JPH0747809B2 - Manufacturing method of high-purity copper wire consisting of coarse crystal grains - Google Patents
Manufacturing method of high-purity copper wire consisting of coarse crystal grainsInfo
- Publication number
- JPH0747809B2 JPH0747809B2 JP3042495A JP4249591A JPH0747809B2 JP H0747809 B2 JPH0747809 B2 JP H0747809B2 JP 3042495 A JP3042495 A JP 3042495A JP 4249591 A JP4249591 A JP 4249591A JP H0747809 B2 JPH0747809 B2 JP H0747809B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- purity
- annealing
- crystal grains
- purity copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/015—Manufacture or treatment of bond wires
- H10W72/01565—Thermally treating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5525—Materials of bond wires comprising metals or metalloids, e.g. silver comprising copper [Cu]
Landscapes
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Conductive Materials (AREA)
- Metal Extraction Processes (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、粗大結晶粒からなる高
純度銅線の製造法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a high-purity copper wire composed of coarse crystal grains.
【0002】[0002]
【従来の技術】従来より、高純度銅はボンディングワイ
ヤーや金属・半導体コンタクトなどエレクトロニクス用
としてのみならず、超電導、超高電圧、超高真空または
音響機器などの導電材料、極低温機器用冷却媒体または
高耐力レーザーミラー等多くの先端技術分野において、
その性能を支配する材料の一つとして広く用いられてき
た。なかでも音響機器の導電材料であるケーブル線、リ
ード線、コード部品、端子およびコネクター等は、銅の
品質が音質に影響を与えることが知られている。2. Description of the Related Art Conventionally, high-purity copper has been used not only for electronics such as bonding wires and metal / semiconductor contacts, but also for conductive materials such as superconductivity, ultra-high voltage, ultra-high vacuum or acoustic equipment, and cooling media for cryogenic equipment. Or in many advanced technology fields such as high-proof laser mirrors,
It has been widely used as one of the materials that control its performance. In particular, it is known that the quality of copper affects the sound quality of cable wires, lead wires, cord parts, terminals, connectors, etc., which are conductive materials for audio equipment.
【0003】例えば、オーディオ機器やビジュアル機器
の配線に使用される銅線においては、特に銅の純度およ
び結晶粒が音質に影響を与える。すなわち、銅線中にお
ける非金属介在物の硫黄や、導電率の高い銀などの含有
量が少ないほど、また、結晶粒界が少ないほど(結晶粒
が粗大化しているほど)音質の劣化は小さくなる。For example, in a copper wire used for wiring audio equipment and visual equipment, the purity and crystal grains of copper particularly affect sound quality. That is, the lower the content of sulfur as a non-metallic inclusion in the copper wire and the higher conductivity of silver, and the smaller the number of crystal grain boundaries (the coarser the crystal grains are), the less the deterioration of sound quality. Become.
【0004】従来、高純度銅線の製造は、材料に99.
99%以上の高純度銅を用い、熱間加工法により線材を
製造する方法、または鋳造法によって純度が99.99
%以上の鋳造銅線を作り、これを所望の線径まで冷間伸
線加工する方法が用いられてきた。前者の方法による
と、再結晶温度以上の熱間での加工を繰り返し、比較的
微細な結晶粒が集合した再結晶を得た後、冷間伸線加工
において均一な歪を与え、さらに高温で焼鈍することに
より充分に結晶を成長させることができる。しかしなが
ら、熱間加工を採用すると製品中への不純物の混入が避
けられず、材料の純度を維持した線材は製造することが
できなかった。一方後者の方法によると、熱間加工を行
わないため製品中への不純物の混入は避けられるが、結
晶方位の異なる比較的大きな鋳造組織を再結晶温度以下
の温度で冷間加工しているため、各結晶粒に対して均一
な歪を与えることができなかった。そのため、これを高
温焼鈍しても各結晶粒における再結晶の挙動が相互に異
なってしまい、粗大結晶粒のみからなる組織とすること
が極めて困難であった。Conventionally, a high-purity copper wire has been manufactured by using 99.
Using 99% or higher high-purity copper, the purity is 99.99 by the method of manufacturing a wire rod by the hot working method or the casting method.
%, There has been used a method of forming a cast copper wire of at least 100% and cold drawing it to a desired wire diameter. According to the former method, hot working at a temperature higher than the recrystallization temperature is repeated to obtain a recrystallized material in which relatively fine crystal grains are aggregated. Crystals can be sufficiently grown by annealing. However, if hot working is adopted, it is inevitable that impurities will be mixed into the product, and a wire rod in which the purity of the material is maintained cannot be manufactured. On the other hand, according to the latter method, since hot working is not performed, it is possible to avoid inclusion of impurities in the product, but since a relatively large cast structure with different crystal orientations is cold worked at a temperature below the recrystallization temperature. However, it was not possible to give a uniform strain to each crystal grain. Therefore, even if this is annealed at a high temperature, the recrystallization behavior in each crystal grain is different from each other, and it has been extremely difficult to obtain a structure composed of only coarse crystal grains.
【0005】また、特願平1−269015および特願
平1−269016には粗大結晶粒からなる高純度銅線
の製造法が開示されているが、これら公報に開示されて
いる方法によると、製品中への不純物の混入の防止およ
び結晶粒の粗大化については目的を達成できているが、
線材が相互に溶着してしまうという問題点があった。Further, Japanese Patent Application Nos. 1-269015 and 1-269016 disclose a method for producing a high-purity copper wire composed of coarse crystal grains. According to the methods disclosed in these publications, Although we have achieved the objectives of preventing impurities from entering the product and coarsening the crystal grains,
There is a problem that the wire rods are welded to each other.
【0006】[0006]
【発明が解決しようとする課題】本発明は、上述従来の
技術の問題点を解決し、素材とした高純度銅の高純度特
性を保持し、かつ粗大結晶粒からなる高純度銅線を、線
材同士が溶着してしまうことなく製造し得る方法の提供
を目的としている。DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and provides a high-purity copper wire made of coarse crystal grains which retains the high-purity characteristics of the high-purity copper used as a material. It is an object of the present invention to provide a method capable of manufacturing wires without welding them together.
【0007】[0007]
【課題を解決するための手段】本発明者等は、上記課題
を解決するため鋭意研究したところ、高純度鋳造材を用
いて熱間加工を行わずに、一次冷間伸線加工および適性
雰囲気下における中間焼鈍を行うことにより、特定方位
を持った微細な一次再結晶を得、さらに二次冷間伸線加
工および適性雰囲気下における所定時間の連続焼鈍を行
うことにより、高純度で粗大化した二次再結晶が得られ
ることを見い出し本発明を達成することができた。Means for Solving the Problems The inventors of the present invention have made earnest studies to solve the above-mentioned problems. As a result, primary cold wire drawing and suitable atmosphere without hot working using a high-purity cast material. By performing intermediate annealing below, fine primary recrystallization with a specific orientation is obtained, and secondary cold wire drawing and continuous annealing in a suitable atmosphere for a predetermined period of time make it coarse with high purity. It was found that the secondary recrystallization described above was obtained, and the present invention could be achieved.
【0008】すなわち、本発明は、銀と硫黄の合計含有
量が0.5ppm 以下で、純度が99.9999%以上の
高純度銅からなる鋳造材料を熱間加工を省略して冷間伸
線加工することにより該高純度を保持した線材を得る方
法であって、該鋳造材料を加工率60%〜99.9%で
一次冷間伸線加工した後、不活性ガス雰囲気下または真
空中で150℃〜600℃の温度範囲で中間焼鈍し、次
いで最終製品線径まで二次冷間伸線加工した後、不活性
ガス雰囲気下または真空中で、450℃〜950℃の温
度範囲で2秒以上連続焼鈍を行うことを特徴とする粗大
結晶粒からなる高純度銅線の製造法を提供するものであ
る。That is, according to the present invention, a casting material made of high-purity copper having a total content of silver and sulfur of 0.5 ppm or less and a purity of 99.9999% or more is drawn by cold drawing without hot working. A method of obtaining a wire rod that retains the high purity by processing, wherein the casting material is subjected to primary cold wire drawing at a working rate of 60% to 99.9%, and then in an inert gas atmosphere or in a vacuum. After intermediate annealing in a temperature range of 150 ° C to 600 ° C, and then secondary cold drawing to the final product wire diameter, in an inert gas atmosphere or in a vacuum, in a temperature range of 450 ° C to 950 ° C for 2 seconds. The present invention provides a method for producing a high-purity copper wire made of coarse crystal grains, characterized by performing continuous annealing.
【0009】また、本発明における中間焼鈍は、前記焼
鈍温度に10〜180分保持した後、急冷して行うこと
が好ましく、これにより一層高品質の製品を得ることが
できる。 なお、本発明において、一次冷間伸線および
二次冷間伸線の2回の冷間伸線加工で最終製品線径まで
減少させることが困難な場合、2回目の冷間伸線の後、
上記同様の中間焼鈍を行ってから最終冷間伸線を行い、
さらに最終焼鈍を行えば良い。The intermediate annealing in the present invention is preferably carried out by holding at the annealing temperature for 10 to 180 minutes and then rapidly cooling, whereby a higher quality product can be obtained. In the present invention, when it is difficult to reduce the final product wire diameter by two cold drawing processes of primary cold drawing and secondary cold drawing, after the second cold drawing, ,
After performing the intermediate annealing similar to the above, perform the final cold wire drawing,
Further, final annealing may be performed.
【0010】[0010]
【作用】本発明では、前記のごとき高純度鋳造材を素材
とし、熱間加工を行わずに適性雰囲気下(真空中または
不活性ガス雰囲気下)における焼鈍および冷間伸線加工
によって線材を得ているため、不純物の混入および酸化
が抑えられ、銀および硫黄の合計含有量が0.5ppm 以
下であり、純度99.9999%以上の高純度銅線を得
ることができる。なお、やむなく大気中で焼鈍工程を行
う場合は、酸洗工程にて酸化被膜を落としてから行うと
良い。In the present invention, a wire having a high purity casting material as described above is obtained by annealing and cold drawing in a suitable atmosphere (in vacuum or in an inert gas atmosphere) without hot working. Therefore, the mixture of impurities and the oxidation are suppressed, the total content of silver and sulfur is 0.5 ppm or less, and a high-purity copper wire having a purity of 99.9999% or more can be obtained. When the annealing step is unavoidably performed in the air, it is preferable to remove the oxide film in the pickling step.
【0011】本発明によると、まず鋳造組織を持つ鋳造
材(好ましくは連鋳材)に対して、熱間加工を行わず、
冷間伸線(一次冷間伸線)加工および中間焼鈍を行うこ
とにより、鋳造組織を完全につぶし、特定方位を持った
微細な再結晶組織(一次再結晶)を得ている。この一次
再結晶は、微細であるほど以後の工程における結晶方位
の制御および粗大化を容易にするため、上記一次冷間伸
線の加工率を充分に高くする必要がある。しかしなが
ら、上記加工率が99.9%を超えると、中間焼鈍にお
いて断線の危険性が増加してしまい、60%未満では中
間焼鈍における再結晶温度が高くなり微細な再結晶粒を
充分に得ることができなくなってしまうため、その範囲
を60〜99.9%とした。According to the present invention, a cast material having a cast structure (preferably continuous cast material) is not subjected to hot working,
By performing cold wire drawing (primary cold wire drawing) processing and intermediate annealing, the cast structure is completely crushed and a fine recrystallized structure (primary recrystallization) having a specific orientation is obtained. The finer the primary recrystallization, the easier the control of the crystal orientation and the coarsening in the subsequent steps, so that the working rate of the primary cold drawing must be sufficiently high. However, if the working rate exceeds 99.9%, the risk of disconnection increases in the intermediate annealing, and if it is less than 60%, the recrystallization temperature in the intermediate annealing becomes high and fine recrystallized grains can be sufficiently obtained. Therefore, the range is set to 60 to 99.9%.
【0012】上記中間焼鈍における焼鈍温度は、150
℃が高純度銅の焼鈍温度の下限であるため、それ以上の
温度を必要とするが、600℃を超えると結晶粒が急激
に増大し、この段階で二次再結晶が形成されてしまうた
め150〜600℃の範囲に限定した。また、上記温度
で保持する時間は、焼鈍温度とも関係するが、10分以
内では充分な再結晶を得ることができず、長すぎても結
晶粒が粗大化してしまうため、10分〜180分とし
た。なお、上記条件のもと焼鈍した後、中間焼鈍温度か
ら急冷することにより結晶粒の成長が抑えられるため、
得られた微細な一次再結晶の組織をより確実に維持する
ことができる。The annealing temperature in the intermediate annealing is 150.
Since ℃ is the lower limit of the annealing temperature of high-purity copper, a temperature higher than that is required, but if it exceeds 600 ° C., the crystal grains increase sharply and secondary recrystallization is formed at this stage. The range was limited to 150 to 600 ° C. Further, the time of holding at the above temperature is also related to the annealing temperature, but within 10 minutes, sufficient recrystallization cannot be obtained, and if it is too long, the crystal grains become coarse, so that 10 minutes to 180 minutes. And After annealing under the above conditions, the growth of crystal grains can be suppressed by quenching from the intermediate annealing temperature,
The obtained fine primary recrystallization structure can be more reliably maintained.
【0013】次に、得られた微細な一次再結晶の焼鈍材
に対して、製品線径まで冷間伸線(二次冷間伸線)加工
を行って適切な歪みを付与し、さらに不活性ガス雰囲気
下または真空下において450℃以上の温度で、2秒以
上連続焼鈍(最終焼鈍)を行うことによって二次再結晶
粒を粗大化させている。このようにして結晶粒を粗大化
させているため、細線を製造する場合においては、その
結晶の最大径が線径を超えるような線材を得ることも可
能である。Next, the obtained fine primary recrystallized annealed material is subjected to cold wire drawing (secondary cold wire drawing) up to the product wire diameter to give an appropriate strain, and further The secondary recrystallized grains are coarsened by carrying out continuous annealing (final annealing) for 2 seconds or more at a temperature of 450 ° C. or higher under an active gas atmosphere or under vacuum. Since the crystal grains are coarsened in this way, it is also possible to obtain a wire rod in which the maximum diameter of the crystal exceeds the wire diameter in the case of producing a thin wire.
【0014】なお、上記二次冷間伸線加工の加工率は、
最終線径にもよるが80%以上であれば充分である。ま
た、上記最終焼鈍における温度は、950℃を超えると
線材が軟化して断線することがあるため、その温度範囲
は450〜950℃とした。The working ratio of the secondary cold wire drawing is
Depending on the final wire diameter, 80% or more is sufficient. In addition, the temperature in the final annealing is in the range of 450 to 950 ° C because the wire may soften and break if the temperature exceeds 950 ° C.
【0015】本発明における最終焼鈍は、バッチ方式に
よらず連続方式により行っているため、最終焼鈍工程時
における線材同士の密着性が低下し、線材が相互に溶着
してしまうことが防止される。Since the final annealing in the present invention is performed by a continuous method rather than a batch method, the adhesion between the wire rods during the final annealing step is reduced, and the wire rods are prevented from being welded to each other. .
【0016】以下、実施例により本発明をさらに詳細に
説明する。しかし本発明の範囲は、以下の実施例により
制限されるものではない。Hereinafter, the present invention will be described in more detail with reference to Examples. However, the scope of the present invention is not limited by the following examples.
【0017】[0017]
【実施例1】本発明の粗大結晶粒からなる高純度銅線の
製造法の一例について以下に説明する。Example 1 An example of a method for producing a high-purity copper wire made of coarse crystal grains of the present invention will be described below.
【0018】まず、連続鋳造により製造された純度が9
9.9999%以上、および銀と硫黄の合計含有量が
0.5ppm 以下の高純度銅鋳造線を、直径2mmまで(加
工率約96.7%)冷間伸線(一次冷間伸線)加工し、
窒素ガス雰囲気下で300℃×1時間の焼鈍(中間焼
鈍)を行った。なお、この中間焼鈍における線材の焼鈍
温度からの冷却は、水冷方式によって急冷した。First, the purity produced by continuous casting is 9
Cold drawing (primary cold drawing) of high purity copper casting wire with a total content of silver and sulfur of 0.5ppm or less to 9.9999% or more up to a diameter of 2 mm (working rate of about 96.7%) Processed,
Annealing (intermediate annealing) was performed at 300 ° C. for 1 hour in a nitrogen gas atmosphere. The cooling from the annealing temperature of the wire rod in this intermediate annealing was performed by a water cooling method.
【0019】次に、上記焼鈍材を直径120μmまで
(加工率約99.6%)冷間伸線(二次冷間伸線)加工
し、窒素ガス雰囲気下で650℃×8秒間の連続焼鈍
(最終焼鈍)を行った。Next, the above-mentioned annealed material is cold-drawn (secondary cold-drawn) to a diameter of 120 μm (working rate of about 99.6%) and continuously annealed at 650 ° C. for 8 seconds in a nitrogen gas atmosphere. (Final annealing) was performed.
【0020】このようにして得られた線材の結晶組織を
調べたところ、平均結晶粒径60μmの巨大結晶粒(粗
大結晶粒)であった。図1に得られた線材における線軸
と直交する断面の顕微鏡写真を筆写したものを示した。When the crystal structure of the wire thus obtained was examined, it was found to be huge crystal grains (coarse crystal grains) having an average crystal grain size of 60 μm. FIG. 1 shows a copy of a micrograph of a cross section of the obtained wire rod which is orthogonal to the wire axis.
【0021】[0021]
【実施例2】本発明の粗大結晶粒からなる高純度銅線の
製造法の別の一例について以下に説明する。Example 2 Another example of the method for producing a high-purity copper wire made of coarse crystal grains of the present invention will be described below.
【0022】本実施例では、中間焼鈍において、線材を
焼鈍温度から冷却する際、急冷せずに徐冷したこと以外
は実施例1と同様に行った。In this example, the intermediate annealing was carried out in the same manner as in Example 1 except that the wire material was cooled from the annealing temperature and was gradually cooled without being rapidly cooled.
【0023】その結果、得られた最終線材の結晶組織を
調べたところ、平均結晶粒径50μmの巨大結晶粒(粗
大結晶粒)であった。図2に得られた線材における線軸
と直交する断面の顕微鏡写真を筆写したものを示した。As a result, when the crystal structure of the obtained final wire was examined, it was found to be huge crystal grains (coarse crystal grains) having an average crystal grain size of 50 μm. FIG. 2 shows a photomicrograph of a cross section of the obtained wire rod which is orthogonal to the line axis.
【0024】[0024]
【比較例1】本発明の粗大結晶粒からなる高純度銅線の
製造法に対する比較例を以下に示す。COMPARATIVE EXAMPLE 1 A comparative example to the method for producing a high-purity copper wire made of coarse crystal grains of the present invention is shown below.
【0025】連続焼鈍(最終焼鈍)を、窒素ガス雰囲気
下で400℃×8秒間行ったこと以外は実施例1と同様
に行った。The same procedure as in Example 1 was carried out except that continuous annealing (final annealing) was performed at 400 ° C. for 8 seconds in a nitrogen gas atmosphere.
【0026】その結果、得られた最終線材の結晶組織を
調べたところ、結晶粒の成長が悪く、平均結晶粒径が1
0μmしかなく、しかも混粒であった。As a result, when the crystal structure of the obtained final wire was examined, the growth of crystal grains was poor and the average crystal grain size was 1
It was only 0 μm, and it was a mixed grain.
【0027】[0027]
【比較例2】本発明の粗大結晶粒からなる高純度銅線の
製造法に対する別の比較例を以下に示す。 中間焼鈍
を、窒素ガス雰囲気下で100℃×1時間行ったこと以
外は実施例1と同様に行った。Comparative Example 2 Another comparative example with respect to the method for producing a high-purity copper wire made of coarse crystal grains of the present invention is shown below. It carried out like Example 1 except having performed intermediate annealing at 100 ° C x 1 hour under nitrogen gas atmosphere.
【0028】その結果、得られた最終線材の結晶組織を
調べたところ、平均結晶粒径が2μmの微細な結晶粒で
あった。As a result, when the crystal structure of the obtained final wire was examined, it was found that the average crystal grain size was 2 μm and that it was a fine crystal grain.
【0029】[0029]
【比較例3】本発明の粗大結晶粒からなる高純度銅線の
製造法に対するさらに別の比較例を以下に示す。COMPARATIVE EXAMPLE 3 Yet another comparative example with respect to the method for producing a high-purity copper wire made of coarse crystal grains of the present invention is shown below.
【0030】中間焼鈍後得られた焼鈍材を、直径7.5
mmまで(加工率約54%)一次冷間伸線加工したこと以
外は実施例1と同様に行った。The annealed material obtained after the intermediate annealing has a diameter of 7.5.
The same procedure as in Example 1 was performed except that the primary cold drawing was performed up to mm (working rate: about 54%).
【0031】その結果、得られた最終線材の結晶組織を
調べたところ、平均結晶粒径が3〜4μmの微細な結晶
粒であった。As a result, when the crystal structure of the obtained final wire was examined, it was found to be fine crystal grains having an average crystal grain size of 3 to 4 μm.
【0032】[0032]
【比較例4】本発明の粗大結晶粒からなる高純度銅線の
製造法に対するさらに別の比較例を以下に示す。COMPARATIVE EXAMPLE 4 Yet another comparative example with respect to the method for producing a high-purity copper wire made of coarse crystal grains of the present invention is shown below.
【0033】中間焼鈍を行わないこと以外は実施例1と
同様に行った。The procedure of Example 1 was repeated except that the intermediate annealing was not performed.
【0034】その結果、得られた最終線材の結晶組織を
調べたところ、平均結晶粒径が2μmの微細な結晶粒で
あった。図3に得られた線材における線軸と直交する断
面の顕微鏡写真を筆写したものを示した。As a result, when the crystal structure of the obtained final wire was examined, it was found that the average crystal grain size was 2 μm. FIG. 3 shows a copy of a micrograph of the cross section of the wire rod obtained, which is orthogonal to the wire axis.
【0035】[0035]
【発明の効果】本発明の開発により、銀と硫黄の合計含
有量が0.5ppm 以下、および純度が99.9999%
以上という素材の超高純度特性を保持したまま、粗大結
晶粒からなる高純度銅線を製造することができるように
なった。また、本発明によると、線材が相互に溶着して
しまうことがなくなったため、生産性が著しく向上し
た。As a result of the development of the present invention, the total content of silver and sulfur is 0.5 ppm or less, and the purity is 99.9999%.
It has become possible to manufacture a high-purity copper wire composed of coarse crystal grains while maintaining the ultra-high-purity characteristics of the above materials. Further, according to the present invention, the wires are not welded to each other, so that the productivity is remarkably improved.
【図1】本発明の粗大結晶粒からなる高純度銅線の製造
法の一例に基づいて製造された高純度銅線の結晶構造を
示したものであって、線軸に直交する断面の顕微鏡写真
を筆写したものである。FIG. 1 shows a crystal structure of a high-purity copper wire produced based on an example of a method for producing a high-purity copper wire composed of coarse crystal grains of the present invention, and is a micrograph of a cross section orthogonal to a line axis. Is a copy of.
【図2】本発明の粗大結晶粒からなる高純度銅線の製造
法の別の一例に基づいて製造された高純度銅線の結晶構
造を示したものであって、線軸に直交する断面の顕微鏡
写真を筆写したものである。FIG. 2 shows a crystal structure of a high-purity copper wire manufactured according to another example of the method for manufacturing a high-purity copper wire composed of coarse crystal grains of the present invention, showing a cross-section of a cross section orthogonal to the line axis. It is a copy of a micrograph.
【図3】本発明の粗大結晶粒からなる高純度銅線の製造
法の比較例に基づいて製造された高純度銅線の結晶構造
を示したものであって、線軸に直交する断面の顕微鏡写
真を筆写したものである。FIG. 3 shows a crystal structure of a high-purity copper wire manufactured based on a comparative example of a method for manufacturing a high-purity copper wire composed of coarse crystal grains of the present invention, and is a microscope of a cross section orthogonal to a line axis. It is a copy of a photo.
1‥‥‥結晶粒 1 crystal grain
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平1−136950(JP,A) 特開 昭60−3808(JP,A) 特開 平3−134143(JP,A) 特開 平3−134142(JP,A) ─────────────────────────────────────────────────── --- Continuation of the front page (56) References JP-A-1-136950 (JP, A) JP-A-60-3808 (JP, A) JP-A-3-134143 (JP, A) JP-A-3- 134142 (JP, A)
Claims (3)
で、純度が99.9999%以上の高純度銅からなる鋳
造材料を熱間加工を省略して冷間伸線加工することによ
り該高純度を保持した線材を得る方法であって、該鋳造
材料を加工率60%〜99.9%で一次冷間伸線加工し
た後、不活性ガス雰囲気下または真空中で150℃〜6
00℃の温度範囲で中間焼鈍し、次いで最終製品線径ま
で二次冷間伸線加工した後、不活性ガス雰囲気下または
真空中で、450℃〜950℃の温度範囲で2秒以上連
続焼鈍を行うことを特徴とする粗大結晶粒からなる高純
度銅線の製造法。1. A casting material made of high-purity copper having a total content of silver and sulfur of 0.5 ppm or less and a purity of 99.9999% or more is subjected to cold wire drawing without hot working. A method for obtaining a wire having a high purity, wherein the casting material is subjected to primary cold wire drawing at a working rate of 60% to 99.9%, and then 150 ° C to 6 ° C in an inert gas atmosphere or in a vacuum.
After intermediate annealing in the temperature range of 00 ° C, then secondary cold drawing to the final product wire diameter, continuous annealing in the temperature range of 450 ° C to 950 ° C for 2 seconds or more in an inert gas atmosphere or in vacuum. A method for producing a high-purity copper wire composed of coarse crystal grains, characterized in that
で、純度が99.9999%以上の高純度銅からなる鋳
造材料を熱間加工を省略して冷間伸線加工することによ
り該高純度を保持した線材を得る方法であって、該鋳造
材料を加工率60%〜99.9%で一次冷間伸線加工し
た後、不活性ガス雰囲気下または真空中で150℃〜6
00℃の温度範囲で中間焼鈍し、次いで再び加工率60
%〜99.9%で二次冷間伸線加工した後、不活性ガス
雰囲気下または真空中で150℃〜600℃の温度範囲
で二次中間焼鈍し、次いで最終製品まで三次冷間伸線加
工した後、不活性ガス雰囲気下または真空中で、450
℃〜950℃の温度範囲で2秒以上連続焼鈍を行うこと
を特徴とする粗大結晶粒からなる高純度銅線の製造法。2. A casting material made of high-purity copper having a total content of silver and sulfur of 0.5 ppm or less and a purity of 99.9999% or more is subjected to cold wire drawing without hot working. A method for obtaining a wire having a high purity, wherein the casting material is subjected to primary cold wire drawing at a working rate of 60% to 99.9%, and then 150 ° C to 6 ° C in an inert gas atmosphere or in a vacuum.
Intermediate annealing in a temperature range of 00 ° C, and then a working rate of 60
% 99.9% secondary cold drawing, then secondary intermediate annealing in the temperature range of 150 ° C to 600 ° C in an inert gas atmosphere or in vacuum, and then tertiary cold drawing until the final product. After processing, in an inert gas atmosphere or in vacuum, 450
A method for producing a high-purity copper wire composed of coarse crystal grains, which comprises continuously annealing for 2 seconds or more in a temperature range of ℃ to 950 ℃.
〜180分保持した後急冷することによって行う請求項
1または2記載の高純度銅線の製造法。3. The method for producing a high-purity copper wire according to claim 1, wherein the intermediate annealing is performed by holding at the annealing temperature for 10 minutes to 180 minutes and then quenching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3042495A JPH0747809B2 (en) | 1991-02-14 | 1991-02-14 | Manufacturing method of high-purity copper wire consisting of coarse crystal grains |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3042495A JPH0747809B2 (en) | 1991-02-14 | 1991-02-14 | Manufacturing method of high-purity copper wire consisting of coarse crystal grains |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04259359A JPH04259359A (en) | 1992-09-14 |
| JPH0747809B2 true JPH0747809B2 (en) | 1995-05-24 |
Family
ID=12637641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3042495A Expired - Fee Related JPH0747809B2 (en) | 1991-02-14 | 1991-02-14 | Manufacturing method of high-purity copper wire consisting of coarse crystal grains |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0747809B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8192596B2 (en) | 2004-01-29 | 2012-06-05 | Jx Nippon Mining & Metals Corporation | Ultrahigh-purity copper and process for producing the same |
| KR101006035B1 (en) * | 2005-06-15 | 2011-01-06 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | Ultra high purity copper, a method of manufacturing the same, and a bonding wire made of ultra high purity copper |
| JP5053456B1 (en) * | 2011-12-28 | 2012-10-17 | 田中電子工業株式会社 | High purity copper wire for semiconductor device connection |
| WO2014156027A1 (en) * | 2013-03-27 | 2014-10-02 | 三菱電線工業株式会社 | Cooling system |
| CN114944253B (en) * | 2022-06-08 | 2023-10-20 | 远东电缆有限公司 | Preparation method of 63.5% IACS (aluminum alloy conductor) high-conductivity hard aluminum conductor and conductor |
| CN116574875A (en) * | 2023-04-14 | 2023-08-11 | 安徽鑫科铜业有限公司 | A kind of preparation method of fine-grained brass strip |
-
1991
- 1991-02-14 JP JP3042495A patent/JPH0747809B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04259359A (en) | 1992-09-14 |
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