JPH0737513B2 - Hybrid IC coating material - Google Patents
Hybrid IC coating materialInfo
- Publication number
- JPH0737513B2 JPH0737513B2 JP62078120A JP7812087A JPH0737513B2 JP H0737513 B2 JPH0737513 B2 JP H0737513B2 JP 62078120 A JP62078120 A JP 62078120A JP 7812087 A JP7812087 A JP 7812087A JP H0737513 B2 JPH0737513 B2 JP H0737513B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- epoxy resin
- parts
- hybrid
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はハイブリッドICの被覆材料に関し、さらに詳し
くは小型および薄型で、かつ信頼性の高い樹脂封止型ハ
イブリッドICの被覆材料に関する。TECHNICAL FIELD The present invention relates to a coating material for hybrid ICs, and more particularly to a coating material for a resin-encapsulated hybrid IC that is small and thin and has high reliability.
〔従来の技術〕 近年、民生機器や産業用機器に使用される電子機器が小
型化および薄型化するにつれて、これに使用されるハイ
ブリッドIC(インテグラル・サーキット)もまた同様に
小型化、薄型化および高集積化が図られる傾向にある。[Prior Art] In recent years, as electronic equipment used for consumer equipment and industrial equipment has become smaller and thinner, the hybrid IC (integral circuit) used therein has also become smaller and thinner. And there is a tendency for higher integration.
従来のハイブリッドICの製造法においては、回路が印刷
されたアルミナ基板上にIC、トランジスタ、コンデンサ
等を種々の方法で搭載した後、外力からの保護と耐湿信
頼性を向上するために外装用樹脂で被覆する方法がとら
れている。In the conventional hybrid IC manufacturing method, after mounting the IC, transistor, capacitor, etc. on the alumina substrate on which the circuit is printed by various methods, the external resin is used to protect from external force and improve the moisture resistance reliability. The method of coating with is adopted.
該外装用樹脂としては、粉体エポキシ樹脂、液状フェノ
ール樹脂、液状エポキシ樹脂などが使用されており、粉
体エポキシ樹脂では流動浸漬法、液状フェノール樹脂お
よび液状エポキシ樹脂ではディッピング法によりハイブ
リッドICを被覆した後に加熱処理が行なわれ、硬化され
ている。A powder epoxy resin, a liquid phenol resin, a liquid epoxy resin, or the like is used as the exterior resin. The powder epoxy resin covers the hybrid IC by a fluidized dipping method, and the liquid phenol resin and the liquid epoxy resin use a dipping method. After that, heat treatment is performed and the resin is cured.
粉体エポキシ樹脂は大量生産ができるという特長を有し
ているが、最近さらに厳しくなっている耐湿信頼性(プ
レッシャー・クッカー試験)に劣る欠点がある。一方、
液状フェノール樹脂および液状エポキシ樹脂は、プレッ
シャー・クッカー試験には良好な結果を示すが、無機質
充填剤を多量に含んでいるため作業時に沈降しやすく、
しかも膜厚が500〜1000μmと厚くなり、ハイブリッドI
Cの薄型化ができにくく、また耐冷熱衝撃性に劣るとい
う欠点を有する。The powdered epoxy resin has a feature that it can be mass-produced, but has a drawback that it is inferior in moisture resistance reliability (pressure cooker test), which has become more severe recently. on the other hand,
Liquid phenolic resins and liquid epoxy resins show good results in the pressure cooker test, but since they contain a large amount of inorganic filler, they easily settle during work,
Moreover, the film thickness becomes as thick as 500 to 1000 μm, and the Hybrid I
It has the drawbacks that it is difficult to make C thinner and it is inferior in thermal shock resistance.
本発明の目的は、前記の従来のハイブリッドICの被覆材
料の欠点を改良し、小型化および薄膜化を図り、かつ耐
湿信頼性および耐熱衝撃性にも優れたハイブリッドICの
被覆材料を提供することにある。An object of the present invention is to improve the above-mentioned drawbacks of the conventional coating material for the hybrid IC, to achieve miniaturization and thinning, and to provide a coating material for the hybrid IC which is excellent in moisture resistance reliability and thermal shock resistance. It is in.
本発明は、(a)エピ−ビス型エポキシ樹脂、(b)ク
レゾールノボラック型エポキシ樹脂、(c)フェノール
ノボラック樹脂、(d)硬化促進剤および(e)有機溶
剤を含有し、クレゾールノボラック型エポキシ樹脂の配
合割合を、全エポキシ樹脂の5〜55重量%としたハイブ
リッドICの被覆材料に関する。The present invention comprises (a) an epi-bis type epoxy resin, (b) a cresol novolac type epoxy resin, (c) a phenol novolac resin, (d) a curing accelerator and (e) an organic solvent, and a cresol novolac type epoxy resin. The present invention relates to a hybrid IC coating material in which the resin content is 5 to 55% by weight based on the total epoxy resin.
本発明に使用されるエピ−ビス型エポキシ樹脂とは、ビ
スフェノールAとエピクロルヒドリンから誘導されるエ
ポキシ樹脂であり、これらは耐熱衝撃性の点からエポキ
シ当量が250以上のものが好ましく、具体的には油化シ
ェル社製EP−1007(エポキシ当量2000)、EP−1004(エ
ポキシ当量950)などが挙げられる。The epi-bis type epoxy resin used in the present invention is an epoxy resin derived from bisphenol A and epichlorohydrin, and those having an epoxy equivalent of 250 or more are preferable from the viewpoint of thermal shock resistance. Examples include EP-1007 (epoxy equivalent 2000) and EP-1004 (epoxy equivalent 950) manufactured by Yuka Shell Co., Ltd.
本発明に使用されるクレゾールノボラック型エポキシ樹
脂としては、クレゾールノボラック樹脂とエピクロルヒ
ドリンから誘導されるエポキシ樹脂が用いられ、東都化
成社製YDCN−702(エポキシ当量210)、住友化成社製ES
CN−195(エポキシ当量220)などが挙げられる。該クレ
ゾールノボラック型エポキシ樹脂の配合割合は、全エポ
キシ樹脂の5〜55重量%とされる。クレゾールノボラッ
ク型エポキシ樹脂の配合割合が5重量%より少ないと、
耐熱性および耐湿信頼性が低下し、また55重量%を超え
ると、耐熱衝撃性が低下することがある。As the cresol novolac type epoxy resin used in the present invention, an epoxy resin derived from cresol novolac resin and epichlorohydrin is used, YDCN-702 manufactured by Tohto Kasei Co., Ltd. (epoxy equivalent 210), ES manufactured by Sumitomo Chemical Co., Ltd.
CN-195 (epoxy equivalent 220) and the like. The mixing ratio of the cresol novolac type epoxy resin is 5 to 55% by weight of the total epoxy resin. When the compounding ratio of the cresol novolac type epoxy resin is less than 5% by weight,
The heat resistance and the humidity resistance reliability decrease, and if it exceeds 55% by weight, the thermal shock resistance may decrease.
本発明に使用されるフェノールノボラック樹脂として
は、フェノール類とホルムアルデヒドの重縮合物が用い
られ、明和化成社製H−1(水酸基当量106)、日本化
薬社製PN(水酸基当量106)などが挙げられる。その配
合量は耐熱劣化特性および強度の点からエポキシ基1個
に対し0.85〜1.1モルの範囲が好ましい。As the phenol novolac resin used in the present invention, polycondensates of phenols and formaldehyde are used, and H-1 (hydroxyl group equivalent 106) manufactured by Meiwa Kasei Co., PN (hydroxyl group equivalent 106) manufactured by Nippon Kayaku Co., Ltd. Can be mentioned. The blending amount thereof is preferably in the range of 0.85 to 1.1 mol with respect to one epoxy group from the viewpoint of heat deterioration resistance and strength.
本発明に使用される硬化促進剤としては、第三級アミン
類、イミダゾール類、テトラ置換ボレート、トリフェニ
ルホスフィンなどが挙げられる。Examples of the curing accelerator used in the present invention include tertiary amines, imidazoles, tetra-substituted borates, triphenylphosphine and the like.
硬化性および安定性のバランスから、硬化促進剤の配合
割合はフェノールノボラック樹脂に対して0.3〜25重量
%の範囲が好ましい。From the balance of curability and stability, the compounding ratio of the curing accelerator is preferably in the range of 0.3 to 25% by weight with respect to the phenol novolac resin.
本発明に使用される有機溶剤としては、芳香族系炭化水
素、アルコール系溶剤、ケトン系溶剤などが挙げられ
る。有機溶剤の配合割合は、被覆材料の作業性および被
覆の膜厚と耐湿信頼性の点から、エピ−ビス型エポキシ
樹脂、クレゾールノボラック型エポキシ樹脂、フェノー
ルノボラック樹脂、硬化促進剤および有機溶剤に対して
45〜70重量%の範囲が好ましい。Examples of the organic solvent used in the present invention include aromatic hydrocarbons, alcohol solvents, ketone solvents and the like. The blending ratio of the organic solvent is based on the workability of the coating material, the film thickness of the coating, and the moisture resistance reliability with respect to the epi-bis type epoxy resin, the cresol novolac type epoxy resin, the phenol novolac resin, the curing accelerator and the organic solvent. hand
A range of 45-70% by weight is preferred.
本発明の被覆材料には目的に応じて着色剤、カップリン
グ剤、消泡剤、難燃剤を添加することができる。A colorant, a coupling agent, a defoaming agent, and a flame retardant can be added to the coating material of the present invention depending on the purpose.
本発明におけるハイブリッドICの製造は、外装用樹脂と
して前記の被覆材料(樹脂組成物)を用いて通常の方法
で行なうことができる。得られたハイブリッドICは、エ
ピ−ビス型エポキシ樹脂の耐熱衝撃性とクレゾールノボ
ラック型エポキシ樹脂およびフェノールノボラック樹脂
の耐湿信頼性を共に有する。The hybrid IC in the present invention can be produced by a usual method using the above-mentioned coating material (resin composition) as the exterior resin. The obtained hybrid IC has both the thermal shock resistance of the epi-bis type epoxy resin and the moisture resistance reliability of the cresol novolac type epoxy resin and the phenol novolac resin.
以下、本発明を実施例により説明する。 Hereinafter, the present invention will be described with reference to examples.
実施例1 エピ−ビス型エポキシ樹脂(油化シェル社製EP−1007)
80重量部 クレゾールノボラック型エポキシ樹脂(東都化成社製YD
CN−702) 20重量部 フェノールノボラック樹脂(明和化成社製H−1)14.3
重量部 ジメチルベンジルアミン 0.3重量部 エチレングリコールモノエチルエーテル 100重量部 トルエン 15重量部 をガラス製フラスコ内で70〜100℃で3〜4時間溶解
し、透明な樹脂組成物を得た。Example 1 Epi-bis type epoxy resin (EP-1007 manufactured by Yuka Shell Co., Ltd.)
80 parts by weight Cresol novolac type epoxy resin (YD manufactured by Tohto Kasei Co., Ltd.
CN-702) 20 parts by weight phenol novolac resin (H-1 manufactured by Meiwa Kasei Co., Ltd.) 14.3
Parts by weight dimethylbenzylamine 0.3 parts by weight ethylene glycol monoethyl ether 100 parts by weight toluene 15 parts by weight were dissolved in a glass flask at 70 to 100 ° C. for 3 to 4 hours to obtain a transparent resin composition.
得られた樹脂組成物を用い、ディップ方式によりハイブ
リッドICを外装被覆した後、120℃で1時間、次いで150
℃で2時間加熱硬化した。得られた硬化物について下記
特性の評価を行なった。その結果を第1表に示す。The resulting resin composition is used to coat the hybrid IC on the exterior by a dip method, then at 120 ° C. for 1 hour, then at 150 ° C.
It was heat-cured at 2 ° C. for 2 hours. The following properties of the obtained cured product were evaluated. The results are shown in Table 1.
(1)膜厚の測定 外装被覆前後のハイブリッドICの基板平坦部の厚さの差
を測定し、2等分した値を片面の膜厚とした。(1) Measurement of film thickness The difference in the thickness of the flat part of the substrate of the hybrid IC before and after the outer coating was measured, and the value divided into two was taken as the film thickness on one side.
(2)耐湿信頼性試験(プレッシャー・クッカー試験) 121℃、2気圧、100%RHの水蒸気下に外装被覆後のハイ
ブリッドICをさらし、時間毎に印刷抵抗の変化を測定
し、初期値が1.5%以上変化した物を不良発生物とし、
各時間舞の不良発生数を調べた。この試験は試料数20個
で行なった。(2) Humidity resistance reliability test (pressure cooker test) The hybrid IC after exterior coating is exposed to steam at 121 ° C, 2 atmospheres and 100% RH, and the change in printing resistance is measured every time. % Changed or more is regarded as a defective product,
The number of defects generated at each time dance was examined. This test was performed with 20 samples.
(3)耐熱衝撃性 外装被覆後のハイブリッドICに−40℃で30分、続いて12
5℃で30分を1サイクルとした熱衝撃を加え、25サイク
ル毎に印刷抵抗の変化を測定し、初期値の1.5%以上変
化した物を不良発生物とし、各サイクル毎の不良発生数
を調べた。この試験は前記と同様に試料数20個で行なっ
た。(3) Thermal shock resistance For 30 minutes at -40 ° C and then 12
A thermal shock was applied at 5 ° C for 30 minutes as one cycle, and the change in printing resistance was measured every 25 cycles, and the one with a change of 1.5% or more of the initial value was defined as a defective product. Examined. This test was conducted with 20 samples as described above.
実施例2 外装被覆用の樹脂組成物を下記の成分からなるエポキシ
樹脂組成物に代えた以外は実施例1と同様にしてハイブ
リッドICを作製し、同様の評価を行なった。その結果を
第1表に示した。Example 2 A hybrid IC was prepared and evaluated in the same manner as in Example 1 except that the epoxy resin composition containing the following components was used instead of the resin composition for exterior coating. The results are shown in Table 1.
エピ−ビス型エポキシ樹脂(油化シェル社製Ep−1007)
60重量部 クレゾールノボラック型エポキシ樹脂(東都化成社製YD
CN−702) 40重量部 フェノールノボラック樹脂(明和化成社製H−1)23.4
重量部 ジメチルベンジルアミン 0.3重量部 エチレングリコールモノエチルエーテル 100重量部 トルエン 20重量部 実施例3 外装被覆用の樹脂組成物を下記成分からなるエポキシ樹
脂組成物に代えた以外は実施例1と同様にしてハイブリ
ッドICを作製し、同様の評価を行なった。その結果を第
1表に示した。Epi-bis type epoxy resin (Ep-1007 manufactured by Yuka Shell Co., Ltd.)
60 parts by weight cresol novolac type epoxy resin (YD manufactured by Tohto Kasei Co., Ltd.
CN-702) 40 parts by weight phenol novolac resin (H-1 manufactured by Meiwa Kasei Co.) 23.4
Parts by weight dimethylbenzylamine 0.3 parts by weight ethylene glycol monoethyl ether 100 parts by weight toluene 20 parts by weight Example 3 The same as Example 1 except that the resin composition for exterior coating was replaced with an epoxy resin composition containing the following components. A hybrid IC was manufactured by the same method, and the same evaluation was performed. The results are shown in Table 1.
エピ−ビス型エポキシ樹脂(油化シェル社製Ep−1004)
50重量部 クレゾールノボラック型エポキシ樹脂(住友化学社製ES
CN−195) 50重量部 フェノールノボラック樹脂(日本化薬社製PN)26.8重量
部 1−シアノエチル−2−エチル−4−メチルイミダゾー
ル(四国化成社製、2E4MZ−CN) 0.2重量部 エチレングリコールモノエチルエーテル 100重量部 キシレン 10重量部 比較例1 外装被覆用の樹脂組成物を下記の成分からなるエポキシ
樹脂組成物に代えた以外は実施例1と同様にしてハイブ
リッドICを作製し、同様の評価を行なった。その結果を
第1表に示した。Epi-bis type epoxy resin (Ep-1004 manufactured by Yuka Shell Co., Ltd.)
50 parts by weight Cresol novolac type epoxy resin (ES manufactured by Sumitomo Chemical Co., Ltd.
CN-195) 50 parts by weight phenol novolac resin (PN manufactured by Nippon Kayaku Co., Ltd.) 26.8 parts by weight 1-cyanoethyl-2-ethyl-4-methylimidazole (2E4MZ-CN manufactured by Shikoku Kasei) 0.2 parts by weight ethylene glycol monoethyl Ether 100 parts by weight Xylene 10 parts by weight Comparative Example 1 A hybrid IC was prepared in the same manner as in Example 1 except that the resin composition for exterior coating was replaced with an epoxy resin composition containing the following components, and the same evaluation was performed. I did. The results are shown in Table 1.
エピ−ビス型エポキシ樹脂(油化シェル社製Ep−1007)
100重量部 フェノールノボラック樹脂(明和化成社製H−1) 5.3
重量部 1−シアノエチル−2−エチル−4−メチルイミダゾー
ル(四国化成社製、2E4MZ−CN) 0.06重量部 エチレングリコールモノエチルエーテル 100重量部 トルエン 30重量部 比較例2 外装被覆用の樹脂組成物を下記成分からなるエポキシ樹
脂組成物に代えた以外は実施例1と同様にしてハイブリ
ッドICを作製し、同様の評価を行なった。その結果を第
1表に示した。Epi-bis type epoxy resin (Ep-1007 manufactured by Yuka Shell Co., Ltd.)
100 parts by weight phenol novolac resin (H-1 manufactured by Meiwa Kasei Co., Ltd.) 5.3
Parts by weight 1-cyanoethyl-2-ethyl-4-methylimidazole (2E4MZ-CN manufactured by Shikoku Kasei Co., Ltd.) 0.06 parts by weight ethylene glycol monoethyl ether 100 parts by weight toluene 30 parts by weight Comparative Example 2 A resin composition for exterior coating was prepared. A hybrid IC was prepared and evaluated in the same manner as in Example 1 except that the epoxy resin composition containing the following components was used instead. The results are shown in Table 1.
エピ−ビス型エポキシ樹脂(油化シェル社製Ep−1007)
40重量部 クレゾールノボラック型エポキシ樹脂(東都化成社製YD
CN−702) 60重量部 フェノールノボラック樹脂(明和化成社製H−1)32.4
重量部 1−シアノエチル−2−エチル−4−メチルイミダゾー
ル(四国化成社製2E4MZ−CN) 0.3重量部 エチレングリコールモノエチルエーテル 100重量部 トルエン 10重量部 比較例3 外装被覆用の樹脂組成物を下記成分からなるエポキシ樹
脂組成物に代えた以外は実施例1と同様にしてハイブリ
ッドICを作製し、同様の評価を行なった。その結果を第
1表に示した。Epi-bis type epoxy resin (Ep-1007 manufactured by Yuka Shell Co., Ltd.)
40 parts by weight cresol novolac type epoxy resin (YD manufactured by Tohto Kasei Co., Ltd.
CN-702) 60 parts by weight Phenol novolac resin (H-1 manufactured by Meiwa Kasei Co.) 32.4
Parts by weight 1-cyanoethyl-2-ethyl-4-methylimidazole (2E4MZ-CN manufactured by Shikoku Kasei Co., Ltd.) 0.3 parts by weight Ethylene glycol monoethyl ether 100 parts by weight Toluene 10 parts by weight Comparative Example 3 A resin composition for exterior coating is described below. A hybrid IC was produced in the same manner as in Example 1 except that the epoxy resin composition containing the components was replaced, and the same evaluation was performed. The results are shown in Table 1.
シリコン変性エポキシ樹脂(信越化学社製ES−1002T、
固型分60重量%) 100重量部 フェノールノボラック樹脂(明和化成社製H−1)15重
量部 1−シアノエチル−2−エチル−4−メチルイミダゾー
ル(四国化成社製、2E4MZ−CN) 0.15重量部 メタノール 20重量部 アセトン 15重量部 第1表の結果から、本発明になる被覆材料により外装、
被覆されたハイブリッドICは従来のものと較べ同等以上
の信頼性を有し、かつ被覆膜厚を5分の1以下にするこ
とが可能である。Silicon modified epoxy resin (ES-1002T, manufactured by Shin-Etsu Chemical Co., Ltd.,
Solid content 60% by weight) 100 parts by weight Phenol novolac resin (H-1 manufactured by Meiwa Kasei Co., Ltd.) 15 parts by weight 1-cyanoethyl-2-ethyl-4-methylimidazole (2E4MZ-CN manufactured by Shikoku Kasei) 0.15 parts by weight Methanol 20 parts by weight Acetone 15 parts by weight From the results shown in Table 1, the coating material according to the present invention was used for the exterior,
The coated hybrid IC has a reliability equal to or higher than that of the conventional one, and the coating film thickness can be reduced to one fifth or less.
本発明のハイブリッドICの被覆材料は、被覆膜厚を薄く
することができるので、ICの型化および薄型化が容易で
あり、また耐湿信頼性および耐熱衝撃性にも優れてい
る。Since the coating material of the hybrid IC of the present invention can reduce the coating film thickness, it is easy to mold and thin the IC, and it is also excellent in moisture resistance reliability and thermal shock resistance.
フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01L 23/31 Continuation of front page (51) Int.Cl. 6 Identification number Office reference number FI technical display location H01L 23/31
Claims (1)
割合を、全エポキシ樹脂の5〜55重量%としたハイブリ
ッドICの被覆材料。1. A cresol novolac type resin containing (a) an epi-bis type epoxy resin, (b) a cresol novolac type epoxy resin, (c) a phenol novolac resin, (d) a curing accelerator and (e) an organic solvent. Hybrid IC coating material with an epoxy resin content of 5 to 55% by weight of the total epoxy resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62078120A JPH0737513B2 (en) | 1987-03-31 | 1987-03-31 | Hybrid IC coating material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62078120A JPH0737513B2 (en) | 1987-03-31 | 1987-03-31 | Hybrid IC coating material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63245430A JPS63245430A (en) | 1988-10-12 |
| JPH0737513B2 true JPH0737513B2 (en) | 1995-04-26 |
Family
ID=13653024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62078120A Expired - Lifetime JPH0737513B2 (en) | 1987-03-31 | 1987-03-31 | Hybrid IC coating material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737513B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH075823B2 (en) * | 1988-12-27 | 1995-01-25 | 住友ベークライト株式会社 | Resin composition for semiconductor encapsulation |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58225120A (en) * | 1982-06-25 | 1983-12-27 | Mitsubishi Gas Chem Co Inc | Epoxy resin composition for semiconductor encapsulation |
| JPS62518A (en) * | 1985-06-26 | 1987-01-06 | Fujitsu Ltd | Epoxy resin for sealing semiconductor |
| JPS6217932A (en) * | 1985-07-15 | 1987-01-26 | Mitsubishi Electric Corp | Ion source |
| JPS62296449A (en) * | 1986-06-16 | 1987-12-23 | Nitto Electric Ind Co Ltd | Semiconductor device |
-
1987
- 1987-03-31 JP JP62078120A patent/JPH0737513B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63245430A (en) | 1988-10-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |