JPH0758538B2 - Magnetic recording body and manufacturing method thereof - Google Patents
Magnetic recording body and manufacturing method thereofInfo
- Publication number
- JPH0758538B2 JPH0758538B2 JP61105930A JP10593086A JPH0758538B2 JP H0758538 B2 JPH0758538 B2 JP H0758538B2 JP 61105930 A JP61105930 A JP 61105930A JP 10593086 A JP10593086 A JP 10593086A JP H0758538 B2 JPH0758538 B2 JP H0758538B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- recording
- magnetic recording
- anisotropy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000758 substrate Substances 0.000 claims description 16
- 230000003746 surface roughness Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 230000005415 magnetization Effects 0.000 description 8
- 239000010408 film Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000010952 cobalt-chrome Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、磁気記録媒体のうちとくに垂直磁気記録媒体
に関する。Description: TECHNICAL FIELD The present invention relates to a perpendicular magnetic recording medium, particularly a magnetic recording medium.
(従来の技術) 磁気記録装置の記録密度の向上は、斯界の変わらぬ趨勢
である。ここに用いられる磁気記録媒体は、従来酸化鉄
微粒子を樹脂に分散させ塗布したいわゆるコーティング
媒体が用いられてきた。近年メッキ法やスパッタ法によ
り作製したCo合金の長手記録(磁化が面内方向)薄膜媒
体では、表面にスジ上の凹凸を形成しスジ方向に異方性
を発生させ磁気特性を改善させて記録密度特性を向上さ
せている。一方、同じくスパッタ法や蒸着法により作製
したCoCr媒体に代表される垂直磁気記録媒体が提案さ
れ、前述の長手記録を越える記録密度が達成されてい
る。(Prior Art) Improvement of the recording density of a magnetic recording device is a constant trend in the field. As a magnetic recording medium used here, a so-called coating medium in which iron oxide fine particles are dispersed and applied in a resin has been conventionally used. Long-term recording of Co alloys (magnetization is in-plane) made by plating or sputtering in recent years, and recording is performed by forming unevenness on the surface and generating anisotropy in the stripe direction to improve magnetic characteristics. Improves density characteristics. On the other hand, a perpendicular magnetic recording medium represented by a CoCr medium similarly produced by a sputtering method or a vapor deposition method has been proposed, and a recording density exceeding the above-mentioned longitudinal recording has been achieved.
この垂直磁気媒体において、本発明者らは第45回応用物
理学会学術講演会(予稿集P372)にて基板上に表面粗さ
Rmaxがおよそ1000Å以上のスジ状凹凸を形成しスジ方向
に面内の容易軸が発生することを報告した。In this perpendicular magnetic medium, the inventors of the present invention presented the surface roughness on the substrate at the 45th Annual Meeting of the Japan Society of Applied Physics (Proceedings P372).
It was reported that an in-plane easy axis is generated in the stripe direction by forming stripe unevenness with Rmax of about 1000Å or more.
(発明が解決しようとする問題点) 長手記録媒体においては、磁気ヘッドで記録した際に発
生する反磁界によって磁化が乱されることなく急峻な磁
化遷移を達成するには、長手方向に異方性を付与させた
り保磁力を大きくしている。一方、垂直記録媒体におい
ては、良好な垂直異方性を付与して長手方向には反磁界
を発生させないようにし高密度記録を達成している。し
かしながら垂直異方性が比較的小さい場合には、長手成
分の面内磁化が発生し記録密度を劣化させる。したがっ
て長手方向に付き合せの磁化を発生させないためには長
手方向と直角に面内異方性を付与すればよく、前述の文
献のような表面形状を形成すれば面内異方性を付与でき
る。しかしながら、記録体の平滑性の観点から基板上に
1000Å以上の表面粗さがある場合、媒体−ヘッド間のス
ペーシングの増大による記録密度特性の劣化及びヘッド
との摺動により摩擦、摩耗が増大し信頼性を保証するこ
とが難しく、さらに表面粗さが大きくなりすぎると垂直
磁気異方性を劣化させた。また、基板加工の観点から本
目的を達成させるためには、基板上に円周方向と直角に
凹凸を形成しなければならなく加工上難かしい面があっ
た。(Problems to be Solved by the Invention) In a longitudinal recording medium, in order to achieve a steep magnetization transition without disturbing the magnetization due to a demagnetizing field generated when recording is performed by a magnetic head, anisotropic magnetization in the longitudinal direction is required. It imparts properties and increases coercive force. On the other hand, in a perpendicular recording medium, good perpendicular anisotropy is imparted so that a demagnetizing field is not generated in the longitudinal direction to achieve high density recording. However, when the perpendicular anisotropy is relatively small, in-plane magnetization of the longitudinal component is generated and the recording density is deteriorated. Therefore, in order to prevent the generation of tangential magnetization in the longitudinal direction, in-plane anisotropy may be imparted at right angles to the longitudinal direction, and in-plane anisotropy can be imparted by forming the surface shape as in the above-mentioned document. . However, from the viewpoint of the smoothness of the recording material,
When the surface roughness is 1000 Å or more, it is difficult to guarantee reliability because the recording density characteristics deteriorate due to the increased spacing between the medium and the head, and friction and wear increase due to sliding with the head. If it becomes too large, the perpendicular magnetic anisotropy deteriorates. Further, in order to achieve this object from the viewpoint of substrate processing, it is necessary to form irregularities on the substrate at right angles to the circumferential direction, which is a difficult surface to process.
本発明の目的は、この問題点を解決した磁気記録媒体と
その製造方法を提供することにある。An object of the present invention is to provide a magnetic recording medium and a method for manufacturing the same which solves this problem.
(問題点を解決するための手段) この発明の要旨とするところは、基板上に垂直磁気異方
性を有する磁性膜を形成した磁気記録体において磁性膜
の膜面内の記録トラックと直角方向に異方性を有する磁
気記録体と、基板上に表面粗さが10Åから800Åの範囲
のミゾもしくはスジ状の凹凸を記録トラック方向に形成
した後、垂直磁気異方性を有する磁性膜を基板上に形成
する磁気記録体の製造方法である。(Means for Solving Problems) The gist of the present invention is that in a magnetic recording body in which a magnetic film having perpendicular magnetic anisotropy is formed on a substrate, a direction perpendicular to a recording track in the film surface of the magnetic film. A magnetic recording material having anisotropy in the direction of the surface, and after forming grooved or streak-shaped irregularities having a surface roughness in the range of 10Å to 800Å on the substrate, a magnetic film having perpendicular magnetic anisotropy is formed on the substrate. It is a method of manufacturing a magnetic recording body formed on the top.
(作用) 本発明は所定の表面粗さのミゾもしくはスジ状の凹凸を
形成することにより従来方法と異なりミゾもしくはスジ
状の方向と直角方向に磁気異方性を発生できることを初
めて見出しことによりなされたものである。(Function) The present invention was made by finding for the first time that magnetic anisotropy can be generated in the direction perpendicular to the groove or stripe direction, unlike the conventional method, by forming the groove or stripe unevenness having a predetermined surface roughness. It is a thing.
(実施例) 第1図及び第2図にそれぞれ本発明に用いたミゾ及びス
ジ状の凹凸を形成した基板1上に垂直磁気異方性を有し
た磁性膜2を形成した本実施例の構成を示す。(Embodiment) The constitution of the present embodiment in which a magnetic film 2 having perpendicular magnetic anisotropy is formed on a substrate 1 in which grooves and streaks are used in the present invention, as shown in FIGS. 1 and 2, respectively. Indicates.
ここで示した基板は、レジストによりパターンを形成し
イオンエッチング法により凹凸を形成したものまたはプ
ラスチック材料を凹凸を形成した金型を用いてインジェ
クションして成形したものが用いられる。As the substrate shown here, a substrate in which a pattern is formed by a resist and unevenness is formed by an ion etching method, or a plastic material which is molded by injection using a mold in which unevenness is formed is used.
第3図は、SiO2基板上にレジストによりパターンを形成
した反応イオンエッチング法により第1図の如く凹凸を
種々の表面粗さtで形成した基板1上に同一スパッタリ
ングにおいてCoCr垂直磁気異方性薄膜(0.3μm厚)を
形成した記録媒体の面内の異方性磁界定数Kuと凹凸の高
さtとの関係を示す。第1図で示す凹凸のピッチA,Bは
それぞれ1.0μm,1.0μmであった。FIG. 3 shows CoCr perpendicular magnetic anisotropy in the same sputtering on the substrate 1 on which unevenness is formed with various surface roughness t as shown in FIG. 1 by the reactive ion etching method in which a pattern is formed on a SiO 2 substrate with a resist. The relationship between the in-plane anisotropic magnetic field constant Ku of a recording medium having a thin film (thickness of 0.3 μm) and the height t of the unevenness is shown. The pitches A and B of the irregularities shown in FIG. 1 were 1.0 μm and 1.0 μm, respectively.
表面粗さtがおよそ1000Å以上では、ミゾ方向と磁界方
向が平行のときθ=0゜とすると第4図に示すトルク曲
線に見られるミゾ方向を容易軸とする面内異方性が生じ
る。表面粗さtが10Åから800Åでは第5図に示すトル
ク曲線に見られるミゾ方向と直角に容易軸とする面内異
方性が生じる。When the surface roughness t is about 1000 Å or more, when the groove direction is parallel to the magnetic field direction and θ = 0 °, in-plane anisotropy with the easy axis in the groove direction shown in the torque curve shown in FIG. 4 occurs. When the surface roughness t is from 10 Å to 800 Å, in-plane anisotropy with an easy axis perpendicular to the groove direction shown in the torque curve shown in FIG. 5 occurs.
(発明の効果) このように、磁気記録媒体として実用に供する表面粗さ
においてミゾもしくはスジ状の凹凸を形成することによ
りミゾ方向に直角に磁気異方性を有する磁気記録が提供
される。これによりミゾ方向と平行に記録トラックを設
定することにより、磁気ヘッドで記録されたビットの磁
化の面内成分は、ビット境界において互いに突き合うこ
となく急峻な磁化遷移が達成され記録密度特性が向上す
る。また基板加工もディスク円板上に同心円状に加工出
来るため加工の観点からも好ましい。(Effect of the Invention) As described above, magnetic recording having magnetic anisotropy at right angles to the groove direction is provided by forming groove or stripe unevenness in the surface roughness practically used as a magnetic recording medium. By setting the recording track parallel to the groove direction, the in-plane component of the magnetization of the bit recorded by the magnetic head does not abut each other at the bit boundary, and a sharp magnetization transition is achieved to improve the recording density characteristic. To do. Further, the substrate can be processed concentrically on the disc disk, which is preferable from the viewpoint of processing.
第1図及び第2図は、本発明の磁気記録体の構成図、図
中の1は基板、2は垂直磁気異方性媒体、第3図は、ミ
ゾの表面粗さと磁気異方性定数の関係を示す図、第4,5
図はトルク曲線を示す図。1 and 2 are configuration diagrams of a magnetic recording medium of the present invention, in which 1 is a substrate, 2 is a perpendicular magnetic anisotropic medium, and FIG. 3 is a surface roughness of a groove and a magnetic anisotropy constant. Diagram showing the relationship between the 4th and 5th
The figure shows a torque curve.
Claims (2)
形成した磁気記録体において、前記基板上に表面粗さが
10Åから800Åの範囲の溝もしくはすじ状の凹凸を磁性
膜の膜面内の記録トラックと同方向に設けたことを特徴
とする磁気記録体。1. A magnetic recording body having a magnetic film having perpendicular magnetic anisotropy formed on a substrate, wherein the surface roughness is
A magnetic recording medium, characterized in that grooves or streaks in the range of 10 Å to 800 Å are provided in the same direction as the recording tracks in the film surface of the magnetic film.
の溝もしくはすじ状の凹凸を記録トラック方向に形成し
た後、垂直磁気異方性を有する磁性膜を基板上に形成す
ることを特徴とする磁気記録体の製造方法。2. A method for forming a magnetic film having perpendicular magnetic anisotropy on a substrate after forming grooves or streaks having a surface roughness in the range of 10Å to 800Å on the substrate in the recording track direction. A method for manufacturing a characteristic magnetic recording medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61105930A JPH0758538B2 (en) | 1986-05-08 | 1986-05-08 | Magnetic recording body and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61105930A JPH0758538B2 (en) | 1986-05-08 | 1986-05-08 | Magnetic recording body and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62262217A JPS62262217A (en) | 1987-11-14 |
| JPH0758538B2 true JPH0758538B2 (en) | 1995-06-21 |
Family
ID=14420572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61105930A Expired - Lifetime JPH0758538B2 (en) | 1986-05-08 | 1986-05-08 | Magnetic recording body and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758538B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003338019A (en) | 2002-05-22 | 2003-11-28 | Hitachi Ltd | Magnetic recording medium and method of manufacturing the same |
| JP2004086968A (en) * | 2002-08-26 | 2004-03-18 | Sharp Corp | Magnetic recording media |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924432A (en) * | 1982-07-29 | 1984-02-08 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| JPS61182624A (en) * | 1985-02-07 | 1986-08-15 | Ulvac Corp | Vertical magnetic recording medium |
-
1986
- 1986-05-08 JP JP61105930A patent/JPH0758538B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62262217A (en) | 1987-11-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |