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JPH0766513B2 - Magnetic recording medium - Google Patents
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JPH0766513B2 - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH0766513B2
JPH0766513B2 JP17694186A JP17694186A JPH0766513B2 JP H0766513 B2 JPH0766513 B2 JP H0766513B2 JP 17694186 A JP17694186 A JP 17694186A JP 17694186 A JP17694186 A JP 17694186A JP H0766513 B2 JPH0766513 B2 JP H0766513B2
Authority
JP
Japan
Prior art keywords
magnetic recording
recording medium
film
thin film
tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17694186A
Other languages
Japanese (ja)
Other versions
JPS6334716A (en
Inventor
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17694186A priority Critical patent/JPH0766513B2/en
Publication of JPS6334716A publication Critical patent/JPS6334716A/en
Publication of JPH0766513B2 publication Critical patent/JPH0766513B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する磁気テープ,磁気ディ
スク等の磁気記録媒体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium such as a magnetic tape or a magnetic disk suitable for high density magnetic recording.

従来の技術 磁気記録の高密度化の進歩は目覚しく、結晶剤中に、強
磁性微粒子を分散した塗布型磁性層を用いて極限まで高
められてきており、今後は、強磁性金属薄膜を磁気記録
層とする媒体により、高密度化が進むことが予測され
る。
2. Description of the Related Art Advances in high density magnetic recording have been remarkable, and they have been maximized by using a coating type magnetic layer in which ferromagnetic particles are dispersed in a crystallizing agent. Depending on the layered medium, higher densification is expected.

一方、高密度化の前提として磁気ヘッドと磁気記録媒体
の高速摺動の安定化を中心にした、ヘッド・媒体間のイ
ンタフェース上の課題を解決することが必要となる。
On the other hand, it is necessary to solve the problem of the interface between the head and the medium, which is centered on the stabilization of high-speed sliding between the magnetic head and the magnetic recording medium as a premise of increasing the density.

磁気記録媒体側からみると、耐久性と磁気変換特性とり
わけ、信号出力だけでなくノイズ(以下、S/Nと記す)
の改良された特性をいかに高水準で調和するかが、重要
で、強磁性金属薄膜を部分酸化する方法、磁気記録層を
微細に凹凸化する方法、保護膜を設ける方法等が各方面
にて検討されている(例えば米国特許第4,564,549号明
細書,米国特許第4,565,734号明細書)。
From the perspective of the magnetic recording medium, the durability and magnetic conversion characteristics, in particular, not only signal output but also noise (hereinafter referred to as S / N)
It is important to harmonize the improved characteristics of the above in a high level, and the method of partially oxidizing the ferromagnetic metal thin film, the method of finely roughening the magnetic recording layer, the method of providing a protective film, etc. Considered (eg, US Pat. No. 4,564,549, US Pat. No. 4,565,734).

発明が解決しようとする問題点 しかしながら上記した構成では、記録波長が、0.8μm
程度であれば、実用に供し得る系もあるが、0.7〜0.3μ
mなどと、より短波長化が進むと、十分なS/Nが確保出
来ないため改良が望まれている。
Problems to be Solved by the Invention However, in the above configuration, the recording wavelength is 0.8 μm.
There is a system that can be put to practical use if the degree is 0.7 to 0.3 μ.
As the wavelength becomes shorter, such as m, sufficient S / N cannot be secured, so improvement is desired.

本発明は、上記事情に鑑みなされたもので、短波長での
十分なS/Nを与えることの出来る磁気記録媒体を提供す
るものである。
The present invention has been made in view of the above circumstances, and provides a magnetic recording medium capable of giving a sufficient S / N at a short wavelength.

問題点を解決するための手段 上記した問題点を解決するために本発明の磁気記録媒体
は、高分子フィルム上に、柱状結晶粒子から成る薄膜磁
気記録層を配し、該柱状結晶粒子の表面が、炭素薄膜で
被覆されたようにしたものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a thin film magnetic recording layer composed of columnar crystal grains on a polymer film, and the surface of the columnar crystal grains. , Which is covered with a carbon thin film.

作用 本発明の磁気記録媒体は、上記した構成により、磁性層
と磁気ヘッドの摺動時の摩擦抵抗が著しく小さくするこ
とができ、保護膜として別途配設するのと異なり、結晶
粒子を被覆しているので、炭素薄膜の厚みが小さくでき
るので、スペーシング損失が少なくなり、良好なS/Nを
与えることができることになる。
The magnetic recording medium of the present invention has the above-described configuration, which can significantly reduce the frictional resistance when the magnetic layer and the magnetic head slide, and unlike the case where the magnetic layer is separately provided as a protective film, the magnetic recording medium is coated with crystal particles. Since the thickness of the carbon thin film can be reduced, the spacing loss is reduced and a good S / N can be provided.

実施例 以下、図面を参照しながら、本発明の実施例について詳
しく説明する。
Examples Hereinafter, examples of the present invention will be described in detail with reference to the drawings.

第1図は本発明の実施例に係る磁気記録媒体の拡大断面
図で、図中、1は厚みが9.5μmのポリエチレンテレフ
タレートフィルムのごとき高分子フィルム、2は炭素薄
膜で被覆された柱状結晶微粒子から成る磁気記録層、3
は潤滑層である。
FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention, in which 1 is a polymer film such as a polyethylene terephthalate film having a thickness of 9.5 μm, and 2 is columnar crystal fine particles coated with a carbon thin film. Magnetic recording layer consisting of 3
Is a lubricating layer.

第2図は柱状結晶微粒子の模式断面図で、第2図で、4
は柱状結晶粒子の該部で、磁性をになう部分である。5
は第1の炭素薄膜、6は第2の炭素薄膜で、磁気ヘッド
と接触する側の5は、後述する様に、ダイヤモンド状硬
質炭素(以下、D.L.C膜と記す)膜であることが好まし
い。必須用件でないのは、炭素薄膜で構成し、その上に
D.L.C膜を別途配することで、磁気記録媒体を構成して
もよいからである。
FIG. 2 is a schematic cross-sectional view of columnar crystal fine particles.
Is the part of the columnar crystal grains, which is the part that becomes magnetized. 5
Is a first carbon thin film, 6 is a second carbon thin film, and 5 on the side contacting the magnetic head is preferably a diamond-like hard carbon (hereinafter referred to as DLC film) film as described later. What is not essential is that it consists of a carbon thin film and
This is because the magnetic recording medium may be configured by separately disposing the DLC film.

第3図は、本発明の磁気記録媒体の製造に用いた蒸着機
の一例の要部構成図で、図中、7は真空槽で、真空槽内
部8は、真空排気系9で、常に真空に保たれるように構
成される。10は高分子フィルム、11は巻出し軸、12は巻
取り軸、13はクーリングキャンで、矢印Fの方向に回転
する。14は電子ビーム蒸発源、15は限定された蒸気流
で、16は強化ガラスから成るプラズマ管、17はプラズマ
噴射孔、18は外部高周波励起コイル、19はメッシュ状電
極で、基板に対して、正電位に保たれるよう構成する。
20はガス導入孔である。
FIG. 3 is a schematic view of an essential part of an example of a vapor deposition machine used for manufacturing the magnetic recording medium of the present invention. In the figure, 7 is a vacuum chamber, 8 is a vacuum exhaust system 9, and a vacuum chamber 9 is used. Configured to be kept at. 10 is a polymer film, 11 is an unwinding shaft, 12 is a winding shaft, and 13 is a cooling can, which rotates in the direction of arrow F. 14 is an electron beam evaporation source, 15 is a limited vapor flow, 16 is a plasma tube made of tempered glass, 17 is a plasma injection hole, 18 is an external high-frequency excitation coil, 19 is a mesh electrode, with respect to the substrate, It is configured to be kept at a positive potential.
20 is a gas introduction hole.

第3図の装置を用いて、本実施例の磁気記録媒体を製造
した。
A magnetic recording medium of this example was manufactured using the apparatus shown in FIG.

高分子フィルムとして、厚み9.5μmのポリエチレンテ
レフタレートフィルムを用い、Co−Ni(Ni:20wt%)を
電子ビーム蒸着した。最小入射角は40度で、膜厚は0.16
μmに制御した。蒸着時に、プラズマ管より、カーボン
プラズマを発生させ、照射を行った。Arとメタンを1:1
の比率で導入し、13.56MHzの高周波で励起して、カーボ
ンにエネルギーを付与し、蒸着の最小入射角部にて、ダ
イヤモンド状硬質炭素となる条件で照射した。D.L.C膜
は約110Åとした。19は1200Vに保った。
As a polymer film, a polyethylene terephthalate film having a thickness of 9.5 μm was used, and Co—Ni (Ni: 20 wt%) was electron beam evaporated. The minimum incident angle is 40 degrees and the film thickness is 0.16
It was controlled to μm. At the time of vapor deposition, carbon plasma was generated from a plasma tube for irradiation. Ar and methane 1: 1
Was introduced at a rate of 13.56 MHz, excited at a high frequency of 13.56 MHz, energy was applied to the carbon, and irradiation was performed under the condition that diamond-like hard carbon was formed at the minimum incident angle portion of vapor deposition. The DLC film was about 110Å. 19 kept at 1200V.

この蒸着膜の上に、パーフロロベヘン酸の蒸着膜を約60
Å配した。比較テープは、蒸着中に酸素を導入し、D.L.
C膜の代わりにCo,Niの酸化膜(表面酸化層厚150Å)を
柱状結晶微粒子の表面に配したものを磁気記録層とし、
表面にパーフロロベヘン酸約60Å配したものをテープ
A、D.L.C膜約100Å、パーフロロベヘン酸約60Åを積層
したものを、テープBとして、比較した。
About 60 vapor-deposited film of perfluorobehenic acid is deposited on this vapor-deposited film.
Å I distributed it. The comparison tape is DL
Instead of the C film, an oxide film of Co and Ni (surface oxide layer thickness 150Å) is arranged on the surface of the columnar crystal particles to form a magnetic recording layer.
Tape A was prepared by arranging about 60Å perfluorobehenic acid on the surface, tape B was prepared by laminating about 100Å DLC film, and tape B was prepared by laminating about 60Å perfluorobehenic acid.

波長0.6μmを記録した時のS/Nは、本実施例を0(dB)
とすると、比較テープAは−1(dB),テープBは−3
(dB)であった。くり返し使用でのS/N低下について
は、−5℃では、100回,200回で本実施例は−0.4(d
B),−0.5(dB)であったが、比較テープAは、−4.8
(dB),−5.1(dB)、テープBでは−4.4(dB),−4.
5(dB)であった。40℃5%RHでは、300回のくり返し使
用でS/Nは、本実施例で−0.9(dB)、テープAでは−6.
4(dB)、テープBでは−4.5(dB)であった。
The S / N when recording a wavelength of 0.6 μm is 0 (dB) in this embodiment.
Then, the comparison tape A is -1 (dB) and the tape B is -3.
It was (dB). Regarding the S / N decrease with repeated use, at −5 ° C., 100 times and 200 times, the present example shows −0.4 (d
B), -0.5 (dB), but the comparative tape A is -4.8
(DB), -5.1 (dB), Tape B: -4.4 (dB), -4.
It was 5 (dB). At 40 ° C. and 5% RH, the S / N after repeated use 300 times is −0.9 (dB) in this embodiment, and the tape A is −6.
It was 4 (dB) and -4.5 (dB) for tape B.

実施例では、高分子フィルムとして、ポリエチレンテレ
フタレートフィルムとしたが、他にポリイミド,ポリア
ミドイミド,ポリフェニレンサルファイド,ポリエチレ
ンナフタレート等でもよく、微粒子塗布層,ミミズ状隆
起層などを配したものでもよい。
In the examples, a polyethylene terephthalate film was used as the polymer film, but polyimide, polyamideimide, polyphenylene sulfide, polyethylene naphthalate, or the like may be used, or a fine particle coating layer, an earthworm-like ridge layer, or the like may be arranged.

炭素被覆した柱状結晶微粒子は、Co−Niの他に、Co−F
e,Co−Ag,Fe−Ag,Co−Cr,Co−Ce,Co−Ca,Co−Sm,Co−T
i,Co−W,Co−Mo,Co−Mg,Co−Ni−Zr,Co−Ni−Nb,Co−Cr
−Nb等でもよい。
Columnar crystal fine particles coated with carbon include Co-F and Co-F.
e, Co-Ag, Fe-Ag, Co-Cr, Co-Ce, Co-Ca, Co-Sm, Co-T
i, Co-W, Co-Mo, Co-Mg, Co-Ni-Zr, Co-Ni-Nb, Co-Cr
-Nb or the like may be used.

発明の効果 以上のように本発明によれば、短波長記録で良好なS/N
を保った状態でくり返し使用できるといったすぐれた効
果がある。
EFFECTS OF THE INVENTION As described above, according to the present invention, a good S / N ratio can be obtained in short wavelength recording.
It has an excellent effect that it can be used repeatedly while maintaining.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の実施例の磁気記録媒体の拡大断面図、
第2図は炭素被覆柱状結晶微粒子の模式断面図、第3図
は本発明の実施例の磁気記録媒体を製造するのに用いた
蒸着装置の一例の要部断面構成図である。 1……高分子フィルム、2……磁気記録層、4……核
部、5……炭素薄膜、6……炭素薄膜、10……高分子フ
ィルム、14……電子ビーム蒸発源、16……プラズマ管、
18……高周波励起コイル。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention,
FIG. 2 is a schematic cross-sectional view of carbon-coated columnar crystal fine particles, and FIG. 3 is a cross-sectional configuration diagram of a main part of an example of a vapor deposition apparatus used to manufacture a magnetic recording medium according to an embodiment of the present invention. 1 ... Polymer film, 2 ... Magnetic recording layer, 4 ... Core part, 5 ... Carbon thin film, 6 ... Carbon thin film, 10 ... Polymer film, 14 ... Electron beam evaporation source, 16 ... Plasma tube,
18 …… High frequency excitation coil.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】高分子フィルム上に、柱状結晶粒子から成
る薄膜磁気記録層を配し、該柱状結晶粒子の表面が炭素
薄膜で被覆されていることを特徴とする磁気記録媒体。
1. A magnetic recording medium characterized in that a thin film magnetic recording layer comprising columnar crystal grains is arranged on a polymer film, and the surface of the columnar crystal grains is covered with a carbon thin film.
JP17694186A 1986-07-28 1986-07-28 Magnetic recording medium Expired - Fee Related JPH0766513B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17694186A JPH0766513B2 (en) 1986-07-28 1986-07-28 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17694186A JPH0766513B2 (en) 1986-07-28 1986-07-28 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS6334716A JPS6334716A (en) 1988-02-15
JPH0766513B2 true JPH0766513B2 (en) 1995-07-19

Family

ID=16022414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17694186A Expired - Fee Related JPH0766513B2 (en) 1986-07-28 1986-07-28 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0766513B2 (en)

Also Published As

Publication number Publication date
JPS6334716A (en) 1988-02-15

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