JPH0754864B2 - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH0754864B2 JPH0754864B2 JP21563987A JP21563987A JPH0754864B2 JP H0754864 B2 JPH0754864 B2 JP H0754864B2 JP 21563987 A JP21563987 A JP 21563987A JP 21563987 A JP21563987 A JP 21563987A JP H0754864 B2 JPH0754864 B2 JP H0754864B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- power supply
- discharge
- voltage
- external electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010355 oscillation Effects 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は加工用，医療用に用いられるCO2レーザ発振装
置に関する。Description: TECHNICAL FIELD The present invention relates to a CO 2 laser oscillator used for processing and medical purposes.
従来の技術 従来の軸流タイプCO2レーザ発振器を第３図に示す、レ
ーザ媒質３を電離し、レーザ管４内を放電させる電極１
はレーザ管４内部に存在し、両電極１間に電源２で直流
高電圧を印加していた。 2. Description of the Related Art A conventional axial flow type CO 2 laser oscillator is shown in FIG. 3, an electrode 1 for ionizing a laser medium 3 and discharging the inside of a laser tube 4.
Existed inside the laser tube 4, and a high DC voltage was applied between both electrodes 1 by the power supply 2.
発明が解決しようとする問題点 従来の軸流タイプCO2レーザ発振器の場合、電源電圧の
変動，レーザ媒質である混合ガスの混合比率の変化、長
期使用による電極の経時変化等により、両電極間に直流
電圧を印加しても、内部レーザ媒質が電離されず、放電
ミスを発生させる時があった。この為レーザパワーを取
りださせなかったり、放電管が複数の場合は全数未点燈
のため、パワーの低下を発生させたりする問題点を有し
ていた。Problems to be Solved by the Invention In the case of the conventional axial flow type CO 2 laser oscillator, due to fluctuations in the power supply voltage, changes in the mixing ratio of the mixed gas that is the laser medium, changes over time in the electrodes due to long-term use, etc. Even when a DC voltage was applied to the internal laser medium, the internal laser medium was not ionized, which sometimes caused a discharge error. For this reason, there are problems that the laser power cannot be taken out and that if there are a plurality of discharge tubes, all of them are not lit so that the power is reduced.
そこで本発明は放電ミスや出力パワーの低下を防止する
ことを目的とする。Therefore, an object of the present invention is to prevent discharge mistakes and output power reduction.
問題点を解決するための手段 上記目的を達成するために本発明は、内部電極の放電に
よりレーザ媒質を励起するレーザ管の外周に外部電極を
配設し、前記内部電極の電位を検出する電位検出部の出
力信号により作動するレーザ起動用高周波電源を具備
し、前記レーザ起動用高周波電源の高電圧端を前記外部
電極に接続したものである。Means for Solving the Problems In order to achieve the above object, the present invention provides a potential for detecting the potential of the internal electrode by disposing an external electrode on the outer circumference of a laser tube that excites a laser medium by discharging the internal electrode. A high frequency power source for laser starting which is operated by an output signal of the detection unit is provided, and a high voltage end of the high frequency power source for laser starting is connected to the external electrode.
作用 上記構成により放電ミスを発生した際レーザ放電管内部
の全電離を起こすための補助となる一部電離により瞬時
に放電ミスを防止でき、レーザパワーの低下もしくは未
発生を防止することができる。Operation With the above configuration, when a discharge error occurs, partial discharge that assists all ionization inside the laser discharge tube can prevent discharge error instantaneously and prevent reduction or non-occurrence of laser power.
実施例 本発明の一実施例を第１図に示す、CO2レーザ管４内に
レーザ媒質３が存在し、内部電極１に高電圧２を印加し
た際、何らかの外的条件にて発生するミス放電を防止す
るためにレーザ管４であるガラス管の外側に高周波起動
用電源の電極である外部電極３をガラス管にそわせて配
設し、高周波起動用電源７を設ける。この高周波起動用
電源７はトランス８にて昇圧されたトランス二次側の高
電圧開路内に抵抗9,コンデンサ10,コイル11とギャップ1
2を設けτ構成されている。この高周波起動電源７はコ
ンデンサ10とギャップ12の回路内位置を交換したり、抵
抗を取りはずしたりした時も起動電源としては有効であ
り、これらの定数はレーザ媒質３のインピーダンスによ
って最適値が選出することができる。一般にレーザ放電
は２の高電圧にて行なわれた際、放電が発生すると内部
媒質は放電維持電圧に保たれる為、陰極側電位が上昇す
る。これが何らかの外的条件変化により放電ミスを起こ
した場合、この陰極電位は変わらない。この電位の無変
化を電位検出回路５にて検出し、この信号を起動電源動
作回路６に送り、起動電源を作動させることができる。
放電ミスが発生すると、この信号が即座に起動電源に送
られ、起動電源より発生した、高周波高圧がレーザ管４
の外側よりレーザ管内部のレーザ媒質と印加され、この
電極近傍を中心として内部レーザ媒質を部分的電離させ
ることができる。この部分的電離と誘発されて、レーザ
管内の全電離を可能とすることができ、レーザ発振のミ
ス発振を防止することができる。EXAMPLE One example of the present invention is shown in FIG. 1, in which a laser medium 3 is present in a CO 2 laser tube 4 and a high voltage 2 is applied to an internal electrode 1, a mistake caused by some external condition. In order to prevent electric discharge, an external electrode 3 which is an electrode of a high frequency starting power source is arranged outside the glass tube which is the laser tube 4 along the glass tube, and a high frequency starting power source 7 is provided. This high-frequency starting power supply 7 has a resistor 9, a capacitor 10, a coil 11 and a gap 1 in a high voltage open circuit on the secondary side of the transformer boosted by a transformer 8.
2 is provided and τ is configured. The high frequency starting power supply 7 is effective as a starting power supply even when the positions of the capacitor 10 and the gap 12 in the circuit are exchanged or the resistance is removed, and optimum values of these constants are selected according to the impedance of the laser medium 3. be able to. Generally, when the laser discharge is performed at a high voltage of 2, when the discharge is generated, the internal medium is maintained at the discharge sustaining voltage, so that the cathode side potential rises. If this causes a discharge error due to some change in external conditions, this cathode potential does not change. It is possible to detect this no change in the potential by the potential detection circuit 5 and send this signal to the starting power supply operation circuit 6 to operate the starting power supply.
When a discharge error occurs, this signal is immediately sent to the startup power supply, and the high frequency high voltage generated from the startup power supply causes the laser tube 4
Is applied to the laser medium inside the laser tube from the outside, and the internal laser medium can be partially ionized around this electrode. Induced by this partial ionization, all ionization in the laser tube can be enabled, and erroneous oscillation of laser oscillation can be prevented.
発明の効果 以上説明から明らかなように本発明は、レーザパワーの
低下もしくはレーザ発振ミスを防止し、信頼性の高いレ
ーザ装置を提供することができる。EFFECTS OF THE INVENTION As is clear from the above description, the present invention can prevent a decrease in laser power or a laser oscillation error and provide a highly reliable laser device.
第１図は本発明による一実施例を示す構成図、第２図は
本発明による起動電源の他の実施例を示す回路図、第３
図は従来例を示す構成図である。 １……電極、２……高電圧、３……レーザ媒質、４……
レーザ管、５……電位検出部、６……起動電源動作回
路、７……高周波電源、13……外部電極。FIG. 1 is a configuration diagram showing an embodiment according to the present invention, FIG. 2 is a circuit diagram showing another embodiment of a starting power supply according to the present invention, and FIG.
The figure is a block diagram showing a conventional example. 1 ... Electrode, 2 ... High voltage, 3 ... Laser medium, 4 ...
Laser tube, 5 ... Potential detection unit, 6 ... Startup power supply operation circuit, 7 ... High frequency power supply, 13 ... External electrode.
Claims (3)
るレーザ管の外周に、外部電極を配設し、前記内部電極
の電位を検出する電位検出部の出力信号により作動する
レーザ起動用高周波電源を具備し、前記レーザ起動用高
周波電源の高電圧端を前記外部電極に接続したレーザ発
振装置。1. A high frequency power supply for laser starting, wherein an external electrode is provided on the outer circumference of a laser tube for exciting a laser medium by discharging the internal electrode, and the external electrode is activated by an output signal of a potential detecting section for detecting the potential of the internal electrode. And a high-voltage end of the high-frequency laser starting power source connected to the external electrode.
り昇圧された二次側の高電圧回路に放電ギャップを並列
接続し、前記放電ギャップの放電による共振発生電圧を
出力電圧とする特許請求の範囲第１項記載のレーザ発振
装置。2. A high frequency power supply for laser start-up, wherein a discharge gap is connected in parallel to a secondary high voltage circuit boosted by a transformer, and a resonance generation voltage due to discharge of the discharge gap is used as an output voltage. The laser oscillator according to item 1.
特許請求の範囲第２項記載のレーザ発振装置。3. The laser oscillation device according to claim 2, wherein the high voltage circuit comprises an LC series resonance circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21563987A JPH0754864B2 (en) | 1987-08-28 | 1987-08-28 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21563987A JPH0754864B2 (en) | 1987-08-28 | 1987-08-28 | Laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6457772A JPS6457772A (en) | 1989-03-06 |
| JPH0754864B2 true JPH0754864B2 (en) | 1995-06-07 |
Family
ID=16675736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21563987A Expired - Lifetime JPH0754864B2 (en) | 1987-08-28 | 1987-08-28 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754864B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0788201A1 (en) | 1996-02-02 | 1997-08-06 | Shibuya Kogyo Co., Ltd | Laser oscillator |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3552973B2 (en) | 1999-05-31 | 2004-08-11 | シャープ株式会社 | Photoconductor unit and image forming apparatus |
-
1987
- 1987-08-28 JP JP21563987A patent/JPH0754864B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0788201A1 (en) | 1996-02-02 | 1997-08-06 | Shibuya Kogyo Co., Ltd | Laser oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6457772A (en) | 1989-03-06 |
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