JPH0767546B2 - Mixed powder spray deposition equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for spraying and depositing mixed powders, and in particular, in a manufacturing process of metal materials, organic materials, inorganic materials and composite materials thereof, it is possible to quantitatively and accurately measure fine particle powders of different kinds in advance. A spatially finely arranged laminated body is formed, and thereafter, through a manufacturing process such as sintering, compression, reaction, and polymerization, a particle arranged laminated body for producing a material having a finely structured and compositionally controlled is produced. For the device. An apparatus for producing such a particle array laminate has been attracting attention as an indispensable technique in the production process of various functional materials such as electrical, electronic, mechanical, thermal, chemical and others.

[0002]

2. Description of the Related Art Conventionally, the microfabrication technology for manufacturing various kinds of functional materials as described above requires a great deal of labor, labor and time, and the materials will not be produced until they have undergone complicated working steps. Has produced something that can be used. Under such circumstances, as a method of creating a material having a new function, a material having a property of spatially varying a non-uniform fine structure from a material having a conventional uniform and uniform structure and composition Is being designed and manufactured.

[0003]

However, the prior art for producing a material having a uniform and uniform structure or composition or a non-uniform and non-uniform spatial distribution obtains a required mixing ratio of particle powder in each layer. As described above, the powders are manually mixed and laminated, so that the mixing ratio is stepwise for each layer, and it is difficult to smoothly change the mixing ratio. As a result, there is a problem in that even if the material is further processed based on the obtained material to obtain a final product, it is impossible to obtain a material having good characteristics.

The present invention has been made in view of the above conventional problems, and an object of the present invention is to provide a mixed powder jet deposition apparatus capable of easily producing a functional material having a very smooth mixing ratio of particle powders. To aim.

[0005]

The present invention comprises at least two aspects.
A powder container for separately storing different types of particle powders mixed with the slurry-forming liquid, and each powder container were connected via a powder supply amount controller, and had a dropping pore at the lower end. A mixing / dripping container, a stirring blade provided inside the mixing / dripping container, an ultrasonic transducer arranged in the mixing / dripping container so that a vibration lower end approaches the dropping pores, and a lower part of the mixing / dripping container. And a nozzle for receiving a dropping slurry from the dropping pores and injecting it with compressed air, and a mixed powder jetting and depositing device, and a lower surface of the mixing and dropping container, A spray depositing device for mixed powder, characterized by forming a cylindrical dropping fixed amount portion that surrounds the dropping pores and extends downward, and the nozzle so as to receive the dropping slurry from the dropping pores. The recess formed on the upper surface of the An air ejection hole for ejecting compressed air,
Injection deposition of mixed powder, comprising: a suction guide hole connected to the bottom of the recess and having a tip adjacent to the air ejection hole; and a liquid supply needle for supplying a slurry-forming liquid to the recess. It relates to the device.

[0006]

According to the first aspect of the invention, the particle powder mixed with the slurry forming liquid in each powder container is
The powder is introduced into the mixing / dripping container so that the predetermined mixing ratio is achieved by adjusting the powder supply amount controller.

The powder slurry from each powder container supplied to the mixing and dropping container is uniformly mixed by the mixing action of the stirring blade and the ultrasonic vibrator, and the mixed slurry powder is the dropping pores of the mixing and dropping container. From the nozzle is quantitatively supplied to the nozzle, and the slurry powder dropped on the nozzle is jetted by the suction action of compressed air.

At this time, even if the mixing ratio of the slurry powder supplied from the powder container to the mixing / dripping container is changed by adjusting the powder supply amount controller, the mixing / dripping container already has the required mixing ratio. Since the powder slurry is mixed and accommodated and a new powder slurry is added to and mixed with this powder slurry, the change in the mixing ratio of the powder that is dropped and injected into the nozzle from the dropping pores is , Gradually, it will be done steplessly. Therefore, the functional material formed by jetting the nozzle has a very smooth mixing ratio of the particle powder.

According to the second aspect of the present invention, the size of one droplet of the slurry dropped from the dropping pores is made constant by the cylindrical dropping quantitative portion formed so as to surround the dropping pores and extend downward. As a result, the amount of the particle powder ejected from the nozzle becomes stable, and the distribution of the particle powder of the functional material becomes stable.

According to the third aspect of the present invention, in the nozzle in which the drip slurry received from the drip pore is received by the dimple, and the drip slurry received by the dimple is injected by suction of compressed air, the drip slurry is supplied to the dimple. Since the slurry forming liquid is supplied through the liquid needle, the powder of the dropped slurry in the recess can be thinly and uniformly jetted, and the slurry powder can be dried even when the amount of the slurry powder is small. It is possible to perform stable injection without doing so.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the invention of claim 1, in which 1 is an XY stage provided so as to be movable back and forth X and left and right Y in a horizontal plane. A heating plate 2 is provided on the heating plate 1, and a sample 3 is formed on the heating plate 2, and a jetting and depositing device 4 of the mixed powder of the present invention is arranged above the sample 3.

The mixed powder jetting and depositing device 4 has a plurality of powder container 7 and 8 on the upper part thereof, in which different particle powders 5A and 5B are mixed with a slurry forming liquid 6 such as alcohol and separately contained. Equipped with the powder container 7,
Each of 8 is a powder supply amount controller 9, 1 such as a roller pump.
A mixing and dripping container 12 connected via 0 and a pipe 11 is provided at the bottom. As the slurry forming liquid 6,
The particle powders 5A and 5B having a wettability that can favorably fluidize them, and that drying after jetting is good and which does not adversely affect the quality of the functional material are selected and used.

The mixing and dropping container 12 has a dropping hole 1 at the lower end.
3 is formed, and inside the mixing and dropping container 12,
An agitation blade 14 is provided, and an ultrasonic vibrator 15 having an upper end fixed to an upper part inside the mixing and dropping container 12 is provided so that a lower end of vibration approaches the drip pore 13. 1 in the figure
Reference numeral 6 denotes a drive motor for the stirring blade 14.

Further, below the mixing and dropping container 12, the dropping slurry 1 from the dropping pores 13 of the mixing and dropping container 12 is provided.
There is provided a nozzle 21 which receives 7 through the recess 18 and injects the compressed air 20 from the compressed air pipe 19.

In order to perform mixed jetting by the jetting and depositing apparatus 4 for jetting mixed powder having the above-described structure, first, the particle powders 5A, which are mixed with the slurry forming liquid 6 and are contained in the respective powder accommodating containers 7, 8. 5B, powder supply amount controller 9,10
Is supplied to the mixing and dropping container 12 so as to achieve a predetermined mixing ratio.

The powder slurries supplied from the powder container 7 and 8 to the mixing and dropping container 12 are uniformly mixed by the mixing action of the stirring blade 14 and the ultrasonic vibrator 15,
The mixed slurry powder becomes the dropping slurry 17 from the dropping pores 13 of the mixing and dropping container 12 and drops one by one into the nozzle 21.
The slurry powder, which is supplied in a fixed amount to the nozzle 21 and is dropped onto the nozzle 21, is jetted toward the sample 3 by the suction action of the compressed air 20 supplied from the compressed air pipe 19.

At this time, even if the mixing ratio of the powders supplied from the powder container 7 or 8 to the mixing / dripping container 12 is changed by the adjustment of the powder supply amount controller 9 or 10, the mixing / dripping container 12 is kept. Since the powder slurry of the required mixing ratio has already been mixed, the powder slurry is newly added to this powder slurry and mixed,
The mixing ratio changes only gradually, and the mixing ratio of the slurry powder dropped and injected from the dropping pores 13 into the nozzle 21 changes infinitely. Therefore, the nozzle 21
In the functional material formed by jetting, the change of the particle powder becomes extremely smooth.

In the structure shown in FIG. 1, the bottom surface of the sample 3 which is in contact with the heating plate 2 has a particle powder 5A10 inside the powder container 7.
0% and the upper surface of the particle powder 5B100 in the powder container 8
%, In order to make the intermediate portion have a linear gradient composition, first, the particle powder 5A in the powder container 7
(100%) is supplied to the required amount of the mixing and dropping container to start the injection, and then only the particle powder 5B of the powder container 8 is gradually and proportionally supplied to the mixing and dropping container 12, and finally. It suffices that the inside of the mixing and dropping container 12 is made of 100% particle powder 5B.

FIG. 2 shows an embodiment of the invention according to claim 2 applied to FIG. 1, in which the required side surface of the mixing and dropping container 12 is surrounded by the dropping pores 13 and extends downward. A tubular dropping constant quantity portion 22 having a diameter D and a length L is formed.

As described above, when the cylindrical dropping quantitative portion 22 that surrounds the dropping pores 13 and extends downward is formed, the dropping slurry 17 dropping from the dropping pores 13 becomes the dropping quantitative portion 2.
Due to the wettability of the slurry stored in the nozzle 2, it is always cut with a constant weight, so that the size of one droplet can be fixed and thus the droplet is supplied to the nozzle 21 as shown in FIG. The variation of the amount of the particle powder ejected from the nozzle 21 is prevented, and the distribution of the particle powder composition of the functional material is stabilized.

3 and 4 show an embodiment of the invention of claim 3 applied to FIG. 1, in which the nozzle 21 is placed on the upper surface so as to receive the dropping slurry 17 from the dropping pores 13. An annular recess 18 and an air ejection hole 23 for ejecting the compressed air 20 from the compressed air pipe 19 downward.
A suction guide hole 24 connected to the bottom of the recess 18 and having a tip adjacent to the air ejection hole 23; and a liquid supply needle 25 for supplying the slurry forming liquid 6 such as alcohol to the recess 18. I am trying to configure it from.

As described above, when the slurry forming liquid 6 is supplied by providing the liquid supply needle 25 to the concave portion 18 formed to receive the dropping slurry 17 from the dropping pores 13, the concave portion 18 is formed. The dripping slurry 17 in the inside is diluted with the slurry forming liquid 6 so that the nozzle 21
As a result, it is possible to perform a thin and uniform injection of the particle powder, and it is possible to prevent the powder slurry in the recess 18 from drying even in a small amount, and to perform stable injection.

It should be noted that the present invention is not limited to the above-mentioned embodiment, and the shape of the nozzle can be variously changed and other various changes can be made without departing from the scope of the present invention. Of course.

[0025]

According to the invention of claim 1, the powder slurry from the powder container in which at least two kinds of particle powders are separately housed is introduced into the mixing and dropping container through the powder supply amount controller. Further, since the mixing blade and the ultrasonic vibrator of the mixing and dropping container are used for uniform mixing and the droplets are injected from the dropping pores to the nozzle, the mixture is supplied from the powder container to the mixing and dropping container. Even if the mixing ratio of the powder is changed, the powder slurry of the required mixing ratio is already mixed and contained in the mixing and dropping container, and the powder slurry is newly added to the mixing and dropping container. The mixing ratio of the powder that is dropped onto the nozzle and jetted becomes completely stepless, so that the functional material formed by jetting the nozzle has a very smooth change in the particle powder composition.

According to the second aspect of the present invention, since the cylindrical dropping quantification portion that surrounds the dropping pores and extends downward is formed, it is possible to use 1 of the slurry dropped from the mixing dropping container by the dropping pores.
Since the size of the droplet is fixed, the amount of the slurry powder sprayed by the nozzle becomes constant, and the distribution of the particle powder composition of the functional material becomes stable.

According to the third aspect of the invention, in the nozzle configured to inject the dropping slurry in the recess formed so as to receive the dropping slurry from the dropping pores by sucking compressed air, the slurry is formed in the recess. Since the liquid supply needle adapted to supply the liquid is provided, it is possible to prevent the dropping slurry in the recessed portion from drying even in a small amount and perform stable ejection.

[Brief description of drawings]

FIG. 1 is a side sectional view showing an embodiment of the invention of claim 1.

FIG. 2 is a cut side view showing an embodiment of the invention of claim 2 applied to FIG.

FIG. 3 is a partially cut side view showing an embodiment of the invention of claim 3 applied to FIG.

FIG. 4 is a view taken along the line IV-IV in FIG.

[Explanation of symbols]

 4 Mixing powder jet deposition apparatus 5A Particle powder 5B Particle powder 6 Slurry forming liquid 7 Powder container 8 Powder container 9 Powder supply amount controller 10 Powder supply amount controller 12 Mixing dropping container 13 Dropping pore 14 Stirring blade 15 Ultrasonic transducer 17 Dropping slurry 18 Recessed portion 20 Compressed air 21 Nozzle 22 Dropping fixed amount portion 23 Air ejection hole 24 Suction guide hole 25 Liquid supply needle

Claims (3)

[Claims] 1. A powder container for separately mixing at least two types of particle powders with a slurry-forming liquid, and a powder container connected to each powder container via a powder supply controller.
A mixing / dripping container having a dripping pore at the lower end, a stirring blade provided inside the mixing / dripping container, and an ultrasonic vibration disposed in the mixing / dripping container so that the lower end of the vibration approaches the dripping pore. An apparatus for jetting and depositing a mixed powder, comprising: a child; and a nozzle, which is disposed below the mixed dropping container, receives a dropping slurry from the dropping pores, and jets the compressed powder by compressed air. 2. The apparatus for jetting and depositing a mixed powder according to claim 1, wherein a cylindrical dropping constant amount portion that surrounds the dropping pores and extends downward is formed on the lower surface of the mixing dropping container. 3. The nozzle has a recess formed on the upper surface thereof so as to receive the dropping slurry from the dropping pores, an air ejection hole for ejecting compressed air downward, and a tip connected to the bottom of the depression and having a tip. The mixed powder jetting and depositing apparatus according to claim 1, further comprising a suction guide hole adjacent to the air jetting hole, and a liquid supply needle for supplying a slurry forming liquid to the recess.