JPH0737944B2 - Scattered light measuring device - Google Patents

Description

Detailed Description of the Invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for analyzing characteristics of an object surface and an object by utilizing light scattering, and more particularly to a scattered light measuring apparatus for converting the scattered light into molecular vibration energy and measuring the energy. . [Prior Art] Conventionally, as an apparatus for analyzing the physical properties of the surface of an object and the inside of the object by utilizing light scattering, as shown in FIG. 3, the object 1 to be inspected is irradiated with the light 2 and the scattered light 3 is opened. The light is guided to the photosensitive surface 6 of the photodetector (for example, Photomul, Pinphoto, etc.) through the lens 4 having a large angle and further through the integrating sphere 5 in order to reduce the influence of the light distribution. However, in this case, if the scattering angle is larger than the aperture angle, the protruding scattering component cannot enter the lens, and measurement is impossible. In order to detect the scattered components that protruded, a transmission type diffusion surface was placed near the object to be inspected and a photodetector was placed behind it, but the characteristics of the diffusion plate, the photodetector installation method, etc. However, it was difficult to measure with high accuracy and high sensitivity. [Problems to be Solved by the Invention] In view of the above, the present invention enables measurement with high accuracy and high sensitivity including a light scattering component having a large scattering angle, which has been difficult in conventional light scattering measurement. The problem to be solved is to efficiently perform a wide range of physical property analysis. [Means for Solving Problems] A first aspect of the present invention is a scattered light measuring device for measuring the light-scattering physical properties of an object to be inspected, the light irradiation for irradiating the object to be inspected intermittently. Means and a scattered light which is arranged in the vicinity of the object to be inspected and is intermittently emitted from the surface of the object to be inspected according to the physical properties of the object to be inspected by the irradiation light from the light irradiating means. A photosensitive medium that absorbs scattered light and converts it into molecular vibrational energy by absorbing the scattered light, energy signal detection means that detects an intermittent molecular vibrational energy signal generated in the photosensitive medium, and its molecular vibrational energy A scattered light measuring device comprising: a molecular vibration measuring unit for measuring the molecular vibration energy by frequency-synchronized detection of a signal by a reference signal from the light irradiating unit. The second invention is a scattered light measuring device for measuring the light-scattering physical properties of an object to be inspected, comprising: a light irradiating means for irradiating the object to be inspected with intermittent light; The scattered light, which is disposed in the vicinity and which is scattered intermittently emitted from the surface of the object to be inspected according to the physical properties of the object to be inspected by the irradiation light from the light irradiation means, absorbs the scattered light in a specific wavelength range and A photosensitive medium that absorbs light to convert it into molecular vibrational energy, an energy signal detection unit that detects an intermittent molecular vibrational energy signal generated in the photosensitive medium, and a molecular vibrational energy signal from the light irradiation unit. And a molecular vibration measuring unit for measuring the molecular vibration energy by frequency-synchronized detection with a reference signal, wherein the photosensitive medium has a plurality of layer structures each absorbing scattered light in different wavelength regions. However, the energy signal detection means comprises means for detecting the phase of the energy signal corresponding to each layer, further the molecular vibration measuring means, from the detected phase shift, to separate the molecular vibration energy from each layer It is a scattered light measuring device characterized in that it is provided with means for simultaneously measuring. FIG. 1 is a basic configuration diagram of a scattered light measuring device according to the present invention. In FIG. 1, when the object 1 to be inspected is irradiated with intermittent light 2, scattered light 3 due to the light inside the object to be inspected is intermittently emitted from the surface of the object to be inspected at various emission angles. The scattered light 3 is applied to the photosensitive medium 7. The photosensitive medium 7 is composed of a light absorbing substance, and the irradiated light energy is absorbed and becomes an intermittent molecular vibration energy signal 8, which is guided to the energy signal detecting means 9. Since the optical signal is converted into the molecular vibrational energy signal for any incident angle,
By appropriately setting the size and position of the photosensitive medium 7, a large scattering angle can be easily detected. A known light source and a chopper are used as the intermittent light irradiating means, and a substance having a large absorption property for the measured scattered light of a specific wavelength is used as the photosensitive medium. In addition, a light-absorbing substance having good thermal conductivity is preferable. For example, if a mixture containing carbon and carbon is used, a wide wavelength range can be covered. By measuring the demultiplexing absorption characteristic of the light absorbing substance in advance, the output signal can be corrected and the sensitivity unevenness for each wavelength can be corrected. As the surface shape of the light-absorbing substance, by providing irregularities slightly larger than the wavelength of scattered light, it is possible to improve the perfect diffusivity and remove not only the influence of the scattering angle but also the absorption efficiency. . As the energy signal detecting means, one corresponding to the molecular vibration energy signal generated in the medium is used. For example, a microphone is used for sound waves, and a thermocouple is used for heat. A roquin amplifier is used as the molecular vibration measuring means. The object to be inspected is not limited to a solid, and may be a liquid, and by irradiating the surface of the liquid with irradiation light, the development state of a so-called LB film (Langmuir-Blodgett film) on the liquid surface, the vicinity of the adsorption molecule interface It can also be applied to the evaluation of fine particles in liquid. [Operation] In FIG. 1, it is stated that the energy signal detecting means corresponds to the molecular vibration energy signal generated in the medium, but the form of the molecular vibration energy signal is as follows due to the photoacoustic effect. It changes like this. FIG. 2 is a basic principle diagram of the photoacoustic effect. In FIG. 2, the photoacoustic effect is composed of four processes, and a substance absorbs light to indicate a state in which energy propagates in the substance. Process A shows the process in which the incident light beam 3, which is modulated intermittently, strikes the absorbing material and is absorbed.
Process B shows a process in which this energy becomes intermittent heat due to the radiationless relaxation process and propagates as a heat wave in the substance. Process C shows a case where a heat wave reaching the surface of a material intermittently heats a gas in contact with the material to generate a sound wave,
In Process D, the heat wave that propagates through the substance is converted into elastic wave,
The case of propagating in the sample M is shown. The present invention is to select a desired form of molecular vibrational energy from any stage of the above process and to detect a required signal by the energy signal detecting means, which is a phenomenon showing an acoustic reaction. The photoacoustic means and the temperature distribution on the surface can be used for highly sensitive detection. Scattering to be analyzed by the present invention includes so-called elastic scattering in which scattered light does not cause wavelength shift, and elastic scattering such as Raman scattering and Brillouin scattering in which wavelength scatters. As an analysis using both elastic and inelastic scattered light, for example, a method of irradiating a transparent crystal with light having a predetermined diameter and using all the scattered light as an information source can be mentioned. The scattered light in this case includes light of all wavelength components, which is a simple method for finding out the fluctuation of the refractive index on the surface of the object to be inspected and the presence of fine particles. For analysis by inelastic scattering, if Raman scattering (or laser Raman spectroscopy) generated by using monochromatic light typified by laser light is analyzed, molecular structure theory in a minute portion inside the object to be inspected Information can be obtained. For example, by analyzing the phase transition by changing the scattered light frequency caused by the change of the lattice vibration, in particular, by using the analysis method of the present invention by changing the temperature of the object to be inspected, various information about the local change of the phase transition is obtained. Can be obtained. Further, in the case of Brillouin scattering, the scattered light accompanied by the wavelength shift due to the interaction between the phonon in the object to be inspected and the irradiation light is used as the information source. It is effective for the analysis of transition and glass transition of polymer substances. In the first aspect of the present invention, the photosensitive medium that absorbs light and converts it into molecular vibration energy is one that absorbs scattered light instead of absorbing converged light. A major feature is that a photosensitive medium that absorbs scattered light in a region is used. That is, according to the first aspect of the present invention, the measurement can be performed without producing inevitable scattered light which cannot be avoided when the scattered light is converged by a lens or the like. Therefore, the sensitivity does not decrease due to generation of scattered light that cannot be captured, and high-sensitivity measurement can be performed. Further, since the photosensitive medium absorbs scattered light in a specific wavelength range, by selecting this wavelength range, noise due to light existing in the outside world can be prevented. In particular, scattered light is generally weak and its accuracy is likely to be greatly reduced by noise due to external light. However, in the first invention of the present application, high accuracy measurement is possible by preventing noise due to external light. In the second aspect of the invention, in addition to the configuration of the first aspect of the invention, a photosensitive medium having a plurality of layer structures for absorbing scattered light in different wavelength regions is used, and the phase of the energy signal corresponding to each layer is detected. It has a major feature in that it uses an energy signal detecting means having a means and a molecular vibration measuring means having a means for separating and simultaneously measuring the molecular vibration energy from each layer from the detected phase shift. . That is, in the second invention, attention is paid to the fact that the molecular vibration energy signal transmitted from each layer of the photosensitive medium to the energy signal detecting means causes a phase shift according to the distance between each layer and the energy signal detecting means. By detecting the deviation, the molecular vibrational energy from each layer can be separated and simultaneously measured. Therefore, according to the second invention, in addition to the effect of the first invention described above, it is possible to simultaneously measure different spectral characteristics of scattered light.
A wide range of physical properties can be efficiently measured and analyzed. EXAMPLES The present invention will be described in detail below with reference to examples and the drawings. FIG. 4 is a block diagram showing an example of the scattered light measuring device embodying the present invention, in which the energy signal is a sound wave generated by the process C and the energy signal detecting means is a microphone. In FIG. 4, a known light source and a chopper 10 are used as the intermittent light irradiating means constituting the scattered light measuring device, the photosensitive medium is the photosensitive surface 7 of the microphone cell 11, and the energy signal detecting means is the microphone 12.
Is. Irradiation light beam 2 interrupted by the chopper 10
Is guided to the object 1 to be inspected by the lens 13 and its scattered light 3
Of the specific wavelength region of the gas inside the microphone cell 11 which is absorbed by the photosensitive surface 7 of the microphone cell 11 and sealed.
Intermittently heat 14 to generate sound waves. This sound wave is detected by the microphone 12 attached to the microphone cell 11, and the signal from this microphone 12 is sent to the lock-in amplifier 15, which is a molecular vibration measuring means, and the measurement light beam 2
Frequency synchronous detection is performed on the basis of the reference signal from the chopper 10 which is intermittently output, and the result is output to the recorder 16. It is theoretically confirmed that the intensity of the photoacoustic signal detected in this way is proportional to the intensity of the light in the specific wavelength range that is absorbed by the photosensitive surface and is included in the scattered light irradiated to the light absorbing substance. Has been done. Therefore, it is possible to quantitatively measure the intensity of the light in the specific wavelength region included in the scattered light. If the incident light intensity is monitored and the variation of the irradiation light intensity is removed, the measurement becomes more stable. Further, the light scattering distribution can be measured by moving the light irradiation position of the object to be inspected. Light irradiation to the object to be inspected may be performed not only in the direction shown in FIG. 4 but also in any direction. 5 and 6 are structural views showing the photosensitive medium in this embodiment. In FIG. 5, the incident light portion of the sealed microphone cell 11 is formed in the partition wall 17 with a soundproof material that does not absorb light, and the light absorbing material 7 is formed inside the partition wall 17.
Are arranged. In FIG. 6, the light absorbing material 7 is disposed on the light incident side of the partition wall 17 formed of a material having a large thermal diffusion length μ, and the partition wall 17 transfers the heat generated by the light absorbing material 7,
The gas in the cell is intermittently heated. The thickness of these partition walls is preferably a thermal diffusion length μ or less. The thermal diffusion length μ is the thermal conductivity α of the substance.

[Cm ² / s] and intermittent frequency f

Given by [Hz], μ = (α / πf) ^1/2

[Cm]

Therefore, if silver (α = 1.7) is used and f = 50Hz, μ = 1

[Mm] FIG. 7 is a block diagram showing another example of the scattered light measuring device embodying the present invention, in which the energy signal is an elastic wave generated by the process D and the energy signal detecting means is a piezoelectric detecting means. Is. In FIG. 7, a known light source and a chopper 10 are used as the intermittent light irradiating means constituting the scattered light measuring device, and the photosensitive medium is formed of an absorbing substance 7 that absorbs light in a specific wavelength region. The energy signal detecting means is the piezoelectric element 18. The irradiation light beam 2 interrupted by the chopper 10 is guided by the lens 13 to the object 1 to be inspected, and the scattered light 3 in a specific wavelength region is absorbed by the light absorbing substance 7 to cause intermittent molecular vibration. And is converted into elastic energy in the process of being transmitted to the piezoelectric element 18 and detected by the piezoelectric element 18. The signal from the piezoelectric element 18 is sent to the lock-in amplifier 15, frequency-coherently detected based on the reference signal from the chopper 10 which intermittently interrupts the measurement beam 2, and the result is output to the recorder 16. It has also been theoretically confirmed that the intensity of the piezoelectric signal detected in this manner is proportional to the intensity of the light in the specific wavelength region included in the scattered light with which the light absorbing substance is irradiated. Therefore, it is possible to quantitatively measure the intensity of the light in the specific wavelength region included in the scattered light. FIG. 8 is a structural diagram showing an example of the energy signal detecting means in this embodiment. In FIG. 8, the light in the specific wavelength region absorbed by the light absorbing substance 7 becomes intermittent molecular vibrations, which are converted into elastic energy, and the piezoelectric element 18
Detected by. A rear plate 19 is inserted between the light absorbing substance 7 and the piezoelectric element 18 to facilitate uniform transmission. In addition, if the rear plate 19 and the light absorbing substance 7 are integrated and the piezoelectric element 18 is detachable, it is convenient when measuring with a light absorbing substance having different characteristics. FIG. 9 is a block diagram showing another example of the scattered light measuring device embodying the present invention, in which the energy signal is used to directly detect the temperature change of the surface of the light absorbing substance generated by the process B by using a thermocouple. Here is an example. In FIG. 9, a known light source and a chopper 10 are used as the intermittent light irradiating means constituting the scattered light measuring device, and the photosensitive medium is formed of a light absorbing substance 7 that absorbs light in a specific wavelength region, and energy signal detection is performed. Means 20 comprises a thermocouple. The irradiation light beam 2 interrupted by the chopper 10 is guided by the lens 13 to the object 1 to be inspected, and the scattered light 3 in the specific wavelength region is absorbed by the light absorbing substance 7 to become intermittent heat, resulting in thermoelectricity. It is converted into an electric signal by the energy signal detecting means 20 composed of a pair. The signal from the energy signal detecting means 20 is a lock-in amplifier.
Frequency synchronization detection is performed based on the reference signal from the chopper 10 which is sent to the measurement light beam 15 and intermittently outputs the measurement light beam 2, and the result is output to the recorder 16. It has also been theoretically confirmed that the intensity of the thermoelectric signal detected in this manner is proportional to the intensity of the light in the specific wavelength region included in the scattered light with which the light absorbing substance is irradiated. Therefore, it is possible to quantitatively measure the intensity of the light in the specific wavelength region included in the scattered light. FIG. 10 and FIG. 11 are structural diagrams showing an example of the energy signal detecting means in this embodiment. In FIG. 10, the heat generated by the light-absorbing substance 7 is detected by the thermocouple 23a via the heat conductor 21, while the temperature in the reference thermoconductor 22 is detected by another thermocouple 23b. The structure is shown in which the detection signal processing unit 24 finds the difference signal of and the signal is sent to the lock-in amplifier 15. In FIG. 11, the light absorbing material 7
A thermocouple is arranged at each of the predetermined positions so that the heat distribution can be measured at the same time, and the intensity distribution can be obtained for light in a specific wavelength region corresponding to each light distribution angle of scattered light. FIG. 12 is a block diagram showing another example of the scattered light measuring device embodying the present invention, in which the energy signal indicates the change in the refractive index near the surface due to the radiant heat wave from the light absorbing substance generated in the stage of the process B. This is an embodiment in which the deflection is detected as a beam. In FIG. 12, a known light source and a chopper 10 are used as the intermittent light irradiation means constituting the scattered light measuring device,
The photosensitive medium is formed of a light absorbing material 7 that absorbs light in a specific wavelength range, and the energy signal detecting means is photothermal deflection detecting means.
25. The irradiation light beam 2 interrupted by the chopper 10 is guided by the lens 13 to the object 1 to be inspected, and the scattered light 3 in a specific wavelength region is absorbed by the light absorbing substance 7 to become intermittent heat. The refractive index in the vicinity of the surface of the light absorbing material is changed to deflect the light passage direction of the region, and the light heat deflection detecting means 25 converts the light into an electric signal. The electric signal from the photothermal deflection detecting means 25 is sent to the lock-in amplifier 15 and frequency-coherently detected based on the reference signal from the chopper 10 which intermittently interrupts the measurement light beam 2, and the result is recorded by the recorder.
It is output to 16. The intensity of the photothermal deflection signal detected in this manner increases with an increase in the intensity of the light in the specific wavelength region contained in the scattered light with which the absorbing material is irradiated, and the relationship has also been theoretically confirmed. Therefore, it is possible to quantitatively measure the intensity of the light in the specific wavelength region included in the scattered light. FIG. 13 is a structural diagram showing an example of the photothermal deflection detecting means in this embodiment. In FIG. 13, the scattered light having a specific wavelength range is transmitted through the transparent flat plate 26, and
It is absorbed by the light absorbing substance 7 existing on the surface, and intermittent heat is generated. This heat changes the refractive index near the surface of the light absorbing material, and the probe light beam that passes through that area
The direction of 27 changes intermittently. The probe light beam 27 has a good directivity such as a laser and preferably has a small beam diameter. In the figure, it is emitted from a light source 28 and refracted by a mirror 29 so that it passes near the light absorbing substance. It is arranged. The position sensor 30 detects the positional deviation due to the deflection of the probe light beam 27, converts it into an electrical signal, and sends it to the lock-in up 15 to measure the intensity of light in a specific wavelength region included in the scattered light. FIG. 14 is a structural diagram showing another example of the photothermal deflection detecting means. In FIG. 14, the probe light beam 27 on the surface of the light absorbing substance 7 is passed through in a matrix form, and the deflection amount at each position is detected by the corresponding position sensor 30. That is, it is possible to obtain the distribution of light in the specific wavelength region included in the scattered light. The probe light beam 27 may be scanned by using a rotating mirror or the like, or different light sources may be set at respective corresponding positions to measure at once. It should be noted that by heating a region in which the light beam is deflected with a substance having a large change in the refractive index with respect to the temperature change, a heating region having a large change in the refractive index with a slight temperature change is formed, and the course of the light beam is greatly changed. Can
Highly sensitive measurement is possible. FIG. 15 is a block diagram showing another example of the scattered light measuring device embodying the present invention, in which the energy signal is a radiant heat wave generated by the temperature change of the surface of the light absorbing substance generated in the step of the process B, which is detected by the infrared detector. It is an example to detect. In FIG. 15, a known light source and a chopper 10 are used as the intermittent light irradiating means constituting the scattered light measuring device, and the photosensitive medium is formed of a light absorbing substance 7 that absorbs light in a specific wavelength region, and energy signal detection is performed. As the means 31, an infrared detector is used. The irradiation light beam 2 interrupted by the chopper 10 has a lens 13
Thus, the scattered light 3 of the specific wavelength region guided to the object 1 is absorbed by the light absorbing material 7, becomes intermittent radiant heat, and is converted into an electric signal by the infrared detector. The electric signal from the infrared detector is sent to the lock-in amplifier 15, frequency-coherently detected based on the reference signal from the chopper 10 which intermittently interrupts the measurement light beam 2, and the result is output to the recorder 16. The intensity of the thermal radiation signal detected in this way increases with an increase in the intensity of the light in the specific wavelength region contained in the scattered light with which the absorbing material is irradiated, and the relationship has also been theoretically confirmed. Therefore, it is possible to quantitatively measure the intensity of the light in the specific wavelength region included in the scattered light. FIG. 16 is a structural diagram showing an example of the energy signal detecting means in the above embodiment. In FIG. 16, the scattered light having a specific wavelength region is absorbed by the light absorbing substance 7,
Intermittent heat is generated to intermittently heat the entire rear plate 32 having good thermal conductivity. Since the back plate surface is heated, the radiant heat wave corresponding to the temperature at that time changes intermittently. This is detected by forming an image on the entrance window of the infrared detector 34 with a lens 33 made of a material that transmits radiant infrared rays. As shown in FIG. 17, the scattered light is transmitted through the transparent flat plate 26, the light absorbing substance 7 existing on the flat plate surface absorbs light in a specific wavelength region, and the heat radiated from the light absorbing substance surface. The radiation is integrated with the lens 33 and the detector 34,
If detection is performed while scanning along the surface of the light absorbing material as indicated by arrow 35 in the figure, information corresponding to the light distribution of scattered light can be obtained. FIG. 18 is a graph showing that the light absorptance depending on the wavelength differs for each substance. If the wavelength characteristics of the light-absorbing substance 7 shown in the basic configuration diagram of FIG. 1 are different as shown in FIG. 18, the scattered light intensity of the corresponding wavelength can be measured. It enables the measurement of elastic scattering. FIG. 19 is a structural diagram in which a filter is provided in the scattered light path between the object to be inspected and the photosensitive medium. As shown in FIG.
The same measurement can be performed by disposing the filter 36 before the scattered light is absorbed by the light absorbing substance 7 and controlling the measurement wavelength range of the scattered light. If you use a polarizing filter as a filter,
It is also possible to obtain the polarization characteristics of scattered light. FIG. 20 shows that by arranging the reflection plate 37 on the light absorption rear surface of the light absorption material 7, the effective thickness of the absorption layer is reduced to 1/2, thereby enabling high sensitivity and high precision light scattering measurement. It is an example. FIG. 21 shows an example in which the light-absorbing substance has a layered structure and substances 7a to 7c having different spectral absorption characteristics are arranged for each layer, and by arranging in this way, signals of respective wavelengths are simultaneously measured. It will be possible. That is, in each layer, light energies having different wavelength characteristics are converted into molecular vibrational energy and transmitted to the energy signal detecting means, but at that time, a phase delay corresponding to the distance from each layer to the energy signal detecting means occurs. . Therefore, when the signal of scattered light is obtained by frequency-coherent detection, if it is detected for each corresponding phase shift, the signal from each layer can be separated. FIG. 22 shows an example in which the present invention is applied to light scattering by a monolayer on the liquid surface. In FIG. 22, the irradiation light 2 is incident from below the liquid surface and at an angle at which it is totally reflected at the liquid interface. On the total reflection interface, the light energy is transmitted as an evanescent wave to the monolayer film 39 on the liquid surface and the adsorbed material, and light scattering 3 is generated by these. The energy signal detecting means 9 arranged on the liquid surface can detect the light scattering characteristics of the monomolecular film 39 and the adsorbed substance by performing the detection based on each of the above methods. FIG. 23 is an example for evaluating the light scattering characteristics under the liquid surface in the LB film forming apparatus. By measuring the scattered light by the scattering factor 40 in the liquid, the state of the unimolecular developing solution can be detected, and the film formation can be controlled based on this information. It should be noted that the irradiation light beam diameter is narrowed down as necessary to eliminate the influence of scattered light in the object to be inspected, and the irradiation light beam is scanned along a predetermined surface of the object to be inspected, thereby patterning each part information. You can also Then, the electric signal and the scanning signal thus obtained are processed by a computer and displayed on a display, so that the microscopic information can be captured as a pattern. [Effects of the Invention] As described above, according to the present invention, elastic scattering and inelastic scattering of light scattering, including a light scattering component having a large scattering angle, which has been conventionally difficult to measure, can be performed with high sensitivity and high sensitivity. Can measure with accuracy. Therefore, it is possible not only to detect the refractive index fluctuation in the object to be inspected and the presence of fine particles, but also to obtain information on the molecular structure theory, and it can also be applied to the LB film forming apparatus. Therefore, it makes an extremely large contribution to the analysis of physical properties.

[Brief description of drawings]

1 is a block diagram of the present invention, FIG. 2 is a principle diagram of the photoacoustic effect, FIG. 3 is a block diagram of a conventional example, FIG. 4, FIG. 7, and FIG.
FIG. 12, FIG. 12 and FIG. 15 are configuration diagrams of an embodiment of the present invention, and FIG.
Figure 6, Figure 8, Figure 8, Figure 10, Figure 11, Figure 13, and Figure 16
FIGS. 17, 17 and 19 to 23 are longitudinal sectional views of the energy signal detecting means of each embodiment, FIG. 14 is a configuration diagram of the photothermal deflection detecting means, and FIG. 18 is an absorption characteristic diagram of an absorbing substance. is there. 1 ... Object to be inspected, 2 ... Irradiation light beam, 3 ... Scattered light, 7 ... Photosensitive medium, 9,20, 31, 34 ... Energy signal detecting means, 10 ... Chopper, 11 ... Microphone cell , 12 …… Microphone, 15 …… Lock-in amplifier, 16 …… Recorder, 17 …… Partition (heat transfer substance), 18 …… Piezoelectric element, 19 …… Rear plate, 23 …… Thermocouple, 25 …… Photothermal Deflection detection means, 30 ... Position sensor, 32 ... Rear plate (heat transfer substance), 34 ... Infrared detector, 36 ... Filter, 37 ... Reflector, 38 ... Liquid, 39 ... Monomolecular film , 40 …… Scattering factor.

 ─────────────────────────────────────────────────── (72) Inventor Haruki Kawata 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Yoshinori Tomita 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Incorporated (72) Inventor Seisei Nishimura 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Takashi Nakagiri 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) References JP-A-55-39082 (JP, A) JP-A-54-12879 (JP, A) JP-A-56-168144 (JP, A) JP-A-58-143542 (JP, A) Kai 56-24693 (JP, A) Japanese Unexamined Patent Publication 51-98072 (JP, A) Actual exploitation 57-147749 (JP, U) Actual exploitation 59-155539 (JP, U)

Claims (15)

[Claims] 1. A scattered light measuring device for measuring light scattering properties of an object to be inspected, comprising: a light irradiating means for irradiating the object to be inspected with intermittent light; and a light irradiating means arranged near the object to be inspected. Of the scattered light emitted intermittently from the surface of the test object according to the physical properties of the test object by the irradiation light from the light irradiation means, absorbs the scattered light in a specific wavelength region and absorbs the scattered light To convert it into molecular vibration energy, an energy signal detecting means for detecting an intermittent molecular vibration energy signal generated in the photosensitive medium, and a frequency of the molecular vibration energy signal by a reference signal from the light irradiation means. A scattered light measuring device, comprising: a molecular vibration measuring means for measuring the molecular vibration energy by performing synchronous detection. 2. A scattered light measuring device for measuring the light-scattering physical properties of an object to be inspected, comprising: a light irradiating means for irradiating the object to be inspected with intermittent light; and a light irradiating means arranged near the object to be inspected. Of the scattered light emitted intermittently from the surface of the test object according to the physical properties of the test object by the irradiation light from the light irradiation means, absorbs the scattered light in a specific wavelength region and absorbs the scattered light To convert it into molecular vibration energy, an energy signal detecting means for detecting an intermittent molecular vibration energy signal generated in the photosensitive medium, and a frequency of the molecular vibration energy signal by a reference signal from the light irradiation means. And a molecular vibration measuring means for measuring the molecular vibration energy by performing synchronous detection, wherein the photosensitive medium has a plurality of layer structures for absorbing scattered light in different wavelength regions, The energy signal detecting means includes means for detecting the phase of the energy signal corresponding to each layer, and the molecular vibration measuring means further separates and measures the molecular vibration energy from each layer from the detected phase shift. A scattered light measuring device comprising means. 3. The scattered light measuring device according to claim 1, wherein the energy signal is a sound wave and the energy signal detecting means is a photoacoustic detecting means. 4. The scattered light measuring device according to claim 1, wherein the energy signal is an elastic wave and the energy signal detecting means is a piezoelectric detecting means. 5. The scattered light measuring device according to claim 1, wherein the energy signal is a conduction heat wave and the energy signal detecting means is heat detecting means. 6. The energy signal is a radiant heat wave, and the energy signal detecting means is a detecting means of optical deflection caused by the radiant heat.
The scattered light measuring device according to the item. 7. A photosensitive medium having different spectral absorption characteristics is used.
The scattered light measuring device according to claim 1, characterized in that a plurality of types of light absorbing substances are stacked. 8. The scattered light measuring device according to claim 1, wherein a predetermined filter is provided in a scattered light path between the object to be inspected and the photosensitive medium. 9. The scattered light measuring device according to claim 1, wherein a reflecting object is attached to the rear surface of the light absorbing surface of the photosensitive medium. 10. The scattered light measuring device according to claim 2, wherein the energy signal is a sound wave and the energy signal detecting means is a photoacoustic detecting means. 11. The scattered light measuring device according to claim 2, wherein the energy signal is an elastic wave and the energy signal detecting means is a piezoelectric detecting means. 12. The scattered light measuring device according to claim 2, wherein the energy signal is a conduction heat wave and the energy signal detecting means is heat detecting means. 13. The scattered light measuring device according to claim 2, wherein the energy signal is a radiant heat wave, and the energy signal detecting means is a detecting means of optical deflection caused by the radiant heat. 14. The scattered light measuring device according to claim 2, wherein a predetermined filter is provided in a scattered light path between the object to be inspected and the photosensitive medium. 15. The scattered light measuring device according to claim 2, wherein a reflecting object is attached to the rear surface of the light absorbing surface of the photosensitive medium.