JPH0780684B2 - Carbon material purification equipment - Google Patents
Carbon material purification equipmentInfo
- Publication number
- JPH0780684B2 JPH0780684B2 JP62084322A JP8432287A JPH0780684B2 JP H0780684 B2 JPH0780684 B2 JP H0780684B2 JP 62084322 A JP62084322 A JP 62084322A JP 8432287 A JP8432287 A JP 8432287A JP H0780684 B2 JPH0780684 B2 JP H0780684B2
- Authority
- JP
- Japan
- Prior art keywords
- purification
- pressure
- gas
- furnace
- carbon material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000746 purification Methods 0.000 title claims description 57
- 239000003575 carbonaceous material Substances 0.000 title claims description 28
- 239000007789 gas Substances 0.000 claims description 43
- 239000011261 inert gas Substances 0.000 claims description 19
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 4
- 150000001805 chlorine compounds Chemical class 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、カーボン材を高純化するための純化処理装置
に関する。TECHNICAL FIELD The present invention relates to a purification treatment device for highly purifying a carbon material.
（従来の技術） カーボン材は、高温下での機械的強度、耐熱性、耐久
性、耐薬品性、電気伝導性、熱伝導性等の優れた特性を
有するため各種の用途に使用されている。(Prior Art) Carbon materials have excellent properties such as mechanical strength at high temperatures, heat resistance, durability, chemical resistance, electrical conductivity, and thermal conductivity, and are used in various applications. .
半導体装置、原子炉装置、石英溶融装置等に用いられる
カーボン材には、カーボン材が有する前述の特性に加え
て、高純度であることが要求される。Carbon materials used in semiconductor devices, nuclear reactor devices, quartz melting devices, etc. are required to have high purity in addition to the above-mentioned characteristics of carbon materials.
従来のカーボン材の純化処理方法は、純化炉内に被処理
物としてのカーボン材を配置し、炉壁とカーボン材の間
の間隙をコークス等の詰粉を入れ、炉の側壁下方に設け
たガス導入口より純化処理用ガスとして塩素ガスを流し
ながら、炉の両側壁の電極に通電して行なうものであ
る。これにより、塩素はカーボン材中の不純物と反応し
て塩素化合物となり、カーボン材の周囲に充填されてい
るガス透過性の詰粉の中に侵入する。この塩素化合物の
大部分は詰粉上部の温度の低い部分で凝縮し、一部の塩
素化合物及び未反応の塩素は上方の排気装置から排気さ
れる。In the conventional purification method of carbon material, the carbon material as the object to be treated is placed in the purification furnace, and the gap between the furnace wall and the carbon material is filled with dust such as coke and provided below the side wall of the furnace. This is done by energizing the electrodes on both side walls of the furnace while flowing chlorine gas as a purification gas from the gas inlet. As a result, chlorine reacts with impurities in the carbon material to form a chlorine compound, which penetrates into the gas-permeable packing powder filled around the carbon material. Most of this chlorine compound condenses in the low temperature portion above the stuffing powder, and some chlorine compound and unreacted chlorine are exhausted from the exhaust device above.
（発明が解決しようとする問題点） この従来の純化処理方法では、カーボン材を高純度化す
るのに長時間を要し、電力、ガス等のエネルギ消費量が
多いため処理コストが高く、また純化処理効率が悪いと
いう欠点がある。さらに、このような純化炉は炉の上方
が開口されているため純化処理用ガスとして使用される
人体に有害な塩素ガス等が飛散するため、炉上方に設け
た排気装置でも十分に排気し得ず作業環境が悪いという
問題がある。(Problems to be Solved by the Invention) In this conventional purification treatment method, it takes a long time to highly purify the carbon material, and the treatment cost is high because the amount of energy consumption such as electric power and gas is large. There is a drawback that the purification efficiency is poor. Furthermore, since such a purification furnace has an opening above the furnace, chlorine gas, which is harmful to the human body and is used as a purification gas, scatters.Therefore, an exhaust device installed above the furnace can sufficiently exhaust the gas. There is a problem that the working environment is bad.
（問題点を解決するための手段） 本発明は以上のような問題点を解決するために、短時間
で高純度化処理し得、純化効率が良く、処理コストの安
いカーボン材の純化処理装置を提供するものである。(Means for Solving Problems) In order to solve the above problems, the present invention can perform a high-purification treatment in a short time, has a high purification efficiency, and has a low treatment cost. Is provided.
本発明の前記目的は、次の構成によって達成される。す
なわち、内方にカーボン材を配置するための密閉された
処理室を形成する炉内壁と、前記炉内壁の周囲に密閉さ
れた間隙を形成する炉外壁と、前記間隙内に設けられた
ヒーターと、前記処理室に連通する純化処理用ガス供給
手段及び純化処理用ガス排出手段と、該純化処理用ガス
を不活性ガスに置換える置換手段と、前記間隙内に連通
する不活性ガス供給手段及び不活性ガス排出手段と、前
記処理室内の圧力及び前記間隔内の圧力を相関し各々の
圧力を制御する制御手段とを備えることを特徴とするカ
ーボン材の純化処理装置である。The above object of the present invention is achieved by the following configurations. That is, a furnace inner wall forming a sealed processing chamber for disposing a carbon material inside, a furnace outer wall forming a sealed gap around the furnace inner wall, and a heater provided in the gap. A purification treatment gas supply means and a purification treatment gas discharge means communicating with the treatment chamber, a replacement means for replacing the purification treatment gas with an inert gas, and an inert gas supply means communicating with the gap, An apparatus for purifying a carbon material, comprising: an inert gas discharge means; and a control means that correlates the pressure in the processing chamber and the pressure in the interval to control each pressure.
本願発明のカーボン材の純化処理においては、処理室内
の圧力、並びに炉内壁及び炉外壁の間の間隙内の圧力を
相関し、各々の圧力を制御するが故に、純化処理時間を
大巾に短縮し、純化処理効率を向上し得、その結果、塩
素消費量、電力消費量を大巾に減少させ得る。加えて、
置換手段により、カーボン材を炉から取出す際にも純化
処理用ガスが炉外に漏れるのを阻止し得る。In the purification treatment of the carbon material of the present invention, the pressure in the treatment chamber and the pressure in the gap between the inner wall of the furnace and the outer wall of the furnace are correlated, and the respective pressures are controlled. However, the purification treatment efficiency can be improved, and as a result, chlorine consumption and power consumption can be greatly reduced. in addition,
The replacement means can prevent the purification gas from leaking out of the furnace even when the carbon material is taken out of the furnace.
本発明の純化処理装置における処理室内の圧力が、間隙
内の圧力より低いのが望ましい。これにより、前述の効
果を増大させ得る。It is desirable that the pressure in the processing chamber of the purification processing apparatus of the present invention is lower than the pressure in the gap. This can increase the above-mentioned effects.
本発明の純化処理装置における間隙内の圧力は、大気圧
以下であるのが望ましい。これにより、純化処理用ガス
が変動しても、間隙内の不活性ガスが緩衝の働きをな
し、炉壁材の破損、損傷を防止し得る。The pressure in the gap in the purification apparatus of the present invention is preferably atmospheric pressure or less. As a result, even if the purification treatment gas changes, the inert gas in the gap acts as a buffer, and damage to the furnace wall material can be prevented.
本発明の純化処理装置の純化処理用ガスとしてはハロゲ
ン又はハロゲン含有ガスが望ましい。Halogen or halogen-containing gas is desirable as the purification gas for the purification apparatus of the present invention.
本発明の純化処理装置では、前記純化処理用ガス供給手
段が炉の中に不活性ガスを導入する手段を含むのが望ま
しい。これにより、さらにカーボン材を炉から取出す際
に純化処理用ガスが炉外に漏れるのを阻止し得る。In the purifying apparatus of the present invention, it is preferable that the purifying gas supply means includes means for introducing an inert gas into the furnace. This can prevent the purifying gas from leaking out of the furnace when the carbon material is taken out from the furnace.
（具体例） 本発明の１具体例を、図面を参照しながら説明する。第
１図は、本発明による純化処理装置の縦断面概略図であ
る。純化炉１の炉外壁２内には処理室３を形成するカー
ボン製の炉内壁４が設けられており、純化処理される図
示しないカーボン材が処理室３に適宜な固定治具を介し
て配置されている。この処理室３は、カーボン材が配置
された後、図示しない両側端の蓋によって密閉される。
炉内壁４と炉外壁２との間の間隙５には処理室３を加熱
するための複数のヒータ６が配設されており、このヒー
タの酸化を防止するために間隙５には不活性ガス供給手
段17から不活性ガス導入路８を介して例えば窒素ガス等
の不活性ガスが導入される。炉外壁２は二重構造となっ
ており、その間には冷却水が流されている。また、この
二重構造の内側の壁は適宜な断熱材によって断熱されて
いる。(Specific Example) One specific example of the present invention will be described with reference to the drawings. FIG. 1 is a schematic vertical sectional view of a purification processing apparatus according to the present invention. A carbon furnace inner wall 4 forming a processing chamber 3 is provided in the furnace outer wall 2 of the purification furnace 1, and a carbon material (not shown) to be purified is placed in the processing chamber 3 via an appropriate fixing jig. Has been done. After the carbon material is placed in the processing chamber 3, the processing chamber 3 is sealed by lids at both ends (not shown).
A plurality of heaters 6 for heating the processing chamber 3 are arranged in a gap 5 between the furnace inner wall 4 and the furnace outer wall 2, and an inert gas is provided in the gap 5 to prevent the heaters from being oxidized. An inert gas such as nitrogen gas is introduced from the supply means 17 through the inert gas introduction passage 8. The outer wall 2 of the furnace has a double structure, and cooling water is flown between them. In addition, the inner wall of this double structure is insulated by a suitable heat insulating material.
処理室３に配置されたカーボン材を純化処理するための
純化処理用ガスは、純化処理用ガス導入路７を介して適
宜な圧力で処理室３に導入される。また、この処理室３
に導入された純化処理用ガスを排出するために、炉内壁
４にはガス排出手段９が接続されている。このガス排出
手段９には、ダストキャッチャーが設けられ、ダスト又
は処理室内反応物、例えば塩素化合物が取り除かれた排
気ガスが排出される。The purification treatment gas for purifying the carbon material arranged in the treatment chamber 3 is introduced into the treatment chamber 3 at an appropriate pressure via the purification treatment gas introduction passage 7. In addition, this processing chamber 3
A gas discharge means 9 is connected to the inner wall 4 of the furnace in order to discharge the purification gas introduced into the furnace. The gas discharge means 9 is provided with a dust catcher and discharges dust or a reaction product in the processing chamber, for example, exhaust gas from which chlorine compounds have been removed.
なお、処理室３の純化処理用ガスが処理室３の外側に流
出しないように間隙５内の不活性ガスの圧力PAは処理室
３内の純化処理用ガスの圧力PBより高く設定される。し
かも、間隙５内の不活性ガスが間隙５の外側に排出しな
いように間隙５内の不活性ガスの圧力PAは大気圧よりも
低く設定されるのが好ましい。The pressure P A of the inert gas in the gap 5 is set higher than the pressure P B of the purification gas in the processing chamber 3 so that the purification gas in the processing chamber 3 does not flow out of the processing chamber 3. It Moreover, the pressure P A of the inert gas in the gap 5 is preferably set lower than the atmospheric pressure so that the inert gas in the gap 5 is not discharged to the outside of the gap 5.
この純化処理装置は第２図のガス供給及び排気系統図に
示されるように接続されており、図示しない制御手段に
よって、以下のように制御される。This purification apparatus is connected as shown in the gas supply and exhaust system diagram of FIG. 2, and is controlled by the control means (not shown) as follows.
処理室３は、ガス排出手段９を介して排気され、0.01ト
ール（第３図P1）まで減圧される。減圧後、炉内壁４と
炉外壁２との間の間隙５に設けられたヒータにより処理
室３を約2,000℃まで昇温する。昇温後、処理室３にカ
ーボン材の純化処理用ガスとして塩素ガスを純化処理用
ガス供給手段10から処理用ガス導入路７を介して圧力が
大気圧以下の700メートル（第３図P2）となるまで導入
し、処理室３を昇圧する。昇圧後一定時間、例えば５分
経過後に処理室３の温度を2000℃に維持したまま、再度
処理室３はガス排出手段９を介して排気されて0.01メー
トル（第３図P3）まで減圧され、その後処理室３の圧力
は、前述と同様の方法で、700トールと0.01トールとの
間で純化処理が完了するまで交互に昇圧及び減圧を繰り
返すいわゆるパルス制御が行なわれる。この時、P3の値
は必ずしもP1に等しくなくてもよい。このような純化処
理工程中、処理室３を大気圧以下の所定圧P2，P3におい
てカーボン材を純化処理するが故に、処理室における純
化処理用ガスの蒸気圧を低くし得、カーボン中の不純物
を純化処理用ガスの化合物としてカーボン材が除去し易
くし得、加えて、純化処理用ガスの排気、導入を交互に
繰り返すので効率よくカーボン材を高純度化し得る。The processing chamber 3 is exhausted through the gas exhausting means 9 and is depressurized to 0.01 Torr (P 1 in FIG. 3). After depressurization, the temperature of the processing chamber 3 is raised to about 2,000 ° C. by the heater provided in the gap 5 between the furnace inner wall 4 and the furnace outer wall 2. After the temperature is raised, chlorine gas is used as a purification gas for the carbon material in the treatment chamber 3 from the purification gas supply means 10 through the treatment gas introduction passage 7 and the pressure is 700 m or less at the atmospheric pressure (see P 2 in FIG. 3). ) And the pressure in the processing chamber 3 is increased. After a lapse of a certain time, for example, 5 minutes, after the pressurization, the temperature of the processing chamber 3 is maintained at 2000 ° C., and the processing chamber 3 is exhausted again through the gas exhausting means 9 and depressurized to 0.01 meters (P 3 in FIG. 3 ). Then, the pressure in the processing chamber 3 is subjected to so-called pulse control in which the pressure increase and pressure reduction are alternately repeated between 700 Torr and 0.01 Torr until the purification treatment is completed in the same manner as described above. At this time, the value of P 3 is not necessarily equal to P 1 . During such a purification process, since the carbon material is purified in the treatment chamber 3 at the predetermined pressures P 2 and P 3 below atmospheric pressure, the vapor pressure of the purification gas in the treatment chamber can be lowered, and The carbon material can be easily removed by using the impurities as a compound of the purification gas, and in addition, exhaustion and introduction of the purification gas are alternately repeated, so that the carbon material can be highly purified efficiently.
純化処理工程終了後、純化処理用ガス導入路７、不活性
ガス導入路８及び中間接続路12に夫々設けられた各弁13
を適宜に開閉して、処理室３の純度処理用ガスを700メ
ートル下の不活性ガスに切換える。本発明の装置におけ
る置換手段は、中間接続路12と、各弁13とに対応する。
この時も前述の純化処理工程と同様に不活性ガスの導
入、排気が交互に繰返され、処理室３を不活性ガス雰囲
気に置換えた後、炉内を冷却しカーボン材を取出す。After completion of the purification process, the valves 13 provided in the purification gas introducing passage 7, the inert gas introducing passage 8 and the intermediate connecting passage 12, respectively.
Is appropriately opened and closed to switch the purity processing gas in the processing chamber 3 to an inert gas 700 m below. The replacement means in the device of the present invention correspond to the intermediate connection 12 and each valve 13.
At this time as well, the introduction and exhaust of the inert gas are alternately repeated in the same manner as in the above-mentioned purification treatment step, the processing chamber 3 is replaced with the inert gas atmosphere, and then the inside of the furnace is cooled to take out the carbon material.
本発明による純化処理装置に対する従来の純化処理装置
との効果の比較を指数で表１に示す。Table 1 shows an index comparison of the effect of the purification processing apparatus according to the present invention with the conventional purification processing apparatus.
この表１からも明らかなように本具体例の純化処理装置
によれば、純化処理時間を大巾に短縮し、純化処理効率
を向上し得る。また、塩素消費量、電力消費量を大巾に
減少させ、処理コストを下げ得る。 As is clear from Table 1, according to the purification processing apparatus of this example, the purification processing time can be greatly shortened and the purification processing efficiency can be improved. In addition, chlorine consumption and electric power consumption can be greatly reduced, and the processing cost can be reduced.
さらに、炉の内部が外気としゃ断されるため、従来の炉
のように純化処理用ガスを炉外に漏れなくし得、詰粉を
使用しないため、粉塵の飛散を防止し得、したがって、
炉の回りの作業環境を良好に維持し得る。Furthermore, since the inside of the furnace is cut off from the outside air, it is possible to prevent the purification gas from leaking out of the furnace like a conventional furnace, and since no packing powder is used, it is possible to prevent the scattering of dust, therefore,
A good working environment around the furnace can be maintained.
本具体例では、純化処理用ガスとして塩素ガスを使用し
たが、これに限らず塩酸、フレオン、その他のハロゲン
含有ガスを使用できる。In this example, chlorine gas was used as the gas for purification treatment, but not limited to this, hydrochloric acid, freon, and other halogen-containing gas can be used.
また、本具体例では、間隙５内の圧力PA及び処理室３内
の圧力PBを負圧としたが、大気圧よりも高くしてもよ
い。Further, in this specific example, the pressure P A in the gap 5 and the pressure P B in the processing chamber 3 are negative, but they may be higher than atmospheric pressure.
（本発明の効果） 本発明のカーボン材の純化装置においては、処理室内の
圧力、並びに炉内壁及び炉外壁の間の間隙内の圧力を相
関し、各々の圧力を制御するが故に、純化処理時間を大
巾に短縮し、純化処理効率を向上し得、その結果、塩素
消費量、電力消費量を大巾に減少させ得る。加えて、置
換手段により、カーボン材を炉から取出す際にも純化処
理用ガスが炉外に漏れるのを阻止し得る。(Effect of the present invention) In the carbon material purifying apparatus of the present invention, the pressure in the processing chamber and the pressure in the gap between the inner wall of the furnace and the outer wall of the furnace are correlated and the respective pressures are controlled. The time can be greatly shortened and the purification treatment efficiency can be improved, and as a result, the chlorine consumption and the power consumption can be greatly reduced. In addition, the replacement means can prevent the purifying gas from leaking out of the furnace even when the carbon material is taken out of the furnace.
第１図は、本発明による純化処理装置の縦断面概略図で
あり、第２図は本発明による純化処理装置のガス供給及
び排気系統図であり、第３図は本発明による純化処理装
置の制御方法の説明用グラフである。 １……純化炉、３……処理室、９……ガス排出手段、10
……純化処理用ガス供給手段、11……不活性ガス供給手
段。FIG. 1 is a schematic vertical sectional view of a purification processing apparatus according to the present invention, FIG. 2 is a gas supply and exhaust system diagram of the purification processing apparatus according to the present invention, and FIG. 3 is a purification processing apparatus according to the present invention. It is a graph for explaining a control method. 1 ... Purification furnace, 3 ... Processing chamber, 9 ... Gas discharging means, 10
…… Purification treatment gas supply means, 11 …… Inert gas supply means.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊藤 正廣 山形県西置賜郡小国町大字小国町378番地 東芝セラミツクス株式会社小国製造所内 (72)発明者 梅津 ▲高▼志 山形県西置賜郡小国町大字小国町378番地 東芝セラミツクス株式会社小国製造所内 (72)発明者 安部 茂 山形県西置賜郡小国町大字小国町378番地 東芝セラミツクス株式会社小国製造所内 (72)発明者 川崎 知安 京都府京都市中京区西ノ京桑原町１番地 株式会社島津製作所三条工場内 (72)発明者 田中 秀一 京都府京都市中京区西ノ京桑原町１番地 株式会社島津製作所三条工場内 (56)参考文献 特開 昭58−84181（ＪＰ，Ａ) 実開 昭61−7536（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Masahiro Ito, 378, Oguni, Oguni-cho, Nishiokitama-gun, Nishigata, Yamagata Prefecture, Oguni Plant, Toshiba Ceramics Co., Ltd. (72) Inventor, Umezu ▲ High ▼ Oguni-cho, Oguni, Yamagata Prefecture Town 378 Toshiba Ceramics Co., Ltd. Oguni Plant (72) Inventor Shigeru Abe Oguni-machi Oguni Town, Ogishi Town, Yamagata Prefecture 378 Toshiba Ceramics Co., Ltd. Oguni Plant (72) Inventor Kawasaki Chian Nishinokyo Kuwabara, Nakagyo Ward, Kyoto City, Kyoto Prefecture No. 1 in the town, Sanjo Works, Shimadzu Corporation (72) Inventor, Shuichi Tanaka, No. 1, Kuwahara-cho, Nishinokyo, Nakagyo-ku, Kyoto City, Kyoto Prefecture (56) Sanjo Works, Sanjo Factory (56) Reference JP-A-58-84181 (JP, A) Actual Development Sho 61-7536 (JP, U)
Claims (3)
れた処理室を形成する炉内壁と、前記炉内壁の周囲に密
閉された間隙を形成する炉外壁と、前記間隙内に設けら
れたヒーターと、前記処理室に連通する純化処理用ガス
供給手段及び純化処理用ガス排出手段と、該純化処理用
ガスを不活性ガスに置換える置換手段と、前記間隙内に
連通する不活性ガス供給手段及び不活性ガス排出手段
と、前記処理室内の圧力及び前記間隔内の圧力を相関し
各々の圧力を制御する制御手段とを備えることを特徴と
するカーボン材の純化処理装置。1. A furnace inner wall forming a sealed processing chamber for arranging a carbon material inside, a furnace outer wall forming a sealed gap around the furnace inner wall, and a furnace inner wall provided inside the gap. A heater, a purification treatment gas supply means and a purification treatment gas discharge means communicating with the treatment chamber, a replacement means for replacing the purification treatment gas with an inert gas, and an inert gas communicating with the gap. A purification apparatus for a carbon material, comprising: a supply unit and an inert gas discharge unit; and a control unit that correlates the pressure in the processing chamber and the pressure in the interval to control each pressure.
り低いことを特徴とする特許請求の範囲第１項に記載の
装置。2. The apparatus according to claim 1, wherein the pressure in the processing chamber is lower than the pressure in the gap.
を特徴とする特許請求の範囲第２項に記載の装置。3. The apparatus according to claim 2, wherein the pressure in the gap is less than atmospheric pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62084322A JPH0780684B2 (en) | 1987-04-06 | 1987-04-06 | Carbon material purification equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62084322A JPH0780684B2 (en) | 1987-04-06 | 1987-04-06 | Carbon material purification equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63248707A JPS63248707A (en) | 1988-10-17 |
| JPH0780684B2 true JPH0780684B2 (en) | 1995-08-30 |
Family
ID=13827276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62084322A Expired - Fee Related JPH0780684B2 (en) | 1987-04-06 | 1987-04-06 | Carbon material purification equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0780684B2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5884181A (en) * | 1981-11-11 | 1983-05-20 | 松下電器産業株式会社 | Carbon member purifying treatment |
| JPS617536U (en) * | 1984-06-21 | 1986-01-17 | 東海カ−ボン株式会社 | Homogeneous firing equipment for carbon molded bodies |
| JPS6284321A (en) * | 1985-10-09 | 1987-04-17 | Hitachi Ltd | Control switch operation response method |
-
1987
- 1987-04-06 JP JP62084322A patent/JPH0780684B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63248707A (en) | 1988-10-17 |
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