JPH0754353B2 - Ultrasonic transducer for high temperature - Google Patents
Ultrasonic transducer for high temperatureInfo
- Publication number
- JPH0754353B2 JPH0754353B2 JP62319045A JP31904587A JPH0754353B2 JP H0754353 B2 JPH0754353 B2 JP H0754353B2 JP 62319045 A JP62319045 A JP 62319045A JP 31904587 A JP31904587 A JP 31904587A JP H0754353 B2 JPH0754353 B2 JP H0754353B2
- Authority
- JP
- Japan
- Prior art keywords
- high temperature
- ultrasonic transducer
- stainless steel
- steel case
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 [産業上の利用分野] この発明は高温用トランスジューサ、特に不透明な物質
である液体ナトリウムで満された原子炉容器内における
構造物及び炉内の各種機器の位置及び形状の認識を行う
ために用いられるものに関する。Description: FIELD OF THE INVENTION The present invention relates to high temperature transducers, in particular the position and shape of structures in reactor vessels filled with liquid sodium, which is an opaque substance, and various equipment in the reactor. Related to what is used to make the recognition of.
[従来の技術] 第2図は従来の高温用超音波トランスジューサを示す断
面図である。図において、(1)は円筒形をした函状の
ステンレスケース、(2)はステンレスケース(1)の
開口部を密閉するステンレスケースカバーで、ステンレ
スケース(1)に溶接で組み付けられて密封容器が構成
される。(3)はステンレスケース(1)の底部内面に
配設されたニオブ酸リチウムからなる円板状の高温用超
音波振動子で、キューリ点が1200℃、電気機械結合係数
Kt が0.17、周波数約2.5MHz、パルス巾約50μsecのもので
ある。(4)は800℃で焼成された接合部材である銀ペ
ースト(8)で、高温用超音波振動子(3)をステンレ
スケース(1)の底部内面に接合している。(5)はス
テンレスケースカバー(2)を貫通して取り付けられた
ハーメテックタイプのシールコネクタ、(6)はシリコ
ーンゴムチューブで被覆された電線で、シールコネクタ
(5)と高温用超音波振動子(3)とを接続している。
(7)はシールコネクタ(5)に接続されたMIケーブル
(Mineral Insulated Cable)、(8)はステンレスケ
ースカバー(2)に取り付けられた支柱である。[Prior Art] FIG. 2 is a sectional view showing a conventional high temperature ultrasonic transducer. In the figure, (1) is a cylindrical box-shaped stainless steel case, (2) is a stainless steel case cover for sealing the opening of the stainless steel case (1), which is welded to the stainless steel case (1) and sealed. Is configured. (3) is a disc-shaped high-temperature ultrasonic transducer made of lithium niobate disposed on the inner surface of the bottom of the stainless steel case (1), with a Curie point of 1200 ° C and an electromechanical coupling coefficient.
Kt Is 0.17, frequency is about 2.5 MHz, and pulse width is about 50 μsec. (4) is a silver paste (8) which is a joining member fired at 800 ° C., and the high temperature ultrasonic transducer (3) is joined to the inner surface of the bottom of the stainless steel case (1). (5) is a hermetic seal connector attached through the stainless case cover (2), and (6) is an electric wire covered with a silicone rubber tube. The seal connector (5) and the ultrasonic transducer for high temperature are used. (3) is connected to.
(7) is a MI cable (Mineral Insulated Cable) connected to the seal connector (5), and (8) is a column attached to the stainless case cover (2).
従来の高温用超音波トランスジューサは上記のように構
成され、キューリ点が1200℃のニオブ酸リチウムからな
る高温用超音波振動子(3)を内蔵する密封容器はステ
ンレスケース(1)とステンレスケースカバー(2)と
からなるから、使用条件が温度200℃〜250℃、放射線1.
0×106Radオーダーの原子炉容器内であっても、耐食性
を有し、長期に亘って使用することができる。また、ス
テンレスケース(1)とステンレスケースカバー(2)
によって密封された高温用超音波振動子(3)に所定の
電圧が印加されたときには、周波数が2.5MHzでパルス巾
50μsecの超音波を発振し、その超音波はステンレスケ
ース(1)の底部を透過してステンレスケース(2)外
に送り出される。このときの指向角は1.3(−6dB)で、
S/N比はせいぜい20dBであった。The conventional high temperature ultrasonic transducer is constructed as described above, and the sealed container containing the high temperature ultrasonic transducer (3) made of lithium niobate having a Curie point of 1200 ° C. is a stainless steel case (1) and a stainless steel case cover. (2) consists of the following conditions: temperature of 200 ℃ -250 ℃, radiation 1.
Even in a reactor vessel of the order of 0 × 10 6 Rad, it has corrosion resistance and can be used for a long time. Also, a stainless steel case (1) and a stainless steel case cover (2)
When a predetermined voltage is applied to the high temperature ultrasonic transducer (3) sealed by, the frequency is 2.5 MHz and the pulse width is
An ultrasonic wave of 50 μsec is oscillated, and the ultrasonic wave is transmitted to the outside of the stainless steel case (2) through the bottom of the stainless steel case (1). At this time, the directivity angle is 1.3 (-6 dB),
The S / N ratio was at most 20 dB.
[発明が解決しようとする問題点] 上記のような従来の高温用超音波トランスジューサでは
高温用超音波振動子(3)がキューリ点が1200℃で電気
機械結合係数が0.17のニオブ酸リチウムからなるため、
耐温という点では優れているが、電気機械結合係数が小
さく、電気・超音波相互の変換効率が良好でなく、超音
波エネルギーが小さいことからS/N比が悪いという問題
点があった。[Problems to be Solved by the Invention] In the conventional high temperature ultrasonic transducer as described above, the high temperature ultrasonic transducer (3) is made of lithium niobate having a Curie point of 1200 ° C. and an electromechanical coupling coefficient of 0.17. For,
Although it is excellent in terms of temperature resistance, it has a problem that the S / N ratio is poor because the electromechanical coupling coefficient is small, the conversion efficiency between electric and ultrasonic waves is not good, and the ultrasonic energy is small.
更に、高温用超音波振動子(3)が接合材である銀ペー
スト(4)でステンレスケース(1)の底部内面に接合
され、高温用超音波振動子(3)とステンレスケース
(1)の熱膨張率が異なるから、使用環境温度と保管場
所の温度差及びその繰り返し温度変化によって生じる高
温用超音波振動子(3)或いはステンレスケース(1)
の底部のソリによる指向性の悪化及び高温用超音波振動
子(3)のステンレスケース(1)からの部分的或いは
全面的な剥離を生じ、その結果、高温用超音波振動子
(3)で発生した超音波エネルギーは一部分或いは全部
がステンレスケース(1)に伝搬せず、S/N比の劣化
や、指向角の変化、パルス巾の広がりといった性能劣化
が生じるという問題点があった。Further, the high temperature ultrasonic transducer (3) is bonded to the inner surface of the bottom of the stainless steel case (1) with a silver paste (4) which is a bonding material, and the high temperature ultrasonic transducer (3) and the stainless steel case (1) are joined together. Since the coefficients of thermal expansion are different, a high temperature ultrasonic transducer (3) or a stainless steel case (1) caused by the temperature difference between the operating environment temperature and the storage location and repeated temperature changes
Deterioration of directivity due to warpage at the bottom of the base plate and partial or full peeling of the ultrasonic transducer (3) for high temperature from the stainless steel case (1), resulting in the ultrasonic transducer (3) for high temperature. Part or all of the generated ultrasonic energy does not propagate to the stainless steel case (1), and there is a problem in that performance deterioration such as S / N ratio deterioration, directivity angle change, and pulse width expansion occurs.
この発明はかかる問題点を解消するためになされたもの
で、S/N比が良好で、しかも初期性能の劣化のない耐久
性の優れた高温用超音波トランスジューサを得ることを
目的としている。The present invention has been made to solve the above problems, and an object thereof is to obtain a high temperature ultrasonic transducer having a good S / N ratio and excellent durability without deterioration of initial performance.
[問題点を解決するための手段] この発明に係る高温用超音波トランスジューサは、ステ
ンレスで形成された容器と、容器の底部内面に配設され
た電気機械結合係数の大きい高温用超音波振動子と、容
器の鏡面に形成された底部内面と高温用超音波振動子の
鏡面に形成された容器接触面との間に介在させられたシ
リコーンオイルと、該高温用超音波振動子を容器の底部
内面に固定する固定部材とを備えるように構成したもの
である。[Means for Solving the Problems] A high temperature ultrasonic transducer according to the present invention includes a container made of stainless steel and a high temperature ultrasonic transducer having a large electromechanical coupling coefficient disposed on the inner surface of the bottom of the container. And a silicone oil interposed between the inner surface of the bottom portion formed on the mirror surface of the container and the container contact surface formed on the mirror surface of the high temperature ultrasonic transducer, and the high temperature ultrasonic transducer at the bottom portion of the container. The fixing member is fixed to the inner surface.
[作 用] この発明においては、高温用超音波振動子は電気機械結
合係数の大きいもので形成されているから、電気・超音
波相互の変換効率が良好となり、超音波エネルギーが大
きい。また、高温用超音波振動子の鏡面に形成された容
器接触面がステンレスで形成された容器の鏡面に形成さ
れた底部内面にシリコーンオイルを介して固定部材によ
って固定されているから、高温用超音波振動子の熱膨張
係数がステンレスケースと異なっても、両者の熱膨張係
数が異なることによる使用環境と保管場所の温度変化及
びその繰返し温度変化によって生じる高温用超音波振動
子或いはステンレスケースの底部のソリによる指向性の
悪化及び高温用超音波振動子のステンレスケースからの
部分的或いは全面的な剥離という問題はなくなった。[Operation] In this invention, since the ultrasonic transducer for high temperature is formed of a material having a large electromechanical coupling coefficient, the conversion efficiency between electric and ultrasonic waves is good, and the ultrasonic energy is large. Further, since the container contact surface formed on the mirror surface of the ultrasonic transducer for high temperature is fixed to the inner surface of the bottom formed on the mirror surface of the container made of stainless steel by the fixing member via silicone oil, Even if the coefficient of thermal expansion of the ultrasonic transducer differs from that of the stainless steel case, the temperature of the operating environment and the storage location change due to the difference in the thermal expansion coefficient of both, and the bottom of the ultrasonic case for high temperature or stainless case caused by repeated temperature changes The problem of deterioration of directivity due to the warp and partial or full peeling of the ultrasonic transducer for high temperature from the stainless steel case disappeared.
[実施例] 第1図はこの発明の一実施例を示す断面図である。図に
おいて、従来例と同一の構成は同一符号を付して重複し
た構成の説明を省略する。(1)はステンレスケース
で、その底部内面は鏡面に形成されている。(2)はス
テンレスケース(1)の開口部を密閉するステンレスケ
ースカバーで、ステンレスケース(1)に溶接で組み付
けられて密封容器が構成される。(13)はチタン酸鉛系
セラミックスからなる円板状の高温用超音波振動子で、
ステンレスケース(1)の底部内面と接触させられるケ
ース接触面は鏡面に形成されている。この高温用超音波
振動子(13)はキューリ点が360℃、電気機械結合係数
が0.45、周波数が約2.5MHz、パルス巾が20μsecのもの
で、熱膨張係数が6×10-6である。(14)は複数のネジ
穴を互いに等間隔に有する固定部材の一部を構成する円
板状の押さえ部材保持板で、その外周縁がステレスケー
ス(1)の内周面部に形成された段部にネジ(9)で固
定されていいる。(15)は押さえ部材保持板(14)の各
ネジ穴に螺合される固定部材の一部を構成する振動子押
さえネジ、(16)は振動子押さえネジ(16)の先端に螺
着されたステンレスの押さえ片、(17)は絶縁部材であ
る柔軟性を有するポリイミドで、250℃の耐熱性、1017
Ω/cmの絶縁性、1×107Radオーダ以上の耐放射性を有
する。(18)は液体であるシリコーンオイルで、ステン
レスケース(1)の底部内面と高温用超音波振動子(1
3)との間に介在させられている。[Embodiment] FIG. 1 is a sectional view showing an embodiment of the present invention. In the figure, the same configurations as those of the conventional example are denoted by the same reference numerals, and the description of the duplicated configurations will be omitted. (1) is a stainless steel case, the inner surface of the bottom of which is mirror-finished. (2) is a stainless case cover that seals the opening of the stainless case (1), and is assembled to the stainless case (1) by welding to form a sealed container. (13) is a disc-shaped high-temperature ultrasonic transducer made of lead titanate-based ceramics.
The case contact surface that is brought into contact with the inner surface of the bottom of the stainless steel case (1) is formed into a mirror surface. This high-temperature ultrasonic transducer (13) has a Curie point of 360 ° C., an electromechanical coupling coefficient of 0.45, a frequency of about 2.5 MHz, a pulse width of 20 μsec, and a thermal expansion coefficient of 6 × 10 −6 . (14) is a disc-shaped pressing member holding plate which constitutes a part of a fixing member having a plurality of screw holes at equal intervals, and the outer peripheral edge of which is a step formed on the inner peripheral surface of the Steres case (1). It is fixed to the section with screws (9). (15) is a vibrator holding screw that constitutes a part of a fixing member that is screwed into each screw hole of the holding member holding plate (14), and (16) is screwed to the tip of the vibrator holding screw (16). and pressing pieces of stainless steel, (17) is a polyimide having flexibility, which is an insulating member, 250 ° C. of heat resistance, 10 17
It has insulation of Ω / cm and radiation resistance of 1 × 10 7 Rad order or more. (18) is a liquid silicone oil, which is used for the inner surface of the bottom of the stainless steel case (1) and the ultrasonic transducer for high temperature
It is interposed between and 3).
高温用超音波振動子(13)のステンレスケース(1)へ
の取り付けは、まず、ステンレスケース(1)の底部内
面にシリコーンオイル(18)を塗布し、しかる後に高温
用超音波振動子(13)をシリコーンオイル(18)が塗布
されたステンレスケース(1)の底部内面に配設する。
その高温超音波振動子(13)のケース接触面とは反対側
の面に柔軟性を有する耐熱シートであるポリイミドシー
ト(17)を載置する。次に、各ネジ穴に振動子押さえネ
ジ(15)が螺合された押さえ部材保持板(14)の外周縁
をステンレスケース(1)の内周面部に形成された段部
にネジ(9)で固定する。しかる後、各振動子押さえネ
ジ(15)を螺回し、振動子押さえネジ(15)の先端に取
り付けられている押さえ片(16)によってポリイミドシ
ート(17)を押圧し、これら振動子押さえネジ(15)の
押圧力によって高温用超音波振動子(13)はステンレス
ケース(1)の底部内面に押圧固定される。最後に、ス
テンレスケース(1)にステンレスケースカバー(2)
を溶接で取り付ける。To attach the ultrasonic transducer for high temperature (13) to the stainless steel case (1), first apply silicone oil (18) to the inner surface of the bottom of the stainless steel case (1), and then attach the ultrasonic transducer for high temperature (13). ) Is disposed on the inner surface of the bottom of the stainless steel case (1) coated with silicone oil (18).
A polyimide sheet (17) which is a heat-resistant sheet having flexibility is placed on the surface of the high-temperature ultrasonic oscillator (13) opposite to the case contact surface. Next, the outer peripheral edge of the holding member holding plate (14) screwed with the vibrator holding screw (15) in each screw hole is screwed (9) to the step formed on the inner peripheral surface of the stainless steel case (1). Fix with. After that, each vibrator holding screw (15) is screwed, and the polyimide sheet (17) is pressed by the holding piece (16) attached to the tip of the vibrator holding screw (15). By the pressing force of 15), the high temperature ultrasonic transducer (13) is pressed and fixed to the inner surface of the bottom of the stainless steel case (1). Finally, the stainless steel case (1) is covered with the stainless steel case cover (2).
Attach by welding.
上記のように構成された高温用超音波トランスジューサ
においては、チタン酸鉛系セラミックスからなる高温用
超音波振動子(13)はキューリ点が360℃でトランスジ
ューサ使用条件が温度200℃〜250℃であるから、温度の
影響を受けることなく、正常に動作し、電気的機械結合
係数が0.45と従来例のニオブ酸リチウムからなる高温用
超音波振動子(3)の電気機械結合係数0.17に比べて高
く、電気・超音波相互の変換効率が良好であり、超音波
エネルギーが大きくなってS/N比が向上した。また、チ
タン酸鉛系セラミックスからなる高温用超音波振動子
(13)はその熱膨張係数が6×10-6であり、ステンレス
ケース(1)の熱膨張係数が16×10-6であって、ステン
レスケース(1)と一桁も違う。従って、この実施例の
高温用超音波振動子(15)をステンレスケース(1)の
底部内面に従来のように銀ペースト(4)でハンダ付け
したときには、低温時に高温用超音波振動子(13)をス
テンレスケース(1)にハンダ付けしても、使用状態が
高温であれば、両者の膨張係数の違いから、高温用超音
波振動子(15)或いはステンレスケース(1)がソリを
起こして指向性が悪化し、高温用超音波振動子(15)の
ステンレスケース(1)からの部分的或いは全体的な剥
離を生じさせ、実用に供しえない、ところが、この実施
例ではステンレスケース(1)の底部内面と高温用超音
波振動子(13)との間にシリコーンオイル(18)を介在
させ、その高温用超音波振動子(15)をステンレスケー
ス(1)の底部に押さえ部材保持板(4)と振動子押さ
えネジ(15)からなる固定部材で押圧固定しているか
ら、ステンレスケース(1)と高温用超音波振動子(1
3)との熱膨張係数が大きく異なっても、振動子保管時
と使用時の温度変化及びその繰返し温度変化によって生
じる高温用超音波振動子(13)のソリをシリコーンオイ
ル(18)で吸収し、従来のハンダ付けによって生じるソ
リによる指向性の悪化及び剥離という問題も起らない。
従って、初期性能の劣化のない耐久性の優れた高温用超
音波トランスジューサとなった。In the high-temperature ultrasonic transducer configured as described above, the high-temperature ultrasonic oscillator (13) made of lead titanate-based ceramics has a Curie point of 360 ° C and a transducer usage condition of 200 ° C to 250 ° C. Therefore, it operates normally without being affected by temperature, and the electromechanical coupling coefficient is 0.45, which is higher than the electromechanical coupling coefficient of 0.17 of the conventional high temperature ultrasonic transducer (3) made of lithium niobate. , The conversion efficiency between electric and ultrasonic waves was good, the ultrasonic energy increased and the S / N ratio improved. Further, the high temperature ultrasonic transducer (13) made of lead titanate-based ceramics has a coefficient of thermal expansion of 6 × 10 −6 , and the stainless steel case (1) has a coefficient of thermal expansion of 16 × 10 −6. , It is different from the stainless steel case (1) by an order of magnitude. Therefore, when the high temperature ultrasonic transducer (15) of this embodiment is soldered to the inner surface of the bottom of the stainless steel case (1) with the silver paste (4) as in the conventional case, the high temperature ultrasonic transducer (13) is used at low temperature. ) Even if it is soldered to the stainless steel case (1), if the usage temperature is high, the ultrasonic transducer (15) for high temperature or the stainless steel case (1) will warp due to the difference in expansion coefficient between the two. The directivity deteriorates and the high-temperature ultrasonic transducer (15) is partially or wholly peeled off from the stainless steel case (1) and cannot be put to practical use. However, in this embodiment, the stainless steel case (1) is used. ) A silicone oil (18) is interposed between the inner surface of the bottom of the stainless steel case (1) and the ultrasonic vibrator (13) for high temperature, and the ultrasonic vibrator (15) for high temperature is held on the bottom of the stainless steel case (1). (4) and oscillator pressed Because it was pressed and fixed by a fixing member consisting of a screw (15), stainless steel case (1) and the high temperature ultrasonic transducer (1
Even if the coefficient of thermal expansion is significantly different from that of 3), the silicone oil (18) absorbs the warp of the ultrasonic vibrator for high temperature (13) caused by temperature changes during storage and use of the vibrator and repeated temperature changes. The problem of deterioration of directivity and peeling due to warpage caused by conventional soldering does not occur.
Therefore, the ultrasonic transducer for high temperature has excellent durability without deterioration of initial performance.
更に、シリコーンオイル(18)が高温用超音波振動(1
5)とステンレスケース(1)の底部との間に介在する
ことにより、両者が直接接触すなわち空気層を介在する
場合に比べて音響の伝播効率は格段に向上し、従来のよ
うに銀ペースト(4)で両者を接合した場合と同様の音
響の伝播効率を有する。また、ステンレスケース(1)
の底部内面と高温用超音波振動子(13)のケース接触面
とを鏡面に形成しているから、ステンレスケース(1)
の底部と高温用超音波振動子(15)との間に介在させら
れるシリコーンオイル(16)の層は極めて薄くなり、音
響の伝播効率が向上する。従って、S/N比も向上する。In addition, the silicone oil (18) is exposed to high temperature ultrasonic vibration (1
By interposing it between the stainless steel case (1) and the bottom of the stainless steel case (1), the sound transmission efficiency is significantly improved compared to the case where both are in direct contact, that is, an air layer is interposed, and the silver paste ( It has the same acoustic propagation efficiency as when the two are joined in 4). Also, stainless steel case (1)
Since the inner surface of the bottom of the and the case contact surface of the ultrasonic transducer for high temperature (13) are formed as mirror surfaces, the stainless steel case (1)
The layer of silicone oil (16) interposed between the bottom of the and the high temperature ultrasonic transducer (15) is extremely thin, and the sound propagation efficiency is improved. Therefore, the S / N ratio is also improved.
更にまた、チタン酸鉛系セラミックスからなる高温用超
音波振動子(15)はニオブ酸リチウムのような劈開性が
ないから、割れにくく、熱衝撃にも強い。従って、超音
波振動子製造時の製造歩留りが良好になると共に寿命も
向上した。Furthermore, since the high-temperature ultrasonic vibrator (15) made of lead titanate-based ceramics does not have the cleavability unlike lithium niobate, it is hard to break and strong against thermal shock. Therefore, the manufacturing yield at the time of manufacturing the ultrasonic vibrator was improved and the life was improved.
なお、この実施例では、高温用超音波振動子(13)がキ
ューリ点300℃以上のチタン酸鉛系セラミックスで形成
されているが、これに限るものではなく、ステンレスケ
ース(1)と熱膨張係数が異なっても、電気機械結合係
数が大きく、高温用のものであれば、この発明を適用し
えることは勿論である。例えば、チタン酸鉛系セラミッ
クス以外のものとしてシリコン酸チタン酸鉛系セラミッ
クスがある。また、この実施例では音響を伝播させるた
めにシリコーンオイル(18)を用いているが、オイル、
液体金属等の液体を用いても、シリコーンオイルと同様
の機能を発揮することはいうまでもない。In this embodiment, the high temperature ultrasonic transducer (13) is made of lead titanate-based ceramics having a Curie point of 300 ° C. or higher, but the present invention is not limited to this, and the stainless steel case (1) and the thermal expansion are used. It is needless to say that the present invention can be applied as long as the electromechanical coupling coefficient is large and the coefficient is high temperature even if the coefficients are different. For example, there is lead silicon titanate-based ceramics other than lead titanate-based ceramics. In addition, although silicone oil (18) is used to propagate sound in this embodiment, oil,
It goes without saying that even if a liquid such as a liquid metal is used, the same function as that of the silicone oil is exhibited.
[発明の効果] この発明は以上説明したとおり、電気機械結合係数の大
きい高温用超音波振動子の鏡面に形成された容器接触面
がステンレスで形成された容器の鏡面に形成された底部
内面にシリコーンオイルを介して固定部材によって固定
されているので、電気・超音波相互の変換効率が良好と
なり、超音波エネルギーが大きくなって従来のものに比
べて音響の伝播効率が向上し、それによってS/N比が向
上し、また、高温用超音波振動子の熱膨張係数がステン
レスケースと異なっても、振動子保管時と使用の温度変
化によって生じる高温用超音波振動子或いは容器の底部
のソリを容器の底部内面と高温用超音波振動子間に介在
するシリコーンオイルで吸収し、ソリによる指向性の悪
化及び高温用超音波振動子のステンレスケースからの部
分的或いは全面的な剥離という問題も解決されて初期性
能の劣化のない耐久性の優れた高温用超音波トランスジ
ューサを得ることができるという効果がある。EFFECTS OF THE INVENTION As described above, according to the present invention, the container contact surface formed on the mirror surface of the ultrasonic transducer for high temperature having a large electromechanical coupling coefficient is formed on the inner surface of the bottom portion formed on the mirror surface of the container formed of stainless steel. Since it is fixed by the fixing member via silicone oil, the conversion efficiency between electric and ultrasonic waves is good, the ultrasonic energy is large, and the sound propagation efficiency is improved compared to the conventional one. The N / N ratio is improved, and even if the thermal expansion coefficient of the ultrasonic transducer for high temperature differs from that of the stainless steel case, the warp of the ultrasonic transducer for high temperature or the bottom of the container caused by the temperature change during storage and use of the transducer Is absorbed by the silicone oil interposed between the inner surface of the bottom of the container and the ultrasonic transducer for high temperature, and the directivity deteriorates due to warping and the ultrasonic transducer for high temperature is partially removed from the stainless steel case. Alternatively, there is an effect that the problem of complete peeling can be solved and an ultrasonic transducer for high temperature having excellent durability without deterioration of initial performance can be obtained.
第1図はこの発明の一実施例を示す断面図、第2図は従
来の高温用超音波トランスジューサを示す断面図であ
る。 図において、(1)はステンレスケース(容器)、
(2)はステンレスケースカバー(容器)、(13)は高
温用超音波振動子、(14)は押さえ部材保持板(固定部
材)、(15)は振動子押さえネジ(固定部材)、(17)
はポリイミドシート(絶縁部材)、(18)はシリコーン
オイル(液体)である。FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional high temperature ultrasonic transducer. In the figure, (1) is a stainless steel case (container),
(2) is a stainless steel case cover (container), (13) is an ultrasonic vibrator for high temperature, (14) is a holding member holding plate (fixing member), (15) is a vibrator holding screw (fixing member), (17) )
Is a polyimide sheet (insulating member), and (18) is silicone oil (liquid).
───────────────────────────────────────────────────── フロントページの続き (72)発明者 唐沢 博一 東京都港区芝浦1丁目1番1号 株式会社 東芝本社事務所内 (72)発明者 佐藤 増雄 東京都港区芝浦1丁目1番1号 株式会社 東芝本社事務所内 (56)参考文献 特開 昭55−46620(JP,A) 実開 昭59−189156(JP,U) 特公 昭59−11238(JP,B2) ─────────────────────────────────────────────────── --- Continuation of the front page (72) Inventor Hirokazu Karasawa 1-1-1, Shibaura, Minato-ku, Tokyo Inside Toshiba Headquarters office (72) Inventor Masuo Sato 1-1-1, Shibaura, Minato-ku, Tokyo Toshiba Headquarters Office (56) References Japanese Patent Laid-Open No. 55-46620 (JP, A) Japanese Utility Model 59-189156 (JP, U) Japanese Patent Publication No. 59-11238 (JP, B2)
Claims (2)
部内面に配設された電気機械結合係数の大きい高温用超
音波振動子と、容器の鏡面に形成された底部内面と高温
用超音波振動子の鏡面に形成された容器接触面との間に
介在させられたシリコーンオイルと、該高温用超音波振
動子を容器の底部内面に固定する固定部材とを備えたこ
とを特徴とする高温用超音波トランスジューサ。1. A container made of stainless steel, an ultrasonic vibrator for high temperature having a large electromechanical coupling coefficient disposed on the inner surface of the bottom of the container, an inner surface of the bottom formed on the mirror surface of the container and ultrasonic waves for high temperature. A high temperature characterized by comprising silicone oil interposed between a container contact surface formed on the mirror surface of the vibrator and a fixing member for fixing the high temperature ultrasonic vibrator to the inner surface of the bottom of the container. Ultrasonic transducer.
以上のチタン酸鉛系セラミックスであることを特徴とす
る特許請求の範囲第1項記載の高温用超音波トランスジ
ューサ。2. The high temperature ultrasonic transducer has a Curie point of 300 ° C.
The ultrasonic transducer for high temperature according to claim 1, which is the lead titanate-based ceramics described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62319045A JPH0754353B2 (en) | 1987-12-18 | 1987-12-18 | Ultrasonic transducer for high temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62319045A JPH0754353B2 (en) | 1987-12-18 | 1987-12-18 | Ultrasonic transducer for high temperature |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01162182A JPH01162182A (en) | 1989-06-26 |
| JPH0754353B2 true JPH0754353B2 (en) | 1995-06-07 |
Family
ID=18105894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62319045A Expired - Lifetime JPH0754353B2 (en) | 1987-12-18 | 1987-12-18 | Ultrasonic transducer for high temperature |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754353B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070007862A1 (en) * | 2003-09-18 | 2007-01-11 | Akihisa Adachi | Ultrasonic vibrator and ultrasonic flowmeter employing the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3925692A (en) * | 1974-06-13 | 1975-12-09 | Westinghouse Electric Corp | Replaceable element ultrasonic flowmeter transducer |
| JPS5546620A (en) * | 1978-09-28 | 1980-04-01 | Toshiba Corp | Ultrasonic probe |
| JPS5911238A (en) * | 1982-07-09 | 1984-01-20 | ハ−ト封筒株式会社 | Manufacture of bag |
| JPS59189156U (en) * | 1983-06-03 | 1984-12-15 | 三菱重工業株式会社 | ultrasonic probe |
| JPS6214325U (en) * | 1985-07-11 | 1987-01-28 |
-
1987
- 1987-12-18 JP JP62319045A patent/JPH0754353B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01162182A (en) | 1989-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH1051039A (en) | Flexible thermoelectric module | |
| JPH0754353B2 (en) | Ultrasonic transducer for high temperature | |
| JP2004329495A (en) | Ultrasonic probe | |
| JP2724612B2 (en) | Ultrasonic transducer | |
| JPH0833097A (en) | Piezoelectric element | |
| JP2647197B2 (en) | Ultrasonic transducer and its assembly | |
| JPH0740067B2 (en) | Ultrasonic transducer | |
| JPH02501611A (en) | Ultrasonic device probe equipped with a rod-shaped body consisting of multiple piezoelectric elements | |
| JPH0419858B2 (en) | ||
| JP2003004713A (en) | High temperature sensor | |
| JPS5817660Y2 (en) | ultrasonic cleaner | |
| JP3056861B2 (en) | Ultrasonic probe and method of manufacturing ultrasonic probe | |
| CN223465057U (en) | Piezoelectric ultrasonic transducer array | |
| JP2515322Y2 (en) | Ultrasonic probe for high temperature | |
| JP2549911Y2 (en) | Ultrasonic transducer | |
| JPS62145163A (en) | High temperature probe | |
| JPH02288500A (en) | Ultrasonic wave transducer | |
| JPH0523040Y2 (en) | ||
| JPH0647045A (en) | Ultrasonic probe and its production | |
| JPS5837200Y2 (en) | Sealed button piezoelectric sounding element | |
| JPS5918919B2 (en) | Balanced output acoustic transducer | |
| JPS5838717Y2 (en) | Sealed button type piezoelectric sounding element | |
| JPH0642224Y2 (en) | Ultrasonic transducer seal structure | |
| JPS63127610A (en) | Manufacture of surface acoustic wave device | |
| JP3172991B2 (en) | Support structure for piezoelectric vibrator |