JPH0749118B2 - UV oxidizer - Google Patents
UV oxidizerInfo
- Publication number
- JPH0749118B2 JPH0749118B2 JP61076752A JP7675286A JPH0749118B2 JP H0749118 B2 JPH0749118 B2 JP H0749118B2 JP 61076752 A JP61076752 A JP 61076752A JP 7675286 A JP7675286 A JP 7675286A JP H0749118 B2 JPH0749118 B2 JP H0749118B2
- Authority
- JP
- Japan
- Prior art keywords
- water
- treated
- ultraviolet
- pressure mercury
- mercury lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Water Treatments (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、半導体製造工場等で使用される純水の再生利
用時や排水時に問題となる有機物を除去するため、被処
理水に紫外線を照射して、他の手段では分解できない有
機物、特に低分子のアルコール類やケトン類等を酸化分
解する装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention removes ultraviolet rays from water to be treated in order to remove organic matter which is a problem when reusing pure water used in semiconductor manufacturing plants or when draining water. The present invention relates to a device for oxidatively decomposing organic substances which cannot be decomposed by other means, particularly low molecular weight alcohols and ketones by irradiation.
［従来の技術とその問題点］ 従来、半導体製造工程において、精度の高い半導体を得
るために処理水の中に含まれている有機物、例えば、メ
タノール、エタノール及びイソプロパノール等に紫外線
を照射して分解除去することが行なわれている。[Prior art and its problems] Conventionally, in the semiconductor manufacturing process, in order to obtain a highly accurate semiconductor, organic substances contained in treated water, for example, methanol, ethanol, and isopropanol are irradiated with ultraviolet rays to decompose them. It is being removed.
かかる手段を用いて工業用純水を数トン単位で得る装置
として従来は例えば第３図に示すようなものが使用され
てきた。これは、数トン単位の水を貯水することができ
る装置本体１の内部に、石英ガラス等の紫外線透過材で
構成した二重構造のジャケット２を収納すると共に同ジ
ャケット２の内管の内側に10〜20kw程度の高圧水銀ラン
プ３を適数本収納したものである。ジャケット２の内管
と外管との間には、高圧水銀ランプ３の放射熱により被
処理水の温度が上昇するのを防ぐために冷却水を注入、
循環させるように構成してある。As a device for obtaining industrial pure water in units of several tons by using such means, for example, a device as shown in FIG. 3 has been conventionally used. This is because a double-structured jacket 2 made of an ultraviolet-transparent material such as quartz glass is housed inside the apparatus body 1 capable of storing several tons of water, and inside the inner tube of the jacket 2. An appropriate number of high pressure mercury lamps 3 of about 10 to 20 kW are stored. Cooling water is injected between the inner tube and the outer tube of the jacket 2 in order to prevent the temperature of the water to be treated from rising due to the radiant heat of the high-pressure mercury lamp 3.
It is configured to circulate.
かかる装置を運転する場合は、装置本体１に貯水された
水に過酸化水素等の酸化物を混入し撹拌するとともに、
高圧水銀ランプを１〜２時間程度点灯して水に含まれる
有機物を紫外線により分解除去する。When operating such an apparatus, while mixing oxides such as hydrogen peroxide into water stored in the apparatus main body 1 and stirring,
A high pressure mercury lamp is turned on for about 1 to 2 hours to decompose and remove organic substances contained in water by ultraviolet rays.
しかし、かかる構造の装置は、数トン単位の水を貯水す
るため装置本体が大形になるという問題がある。また、
大容量の高圧水銀ランプを連続して点灯するため電力消
費が嵩むという問題もある。しかも、水の有機物を分解
除去できるまでに要する時間が１〜２時間程度と長い欠
点もある。さらにランプを収納するジャケットに冷却水
を循環させるための装置を必要とするためコスト高にも
なる。However, the apparatus having such a structure has a problem that the apparatus main body becomes large in size because it stores water of several tons. Also,
There is also a problem that power consumption increases because a large-capacity high-pressure mercury lamp is continuously lit. In addition, there is a drawback that the time required for decomposing and removing organic matter of water is as long as about 1 to 2 hours. Further, since a device for circulating the cooling water is required in the jacket for accommodating the lamp, the cost becomes high.
［発明の目的］ 本発明は上記の点に鑑みてなされたもので、小形かつ簡
単な装置により、少ない電力費で短時間のうちに必要量
の工業用純水を連続的に得ることのできる紫外線酸化分
解装置を提供することを目的とする。[Object of the Invention] The present invention has been made in view of the above points, and it is possible to continuously obtain a required amount of industrial pure water in a short time with a small electric power cost by a small and simple device. It is an object of the present invention to provide an ultraviolet oxidation decomposition apparatus.
［発明の構成及び作用］ 以下、本発明の典型的な実施例を図に基づいて説明す
る。第１図において、６はステンレス材等で構成された
筒状の装置本体である。この装置本体６の一端には被処
理水の注入口７が設けてある。また、装置本体６の内面
は紫外線反射が効率良く行なわれるように研磨されてい
る。９は紫外線透過率の良い材料、例えば高純度石英ガ
ラスにより構成された筒状のジャケットで装置本体６の
内部に適数本配置してある。[Structure and Action of the Invention] Hereinafter, a typical embodiment of the present invention will be described with reference to the drawings. In FIG. 1, reference numeral 6 denotes a tubular device body made of stainless steel or the like. An inlet 7 for water to be treated is provided at one end of the apparatus body 6. Further, the inner surface of the apparatus body 6 is polished so that ultraviolet rays are efficiently reflected. Reference numeral 9 denotes a cylindrical jacket made of a material having a high ultraviolet transmittance, for example, high-purity quartz glass, and a suitable number of the jackets are arranged inside the apparatus main body 6.
10はジャケット９の内部に収納した紫外線放電灯であ
り、本発明においては、電極間距離1cmあたり２〜8wの
高負荷の低圧水銀ランプを使用する。かかる高負荷の低
圧水銀ランプは点灯中に何らかの方法で冷却しないと短
寿命となるが、本発明では装置本体６とジャケット９の
間を流れる被処理水によって冷却されるため問題はな
い。なお、この場合、被処理水の温度上昇に注意しなけ
ればならないが、高負荷の低圧水銀ランプは高圧水銀ラ
ンプに比べれば発熱量は少なく、しかも被処理水は連続
的に流れることとなるので被処理水の温度は殆ど上がら
ない。Reference numeral 10 denotes an ultraviolet discharge lamp housed inside the jacket 9. In the present invention, a high-load low-pressure mercury lamp of 2 to 8 w per electrode distance 1 cm is used. Such a high-load low-pressure mercury lamp has a short life unless it is cooled by any method during lighting, but in the present invention, there is no problem because it is cooled by the water to be treated flowing between the apparatus body 6 and the jacket 9. In this case, it is necessary to pay attention to the temperature rise of the water to be treated, but the high-load low-pressure mercury lamp produces less heat than the high-pressure mercury lamp, and the water to be treated flows continuously. The temperature of the water to be treated hardly rises.
かかる装置を運転する場合は、被処理水を注入口７を通
して装置本体６内に注入する。この際、投入口11を通じ
て被処理水に過酸化水素等の酸化剤をを投入する。そし
て装置本体６内に注入した被処理水に低圧水銀ランプ10
により紫外線を照射し、被処理水中の有機物を酸化分解
させる。When operating such a device, the water to be treated is injected into the device body 6 through the injection port 7. At this time, an oxidizing agent such as hydrogen peroxide is introduced into the water to be treated through the inlet 11. Then, the low-pressure mercury lamp 10 is added to the water to be treated that has been injected into the apparatus body 6.
To irradiate ultraviolet rays to oxidize and decompose organic substances in the water to be treated.
処理された水は流出口８を通して連続的に外部に取り出
される。なお、12は装置本体に注入した被処理水を撹拌
して酸化分解を効率よく行なわせるための乱流板であ
る。The treated water is continuously taken out through the outlet 8. Reference numeral 12 is a turbulent flow plate for agitating the water to be treated injected into the apparatus main body to efficiently perform oxidative decomposition.
かかる装置により被処理水中の有機物の酸化分解を行な
う場合、被処理水及び装置における様々な要素及びそれ
らの条件が有機物の酸化分解や小形化等に大きな影響を
及ぼすため、これらの条件を適当に選定しないと期待す
る効果は得られない。発明者等は種々実験を重ねた結
果、低圧水銀ランプの有効出力、該有効出力の利用効
率、被処理水の紫外線透過率及び装置本体とジャケット
との間を流れる被処理水の厚さ等が効果に最も影響があ
る要素であることを確認した。When the oxidative decomposition of the organic matter in the water to be treated is carried out by such an apparatus, various conditions in the water to be treated and the apparatus and their conditions have a great influence on the oxidative decomposition and downsizing of the organic matter. The expected effect cannot be obtained without selection. As a result of various experiments conducted by the inventors, the effective output of the low-pressure mercury lamp, the utilization efficiency of the effective output, the ultraviolet transmittance of the treated water, the thickness of the treated water flowing between the apparatus body and the jacket, etc. It was confirmed that this is the element that has the greatest effect on the effect.
ここに低圧水銀ランプの有効出力とは、低圧水銀ランプ
から放射される全エネルギーのうち被処理水の紫外線吸
収特性に基づき反応に寄与する紫外線出力をいう。すな
わち、第２図（ｂ）に示すように、低圧水銀ランプから
放射される全エネルギーを棒線であらわし、被処理水の
紫外線吸収特性Ａ曲線であらわすと、Ａ曲線よりも下側
における紫外線出力が有機物の分解に有効に使われる紫
外線出力であり、これを有効出力と称する。Here, the effective output of the low-pressure mercury lamp means the ultraviolet output that contributes to the reaction based on the ultraviolet absorption characteristics of the water to be treated among all the energy emitted from the low-pressure mercury lamp. That is, as shown in FIG. 2 (b), when the total energy radiated from the low-pressure mercury lamp is represented by a bar line and the ultraviolet absorption characteristic A curve of the water to be treated is represented, the ultraviolet light output below the A curve is shown. Is the UV output that is effectively used for the decomposition of organic matter, and this is called the effective output.
次に、利用効率とは紫外線の有効出力のうち、被処理水
の水層厚や単位長あたりの紫外線透過率との関係で、実
際にどれだけの出力が利用されるかを示すものでこれを
Ｅとすると下記の式により算出される。Next, the utilization efficiency is a relation between the effective ultraviolet ray output and the water layer thickness of the water to be treated and the ultraviolet ray transmission rate per unit length, and indicates how much output is actually used. Let E be the calculation by the following formula.
ここで、ａは被処理水の水層厚（cm）で第１図の装置本
体６とジャケット９との間の距離であり、trは被処理水
1cmあたりの紫外線透過率（％）である。 Here, a is the water layer thickness (cm) of the water to be treated, which is the distance between the apparatus body 6 and the jacket 9 in FIG. 1, and tr is the water to be treated.
It is the ultraviolet transmittance (%) per cm.
前記被処理水の厚みａ（cm）は、前記利用効率Ｅ（％）
との関係において適当な範囲に選定しなければならな
い。これは、被処理水の酸化剤の反応に大きな影響があ
り、それによって有機物の分解能力が左右されるからで
ある。The thickness a (cm) of the treated water is the utilization efficiency E (%).
Must be selected in an appropriate range in relation to. This is because the reaction of the water to be treated with the oxidizing agent has a great influence, and the decomposition ability of the organic matter is influenced thereby.
すなわち、被処理水に酸化剤として代表的な過酸化水素
（H2O2）を混入した場合、該混入水に紫外線を照射する
と次のような反応が生じる。That is, when typical hydrogen peroxide (H 2 O 2 ) is mixed into the water to be treated as an oxidant, the following reaction occurs when the mixed water is irradiated with ultraviolet rays.
上記反応式に示すように、H2O2に紫外線が吸収され活性
酸素が発生する。この反応には吸収された光だけが寄与
する（Grotthos−Draperの原則）ことから、より効率よ
く反応を起させるためにはどれだけ紫外線を吸収させう
るかを考慮しなければならない。被処理水の単位長あた
りの紫外線透過率は任意に変えられないから、被処理水
の厚みａを利用効率Ｅとの関係で選定するのが実際的で
あることが判明した。 As shown in the above reaction formula, H 2 O 2 absorbs ultraviolet rays to generate active oxygen. Since only the absorbed light contributes to this reaction (Grotthos-Draper's principle), it is necessary to consider how much ultraviolet light can be absorbed in order to cause the reaction more efficiently. It has been found that it is practical to select the thickness a of the water to be treated in relation to the utilization efficiency E because the ultraviolet transmittance per unit length of the water to be treated cannot be arbitrarily changed.
発明者等の実験によれば、被処理水の厚みａ（cm）は利
用効率Ｅ（％）が80〜98％となるように選定するのが最
も効果的であることが判明した。According to experiments by the inventors, it has been found that it is most effective to select the thickness a (cm) of the water to be treated so that the utilization efficiency E (%) is 80 to 98%.
Ｅ＜80（％）になるようにａを選択すると、利用されな
い紫外線が無駄となり、結果的に消費電力が増大し装置
全体も大形になる。反対にＥ＞98（％）になるようにａ
を選択すると、従来のタンク式と同様水層厚が極めて大
となり、装置本体内壁側を流れる水は処理されない結果
となる。この場合、撹拌等の手段を用いれば処理は可能
であるが、処理スピードを落とさなければならず、装置
本体内の通過時間を長くとらなければならないので結果
的には装置が大形になる。If a is selected so that E <80 (%), unused ultraviolet rays are wasted, resulting in an increase in power consumption and an overall size of the apparatus. On the contrary, E> 98 (%) a
If is selected, the water layer thickness becomes extremely large as in the conventional tank type, and the water flowing on the inner wall side of the apparatus main body is not treated. In this case, although processing can be performed by using a means such as stirring, the processing speed must be reduced and the passage time inside the apparatus main body must be lengthened, resulting in a large size apparatus.
本発明は、紫外線放電灯として高負荷の低圧水銀ランプ
を使用したうえで前記のごとく被処理水の水層厚を選定
する点が特色である。このように高負荷の低圧水銀ラン
プを使用する理由は、ランプから放射される全エネルギ
ーのうち有機物の酸化分解反応に寄与する紫外線の割合
（赤外線放射効率）が高圧水銀ランプに比べて高く、消
費電力を小さくすることができるからである。第１表は
高負荷の低圧水銀ランプ及び高圧水銀ランプの紫外線放
射効率、紫外線放射効率比及び消費電力の比較表であ
る。The present invention is characterized in that a high-load low-pressure mercury lamp is used as an ultraviolet discharge lamp and the water layer thickness of the water to be treated is selected as described above. The reason for using a high-load low-pressure mercury lamp is that the ratio of ultraviolet rays (infrared radiation efficiency) that contribute to the oxidative decomposition reaction of organic matter in the total energy emitted from the lamp is higher than that of a high-pressure mercury lamp, and the consumption is high. This is because the power can be reduced. Table 1 is a comparison table of ultraviolet radiation efficiency, ultraviolet radiation efficiency ratio, and power consumption of a high-load low-pressure mercury lamp and a high-pressure mercury lamp.
このように、紫外線の放射効率が高負荷の低圧水銀ラン
プの方が優れている理由は、第２図（ａ）、（ｂ）に示
すように放電灯のエネルギー分布に基因する。すなわ
ち、第２図（ａ）に示すように、高圧水銀ランプでは有
機物の酸化分解反応に有効な300nm以外の近紫外線・可
視領域に発光がずれるのに対して、高負荷の低圧水銀ラ
ンプでは第２図（ｂ）のように反応に寄与する主波長の
254nmのスペクトルが有効に利用されるからである。し
かし、紫外線放射効率の高い低圧水銀ランプでも、従来
の殺菌灯や蛍光灯に使用されているような0.4〜0.7w/cm
の低負荷のものでは、本発明の目的の一つである装置の
小形化は不可能である。これは紫外線の絶対出力が低い
ため、所定の有効出力を得るためには多数の低圧水銀ラ
ンプを使用しなければならないためである。第２表は、
数トンの水を処理するために高圧水銀ランプを使用した
場合、低負荷の低圧水銀ランプを使用した場合及び本発
明に係る高負荷の低圧水銀ランプを使用した場合の必要
ランプ灯数、消費電力及び装置の体積比を比較したもの
である。なお、同じ処理能力で比較するために、紫外線
の有効出力をほぼ同じ値として比較してある。 Thus, the reason why the low-pressure mercury lamp with a high load of ultraviolet radiation efficiency is superior is due to the energy distribution of the discharge lamp, as shown in FIGS. 2 (a) and 2 (b). That is, as shown in FIG. 2 (a), in the high-pressure mercury lamp, the light emission shifts to the near-ultraviolet / visible region other than 300 nm, which is effective for the oxidative decomposition reaction of organic substances, while in the high-load low-pressure mercury lamp, As shown in Fig. 2 (b),
This is because the spectrum of 254 nm is effectively used. However, even low-pressure mercury lamps with high ultraviolet radiation efficiency have 0.4-0.7 w / cm like those used in conventional germicidal lamps and fluorescent lamps.
With a low load, it is impossible to downsize the device, which is one of the objects of the present invention. This is because the absolute output of ultraviolet rays is low, and a large number of low pressure mercury lamps must be used to obtain a predetermined effective output. Table 2 shows
When using a high-pressure mercury lamp to treat several tons of water, when using a low-load low-pressure mercury lamp and when using a high-load low-pressure mercury lamp according to the present invention, the required number of lamps, power consumption And the volume ratio of the apparatus are compared. In addition, in order to compare with the same processing capacity, the effective output of ultraviolet rays is compared as substantially the same value.
なお、本発明において使用する低圧水銀ランプの負荷が
2w/cmより小さいと、所定の処理能力を得るために必要
なランプ灯数が多くなるため装置の大形化を招き、反対
に8w/cmより大きいと、エネルギー分布が長波長側にず
れて放射効率が悪くなり省電力の効果がうすれる。 The load of the low-pressure mercury lamp used in the present invention is
If it is less than 2 w / cm, the number of lamps required to obtain the prescribed processing capacity will increase, which will lead to an increase in the size of the device.On the other hand, if it is greater than 8 w / cm, the energy distribution will shift to the long wavelength side. The radiation efficiency becomes poor and the effect of power saving is reduced.
また、第１図の実施例では、装置本体６の内部に複数の
ジャケット９を収納した例を示したが、ジャケット９は
単数であっても差し支えなく、さらに単数または複数の
ジャケットを有する装置本体を複数個直列または並列に
接続配置してもよい。Further, in the embodiment shown in FIG. 1, an example in which a plurality of jackets 9 are housed inside the apparatus main body 6 is shown. You may connect and arrange several in series or parallel.
更に、被処理水に添加する酸化剤として過酸化水素を用
いた場合について説明したが、次亜塩素酸等の紫外線照
射で活性酸素を生ずるものであればよい。又、装置本体
の内面の紫外線反射率を高めたり、装置本体内に注入し
た被処理水を乱流にして撹拌する手段等を付加すると酸
化分解効果を高めることができる。Further, the case where hydrogen peroxide is used as the oxidizing agent added to the water to be treated has been described, but any substance capable of generating active oxygen by irradiation of ultraviolet rays such as hypochlorous acid may be used. Further, the effect of oxidative decomposition can be enhanced by increasing the ultraviolet reflectance of the inner surface of the apparatus body or adding a means for stirring the water to be treated injected into the apparatus body in a turbulent flow.
［発明の効果］ 以上の説明から明らかなように、本発明によれば従来装
置に比較して小型・簡単な装置により、少ない電力費で
短時間に必要とする工業用純水を連続的に得ることがで
きる紫外線酸化分解装置を提供することができる。[Effects of the Invention] As is clear from the above description, according to the present invention, it is possible to continuously supply industrial pure water required for a short time with a small electric power cost by a small and simple device as compared with the conventional device. It is possible to provide an ultraviolet oxidative decomposition apparatus that can be obtained.
第１図は本発明に係る紫外線酸化分解装置の断面図、第
２図（ａ）は高圧水銀ランプの照射光の分光エネルギー
分布図、第２図（ｂ）は高負荷の低圧水銀ランプの照射
光の分光エネルギー分布図、第３図は従来の紫外線酸化
分解装置の断面図である。 第１図において、６……装置本体、９……ジャケット、
10……低圧水銀ランプ。FIG. 1 is a sectional view of an ultraviolet oxidative decomposition apparatus according to the present invention, FIG. 2 (a) is a spectral energy distribution diagram of irradiation light of a high-pressure mercury lamp, and FIG. 2 (b) is irradiation of a high-load low-pressure mercury lamp. FIG. 3 is a cross-sectional view of a conventional ultraviolet oxidative decomposition apparatus, which is a spectral energy distribution chart of light. In FIG. 1, 6 ... Device body, 9 ... Jacket,
10 ... Low-pressure mercury lamp.
フロントページの続き (72)発明者 河合 勝弘 埼玉県行田市富士見町１丁目20番地 岩崎 電気株式会社開発センター内 (72)発明者 弦田 忍 埼玉県行田市富士見町１丁目20番地 岩崎 電気株式会社開発センター内 (72)発明者 広瀬 正益 埼玉県行田市壱里山町１丁目１番地 岩崎 電気株式会社埼玉製作所内 審判の合議体 審判長 吉村 康男 審判官 柴沼 雅樹 審判官 原 健司 (56)参考文献 特開 昭53−84362（ＪＰ，Ａ) 特開 昭51−88847（ＪＰ，Ａ) 特開 昭50−79950（ＪＰ，Ａ) 特開 昭50−86159（ＪＰ，Ａ) 特開 昭52−35445（ＪＰ，Ａ) 特公 昭60−51876（ＪＰ，Ｂ１)Front page continuation (72) Inventor Katsuhiro Kawai 1-20 Fujimi-cho, Gyoda-shi, Saitama Iwasaki Electric Co., Ltd. Development Center (72) Shinobu Tsuruda 1-20 Fujimi-cho, Gyoda-shi, Saitama Iwasaki Electric Co., Ltd. In the Development Center (72) Inventor Masayasu Hirose 1-1 Ichiriyama-cho, Gyoda-shi, Saitama Iwasaki Electric Co., Ltd. Saitama Manufacturing Co., Ltd. Judgment General Manager Judge Yasuo Yoshimura Judge Masaki Shiinuma Judge Ken Hara (56) References JP-A-53-84362 (JP, A) JP-A-51-88847 (JP, A) JP-A-50-79950 (JP, A) JP-A-50-86159 (JP, A) JP-A-52-35445 (JP, A) JP 60-51876 (JP, B1)
Claims (1)
成したジャケットを収納するとともに、該ジャケットの
内部に紫外線放電灯を収納し、装置本体とジャケットと
の間に酸化剤を混入した被処理水を流して、これに紫外
線を照射して被処理水中の有機物を酸化分解する装置に
おいて、 前記紫外線電灯として電極間距離1cmあたり２〜８ワッ
ト（ｗ）の高負荷の低圧水銀ランプを使用するととも
に、該低圧水銀ランプから放射される全エネルギーのう
ち被処理水の紫外線吸収特性に基づき反応に寄与する紫
外線の有効出力が被処理水の中の有機物の酸化分解に有
効に利用される割合（利用効率）をＥ（％）、装置本体
とジャケットとの間を流れる被処理水の厚さをａ（c
m）、被処理水1cmあたりの紫外線透過率をtr（％）とし
た場合、利用効率Ｅを、 なる式で算出し、その値が80〜98％となるように被処理
水の厚さａ（cm）を選定したことを特徴とする紫外線酸
化分解装置。1. A tubular apparatus main body contains a jacket made of an ultraviolet-transparent material, an ultraviolet discharge lamp is housed inside the jacket, and an oxidizer is mixed between the apparatus main body and the jacket. In a device for flowing water to be treated and irradiating it with ultraviolet rays to oxidize and decompose organic matter in the water to be treated, a high-load low-pressure mercury lamp of 2 to 8 watts (w) per electrode distance 1 cm is used as the ultraviolet lamp. Of the total energy emitted from the low-pressure mercury lamp, the effective output of ultraviolet rays that contributes to the reaction based on the ultraviolet absorption characteristics of the water to be treated is effectively used for the oxidative decomposition of organic matter in the water to be treated. The ratio (utilization efficiency) is E (%), and the thickness of the water to be treated flowing between the apparatus main body and the jacket is a (c
m), assuming that the ultraviolet ray transmittance per 1 cm of treated water is tr (%), the utilization efficiency E is The ultraviolet oxidative decomposition apparatus is characterized in that the thickness a (cm) of the water to be treated is selected so that the calculated value is 80 to 98%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61076752A JPH0749118B2 (en) | 1986-04-04 | 1986-04-04 | UV oxidizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61076752A JPH0749118B2 (en) | 1986-04-04 | 1986-04-04 | UV oxidizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62234591A JPS62234591A (en) | 1987-10-14 |
| JPH0749118B2 true JPH0749118B2 (en) | 1995-05-31 |
Family
ID=13614320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61076752A Expired - Lifetime JPH0749118B2 (en) | 1986-04-04 | 1986-04-04 | UV oxidizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749118B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2666340B2 (en) * | 1988-04-06 | 1997-10-22 | 岩崎電気株式会社 | UV oxidation decomposition equipment |
| JPH01284385A (en) * | 1988-05-10 | 1989-11-15 | Iwasaki Electric Co Ltd | Pure water and ultrapure water production method and its production equipment |
| DE3919885C2 (en) * | 1989-06-19 | 1994-06-30 | Wedeco Umwelttechnologien Wass | Process and plant for the treatment of aqueous liquids contaminated with poorly degradable pollutants |
| DE4138421C2 (en) * | 1991-11-22 | 1993-12-02 | Degussa | Process for reducing pollutants in water by means of hydrogen peroxide under UV irradiation |
| JP2696636B2 (en) * | 1992-02-05 | 1998-01-14 | 株式会社東芝 | UV irradiation device with mixed flow plate |
| FR2719483B1 (en) * | 1994-05-09 | 1996-07-05 | Stoutz Jean Christian De | Method and device for treating liquids by ultraviolet radiation. |
| JP4811892B2 (en) * | 2000-04-26 | 2011-11-09 | 住友精密工業株式会社 | Water treatment method and apparatus |
| JP5352858B2 (en) * | 2009-05-14 | 2013-11-27 | 新科産業有限会社 | Ultrasonic / photochemical hybrid reactor |
| JP7592237B1 (en) * | 2024-03-04 | 2024-12-02 | 海賀 信好 | Water purification system and water purification method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5326418B2 (en) * | 1975-01-30 | 1978-08-02 | ||
| JPS5384362A (en) * | 1976-12-29 | 1978-07-25 | Mitsutoshi Matsuoka | Device for continuously purifying waste water |
| JPS6051876A (en) * | 1983-08-31 | 1985-03-23 | Fuji Xerox Co Ltd | Toner recovery and reuse mechanism of copying machine |
-
1986
- 1986-04-04 JP JP61076752A patent/JPH0749118B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62234591A (en) | 1987-10-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Nansheng et al. | Ferric citrate-induced photodegradation of dyes in aqueous solutions | |
| TWI460136B (en) | Ultraviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water | |
| US20020033369A1 (en) | Decontamination of water by photolytic oxidation/reduction utilizing near blackbody radiation | |
| CN102448891A (en) | Ultraviolet light processing chamber | |
| NO791869L (en) | LOW PRESSURE STEAM LAMP, SPECIALLY MERCURY LAMP AND RADIATION REACTOR WITH SUCH A LAMP | |
| JPH0749118B2 (en) | UV oxidizer | |
| US20250230078A1 (en) | Catalytic oxidation reactor and complete set of equipment | |
| Luo et al. | Electrodeless discharge in water: Reactive species in liquid and gas phase and energy cost for nitrogen fixation | |
| JPH1147771A (en) | Continuous water passing type water treatment apparatus | |
| US6610258B1 (en) | Device for purifying fluid with photonic pulses | |
| JP3797552B2 (en) | Ultraviolet irradiation treatment method and apparatus | |
| CN105858857A (en) | Electromagnetism and ultraviolet ray cooperated organic wastewater treatment device and method | |
| JP4229363B2 (en) | Water treatment equipment | |
| JPH11262759A (en) | Water treatment apparatus and water treatment method using photocatalyst | |
| CN114349108A (en) | Method for degrading organic matter in wastewater based on laser catalysis | |
| Šima | Photochemistry-development and achievements | |
| JP2582550B2 (en) | Treatment of water containing organic matter | |
| Arany et al. | Influence of H2O2 formed in situ on the photodegradation of ibuprofen and ketoprofen | |
| CN216764385U (en) | A system based on laser catalytic degradation of organic matter in wastewater | |
| Horikoshi et al. | Microwave discharge electrodeless lamps (MDEL) Part IV. Novel self-ignition system incorporating metallic microwave condensing cones to activate MDELs in photochemical reactions | |
| JP2002166270A (en) | Photochemical reactor | |
| KR100664557B1 (en) | Water treatment device using pulsed ultraviolet lamp | |
| JPH10192696A (en) | Photocatalytic reaction apparatus | |
| Oppenländer | Photochemical Treatment of Water: Comparison of Incoherent Excimer Lamps with a Medium‐Pressure Mercuy Lamp | |
| CN210237187U (en) | Ultraviolet catalytic oxidation water treatment equipment |