates a semiconductor chip is also enlarged, and the number of electrodes on the package reaches 300.
第2図(a)(b)は半導体集積回路チップの一般的な
実装構造を示している。21がチップであり、23がこれを
搭載したパッケージ基台であって、チップ21上の電極パ
ッド22とパッケージ基台23上の電極24との間はボンディ
ング・ワイヤ25により接続されている。集積回路の高集
積化、多ピン化に伴い、チップ上の電極パッド列及びパ
ッケージ基台上の電極列の面積や間隔は今後も更に縮小
化していく傾向にある。しかしこの縮小化には技術的に
限界がある。2A and 2B show a general mounting structure of a semiconductor integrated circuit chip. Reference numeral 21 is a chip, and 23 is a package base on which the chip is mounted. The electrode pads 22 on the chip 21 and the electrodes 24 on the package base 23 are connected by bonding wires 25. With the high integration and the increase in the number of pins of integrated circuits, the area and the interval of the electrode pad row on the chip and the electrode row on the package base tend to be further reduced in the future. However, there is a technical limit to this reduction.
第3図(a)(b)はこの問題を解決するために考えら
れた実装構造である。集積回路チップ31の電極パッド32
は各辺に沿って2列設けられ、パッケージ基台33上の電
極34も階段状に2段に配列形成され、これら電極パッド
32と電極34間をボンディング・ワイヤ35により接続して
いる。この様な多段ボンディングにより、電極間隔等を
極端に縮小することなく、多ピン化に対応しようとする
ものである。FIGS. 3 (a) and 3 (b) show a mounting structure designed to solve this problem. Electrode pad 32 of integrated circuit chip 31
Are provided in two rows along each side, and the electrodes 34 on the package base 33 are also arranged in two steps in a stepwise manner.
The bonding wire 35 connects between the electrode 32 and the electrode 34. By such multi-step bonding, it is intended to cope with the increase in the number of pins without extremely reducing the electrode interval or the like.
(発明が解決しようとする問題点) 第3図のように多段ワイヤ・ボンディング技術を適用し
た場合、ボンディング・ワイヤの過密化により短絡の可
能性が高いものとなる。これに対し、ワイヤ・ボンディ
ング方向を隣同士交互にすることで短絡を防止する提案
がなされているが(特開昭59−195856号公報)、根本的
解決にはなってはいない。また更に高密度多段階電極化
した場合、ワイヤ・ボンディングそのものを行なうこと
が困難になる。更に、ボンディング・ワイヤの高密度化
に伴いワイヤの太さが減少していく傾向にあるため、例
えば電源線など比較的大電流が流れる部分は複数本のワ
イヤを設けなければならない、といった問題が生じる。(Problems to be Solved by the Invention) When the multi-stage wire bonding technique is applied as shown in FIG. 3, there is a high possibility of a short circuit due to the overcrowding of the bonding wires. On the other hand, a proposal has been made to prevent short circuits by alternating the wire bonding directions next to each other (Japanese Patent Laid-Open No. 59-195856), but it has not been a fundamental solution. Further, if the electrode is made into a high density multi-stage electrode, it becomes difficult to perform wire bonding itself. Further, as the density of the bonding wires tends to decrease, the thickness of the wires tends to decrease, so that there is a problem that a plurality of wires must be provided in a portion such as a power supply line through which a relatively large current flows. Occurs.
本発明は上記したような問題を解決して、多ピン化パッ
ケージへの信頼性の高い実装構造を実現した半導体装置
を提供することを目的とする。It is an object of the present invention to provide a semiconductor device which solves the above problems and realizes a highly reliable mounting structure for a multi-pin package.
[発明の構成] (問題点を解決するための手段) 本発明は、半導体チップと、このチップが搭載されたパ
ッケージとを有する半導体装置において、前記半導体チ
ップ上の電極パッドと前記パッケージ基台上の電極との
間を、ワイヤ・ボンディングとワイヤレス・ボンディン
グの組み合わせにより接続し、且つ前記半導体チップ上
の電極パッドと前記パッケージ基台上の電極との間のう
ち、大電流の流れるところをワイヤレス・ボンディング
により接続していることを特徴とする。[Structure of the Invention] (Means for Solving Problems) The present invention relates to a semiconductor device having a semiconductor chip and a package in which the chip is mounted, and in the electrode pad on the semiconductor chip and on the package base. Of the electrode of the semiconductor chip and the electrode of the package base are connected to each other by wire bonding and wireless bonding. It is characterized in that they are connected by bonding.
ここで、大電流とは、1本のワイヤでは該ワイヤが溶け
てしまい必要な電流容量を確保できない程度の大きさの
電流のことをいう。Here, the large current refers to a current of a magnitude such that one wire is melted by one wire and a necessary current capacity cannot be secured.
(作用) 本発明によれば、ワイヤ・ボンディングとワイヤレス・
ボンディングの組合わせによって、多ピン化実装構造の
場合にもボンディング・ワイヤ間のピッチを従来より大
きく保つことができる。また特に、パッケージ側電極を
2段構造として、下段を半導体チップ表面とほぼ同じ高
さにすれば、先ず下段電極とチップ上電極パッドの間を
テープリードやビームリードなどのワイヤレス・ボンデ
ィングによって一括接続を行なった後、上段電極とチッ
プ上の残りの電極パッドとの間をワイヤ・ボンディング
することにより、ボンディング・ワイヤとリードとの間
の短絡の危険を小さくしてボンディング接続を容易に行
なうことができる。また電源線など比較的大きい電流が
流れる部分に優先的にワイヤレス・ボンディングを利用
しているので、細いボンディング・ワイヤを併設するこ
となく、十分な電流容量を確保することができる。(Operation) According to the present invention, wire bonding and wireless
By combining bonding, the pitch between bonding wires can be kept larger than before even in the case of a multi-pin mounting structure. In particular, if the package-side electrode has a two-stage structure and the lower stage is almost at the same height as the surface of the semiconductor chip, the lower electrode and the chip upper electrode pad are first connected collectively by wireless bonding such as tape lead or beam lead. Then, wire bonding is performed between the upper electrode and the remaining electrode pads on the chip to reduce the risk of short circuit between the bonding wire and the lead and facilitate the bonding connection. it can. Moreover, since the wireless bonding is preferentially used in a portion such as a power supply line where a relatively large current flows, a sufficient current capacity can be secured without providing a thin bonding wire.
(実施例) 第1図(a)(b)は本発明の一実施例の集積回路チッ
プ実装構造を示す。11は集積回路チップであり、その電
極パッド12は各辺に沿って2列に分けてジグザグ状に配
列形成されている。13はチップ11を搭載したパッケージ
基台であり、このパッケージ基台13上の電極14は階段状
に高さの異なる位置に2段に渡って配列形成されてい
る。下段の電極配列と上段の電極配列は半ピッチずつず
れたジグザグ状となっている。この様なチップ11上の電
極パッド12とパッケージ基台13上の電極14の間を、この
実施例ではTAB(Tape Automated Bonding)法とワイヤ
・ボンディング法の組合わせにより接続している。即
ち、パッケージ基台13の下段の電極部の高さ位置がほぼ
チップ11の表面位置に等しく、まずパッケージ基台13上
の電極14のうち下段部分とチップ11上の電極パッド12の
うち外側部分との間をTAB法によるテープリード16によ
り接続し、次にパッケージ基台13上の電極14のうち上段
部分とチップ11上の電極パッド12のうち内側部分との間
をボンディング・ワイヤ15により接続している。この実
施例ではTAB法として、BTAB(Bunped TAB)法と呼ばれ
る、突起状電極17つきのテープを用いた場合を示してい
る。またこの実施例では、電源線など比較的大きい電流
が流れる部分に、ボンディング・ワイヤ15に比べて電流
容量の大きいテープリード16を用いている。(Embodiment) FIGS. 1A and 1B show an integrated circuit chip mounting structure of an embodiment of the present invention. Reference numeral 11 denotes an integrated circuit chip, the electrode pads 12 of which are divided into two rows along each side and arranged in a zigzag pattern. Reference numeral 13 denotes a package base on which the chip 11 is mounted, and the electrodes 14 on the package base 13 are arranged in two steps at positions of different heights. The lower electrode arrangement and the upper electrode arrangement have a zigzag pattern, which is shifted by half a pitch. In this embodiment, the electrode pad 12 on the chip 11 and the electrode 14 on the package base 13 are connected by a combination of the TAB (Tape Automated Bonding) method and the wire bonding method. That is, the height position of the lower electrode portion of the package base 13 is substantially equal to the surface position of the chip 11, and first, the lower portion of the electrode 14 on the package base 13 and the outer portion of the electrode pad 12 on the chip 11 are arranged. Is connected by a tape lead 16 by the TAB method, and then an upper part of the electrode 14 on the package base 13 and an inner part of the electrode pad 12 on the chip 11 are connected by a bonding wire 15. is doing. In this embodiment, as the TAB method, a case where a tape called a BTAB (Bunped TAB) method with a protruding electrode 17 is used is shown. Further, in this embodiment, the tape lead 16 having a larger current capacity than the bonding wire 15 is used in a portion such as a power supply line where a relatively large current flows.
この様な構造とすれば、ボンディング・ワイヤ15の過密
を解消することができ、ボンディング・ワイヤ15間の短
絡事故を防止することができる。またボンディング・ワ
イヤ15とテープリード16とは高さが異なり、しかもテー
プリード16はたるみがないから、ボンディング・ワイヤ
15とテープリード16間の短絡事故の確率も非常に少な
い。従って信頼性の高い多ピン化実装が可能になる。電
流の大きい部分にテープリードを用いるという使い分け
を行なうことにより、細いボンディング・ワイヤを2本
併設するという煩わしさも解消される。ボンディング接
続の半分をTAB法で一括接続するため、ボンディング工
程は非常に簡単である。With such a structure, it is possible to eliminate the overcrowding of the bonding wires 15 and prevent a short circuit between the bonding wires 15. Further, since the bonding wire 15 and the tape lead 16 have different heights, and the tape lead 16 has no slack, the bonding wire 15
The probability of a short circuit between 15 and tape lead 16 is also very low. Therefore, highly reliable multi-pin mounting is possible. By separately using the tape lead for the portion where the current is large, it is possible to eliminate the troublesomeness of providing two thin bonding wires. The bonding process is very simple because half of the bonding connections are connected together using the TAB method.
本発明は上記実施例に限られるものではない。例えば上
記実施例では、パッケージ基台上の電極を2段構造とし
たが、3段以上とし、1段目のみワイヤレスで他の段を
ボンディング・ワイヤとし、あるいは2段目までワイヤ
レスとしてそれ以上をボンディング・ワイヤとするな
ど、種々の組合わせが可能である。またパッケージ基台
上の電極が階段状に配置されない場合にも、ワイヤ・ボ
ンディングとワイヤレス・ボンディングの組合わせによ
り十分効果が得られる。また上記実施例ではワイヤレス
・ボンディングの例としてTAB法を利用したが、ビーム
リードなどを利用することもできる。The present invention is not limited to the above embodiment. For example, in the above embodiment, the electrodes on the package base have a two-stage structure, but there are three or more stages and only the first stage is wireless and the other stages are bonding wires, or the second stage is wireless and more. Various combinations such as bonding wires are possible. Further, even when the electrodes on the package base are not arranged in a staircase, a sufficient effect can be obtained by the combination of wire bonding and wireless bonding. Although the TAB method is used as an example of wireless bonding in the above embodiment, a beam lead or the like can also be used.
その他本発明はその趣旨を逸脱しない範囲で種々変形し
て実施することができる。Others The present invention can be variously modified and implemented without departing from the spirit thereof.
[発明の効果] 以上述べたように本発明によれば、多ピン化パッケージ
への信頼性の高い実装を実現した半導体装置を得ること
ができる。[Effects of the Invention] As described above, according to the present invention, it is possible to obtain a semiconductor device that realizes highly reliable mounting in a multi-pin package.
第1図(a)(b)は本発明の一実施例の集積回路チッ
プ実装構造を示す平面図と断面図、第2図(a)(b)
及び第3図(a)(b)は従来の実装構造を示す平面図
と断面図である。 11…集積回路チップ、12…電極パッド、13…パッケージ
基台、14…電極、15…ボンディング・ワイヤ、16…テー
プリード、17…突起電極。1 (a) and 1 (b) are a plan view and a sectional view showing an integrated circuit chip mounting structure of an embodiment of the present invention, and FIGS. 2 (a) and 2 (b).
3 (a) and 3 (b) are a plan view and a sectional view showing a conventional mounting structure. 11 ... Integrated circuit chip, 12 ... Electrode pad, 13 ... Package base, 14 ... Electrode, 15 ... Bonding wire, 16 ... Tape lead, 17 ... Projection electrode.
Claims (3)
パッケージとを有する半導体装置において、前記半導体
チップ上の電極パッドと前記パッケージ基台上の電極と
の間を、ワイヤ・ボンディングとワイヤレス・ボンディ
ングの組み合わせにより接続し、且つ前記半導体チップ
上の電極パッドと前記パッケージ基台上の電極との間の
うち、大電流の流れるところをワイヤレス・ボンディン
グにより接続していることを特徴とする半導体装置。1. In a semiconductor device having a semiconductor chip and a package on which the chip is mounted, wire bonding and wireless bonding are performed between electrode pads on the semiconductor chip and electrodes on the package base. And a portion of the electrode on the semiconductor chip and an electrode on the package base where a large current flows are connected by wireless bonding.
の1辺につき2列以上配列形成され、前記パッケージ基
台上の電極が階段状の異なる高さ位置に2列以上配列形
成され、前記半導体チップ上の外側の電極パッド例と前
記パッケージ基台上の下段の電極列との間がテープリー
ドまたはビームリードにより接続され、前記半導体チッ
プ上の内側の電極パッド列と前記パッケージ基台上の上
段の電極列との間がボンディング・ワイヤにより接続さ
れている特許請求の範囲第1項記載の半導体装置。2. The electrode pads on the semiconductor chip are arranged in two or more rows on one side of the chip, and the electrodes on the package base are formed in two or more rows at different heights in a step shape. An example of the outer electrode pads on the chip and the lower electrode row on the package base are connected by tape leads or beam leads, and the inner electrode pad row on the semiconductor chip and the upper row on the package base are connected. The semiconductor device according to claim 1, wherein the electrode array is connected by a bonding wire.
よるものであることを特徴とする特許請求の範囲第1項
記載の半導体装置。3. The semiconductor device according to claim 1, wherein the wireless bonding is based on the BTAB method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61029313A JPH0722169B2 (en) | 1986-02-13 | 1986-02-13 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61029313A JPH0722169B2 (en) | 1986-02-13 | 1986-02-13 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188232A JPS62188232A (en) | 1987-08-17 |
| JPH0722169B2 true JPH0722169B2 (en) | 1995-03-08 |
Family
ID=12272727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61029313A Expired - Lifetime JPH0722169B2 (en) | 1986-02-13 | 1986-02-13 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722169B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5555981A (en) * | 1992-05-26 | 1996-09-17 | Empak, Inc. | Wafer suspension box |
-
1986
- 1986-02-13 JP JP61029313A patent/JPH0722169B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62188232A (en) | 1987-08-17 |
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