JPH0735578B2 - Strip meandering control device for continuous dry plating device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a strip meandering control device in a continuous dry plating apparatus, and more particularly to a metal strip that is passing at high speed in a processing tank under high temperature and high vacuum. By detecting the sign of meandering at an early stage and promptly and appropriately dealing with the sign, it is possible to effectively prevent the progress of meandering to the extent that the continuous plating process is hindered.

(Prior Art) Recently, dry plating techniques such as vacuum deposition, sputtering, ion plating, and chemical vapor deposition (CVD) have been used in various fields.

For example, in the field of steel, coating treatment of ceramics such as TiN and TiC is performed for the purpose of improving the surface properties of metal strips such as corrosion resistance, wear resistance and surface hardness.

However, in order to carry out such a dry plating treatment on a metal strip continuously and on an industrial scale, various problems remain to be solved, one of which is the meandering of the strip.

That is, in order to process a relatively wide strip continuously and in a large amount, it is necessary to increase the line speed. However, increasing the line speed may increase the length of the strip in the processing tank, causing the strip to meander. Easier to do. When the strip meanders, it not only adversely affects the formation of the vapor-deposited film, but also causes the strip to be broken in extreme cases.

Once ruptured, the processing tank may be held in a high vacuum, so that the recovery work requires a long time, resulting in a reduction in production efficiency.

Therefore, it is necessary to prevent the meandering of the strip in the processing tank as much as possible, and there is a steering device as such a meandering correcting device. This device corrects the position of the strip by tilting a roll around which the strip is wound.

In order to properly operate the steering device, it is usually important to know the position of the strip accurately.

As such a strip position detecting device, there is a device utilizing the injection pressure of an inert gas (for example, N ₂ ) as shown in FIG. In the figure, symbol a is an injection nozzle, b is a pressure receiving nozzle, c is a pressure transmitter, d is a cylinder, and e is a position transmitter.

In the above apparatus, if the gas injected from the injection nozzle i is blocked by the strip S, the pressure receiving at the pressure receiving nozzle b is almost 0, while if the strip S is not present in the gap between the nozzles i and b, the injection gas pressure is reduced. You will receive it as it is. Therefore, when the pressure is 0, the cylinder pair moves the nozzle pair to the wall side, and when there is pressure, the nozzle pair is moved inward so as to follow the edge portion of the strip S. The position of the strip is grasped by detecting it with the transmitter E.

In addition, there is a method of detecting the position of the strip by optical means. This is to provide a light emitter and a light receiver on both edge portions of the strip with the strip sandwiched therebetween, and detect the position of the strip by the light amount difference at both edge portions.

(Problems to be Solved by the Invention) However, in the former method using gas injection pressure,
Since the vacuum degree of the processing tank is lowered, the vapor deposition is adversely affected. On the other hand, in the latter optical method, in addition to the high temperature inside the apparatus, vapor of the vapor deposition material (stray paper) adheres to the projector and the light receiver. Therefore, it is difficult to maintain the maintenance because it causes a decrease in sensitivity, and in any case, it was not possible to accurately prevent the strip from meandering.

The present invention advantageously solves the above-mentioned problems and is capable of running at a high speed (100 mpm) in a dry plating treatment tank maintained at a high temperature (400 ° C. or higher) and a high vacuum (1 × 10 ^-5 torr or less).
It is an object of the present invention to propose a strip meandering control device capable of accurately detecting the position of the above strips and effectively preventing the occurrence of meandering.

(Means for Solving Problems) That is, according to the present invention, a strip introduced into a dry plating treatment tank held in a high vacuum is passed through a group of rolls for sheet passing including a steering roll arranged in the treatment tank. In a device for continuously performing dry plating while passing a detour plate, a sensor for detecting the edge of the strip is arranged on the output side of the steering roll of the strip, and the steering roll is tilted based on the detection signal of the sensor. Drive means for
It is a strip meandering control device in a continuous dry plating device.

(Embodiment) FIG. 1 schematically shows an entire continuous dry plating apparatus incorporating a preferred example of the strip meandering control apparatus according to the present invention.

In the figure, number 1 is a bay-off reel, 2a, 2b, 2c and 2d are deflector rolls, 3a and 3b are inlet and outlet differential pressure chambers, 4a and 4b are preheating chambers and 5a and 5b are strips. A vacuum deposition chamber for performing dry plating on the front and back surfaces of S, 6 is a steering roll, and 7 is a meandering detector of the strip S, which is the same as the preheating chamber 4a.
A high-vacuum processing tank is formed up to 4b. Further, 8 is a cooling chamber, and 9 is a tension reel.

The strip S rewound by the payoff reel 1 is
It is sequentially guided to the vacuum deposition chambers 5a and 5b via the differential pressure chamber 3a,
While passing through the vacuum vapor deposition chambers 5a and 5b, the front and back surfaces of the strip S are dry-plated,
Then, it is wound by the tension reel 9 through the differential pressure chamber 3b and the cooling chamber 8.

As the meandering detector, an optical detecting device as shown in FIG. 2 is advantageously suitable. In the figure, 10a and 10b are transparent walls made of a transparent material such as tempered glass, and at least the wall facing the front and back surfaces of the strip S in the meandering detection unit 7 has the above-mentioned transparent walls 10a and 10b. Must be 10b. 11 is a floodlight, 1
Reference numeral 2 is a light receiver, and it is particularly important that the light receiver 12 is arranged so as to face both edge portions of the strip S. Further, 13a, 13b and 14a, 14b are differential pressure chambers provided on the inlet side and the outlet side of the meandering detector 7, respectively.

As described above, since a part of the wall surface of the meandering detection portion 7 of the strip S is the transparent walls 10a and 10b, the normal detection of the strip edge can be realized by the ordinary optical means without adversely affecting the vacuum degree. Will be.

When the vapor deposition efficiency in the vacuum vapor deposition chambers 5a and 5b is poor, there is a concern that the stray vapor may enter the detection unit 7 and adhere to the inner surface of the transparent wall, which may interfere with the optical detection means. In the present invention, the differential pressure chambers 13 and 14 for discharging the stray vapor on the inlet side and the outlet side of the detection unit 7, respectively.
Since it is provided, there is no risk of this happening.

Next, FIG. 3 shows another meandering detection device in cross section. In this device, the wall surface of the detection unit 7 does not need to be formed of a transparent material, and may be an insulator such as ceramics. Then, the edge of the strip is detected by the sensor 15 that detects the displacement of the conductor, which may be an eddy current displacement sensor, from the outside of the insulating wall.

(Operation) Next, a control procedure for controlling the steering roll based on the detection data thus obtained will be described with reference to FIG.

Now, for example, the position of the strip is constantly monitored by the overcurrent type displacement sensor 15, and when the deviation of the strip S from the predetermined position is detected, the detected displacement amount U is sent to the arithmetic unit 16. Here, the tilting direction and tilting amount of the steering roll 6 necessary to restore the displacement amount U are calculated, and the calculation result is sent to the control device 17. The control device 17 drives the cylinder 18 and tilts the steering roll 6 to an appropriate posture based on the sent command.

A suitable steering device is shown in FIG.

As shown in the figure, the non-driving side of the steering roll 6 is pivotally fixed by a pivot 19, while the driving side is connected to the cylinder 8 via a bracket 20.
21 is a bearing seat (movable) and 23 is a base (fixed).

(Effect of the Invention) Thus, according to the present invention, even when continuous dry plating is performed on a strip that passes through a high-temperature, high-vacuum processing tank at a high speed, the strip running during the processing tank The position of the strip can be detected accurately, and thus accurate strip meandering control is realized.

[Brief description of drawings]

FIG. 1 is an overall view of a continuous ion plating device incorporating a preferred example of a strip meandering control device according to the present invention, and FIGS. 2 and 3 are sectional views of a preferred example of a strip position detecting device, respectively. FIG. 4 is an explanatory view of the strip meandering control by the steering device, FIG. 5 is a schematic diagram of a suitable steering device, and FIG. 6 is a schematic diagram of a conventional position detecting device. 1 ... Pay-off reel 2 ... Deflector roll 3 ... Differential pressure chamber, 4 ... Preheating chamber 5 ... Vacuum deposition chamber, 6 ... Steering roll 7 ... Meandering detector, 8 ... Cooling chamber 9 ... Tension reel, 10 ... Transparent wall 11 ... Projector , 12 ... Receiver 13,14 ... Differential pressure chamber, 15 ... Overflow displacement sensor 16 ... Arithmetic device, 17 ... Control device 18 ... Cylinder, 19 ... Pivot 20 ... Bracket, 21 ... Bearing 22 ... Bearing seat, 23 ... base

Claims (1)

[Claims] 1. The dry plating is continuously performed while strips introduced into a dry plating treatment tank maintained in a high vacuum are passed through a detouring passage through a passage roll group including a steering roll arranged in the treatment tank. In a device for rating, a continuous dry drive comprising a sensor for detecting an edge of the strip on the exit side of the steering roll of the strip and a drive means for tilting the steering roll based on a detection signal of the sensor. A strip meandering control device in a rating device.