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JPH0772086B2 - Method for producing thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide - Google Patents
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JPH0772086B2 - Method for producing thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide - Google Patents

Method for producing thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide

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Publication number
JPH0772086B2
JPH0772086B2 JP63213536A JP21353688A JPH0772086B2 JP H0772086 B2 JPH0772086 B2 JP H0772086B2 JP 63213536 A JP63213536 A JP 63213536A JP 21353688 A JP21353688 A JP 21353688A JP H0772086 B2 JPH0772086 B2 JP H0772086B2
Authority
JP
Japan
Prior art keywords
superconducting oxide
thick film
oxide
based superconducting
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63213536A
Other languages
Japanese (ja)
Other versions
JPH0264019A (en
Inventor
昌弘 吉村
善兵衛 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP63213536A priority Critical patent/JPH0772086B2/en
Publication of JPH0264019A publication Critical patent/JPH0264019A/en
Publication of JPH0772086B2 publication Critical patent/JPH0772086B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は結晶の配向したBi-Sr-Ca-Cu-O系超電導酸化
物の厚膜を基板上に製造する方法に関する。
TECHNICAL FIELD The present invention relates to a method for producing a thick film of crystal-oriented Bi—Sr—Ca—Cu—O-based superconducting oxide on a substrate.

なお、厚膜とは10μm以上の厚みを持った膜である。The thick film is a film having a thickness of 10 μm or more.

[従来の技術] BednorzおよびMullerによりLa-Ba-Cu-O系の高温超電導
酸化物が報告(Phys.B64(1986)189)されてから、TC
(電気抵抗が0となる絶対温度、以下TC)が約90KのY-B
a-Cu-O系の超電導酸化物の報告(Phys.Rew.Lett.58(19
87)908)かなされるにおよんで高温超電導酸化物の開
発競争が熾烈をきわめている。
[Prior Art] Since Bednorz and Muller reported high-temperature superconducting oxides of the La-Ba-Cu-O system (Phys.B64 (1986) 189), T C
YB of (absolute temperature at which electric resistance becomes 0, hereinafter T C ) is about 90K
Report of a-Cu-O superconducting oxide (Phys.Rew.Lett.58 (19
87) 908) The development competition for high-temperature superconducting oxides is extremely fierce.

さらにまた、最近になってBi-Sr-Ca-Cu-O系のTC約105K
を有する新高温超電導酸化物が報告(J.Appl.Phys.27
(1988)L209)された。しかしながらこのBi-Sr-Ca-Cu-
O系超電導酸化物にはTCが105Kの酸化物と75Kの酸化物の
2つの相を持っており、この高TC相をいかに多くの晶出
させるかがこのBi-Sr-Ca-Cu-O系の超電導酸化物の課題
である。この課題を解決するために高野等はBi-Sr-Ca-C
u-O系超電導酸化物のBiの1部をPbに置換することによ
り高TC相の比率が急激に増加することを報告(Jpn.J.Ap
pl.Phys.27(1988)L1041)した。
Furthermore, recently Bi-Sr-Ca-Cu- O system from T C to about 105K
A new high-temperature superconducting oxide that has the properties (J.Appl.Phys.27
(1988) L209). However, this Bi-Sr-Ca-Cu-
O system T C in the superconducting oxide has two phases of oxide and oxides of 75K of 105K, or to how many crystallized the high T C phase this Bi-Sr-Ca-Cu This is a problem of -O superconducting oxide. To solve this problem, Takano et al. Have proposed Bi-Sr-Ca-C.
reported that the ratio of the high T C phase increases abruptly by replacing a portion of Bi of uO based superconducting oxide Pb (Jpn.J.Ap
pl.Phys.27 (1988) L1041).

一方、上記超電導酸化物は焼結工程で作るバルク材や基
板上に薄膜を形成する方法が盛んに研究されている。バ
ルク材はこの超電導材が酸化物であるため加工性が悪く
所望の形状としにくいこと、気孔を多く含むなどの理由
のためJC(臨界電流密度、以下JC)が低いという問題点
があり、また薄膜についてはTCがバルク材に比較して低
下するという問題があった。これらの観点からTCを低下
させずに実際に流せる電流値の大きさ厚膜を基板上に形
成した製品を開発することが望まれていた。
On the other hand, a method of forming a thin film on a bulk material or a substrate formed by a sintering process has been actively researched for the superconducting oxide. The bulk material has a problem that the superconducting material is an oxide, so that it is difficult to form into a desired shape due to poor workability, and the J C (critical current density, hereinafter referred to as J C ) is low because of the large number of pores. Moreover, there is a problem that T C of the thin film is lower than that of the bulk material. From these points of view, it has been desired to develop a product in which a thick film having a current value that can actually flow without lowering T C is formed on the substrate.

薄膜と厚膜とでは用途が異なり、薄膜では、NIS、SISな
どのジョセフソン接合を利用した超電導素子が中心にな
るのに対し厚膜ではマクロな例えばプリント基板のよう
な回路あるいはテープなどの用途が考えられる。
The thin film and thick film have different uses.For thin films, superconducting devices using Josephson junctions such as NIS and SIS are the main, whereas thick films are macro, for example, circuits such as printed circuit boards or tapes. Can be considered.

薄膜を基板上に形成する方法としては、Bi-Sr-Ca-Cu-O
系超電導酸化物のペーストをMgO単結晶(100)面に印刷
し熱処理する方法が報告(Jpn.J.Appl.Phys.27(1988)
L649)されているがTCは80K程度である。
As a method for forming a thin film on a substrate, Bi-Sr-Ca-Cu-O is used.
A method of printing and heat-treating a paste of superconducting oxides on the MgO single crystal (100) surface (Jpn.J.Appl.Phys.27 (1988)
However, T C is about 80K.

また、Bi-Sr-Ca-Cu-O系の超電導酸化物の急冷によりア
モルファス(非晶質、以下アモルファス)化する性質が
あり、小松等により急冷厚膜を作る方法(Jpn.J.Appl.P
hys.27(1988)L533)が報告されている。しかしながら
この方法は基板上に形成するものでないため、このまま
では実用化は困難であるなどの問題点があった。
In addition, there is a property that a Bi-Sr-Ca-Cu-O-based superconducting oxide is made amorphous by quenching. P
hys.27 (1988) L533) has been reported. However, since this method is not formed on the substrate, there is a problem that it is difficult to put it into practical use as it is.

[発明が解決しようとする課題] 本発明はTCが高く、結晶の配向したBi-Sr-Ca-Cu-O系超
電導酸化物の厚膜の製造方法を提供することを目的とす
る。
[Problems to be Solved by the Invention] An object of the present invention is to provide a method for producing a thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide having a high T C and having a crystallographic orientation.

[課題を解決するための手段] 本発明はBi-Sr-Ca-Cu-O系および必要に応じCdまたはPb
の酸化物をふくむ粉体を仮焼、粉砕、成形した物体を融
解、急冷凝固してアモルファス化した、あるいはアモル
ファスを含む薄片を製造し、該薄片を基板上で800℃〜8
90℃で熱処理することを特徴とする。
[Means for Solving the Problems] The present invention provides a Bi-Sr-Ca-Cu-O system and optionally Cd or Pb.
Calcination, crushing, and melting of a powder containing oxides of the above are melted, rapidly solidified to produce an amorphous or thin piece containing amorphous material, and the thin piece is placed on a substrate at 800 ° C to 8 ° C.
It is characterized by heat treatment at 90 ° C.

[作用] 以下、本発明について詳細に説明する。本発明に用いる
超電導酸化物はアモルファス化しやすいBi-Sr-Ca-Cu-O
系超電導酸化物であり、これにCd酸化物を含むものであ
る。Bi-Sr-Ca-Cu-O系超電導酸化物は高TC相としてBi2Sr
2Ca2Cu3OY相が、TCの低い相としてBi2Sr2CaCu2OY相、ま
たはBi4Sr3Ca3Cu4OY相があるといわれている。このよう
にBi-Sr-Ca-Cu-O系超電導酸化物には高TC相、低TC相が
共存しているため原料の配合を高TC相のBi2Sr2Ca2Cu3OY
にあわせて焼成しても、電気抵抗が低下し始めるTC(on
set)が変動し、電気抵抗が0となるTC(end)も105K
よりさらに低温側に移行するとともに、TC(on set)か
らTC(end)までの温度範囲が広がる傾向がある。先に
記載したように、このような問題点を解決するためにBi
の1部をPbに置換した焼結体でTC(on set)125K、T
C(end)107Kの値のものが得られている。
[Operation] Hereinafter, the present invention will be described in detail. The superconducting oxide used in the present invention is easily Bi-Sr-Ca-Cu-O.
It is a superconducting oxide and contains Cd oxide. Bi-Sr-Ca-Cu- O based superconducting oxide Bi 2 Sr as a high T C phase
It is said that the 2 Ca 2 Cu 3 O Y phase has a Bi 2 Sr 2 CaCu 2 O Y phase or a Bi 4 Sr 3 Ca 3 Cu 4 O Y phase as a low T C phase. Thus the Bi-Sr-Ca-Cu- O based superconducting oxide high T C phase, the formulation of raw materials for low T C phase coexists high T C phase Bi 2 Sr 2 Ca 2 Cu 3 O Y
It is fired in accordance with the, T C (on the electrical resistance begins to drop
set) fluctuates and T C (end) at which electric resistance becomes 0 is 105K
With shifts to even more low-temperature side, there is a tendency that the temperature range is widened from T C (on set) to T C (end). As mentioned above, Bi
Is a sintered body in which a part of P is replaced with Pb, T C (on set) 125K, T
The value of C (end) 107K is obtained.

しかしながら、上記組成を有する超電導酸化物をアモル
ファス化した厚膜をMgO単結晶基板上で熱処理すると第
3図の(b)曲線のようにTCが低下し上記のような高TC
は得られないことが判明した。
However, when a thick film obtained by amorphizing a superconducting oxide having the above composition is heat-treated on a MgO single crystal substrate, T C decreases as shown by the curve (b) in FIG. 3 and the high T C as described above.
Turned out not to get.

発明者等はこのような知見に基づきTCの高いBi-Sr-Ca-C
u-O系超電導酸化物の厚膜を基板上に作る方法を検討し
た。その結果、Bi-Sr-Ca-Cu-O系超電導酸化物をまず急
冷凝固によりアモルファス化したまたはアモルファスを
含む薄片を製造し、この薄片を基板上で熱処理する方法
を見出した。すなわち、Bi-Sr-Ca-Cu-O系超電導酸化物
を高TC相であるBi2Sr2Ca2Cu3OYになるようにBi2O3,CaCo
3,CuO,SrCO3,PbOおよびCdOの粉体を配合し、よく混合し
てから空気中で800℃で仮焼する。これを粉砕し、CIPに
よりサンプルを成形する。このサンプルを組成が蒸発等
により変動しないようにできるだけ早く融解して急冷凝
固することが望ましい。例えばサンプルはCIPで棒状に
成形し、この棒の先端をキセノンあるいはハロゲンラン
プを用いたアークイメージ炉で急速融解し、滴下した融
液を回転する双ローラーあるいは片ローラーで急冷凝固
する。
Inventors have high T C based on this finding Bi-Sr-Ca-C
A method of forming a thick film of uO-based superconducting oxide on a substrate was investigated. As a result, we have found a method of producing a thin piece of Bi-Sr-Ca-Cu-O based superconducting oxide which is first made amorphous or containing amorphous by rapid solidification and then heat treating this thin piece on a substrate. That, Bi-Sr-Ca-Cu -O based superconducting oxide is a high-T C-phase Bi 2 Sr 2 Ca 2 Cu 3 O Y so that the Bi 2 O 3, CaCo
Powders of 3 , CuO, SrCO 3 , PbO and CdO are blended, mixed well, and then calcined in air at 800 ° C. This is crushed and a sample is molded by CIP. It is desirable that this sample be melted as quickly as possible and rapidly solidified so that the composition does not change due to evaporation or the like. For example, a sample is formed into a rod shape by CIP, the tip of the rod is rapidly melted in an arc image furnace using a xenon or halogen lamp, and the dropped melt is rapidly solidified by rotating twin rollers or one roller.

このようにして得られたアモルファス化したまたはアモ
ルファスを含む急冷凝固薄片を基板上で800℃〜890℃で
熱処理を行なう。基板はMgO,SrTiO3,ZrO2等の酸化物の
単結晶あるいはAg,Pt等の金属、Siなどの半導体のいず
れを用いてもよい。第1図に示したようにこのアモルフ
ァス化した薄片(第1図(a)は800℃付近で高TC相が
生成する(第1図(d))。また890℃を超えると、こ
の薄片は溶融してしまい形状を保持しえないため望まし
くない。
The thus obtained amorphized or rapidly solidified thin piece containing amorphous is heat-treated on a substrate at 800 ° C to 890 ° C. The substrate may be either a single crystal of oxide such as MgO, SrTiO 3 or ZrO 2 , a metal such as Ag or Pt, or a semiconductor such as Si. As shown in Fig. 1, this amorphized thin piece (Fig. 1 (a) produces a high TC phase at around 800 ° C (Fig. 1 (d)). Is not desirable because it melts and cannot retain its shape.

同様に、Bi2Sr2Ca1.8Cd0.2Cu3OY系においても第2図
(a)に示したようにCaOの結晶を含む大部分がアモル
ファス化した薄片では800℃以上で高TC相の生成が見ら
れた(第2図(b))。
Similarly, in the Bi 2 Sr 2 Ca 1.8 Cd 0.2 Cu 3 O Y system, as shown in Fig. 2 (a), in the case where most of the flakes containing CaO crystals are amorphized, the high T C phase is higher than 800 ° C. Was observed (Fig. 2 (b)).

これらの相はSEM観察の結果いずれも結晶が配向してお
り、この方法により基板上に結晶の配向した超電導酸化
物相を得ることができる。このようにして得られたBi2S
r2Ca2-XCdXCu3OY超電導酸化物厚膜のTCはx=0.2で84
K、x=0.4で87Kのものがえられた。
As a result of SEM observation, crystals of these phases are all oriented. By this method, a superconducting oxide phase in which crystals are oriented can be obtained on the substrate. Bi 2 S obtained in this way
r 2 Ca 2-X Cd X Cu 3 O Y superconducting T C of the oxide thick film x = 0.2 at 84
With K, x = 0.4, 87K was obtained.

[実施例] Bi2O3,CaCO3,CuO,SrCO3,PbOおよびCdOをBi0.7Pb0.3SrCa
Cu1.8OY,Bi2Sr2Ca2-XCdXCu3OY、x=0,0.2,0.4,0.8,1.
0,1.4,2.0となるように配合し、メノウ乳鉢でメタノー
ルとともに4時間混合し、空気中800℃で12時間仮焼し
た。これを粉砕し、CIPにより直径2.5mm径、長さ150mm
の棒状に成形した。この棒の先端をキセノンランプを用
いたアークイメージ炉で融解し、双ローラー(2000rp
m)超急冷して、厚さ約20μmの薄片試料を得た。この
試料をMgO単結晶の(100)劈開面上に乗せて800℃〜890
℃で熱処理を行ない厚膜を形成した。その結果の1例を
第3図(a)に示した。この図からも明らかにように、
Bi2Sr2Ca2-XCdXCu3OY系ではTC(on set)100K以上、x
=0.2でTC(end)84K、x=0.4で87Kのものがえられ
た。TCが高く良好な超電導性を示すxの範囲は0.1〜0.8
で、Xが1.0を超えると絶縁相となった。
[Example] Bi 2 O 3 , CaCO 3 , CuO, SrCO 3 , PbO and CdO were added to Bi 0.7 Pb 0.3 SrCa.
Cu 1.8 O Y , Bi 2 Sr 2 Ca 2-X Cd X Cu 3 O Y , x = 0,0.2,0.4,0.8,1.
The ingredients were blended so as to be 0, 1.4, 2.0, mixed with methanol in an agate mortar for 4 hours, and calcined in air at 800 ° C for 12 hours. This is crushed and the diameter is 2.5mm and the length is 150mm by CIP.
Was molded into a rod shape. The tip of this rod was melted in an arc image furnace using a xenon lamp and twin rollers (2000rp
m) Ultra-quenched to obtain a thin sample with a thickness of about 20 μm. This sample is placed on the (100) cleavage plane of MgO single crystal and the temperature is 800 ℃ ~ 890
A thick film was formed by heat treatment at ℃. An example of the result is shown in FIG. As is clear from this figure,
Bi 2 Sr 2 Ca 2-X Cd X Cu 3 O Y system T C (on set) 100K or more, x
= 0.2, T C (end) 84K, x = 0.4, 87K. The range of x, which has a high T C and good superconductivity, is 0.1 to 0.8.
Then, when X exceeded 1.0, it became an insulating phase.

[発明の効果] Bi-Sr-Ca-Cu-O系超電導酸化物を急冷凝固によりアモル
ファス化した薄片を製造し、この薄片を基板上で熱処理
することにより、結晶の配向した超電導酸化物の厚膜を
得ることが可能となり、大電流を流せる超電導体素子の
開発の可能性が得られた。
[Effects of the Invention] A thin piece of Bi-Sr-Ca-Cu-O-based superconducting oxide is made amorphous by rapid solidification, and this thin piece is heat-treated on a substrate to obtain the thickness of the crystal-oriented superconducting oxide. It became possible to obtain a film, and the possibility of developing a superconductor element capable of passing a large current was obtained.

【図面の簡単な説明】[Brief description of drawings]

第1図、第2図は組成のことなるBi-Sr-Ca-Cu-O系超電
導酸化物の熱処理前後のX線回析結果、第3図はBi2Sr2
Ca2-XCdXCu3OYにおけるx=0.2のときとBi0.7Pb0.3SrCa
Cu1.8OYの電気抵抗の変化を示した図である。
Figures 1 and 2 show the X-ray diffraction results before and after heat treatment of Bi-Sr-Ca-Cu-O based superconducting oxides with different compositions, and Figure 3 shows Bi 2 Sr 2
Ca 2-X Cd X Cu 3 O Y at x = 0.2 and Bi 0.7 Pb 0.3 SrCa
It is a figure showing change of electric resistance of Cu 1.8 O Y.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】Bi-Sr-Ca-Cu-O系およびCd酸化物を含む粉
体を仮焼、粉砕、成形した物体を融解、急冷凝固してア
モルファス化した、またはアモルファスを含む薄片を製
造し、該薄片を基板上で800℃〜890℃で熱処理すること
を特徴とするBi2Sr2Ca2-XCdXCu3OY系(ただし、x=0.2
〜0.4)超電導酸化物厚膜の製造方法。
1. A thin piece containing an amorphous or amorphous material by melting, rapidly quenching and solidifying an object obtained by calcining, crushing, and molding a powder containing a Bi-Sr-Ca-Cu-O system and a Cd oxide. Then, the thin piece is heat-treated at 800 ° C. to 890 ° C. on the substrate, and the Bi 2 Sr 2 Ca 2 -X Cd X Cu 3 O Y system (where x = 0.2
~ 0.4) A method for manufacturing a superconducting oxide thick film.
JP63213536A 1988-08-30 1988-08-30 Method for producing thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide Expired - Lifetime JPH0772086B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63213536A JPH0772086B2 (en) 1988-08-30 1988-08-30 Method for producing thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63213536A JPH0772086B2 (en) 1988-08-30 1988-08-30 Method for producing thick film of Bi-Sr-Ca-Cu-O-based superconducting oxide

Publications (2)

Publication Number Publication Date
JPH0264019A JPH0264019A (en) 1990-03-05
JPH0772086B2 true JPH0772086B2 (en) 1995-08-02

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507890B2 (en) * 1989-01-23 1996-06-19 科学技術庁無機材質研究所長 Manufacturing method of bismuth-based superconducting ceramic thick film

Also Published As

Publication number Publication date
JPH0264019A (en) 1990-03-05

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