JPH0736218B2 - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0736218B2 JPH0736218B2 JP60209189A JP20918985A JPH0736218B2 JP H0736218 B2 JPH0736218 B2 JP H0736218B2 JP 60209189 A JP60209189 A JP 60209189A JP 20918985 A JP20918985 A JP 20918985A JP H0736218 B2 JPH0736218 B2 JP H0736218B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- film
- recording medium
- thin film
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 29
- 239000010408 film Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 14
- 230000005294 ferromagnetic effect Effects 0.000 claims description 13
- 239000010419 fine particle Substances 0.000 claims description 7
- 239000000470 constituent Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 11
- 239000000178 monomer Substances 0.000 description 8
- 229920006254 polymer film Polymers 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- -1 polyethylene naphthalate Polymers 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- ZHZPKMZKYBQGKG-UHFFFAOYSA-N 6-methyl-2,4,6-tris(trifluoromethyl)oxane-2,4-diol Chemical compound FC(F)(F)C1(C)CC(O)(C(F)(F)F)CC(O)(C(F)(F)F)O1 ZHZPKMZKYBQGKG-UHFFFAOYSA-N 0.000 description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910018553 Ni—O Inorganic materials 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910020634 Co Mg Inorganic materials 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910020646 Co-Sn Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020709 Co—Sn Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000004341 Octafluorocyclobutane Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- WMIYKQLTONQJES-UHFFFAOYSA-N hexafluoroethane Chemical compound FC(F)(F)C(F)(F)F WMIYKQLTONQJES-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 1
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920006290 polyethylene naphthalate film Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する強磁性金属薄膜を磁気
記録層とする磁気記録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium having a ferromagnetic metal thin film suitable for high density magnetic recording as a magnetic recording layer.
従来の技術 従来、磁気記録層として広く実用に供されているものは
γ−Fe2O3,Coをドープしたγ−Fe2O3,CrO2,或いは鉄等
の強磁性金属又は合金微小粉末磁性材料を塩化ビニル、
酢酸ビニル共重合体、スチレンブタジエン共重合体、エ
ポキシ樹脂等の有機バインダ中に分散させて高分子フィ
ルム等の基板上に塗布乾燥させた塗布型磁性層である。
近年高密度記録への要求の高まりと共に高密度域で優れ
た信号対雑音比(S/N)を与えうる期待の大きい、強磁
性金属薄膜層を磁気記録層とするいわゆる金属薄膜型磁
気記録媒体が注目され実用化に向けて努力が続けられて
いる〔例えば、外国論文誌「アイイーイーイー トラン
ザクションズ オン マグネティクス」(IEEE TRANSA
CTIONS ON MAGNETICS Vol.MAG−20,No.5,669〜674
(1984))〕。2. Description of the Related Art Conventionally, what has been widely put to practical use as a magnetic recording layer is γ-Fe 2 O 3 , Co-doped γ-Fe 2 O 3 , CrO 2 , or a ferromagnetic metal or alloy fine powder such as iron. Magnetic material is vinyl chloride,
It is a coating type magnetic layer which is dispersed in an organic binder such as a vinyl acetate copolymer, a styrene-butadiene copolymer and an epoxy resin and then coated and dried on a substrate such as a polymer film.
The so-called metal thin film magnetic recording medium using a ferromagnetic metal thin film layer as a magnetic recording layer, which is expected to give an excellent signal-to-noise ratio (S / N) in the high density region with the increasing demand for high density recording in recent years Has been attracting attention and efforts are being made toward its practical application (for example, the foreign journal “IEE Transactions on Magnetics” (IEEE TRANSA
CTIONS ON MAGNETICS Vol.MAG-20, No.5,669-674
(1984))].
かかる磁気記録媒体の改良の主眼は、優れた電磁変換特
性を保ちながら磁気記録層の耐久性を向上させることに
ある。The main object of the improvement of such a magnetic recording medium is to improve the durability of the magnetic recording layer while maintaining excellent electromagnetic conversion characteristics.
従って、これに関する提案も多くなされ、一般に磁気記
録層として用いられるCo−P,Co−Ni−O,Co−Cr膜等の強
磁性金属薄膜上に保護膜を形成して、磁気ヘッドや走行
系の機構材料との摩擦を少なくする方向〔例えば特開昭
52−153707号公報 特開昭59−171026号公報〕や、高分
子フィルム上に微細な凹凸を設け、その表面に強磁性金
属薄膜を設けることで、真実接触面積を減少させ、耐す
り傷性や走行性能の改良を行うことが提案されている
〔例えば特開昭56−10455号公報 特開昭59−121631号
公報等〕。Therefore, many proposals have been made regarding this, and a protective film is formed on a ferromagnetic metal thin film such as a Co-P, Co-Ni-O, or Co-Cr film that is generally used as a magnetic recording layer, and a magnetic head or a traveling system is formed. To reduce friction with mechanical materials of
No. 52-153707, Japanese Patent Laid-Open No. 59-171026], or by providing fine irregularities on a polymer film and providing a ferromagnetic metal thin film on the surface, the true contact area is reduced, and the scratch resistance is improved. It has been proposed to improve the running performance of the vehicle (for example, JP-A-56-10455 and JP-A-59-121631).
発明が解決しようとする問題点 しかしながら上記のような構成では、磁気ヘッドが合金
化すると、特定の環境でしか良好なS/Nを保てず、実用
範囲に制約を受けるという問題を有していた。Problems to be Solved by the Invention However, in the above-mentioned configuration, when the magnetic head is alloyed, it has a problem that a good S / N can be maintained only in a specific environment and the practical range is restricted. It was
本発明は上記問題に鑑み、合金系ヘッドとの摩擦下でも
耐久性のある保護膜を配することで、実用範囲に特別の
制約を受けない磁気記録媒体を提供するものである。In view of the above problems, the present invention provides a magnetic recording medium that is not particularly limited in its practical range by disposing a protective film that is durable even under friction with an alloy head.
問題点を解決するための手段 上記した問題点を解決するため本発明の磁気記録媒体
は、柱状構造の磁性微粒子表層部にプラズマ重合膜を配
してなる強磁性金属薄膜から成る磁気記録層を備えたも
のである。Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention comprises a magnetic recording layer made of a ferromagnetic metal thin film in which a plasma polymerized film is arranged on the surface layer of magnetic fine particles having a columnar structure. Be prepared.
作用 本発明は上記した構成によって、プラズマ重合膜が、従
来のように強磁性金属薄膜上に積層されているものと異
なり、薄膜を構成する柱状構造の磁性微粒子の一部とし
て構成されることから、合金ヘッドとの摩擦でも十分な
耐久性が確保されることになる。Action The present invention has the above-described structure, in which the plasma-polymerized film is formed as a part of the columnar magnetic fine particles constituting the thin film, unlike the conventional structure in which the plasma-polymerized film is laminated on the ferromagnetic metal thin film. As a result, sufficient durability is ensured even with friction with the alloy head.
実 施 例 以下、本発明の実施例について図面を参照しながら説明
する。EXAMPLES Examples of the present invention will be described below with reference to the drawings.
第1図は本発明の一実施例における磁気記録媒体の部分
拡大断面図である。第1図において、1は厚み10μmの
ポリエチレンナフタレートフィルムで、2は強磁性金属
薄膜で、柱状微粒子3と、表層部にプラズマ重合膜4が
配されたものから成りたつものである。FIG. 1 is a partially enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In FIG. 1, 1 is a polyethylene naphthalate film having a thickness of 10 μm, 2 is a ferromagnetic metal thin film, which is composed of columnar fine particles 3 and a plasma polymerized film 4 arranged on the surface layer portion.
表層部のプラズマ重合膜4は、柱状微粒子と一体化され
て構成されている点が本発明の特徴で、後述する製法か
らも理解できるように、プラズマ重合膜は、強磁性金属
薄膜構成元素を含むもので、その点でも耐久性が優れた
ものとなることと密接に関係してるものと考えられるも
のである。強磁性金属薄膜構成元素のプラズマ重合膜に
含まれる原子比率は3〜10%が好ましい。3%以下では
硬さ増加による耐久性向上効果が弱く、10%以上では柔
軟性が失われて耐久性が低下するからである。The feature of the present invention is that the plasma-polymerized film 4 in the surface layer portion is formed integrally with the columnar fine particles, and as can be understood from the manufacturing method described later, the plasma-polymerized film 4 contains ferromagnetic metal thin film constituent elements. It is considered that it is closely related to the fact that it also has excellent durability. The atomic ratio of the constituent elements of the ferromagnetic metal thin film contained in the plasma polymerized film is preferably 3 to 10%. If it is 3% or less, the effect of improving the durability due to the increase in hardness is weak, and if it is 10% or more, the flexibility is lost and the durability is lowered.
本実施例では柱状微粒子は、ほぼ垂直に伸びたものでCo
−Cr(Crは20.5wt%)から成る垂直磁化膜で膜厚は1650
Åで、プラズマ重合膜4は表層部(100〜150Å)で、モ
ノマーはオクタフロロシクロブタン等を用いた。In this embodiment, the columnar fine particles are those that extend almost vertically and
Perpendicular magnetization film made of -Cr (Cr is 20.5 wt%) with a film thickness of 1650
Å, the plasma polymerized film 4 was the surface layer portion (100 to 150 Å), and the monomer used was octafluorocyclobutane.
第2図は第1図の構成の磁気記録媒体を得るのに用いた
蒸着装置の内部構成概要図である。FIG. 2 is a schematic diagram of the internal structure of a vapor deposition apparatus used to obtain the magnetic recording medium having the structure shown in FIG.
第2図において、5は高分子フィルム、6は送り出し
軸、7は巻き取り軸、8は円筒キャン、9は蒸発部、10
は限定蒸気流で、円筒キャンに沿った位置でl1からl2の
範囲の入射角成分から成り、l1が結晶成長初期で、l2部
が最終部に相当する。11はマスクで12はスリット部であ
る。13はモノマー導入ノズルで14は放電電極である。15
は真空容器、16は真空排気系である。In FIG. 2, 5 is a polymer film, 6 is a delivery shaft, 7 is a take-up shaft, 8 is a cylindrical can, 9 is an evaporation part, and 10
Limitation vapor stream consists incident angle component in the range of l 1 at a position along the cylindrical can of l 2, l 1 is the crystal growth early, l 2 parts corresponds to the final portion. 11 is a mask and 12 is a slit part. 13 is a monomer introduction nozzle and 14 is a discharge electrode. 15
Is a vacuum container, and 16 is an evacuation system.
モノマー導入ノズルは直径10mmの銅パイプに、12ミリピ
ッチで0.2φの細孔を50個配したもので、放電電極は直
径15mmのアルミ棒を22mm離して一対配し、この2本の電
極間にAC100KHzを印加してグロー放電を発生させ、モノ
マーを部分電離、重合させるようにしている。モノマー
蒸気がほぼl2を目指すような配置になるよう調整してい
る。The monomer introduction nozzle consists of a copper pipe with a diameter of 10 mm and 50 pores with a diameter of 0.2φ arranged at a pitch of 12 mm. The discharge electrodes are a pair of aluminum rods with a diameter of 15 mm, which are separated by 22 mm, and between the two electrodes. AC100KHz is applied to generate glow discharge to partially ionize and polymerize the monomer. The arrangement is such that the monomer vapor is aimed at approximately l 2 .
この装置を用いて、表層部の厚みを100Å〜150Åの範囲
になるような条件を見い出し、モノマーを変化させてテ
ープを製造する。Using this equipment, we find conditions that the thickness of the surface layer is in the range of 100Å to 150Å, and change the monomer to produce tape.
テープとしての走行性を改良するために、いずれのテー
プもパーフロロデカン酸を真空蒸着法で約50%Å蒸着し
た滑剤層を付加したもので比較検討した。In order to improve the running property as a tape, each tape was comparatively examined by adding a lubricant layer in which about 50% Å vapor-deposited perfluorodecanoic acid was deposited by a vacuum deposition method.
いずれも比較例は、Co−Cr垂直磁化膜を形成した上に従
来通りプラズマ重合膜を形成し、その上にパーフロロデ
カン酸を真空蒸着したものを用いている。In each of the comparative examples, a Co-Cr perpendicularly magnetized film was formed, a plasma polymerized film was formed as in the conventional case, and perfluorodecanoic acid was vacuum-deposited on the plasma polymerized film.
Co−Crの垂直蒸着は円筒キャン温度を165℃に保ち、垂
直保磁力720(Oe)のものを用い、磁気ヘッドはギャッ
プ長0.2(μm)のセンダストヘッドを用いた。For vertical vapor deposition of Co-Cr, a cylindrical can temperature was kept at 165 ° C, a vertical coercive force of 720 (Oe) was used, and a magnetic head was a sendust head with a gap length of 0.2 (μm).
S/N変化は、それぞれの環境で記録再生をくり返り、200
回目の録再時の再生S/Nで、初期値をO(dB)として相
対比較した。The S / N change is recorded and reproduced repeatedly in each environment,
In the reproduction S / N at the time of the second recording / reproduction, the initial value was set to O (dB) for relative comparison.
前表より明らかなように本発明の構成は、環境による差
は殆んどみうけられず、且つ、S/N低下も殆んど無視で
きるのに比して、従来の構成のものは200回の録音再生
操作に於いて実用性はなく、環境依存も大きい。 As is clear from the above table, the configuration of the present invention has almost no difference due to the environment, and the S / N reduction is almost negligible. It has no practical use in the recording and playback operations of, and is highly dependent on the environment.
尚、本発明の実施例で、高分子フィルムはポリエチレン
ナフタレートとしたが、他にポリエチレンテレフタレー
ト、ポリプロピレン、オリフェニレンサルファイド、ポ
リアミド、ポリイミド等としてもよい。Although the polymer film is polyethylene naphthalate in the examples of the present invention, it may be polyethylene terephthalate, polypropylene, oriphenylene sulfide, polyamide, polyimide or the like.
強磁性金属薄膜としてはCo−Cr垂直磁化膜の他に、Co−
Ti,Co−Ta,Co−Mo,Co−W,Co−Cr−Nb等の垂直磁化膜、C
o−O,Co−Ni,Co−Fe,Co−Sn,Co−Mg,Co−Ni−O等の斜
め蒸着膜などであってもよい。As the ferromagnetic metal thin film, in addition to the Co-Cr perpendicular magnetization film, Co-Cr
Perpendicular magnetic film such as Ti, Co-Ta, Co-Mo, Co-W, Co-Cr-Nb, C
It may be an oblique vapor deposition film of o-O, Co-Ni, Co-Fe, Co-Sn, Co-Mg, Co-Ni-O or the like.
プラズマ重合層を形成するのに用いるモノマーは、他に
テトラフロロエチレン、ヘキサフロロエタン、エチレ
ン、ブチレン、ヘキサフロロプロピレン、ジフロロエタ
ン、トリフロロメタン、キシレン等であってもよい。The monomer used for forming the plasma-polymerized layer may be tetrafluoroethylene, hexafluoroethane, ethylene, butylene, hexafluoropropylene, difluoroethane, trifluoromethane, xylene or the like.
発明の効果 本発明の磁気記録媒体によれば、合金ヘッドと組み合わ
せて、各種の実使用環境で、くり返し記録再生を行って
も安定なS/Nを得ることができるといったすぐれた効果
を得ることができる。EFFECTS OF THE INVENTION According to the magnetic recording medium of the present invention, in combination with an alloy head, it is possible to obtain an excellent effect that a stable S / N can be obtained even after repeated recording / reproduction in various practical use environments. You can
第1図は本発明の一実施例における磁気記録媒体の部分
拡大断面図、第2図は本発明の磁気記録媒体を得るのに
用いた蒸着装置の内部概略構成図である。 1,5……高分子フィルム、3……柱状微粒子、4……プ
ラズマ重合層、9……蒸発源、13……モノマー導入ノズ
ル、14……放電電極。FIG. 1 is a partially enlarged cross-sectional view of a magnetic recording medium in one embodiment of the present invention, and FIG. 2 is a schematic internal configuration diagram of a vapor deposition apparatus used to obtain the magnetic recording medium of the present invention. 1,5 ... Polymer film, 3 ... Columnar fine particles, 4 ... Plasma polymerization layer, 9 ... Evaporation source, 13 ... Monomer introducing nozzle, 14 ... Discharge electrode.
Claims (1)
薄膜構成元素を含むプラズマ重合膜として一体的に構成
された強磁性金属薄膜からなる磁気記録層を有すること
を特徴とする磁気記録媒体。1. A magnetic recording medium comprising a magnetic recording layer composed of a ferromagnetic metal thin film integrally formed as a plasma-polymerized film containing a ferromagnetic metal thin film constituent element in a surface portion of a magnetic fine particle having a columnar structure. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60209189A JPH0736218B2 (en) | 1985-09-20 | 1985-09-20 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60209189A JPH0736218B2 (en) | 1985-09-20 | 1985-09-20 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6267720A JPS6267720A (en) | 1987-03-27 |
| JPH0736218B2 true JPH0736218B2 (en) | 1995-04-19 |
Family
ID=16568820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60209189A Expired - Lifetime JPH0736218B2 (en) | 1985-09-20 | 1985-09-20 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0736218B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59171029A (en) * | 1983-03-18 | 1984-09-27 | Fuji Photo Film Co Ltd | Magnetic recording medium |
-
1985
- 1985-09-20 JP JP60209189A patent/JPH0736218B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6267720A (en) | 1987-03-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |