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JPH0748532B2 - Optical sensor package - Google Patents
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JPH0748532B2 - Optical sensor package - Google Patents

Optical sensor package

Info

Publication number
JPH0748532B2
JPH0748532B2 JP62161866A JP16186687A JPH0748532B2 JP H0748532 B2 JPH0748532 B2 JP H0748532B2 JP 62161866 A JP62161866 A JP 62161866A JP 16186687 A JP16186687 A JP 16186687A JP H0748532 B2 JPH0748532 B2 JP H0748532B2
Authority
JP
Japan
Prior art keywords
solid
optical sensor
state
package
photosensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62161866A
Other languages
Japanese (ja)
Other versions
JPS647561A (en
Inventor
茂 遠山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62161866A priority Critical patent/JPH0748532B2/en
Publication of JPS647561A publication Critical patent/JPS647561A/en
Publication of JPH0748532B2 publication Critical patent/JPH0748532B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/804Containers or encapsulations

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Light Receiving Elements (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は半導体デバイスのなかでも特に光センサを搭載
するパッケージに関する。
DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a package in which, among semiconductor devices, an optical sensor is mounted.

(従来の技術) 第3図(a)は従来のこの種のパッケージの断面図、同
図(b)はそのパッケージの正面図である。第3図のパ
ッケージには、裏面照射型で表面側からボンディング配
線される構造の固体光センサが搭載される。このパッケ
ージは絶縁性の枠体15とボンディングパッド6と導体7
とからなる。枠体15には固体光センサより小さく、かつ
固体光センサの受光領域に入射すべき光を遮らないだけ
の大きさの穴が中央部に形成されている。光入射面では
ない側(第3図(a)では上側)の前記穴の周囲には外
周部より窪んだ2つの段差のある凹部が形成されてい
る。その枠体15の一段目の窪み平坦部分にボンディング
パッド6が設けられ、ボンディングパッド6と電気的に
繋がる導体7が前記枠体15内を通して外部に引き出され
ている。枠体の二段目の窪みは固体光センサより広い。
その固体光センサ11が第4図に示すように二段目の窪み
平坦部分に裏面を光入射側に向けて接着され、固体光セ
ンサ11のボンディングパッドとパッケージのボンディン
グパッド6との間が接続ワイヤ12で配線されてパッケー
ジと固体光センサ11との組立てがなされる。
(Prior Art) FIG. 3 (a) is a sectional view of a conventional package of this type, and FIG. 3 (b) is a front view of the package. The package of FIG. 3 is mounted with a solid-state optical sensor of a backside illumination type, which has a structure in which bonding wiring is performed from the front side. This package includes an insulating frame 15, a bonding pad 6 and a conductor 7.
Consists of. In the frame body 15, a hole smaller than the solid-state photosensor and having a size that does not block light to be incident on the light-receiving region of the solid-state photosensor is formed in the central portion. Around the hole on the side that is not the light incident surface (the upper side in FIG. 3A), there are formed two stepped recesses that are recessed from the outer peripheral portion. The bonding pad 6 is provided on the flat portion of the first hollow of the frame body 15, and the conductor 7 electrically connected to the bonding pad 6 is drawn out through the frame body 15. The second recess of the frame is wider than the solid-state photosensor.
As shown in FIG. 4, the solid-state optical sensor 11 is adhered to the flat portion of the recess of the second stage with the back surface facing the light incident side, and the bonding pad of the solid-state optical sensor 11 and the bonding pad 6 of the package are connected. The package and the solid-state optical sensor 11 are assembled by wiring with the wire 12.

(発明が解決しようとする問題点) 上述した裏面照射型で表面側からボンディング配線され
る構造の固体光センサが搭載される従来のパッケージで
は、中央に設けられた穴を通して光が固体光センサに入
射する構造となっており、その穴の周囲の二段目窪み平
坦部分に固体光センサが裏面を光入射側に向けて接着さ
れる。このような構造の従来のパッケージは、搭載され
る固体光センサが受光領域の周囲に接着するのに充分な
面積の非受光領域を有するものでなければならず、それ
に伴って二段目窪みもそれが収まるだけの面積を要する
から小型化が難しい。また、前述の固体光センサのなか
には冷却して用いられる種類のものもあるが、従来のパ
ッケージでは二重凹部を有する側の凹部外周平坦部分が
冷却装置に接続あるいは接着されるので、搭載された固
体光センサの熱は二段目窪み平坦部分との接着部及び前
述のパッケージと冷却装置との接続部(接着部)を介し
て放出される。従って従来のパッケージではもともと冷
却効率が悪いうえ、小型化するために前記の固体光セン
サとパッケージとの接着部及びパッケージと冷却装置と
の接続部(接着部)の面積を減らすとさらにその効率が
低下するという欠点がある。
(Problems to be Solved by the Invention) In the conventional package in which the solid-state photosensor of the above-mentioned back-illuminated type in which bonding wiring is performed from the front side is mounted, light is transmitted to the solid-state photosensor through a hole provided in the center. The structure is such that the light is incident, and the solid-state optical sensor is bonded to the flat portion of the second-stage depression around the hole with the back surface facing the light incident side. The conventional package having such a structure must have a non-light-receiving area having a sufficient area for the solid-state photosensor to be mounted to adhere to the periphery of the light-receiving area. It is difficult to miniaturize because it requires an area to fit it. Some of the above-mentioned solid-state photosensors are used by cooling, but in the conventional package, the flat outer periphery of the recess on the side having the double recess is connected or bonded to the cooling device, so that it is mounted. The heat of the solid-state optical sensor is radiated through the bonding part with the flat part of the second-step depression and the connecting part (bonding part) between the package and the cooling device. Therefore, in the conventional package, the cooling efficiency is originally poor, and if the area of the bonding portion between the solid-state optical sensor and the package and the connection portion (bonding portion) between the package and the cooling device is reduced for downsizing, the efficiency is further reduced. It has the drawback of decreasing.

(問題点を解決するための手段) 前述の問題点を解決するために本発明が提供する手段
は、裏面照射型で表面側からボンディング配線される型
式の固体光センサが搭載される光センサパッケージにお
いて、 中央に前記固体光センサより大きい穴を有する枠状で、
一方の面だけに中央の前記穴の周囲に外周部より窪んだ
凹部を持ち、他方の面では組み立て中に前記固体光セン
サが仮接着で支持される仮支持部が仮接着できる面形状
を有する絶縁体を基礎とし、その絶縁体における前記窪
んだ凹部の平坦部分にボンディングパッドを有し、該ボ
ンディングパッドと電気的に繋がる導体を前記絶縁体内
を通して外部に引き出してある主体部と、 前記主体部の前記凹部側外周部に接着されて前記固体光
センサを支持する部品で、前記主体部に接着される側の
面の中央付近に接着剤溜が設けられ、該接着剤溜以外の
部分に通気孔を具備した基底部 とから構成され、 前記基底部における前記接着剤溜側の面が該接着剤溜内
の接着剤により前記固体光センサの前記表面に接着され
たとき、該表面に設けられているボンディングパッドと
前記主体部の前記ボンディングパッドとを接続するワイ
ヤに触れない領域に前記接着剤溜が設けてある ことを特徴とする光センサパッケージである。
(Means for Solving the Problems) Means provided by the present invention for solving the above problems are an optical sensor package in which a solid-state optical sensor of a backside irradiation type in which bonding wiring is performed from the front side is mounted. In, in the shape of a frame having a hole larger than the solid-state photosensor
Only one surface has a recess recessed from the outer peripheral portion around the hole in the center, and the other surface has a surface shape capable of temporarily adhering a temporary support portion to which the solid-state optical sensor is temporarily attached during assembly. A main body based on an insulator, having a bonding pad on a flat portion of the recessed concave portion of the insulator, and a conductor electrically connected to the bonding pad being drawn out through the insulator to the outside; The part that is adhered to the outer peripheral portion of the concave portion and supports the solid-state optical sensor, has an adhesive reservoir provided near the center of the surface on the side that is adhered to the main body, and passes through parts other than the adhesive reservoir. A bottom portion having pores, and provided on the surface when the surface of the bottom portion on the adhesive reservoir side is bonded to the surface of the solid-state optical sensor by an adhesive in the adhesive reservoir. The Bo An optical sensor package, wherein the adhesive reservoir to the region not touch the wire connecting the bonding pads of the loading pad and the main body is provided.

(作用) 本発明の光センサパッケージでは、固体光センサのボン
ディング配線工程及び基底部との接着工程の際は、固体
光センサ及びパッケージ主体部の固定維持のために仮支
部と呼ぶ治具を用いるが、それは固体光センサ組込み完
了時には主体部から除去され、固体光センサの支持は基
底部で行う。従って、本発明の光センサパッケージに搭
載する固体光センサでは受光領域周囲の非受光領域をボ
ンディングパッド等の周辺構成要素を設けるのに必要な
最小限にすることができ従来のパッケージの二段目窪み
に相当する本発明の光センサパッケージの主体部中央の
穴はその固体光センサが収まるだけの大きさがあれば充
分なので、小型化するうえでの問題点が解決される。ま
た、冷却を必要とする固体光センサを搭載する場合に
も、本発明の光センサパッケージでは冷却装置との接続
あるいは接着に基底部の広い面積を当てることができ、
加えて固体光センサと基底部との接着面積を広く取るこ
とが可能なので、冷却効率の問題点も解決される。
(Operation) In the optical sensor package of the present invention, a jig called a temporary support portion is used to maintain the fixing of the solid-state optical sensor and the package main body during the bonding wiring step of the solid-state optical sensor and the bonding step with the base. However, it is removed from the main body when the solid-state photosensor is assembled, and the solid-state photosensor is supported by the base. Therefore, in the solid-state photosensor mounted in the photosensor package of the present invention, the non-light-receiving region around the light-receiving region can be minimized to provide peripheral components such as bonding pads, etc. The hole in the center of the main body of the optical sensor package of the present invention, which corresponds to the depression, has only to be large enough to accommodate the solid-state optical sensor, so that the problem in miniaturization is solved. Further, even when mounting a solid-state photosensor that requires cooling, in the photosensor package of the present invention, a wide area of the base portion can be applied to connection or adhesion with a cooling device,
In addition, since the bonding area between the solid-state optical sensor and the base can be widened, the problem of cooling efficiency can be solved.

(実施例) 次に本発明について図面を参照して説明する。(Example) Next, this invention is demonstrated with reference to drawings.

第1図は本発明の一実施例の構造を示す図で、同図
(a)は仮支持部を含む全体の縦断面構造図、同図
(b)は凹部側から見た主体部正面図、同図(c)は接
着剤溜側から見た基底部正面図である。中央に固体光セ
ンサより大きい穴4を有する枠状で、一方の面のみ中央
の穴4の周囲に外周部より窪んだ凹部5を持ち、他方の
面は仮支持部2を仮接着できる面形状を有する絶縁体を
基礎とし、その絶縁体の窪み平坦部にボンディングパッ
ド6を有し、ボンディングパッド6と電気的に繋がる導
体7を前記絶縁体内を通して外部に引き出してある主体
部1と、主体部と同種の絶縁体から成り平行平板の一方
の面中央に接着剤溜10を有しその周辺部に通気孔9を設
けた構造の基底部3の二つの部分から本実施例は成り立
っている。実装作業工程において治具として用いられる
仮支部2は、本実施例では平行平板形状を有し、固体光
センサを仮接着した時その個体光センサで覆われない部
分に通気孔8を具備している。第1図(a)に示してあ
る三つの部分を密着させたとき、基底部3の接着剤溜10
の最高部と仮支持部2との隙間が固体光センサの厚さに
若干の余裕を加えた程度となるように該パッケージの寸
法は設計してある。また、接着剤溜10の開口の広さは固
体光センサの受光領域と同程度にし、固体光センサと主
体部1のボンディングパッド6との間を配線した接続ワ
イヤに接着剤溜10が触れて傷つけることのないようにし
てある。
FIG. 1 is a view showing the structure of an embodiment of the present invention, in which FIG. 1 (a) is an overall vertical cross-sectional structural view including a temporary support portion, and FIG. 1 (b) is a front view of a main body seen from the recess side. The same figure (c) is a front view of the base seen from the adhesive reservoir side. A frame shape having a hole 4 larger than the solid-state optical sensor in the center, only one surface having a concave portion 5 recessed from the outer peripheral portion around the hole 4 in the center, and the other surface having a shape capable of temporarily adhering the temporary supporting portion 2 A main body 1 having a bonding pad 6 in the recessed flat portion of the insulator, and a conductor 7 electrically connected to the bonding pad 6 being drawn out to the outside through the insulator. This embodiment consists of two parts of the base part 3 which is made of an insulating material of the same type and has a structure in which an adhesive reservoir 10 is provided at the center of one surface of a parallel plate and a ventilation hole 9 is provided in the peripheral part thereof. The temporary support portion 2 used as a jig in the mounting work step has a parallel plate shape in this embodiment, and has a vent hole 8 in a portion which is not covered by the solid-state optical sensor when the solid-state optical sensor is temporarily bonded. There is. When the three parts shown in FIG.
The size of the package is designed so that the clearance between the highest portion of the solid-state optical sensor and the temporary support portion 2 is about the thickness of the solid-state optical sensor with some margin added. In addition, the opening of the adhesive reservoir 10 should be approximately the same size as the light receiving area of the solid-state optical sensor, and the adhesive reservoir 10 should touch the connection wire between the solid-state optical sensor and the bonding pad 6 of the main body 1. I try not to hurt.

次に同実施例のパッケージの使用方法について説明す
る。第2図は同実施例のパッケージに固体光センサを実
装する作業工程を示す図である。この図からは仮支持部
2及び基底部3に設けてある通気孔を省略してある。ま
ず最初に主体部1の凹部の無い側に仮支持部2を比較的
低温で溶融する物質あるいは有機溶剤等に対して可溶性
の粘着物質によって仮接着する。次に、主体部1中央の
穴を通して仮支持部2上に固体光センサ11を同様の物質
を用いて仮接着し、固体光センサ11と主体部1のボンデ
ィングパッド間を接続ワイヤ12でボンディング配線する
(第2図(a))。基底部3の接着剤溜10に充填可能な
接着剤13を表面張力で丸く脹らむ程たっぷり満した後、
基底部3を接着剤13で主体部に接着する(第2図
(b))。このとき接着剤溜10の接着剤13は固体光セン
サ11と大きな面積で接触する(第2図(c))。接着剤
が全く完全に硬化するまで放置し、仮支持部2を取り外
して実装が完了する(第2図(d))。なお、基底部3
と固体光センサ11との接着及び基底部3と主体部1との
接着に用いる接着剤には、主体部1と仮支持部2との仮
接着及び仮支持部2と固体光センサ11との仮接着に用い
る物質が熱を加えて溶融させて仮接着するタイプの場合
には耐熱性の良いものを選択し、有機溶剤等で溶解して
除去するタイプの場合そのような薬品に対して少なくと
も硬化後不溶性を示すものを用いる。
Next, a method of using the package of the embodiment will be described. FIG. 2 is a diagram showing a work process of mounting the solid-state optical sensor on the package of the embodiment. Vent holes provided in the temporary support portion 2 and the base portion 3 are omitted from this figure. First, the temporary supporting portion 2 is temporarily adhered to the side of the main body portion 1 where there is no recess by a substance that melts at a relatively low temperature or an adhesive substance that is soluble in an organic solvent or the like. Next, the solid-state photosensor 11 is temporarily adhered to the temporary support part 2 using the same substance through the hole in the center of the main body part 1, and the solid-state photosensor 11 and the bonding pad of the main body part 1 are bonded by a connecting wire 12. (FIG. 2 (a)). After fully filling the adhesive agent 13 that can be filled in the adhesive agent reservoir 10 of the base portion 3 with the surface tension,
The base portion 3 is adhered to the main body portion with the adhesive 13 (FIG. 2 (b)). At this time, the adhesive 13 of the adhesive reservoir 10 contacts the solid-state optical sensor 11 in a large area (FIG. 2 (c)). The adhesive is left until it is completely cured, the temporary support portion 2 is removed, and the mounting is completed (FIG. 2 (d)). The base 3
The adhesive used for the adhesion between the main body part 1 and the temporary support part 2 and for the temporary support part 2 and the solid-state optical sensor 11 are If the substance used for temporary adhesion is a type that is heated and melted to be temporarily bonded, select one with good heat resistance, and if it is a type that dissolves and removes with an organic solvent, etc., at least for such chemicals. Use one that is insoluble after curing.

(発明の効果) 以上説明したように本発明の光センサパッケージは、裏
面照射型で表面側からボンディング配線される型式の固
体光センサ搭載完了後に固体光センサ裏面と発光体との
間に固体光センサを支持するための構成要素を持たず、
固体光センサ表面の受光領域付近を接着剤を介して支持
する構造である。このような構造の採用により、収容さ
れる光センサには光センサパッケージとの糊代としての
周縁が不要となるから該光センサを小型化でき、ひいて
は光センサパッケージを小型化できる。また冷却を必要
とする固体光センサを搭載すれば本発明の光センサパッ
ケージは冷却効率を向上できる。
(Effect of the invention) As described above, the optical sensor package of the present invention is a back-illuminated type in which bonding wiring is performed from the front side. Has no components to support the sensor,
It is a structure in which the vicinity of the light receiving area on the surface of the solid-state photosensor is supported via an adhesive. By adopting such a structure, the optical sensor to be housed does not require a peripheral edge as a margin for the optical sensor package, so that the optical sensor can be miniaturized, and in turn, the optical sensor package can be miniaturized. Further, if the solid-state photosensor requiring cooling is mounted, the photosensor package of the present invention can improve the cooling efficiency.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例の構成を示す図で、同図
(a)は仮支持部を含むその実施例全体の縦断面図、同
図(b)は凹部側から見た主体部正面図、同図(c)は
接着剤溜側から見た基底部正面図である。第2図(a)
〜(d)は同実施例のパッケージに裏面照射型で表面側
からボンディング配線される構造の固体光センサを実装
する作業工程を示す図である。第3図は従来例の構造を
示す図で、同図(a)は縦断面図、同図(b)は二重凹
部側から見た正面図である。第4図は同従来例の前記固
体光センサ実装状態図である。 1…主体部、2…仮支持部、3…基底部、4…穴、5…
凹部、6…ボンディングパッド、7…導体、8,9…通気
孔、10…接着剤溜、11…裏面照射型固体光センサ、12…
接続ワイヤ、13…接着剤。
FIG. 1 is a diagram showing a configuration of an embodiment of the present invention, in which FIG. 1 (a) is a vertical sectional view of the entire embodiment including a temporary support portion, and FIG. 1 (b) is a main body portion viewed from the recess side. A front view and the same figure (c) are the front views of the base part seen from the adhesive reservoir side. Fig. 2 (a)
8D are views showing work steps of mounting a solid-state optical sensor of a backside illumination type having a structure in which bonding wiring is performed from the front side on the package of the same example. FIG. 3 is a view showing the structure of a conventional example, FIG. 3 (a) is a longitudinal sectional view, and FIG. 3 (b) is a front view seen from the double recess side. FIG. 4 is a mounting state diagram of the solid-state optical sensor of the conventional example. 1 ... Main part, 2 ... Temporary support part, 3 ... Base part, 4 ... Hole, 5 ...
Recesses, 6 ... Bonding pad, 7 ... Conductor, 8,9 ... Vent hole, 10 ... Adhesive agent reservoir, 11 ... Back-illuminated solid-state optical sensor, 12 ...
Connection wire, 13 ... adhesive.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】裏面照射型で表面側からボンディング配線
される型式の固体光センサが搭載される光センサパッケ
ージにおいて、 中央に前記固体光センサより大きい穴を有する枠状で、
一方の面だけに中央の前記穴の周囲に外周部より窪んだ
凹部を持ち、他方の面では組み立て中に前記固体光セン
サが仮接着で支持される仮支持部が仮接着できる面形状
を有する絶縁体を基礎とし、その絶縁体における前記窪
んだ凹部の平坦部分にボンディングパッドを有し、該ボ
ンディングパッドと電気的に繋がる導体を前記絶縁体内
を通して外部に引き出してある主体部と、 前記主体部の前記凹部側外周部に接着されて前記固体光
センサを支持する部品で、前記主体部に接着される側の
面の中央付近に接着剤溜が設けられ、該接着剤溜以外の
部分に通気孔を具備した基底部 とから構成され、 前記基底部における前記接着剤溜側の面が該接着剤溜内
の接着剤により前記固体光センサの前記表面に接着され
たとき、該表面に設けられているボンディングパッドと
前記主体部の前記ボンディングパッドとを接続するワイ
ヤに触れない領域に前記接着剤溜が設けてある ことを特徴とする光センサパッケージ。
1. A photosensor package in which a solid-state photosensor of a back-illuminated type in which bonding wiring is performed from the front side is mounted, in a frame shape having a hole larger than the solid-state photosensor in the center,
Only one surface has a recess recessed from the outer peripheral portion around the hole in the center, and the other surface has a surface shape capable of temporarily adhering a temporary support portion to which the solid-state optical sensor is temporarily attached during assembly. A main body based on an insulator, having a bonding pad on a flat portion of the recessed concave portion of the insulator, and a conductor electrically connected to the bonding pad being drawn out through the insulator to the outside; The part that is adhered to the outer peripheral portion of the concave portion and supports the solid-state optical sensor, has an adhesive reservoir provided near the center of the surface on the side that is adhered to the main body, and passes through parts other than the adhesive reservoir. A bottom portion having pores, and provided on the surface when the surface of the bottom portion on the adhesive reservoir side is bonded to the surface of the solid-state optical sensor by an adhesive in the adhesive reservoir. The Bo Light sensor package, characterized in that said adhesive reservoir in a region not touch the wires that connect the loading pad and the bonding pads of the main body portion is provided.
JP62161866A 1987-06-29 1987-06-29 Optical sensor package Expired - Lifetime JPH0748532B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62161866A JPH0748532B2 (en) 1987-06-29 1987-06-29 Optical sensor package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62161866A JPH0748532B2 (en) 1987-06-29 1987-06-29 Optical sensor package

Publications (2)

Publication Number Publication Date
JPS647561A JPS647561A (en) 1989-01-11
JPH0748532B2 true JPH0748532B2 (en) 1995-05-24

Family

ID=15743450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62161866A Expired - Lifetime JPH0748532B2 (en) 1987-06-29 1987-06-29 Optical sensor package

Country Status (1)

Country Link
JP (1) JPH0748532B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4373695B2 (en) * 2003-04-16 2009-11-25 浜松ホトニクス株式会社 Manufacturing method of backside illuminated photodetector

Also Published As

Publication number Publication date
JPS647561A (en) 1989-01-11

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