JPH077859B2 - Laser processing equipment - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus for processing a workpiece with laser light.

2. Description of the Related Art A conventional example will be described with reference to FIG.

When performing laser processing, the laser light 5 extracted from the laser oscillator 1 is processed by the total reflection mirror 2 and the like on the processing table 4
To the processing table 4
The upper workpiece 6 is irradiated and processed.

In that case, the processing conditions differ depending on the type of the workpiece 6. That is, continuous output laser light may be used, or pulse output laser light may be used. Depending on the shape, continuous output and pulse output may be combined. Furthermore, it is necessary to adjust the output level in both continuous output and pulse output. That is, if the output is small, the processing becomes insufficient, and if the output is too large, the processing state deteriorates.

Therefore, the laser oscillator is usually provided with an output adjusting element. In the case of a gas laser oscillator, the laser output level is often controlled by making the discharge current value variable.

Problems to be Solved by the Invention Generally, when a laser processing apparatus is produced, the laser output characteristics as shown in FIG. 3 are checked. In the case of FIG. 3, the relationship between the discharge current and the laser output is shown. From such characteristics, depending on the type and shape of the work piece, it is determined what the discharge current should be to set the laser output to a certain level. However, in this case, due to the output reduction of the laser oscillator over time, the output loss due to the contamination of the optical system such as the total reflection mirror, the condenser lens, etc., the initial output characteristic in FIG. If the value changes to, it means that the laser output required for processing cannot be obtained with the discharge current value set in the related art.

Therefore, in the present invention, as means for solving the problem,
In a laser processing device that guides laser light extracted from a laser oscillator to a processing table by an optical system such as a total reflection mirror, collects it with a condenser lens, and irradiates and processes a workpiece on the processing table. It has a laser output measuring device for measuring the output of the laser beam after passing, and a control part for analyzing the mutual relation between the laser output adjusting element (discharge current etc.) and the laser output.

Operation With the above configuration, the laser output at the processing point can be made uniform, so that the same processing conditions are always satisfied, the processing quality is improved, and processing errors are eliminated.

Embodiment An embodiment of the present invention will be described with reference to FIG. The laser beam 5 extracted from the laser oscillator 1 is guided to the processing table 4 by the total reflection mirror 2 and the like, is condensed by the condenser lens 3 and is irradiated to the workpiece 6 placed on the processing table 4, and the machining is performed. To do. The laser output measuring instrument 7 is movable, and is moved below the condenser lens 3 before processing. The control unit 8 checks the output characteristic as shown in FIG. 3, and performs correction to match the original output characteristic. After the check, if the operator sets the conventional processing conditions, the calibrated signal from the control unit 8 is the laser oscillator 1
It will be processed with the same laser output as before.

EFFECTS OF THE INVENTION As described above, according to the present invention, it is possible to obtain the stability of the laser output at the processing point, which is indispensable for performing stable processing, and the cause is the laser oscillator when a defect occurs (output is reduced). Since it can be easily determined whether it is an external optical system or not, it has an excellent effect that greatly contributes to the improvement of the reliability of laser processing.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a laser processing apparatus showing one embodiment of the present invention, FIG. 2 is a schematic configuration diagram of a conventional laser processing apparatus, and FIG. 3 is a characteristic showing characteristics of discharge current and laser output. It is a figure. 1 ... Laser oscillator, 2 ... Total reflection mirror, 3 ... Condensing lens, 4 ... Processing table, 5 ... Laser light, 6 ... Workpiece, 7 ... Laser output measuring instrument, 8 ... Control section.

Claims (1)

[Claims] 1. A laser beam extracted from a laser oscillator,
An optical system such as a total reflection mirror leads to the processing table,
In a laser processing device that collects light with a condenser lens, irradiates the workpiece on the processing table, and processes the laser, a laser that moves to a position where the output of the laser light after passing through the condenser lens before processing is measured. A laser processing apparatus comprising an output measuring device and a control unit for analyzing a mutual relation between a laser output adjusting element such as a discharge current and a laser output.