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JPH0740537B2 - Capacitor manufacturing method - Google Patents
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JPH0740537B2 - Capacitor manufacturing method - Google Patents

Capacitor manufacturing method

Info

Publication number
JPH0740537B2
JPH0740537B2 JP62097804A JP9780487A JPH0740537B2 JP H0740537 B2 JPH0740537 B2 JP H0740537B2 JP 62097804 A JP62097804 A JP 62097804A JP 9780487 A JP9780487 A JP 9780487A JP H0740537 B2 JPH0740537 B2 JP H0740537B2
Authority
JP
Japan
Prior art keywords
electrode
thin film
organic thin
electrolytic polymerization
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62097804A
Other languages
Japanese (ja)
Other versions
JPS63262818A (en
Inventor
基 北野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62097804A priority Critical patent/JPH0740537B2/en
Publication of JPS63262818A publication Critical patent/JPS63262818A/en
Publication of JPH0740537B2 publication Critical patent/JPH0740537B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、各種の電子機器に用いられるコンデンサに関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitor used in various electronic devices.

従来の技術 誘電体として、プラスチックフィルム,金属化成膜,セ
ラミックス等を用いたコンデンサが使用されてきた。
2. Description of the Related Art Capacitors made of plastic films, metallized films, ceramics, etc. have been used as dielectrics.

発明が解決しようとする問題点 本発明は、前述のような誘電体層を組入れることなく、
電解重合により、陽電極に生成させた有機薄膜−電極一
体化膜を利用した新しいタイプのコンデンサ素子を提供
するものである。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention The present invention provides the following problems without incorporating a dielectric layer as described above.
It is intended to provide a new type capacitor element using an organic thin film-electrode integrated film formed on a positive electrode by electrolytic polymerization.

問題点を解決するための手段 本発明は、電解重合時に陰電極板を2分して設置し、こ
の両陰電極板間に1枚の陽電極板を設置して、この陽電
極板の両面上に均一なる有機薄膜を形成させる。次に、
こうして得た電極・膜一体化物の両方の膜面上にアルミ
ニウムを真空蒸着して、2層コンデンサの各々の一方の
電極となし、他面の電極は電解重合時の陽金属電極をそ
のまま共通電極として利用する。但し共通電極はアルミ
ニウムとは別種の金属を用いる。
Means for Solving the Problems In the present invention, a negative electrode plate is divided into two parts at the time of electrolytic polymerization, one positive electrode plate is installed between both negative electrode plates, and both surfaces of the positive electrode plate are arranged. A uniform organic thin film is formed on top. next,
Aluminum is vacuum-deposited on both film surfaces of the electrode / membrane integrated product thus obtained to form one electrode of each of the two-layer capacitors, and the other surface electrode is a positive metal electrode during electrolytic polymerization as it is as a common electrode. To use as. However, a metal different from aluminum is used for the common electrode.

又、上記の電極・膜一体化物は巻回型,積層型コンデン
サとして更に大容量素子化する場合には、1枚のみで達
成する。なお、特に巻回型素子とする場合や素子の小型
化が要求される場合には電解重合時の陽電極に箔等の巻
回可能な性状の薄板を用いる。
Further, the above electrode / membrane integrated product can be achieved by using only one sheet in the case of further increasing the capacity of a wound or laminated capacitor. In particular, when a wound element is used or when miniaturization of the element is required, a thin plate having a winding property such as a foil is used as a positive electrode during electrolytic polymerization.

電解重合膜は製膜後、純水,純溶媒等で洗條し、遊離の
塩,残留溶媒,未反応モノマー等を除去して、乾燥後に
前述の加工を行う。しかし、脱ドープ現象はこの様な操
作では起きることはない。
After the electrolytic polymerized film is formed, it is washed with pure water, a pure solvent, etc. to remove free salts, residual solvent, unreacted monomers, etc., and dried to carry out the above-mentioned processing. However, the dedoping phenomenon does not occur by such an operation.

電解重合に使用するモノマ類には、チオフェン,ピロー
ルフラン,セレノフェン,パラフェニレン,アントラセ
ン,アズレン,アニリン等分子内に少なくとも炭素環,
含窒素環,含セレン環,含酸素環,アミノ芳香族環,含
硫黄環等を含むがある。電解重合時に支持電解質として
用いる塩類には、ホウ弗化リチウム,パラトルエンスル
ホネート,過塩素酸銀,過塩素酸リチウム,塩化銅,ホ
ウ弗化テトラブチルアミン,過塩素酸テトラブチルアミ
ン等があり、これらを単独又は混合して用いる。溶媒に
はベンゾニトリル,アセトニトリル,ニトロベンゼン,
オルソジクロルベンゼン,ジメチルスルフェート,水等
がある。
Monomers used for electrolytic polymerization include thiophene, pyrrolefuran, selenophene, paraphenylene, anthracene, azulene, aniline, etc., at least a carbon ring in the molecule,
There are nitrogen-containing rings, selenium-containing rings, oxygen-containing rings, aminoaromatic rings, sulfur-containing rings and the like. Salts used as a supporting electrolyte during electrolytic polymerization include lithium borofluoride, paratoluene sulfonate, silver perchlorate, lithium perchlorate, copper chloride, tetrabutylamine borofluoride, tetrabutylamine perchlorate, and the like. Used alone or as a mixture. Benzonitrile, acetonitrile, nitrobenzene,
Ortho-dichlorobenzene, dimethyl sulfate, water, etc.

作用 本発明者は、電解重合により得られる導電体,半導体特
性領域の有機薄膜にアルミニウムを真空蒸着した系につ
いて種々の実験,研究の結果、他面にアルミニウムと別
種の金属を付着させた系では、電極作用により電極と半
導体界面部に極めて大容量で、かつ、もれ電流の小なる
コンデンサが得られることを確認した。
Action The inventors of the present invention have conducted various experiments and studies on a system in which aluminum is vacuum-deposited on a conductor obtained by electrolytic polymerization and an organic thin film in a semiconductor characteristic region. , It was confirmed that the electrode action provides a capacitor with extremely large capacity and small leakage current at the interface between the electrode and the semiconductor.

このため有機薄膜の体積の残りの大部分は対極導電材と
しての機能を果すことになる。更に電解重合時に陰電極
を2分して設置し、両陰電極間に1枚の陽電極を設置し
た重合方式を種々試みた結果、陽極両面に均一なる有機
薄膜が形成され、それらの膜特性が陽極の片面のみに形
成されるもののそれと同一であることを併せて確認し
た。又これらの電極・膜一体化物では、アルミニウムが
各々の片方電極となり、電解重合時の陽電極が共通電極
となった2層コンデンサが形成されており、そのコンデ
ンサ特性も前述の電極作用が完全に発揮されていること
を重ねて確認した。なお、陽電極としては、アルミニウ
ムより仕事関数の大なる金属を用いるのがよい。
Therefore, most of the remaining volume of the organic thin film functions as a counter electrode conductive material. Furthermore, as a result of various polymerization methods in which the negative electrode was divided into two parts during electrolytic polymerization and one positive electrode was installed between both negative electrodes, a uniform organic thin film was formed on both sides of the anode, and the film characteristics Was also confirmed to be the same as that formed on only one surface of the anode. In addition, in these electrode / membrane integrated products, a two-layer capacitor is formed in which aluminum serves as one of the electrodes and the positive electrode during electrolytic polymerization serves as the common electrode, and the capacitor characteristics are such that the above-mentioned electrode function is completely I confirmed again that it was being demonstrated. As the positive electrode, it is preferable to use a metal having a work function larger than that of aluminum.

実施例 実施例によるコンデンサの構成および特性を表に示す。Example The configuration and characteristics of the capacitor according to the example are shown in the table.

ここに用いたチオフェン,ピロール,アズレンの各重合
体は、それぞれアセトニトリル−ホウ弗化リチウム系,
アセトニトリル−パラトルエンスルホネート系,ベンゾ
ニトリル−過塩素酸リチウム系で電解重合させた膜厚5
μmのものであり、塩/溶媒(比),モノマ/溶媒
(比)はいずれも2g/180g(比)とした。コンデンサの
電極Bは、電解重合時の陽電極である。Ptスパッタとは
6μm厚のポリエチレンテレフタレートフィルムの両面
にPt層をスパッタ法で金属化したものであり、Ni箔,Co
箔はいずれも6μ厚の箔を用いた。又これらのコンデン
サは有極性であり、アルミニウム電極側を正とした時に
高い耐電圧が得られ、表中のもれ電流はこの場合の値を
記した。
The polymers of thiophene, pyrrole and azulene used here are acetonitrile-lithium borofluoride,
Film thickness 5 electro-polymerized by acetonitrile-paratoluene sulfonate system, benzonitrile-lithium perchlorate system
μm, and salt / solvent (ratio) and monomer / solvent (ratio) were both 2 g / 180 g (ratio). The electrode B of the capacitor is a positive electrode during electrolytic polymerization. Pt sputter is a 6 μm thick polyethylene terephthalate film with Pt layers metallized on both sides by sputtering. Ni foil, Co
The foil used was 6 μm thick. Further, these capacitors are polar, and a high withstand voltage is obtained when the aluminum electrode side is positive, and the leakage current in the table is the value in this case.

有機薄膜の膜厚は電解時の各種条件を設定すれば電気量
的に制御でき、均一超薄膜化して、1μm厚以下の長尺
膜,広巾膜も得ることができた。この膜厚でも、表中の
諸特性は維持されており、より特性の向上したものさえ
あった。
The film thickness of the organic thin film can be controlled in an electrical quantity by setting various conditions during electrolysis, and a uniform ultra thin film can be obtained to obtain a long film or a wide film having a thickness of 1 μm or less. Even with this film thickness, the various characteristics shown in the table were maintained, and even the characteristics were improved.

この超薄膜からなった2層コンデンサの一体化物を、他
に誘電体,電極材,スペーサ等と同時巻回,積層するこ
となく、1枚のみでの巻回型,積層型コンデンサを製造
し、優れた特性を得ることができた。
This two-layer capacitor integrated body consisting of ultra-thin film is not wound simultaneously with other dielectrics, electrode materials, spacers, etc. Excellent properties could be obtained.

又、他の重合体膜,電極,系でも同様な結果が得られ
た。
Similar results were obtained with other polymer membranes, electrodes and systems.

発明の効果 本発明によれば、電解重合で得られる有機薄膜の電極効
果により、大容量でもれ電流の小なる優れた2層コンデ
ンサが得られ、有機薄膜の超薄膜化により、更に小型,
軽量で乾式のコンデンサが得られる。又この膜・電極一
体化物はコンデンサの大容量素子化でも、1枚巻回構
造,1枚積層構造を採ることができ、極めて効率的な製造
方式が達成できる。
EFFECTS OF THE INVENTION According to the present invention, an excellent two-layer capacitor having a large capacity and a small leakage current can be obtained due to the electrode effect of the organic thin film obtained by electrolytic polymerization, and further miniaturization can be achieved by making the organic thin film ultra thin.
A lightweight and dry type capacitor can be obtained. In addition, this membrane / electrode integrated product can have a one-roll structure or a one-layer structure even if it is used as a large-capacity capacitor element, and an extremely efficient manufacturing method can be achieved.

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01G 4/18 321 9174−5E Continuation of front page (51) Int.Cl. 6 Identification number Office reference number FI technical display location H01G 4/18 321 9174-5E

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】電解重合時に陰電極板を2分して設置し、
前記陰電極板間にアルミニウム以外の金属よりなる1枚
の陽電極板を設置し、前記陽電極板の両面上に電解重合
により有機薄膜を形成した後、前記有機薄膜を洗浄,乾
燥し、次いで前記有機薄膜の表面にアルミニウムを蒸着
し、前記アルミニウムを一方の電極とし、前記陽電極板
を他方の電極とすることを特徴とするコンデンサの製造
方法。
1. A negative electrode plate is divided into two parts at the time of electrolytic polymerization,
One positive electrode plate made of a metal other than aluminum is placed between the negative electrode plates, an organic thin film is formed on both surfaces of the positive electrode plate by electrolytic polymerization, the organic thin film is washed and dried, and then Aluminum is vapor-deposited on the surface of the organic thin film, the aluminum is used as one electrode, and the positive electrode plate is used as the other electrode.
JP62097804A 1987-04-21 1987-04-21 Capacitor manufacturing method Expired - Lifetime JPH0740537B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62097804A JPH0740537B2 (en) 1987-04-21 1987-04-21 Capacitor manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62097804A JPH0740537B2 (en) 1987-04-21 1987-04-21 Capacitor manufacturing method

Publications (2)

Publication Number Publication Date
JPS63262818A JPS63262818A (en) 1988-10-31
JPH0740537B2 true JPH0740537B2 (en) 1995-05-01

Family

ID=14201967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62097804A Expired - Lifetime JPH0740537B2 (en) 1987-04-21 1987-04-21 Capacitor manufacturing method

Country Status (1)

Country Link
JP (1) JPH0740537B2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140410A (en) * 1985-12-16 1987-06-24 昭和電工株式会社 Metallized plastic film capacitor

Also Published As

Publication number Publication date
JPS63262818A (en) 1988-10-31

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