JPH0796475B2 - Method for producing single crystal ferrite - Google Patents
Method for producing single crystal ferriteInfo
- Publication number
- JPH0796475B2 JPH0796475B2 JP3041410A JP4141091A JPH0796475B2 JP H0796475 B2 JPH0796475 B2 JP H0796475B2 JP 3041410 A JP3041410 A JP 3041410A JP 4141091 A JP4141091 A JP 4141091A JP H0796475 B2 JPH0796475 B2 JP H0796475B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- ferrite
- temperature
- sintered body
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 56
- 229910000859 α-Fe Inorganic materials 0.000 title claims description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 18
- 239000012298 atmosphere Substances 0.000 claims description 15
- 238000010304 firing Methods 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 5
- 229910052596 spinel Inorganic materials 0.000 claims description 5
- 239000011029 spinel Substances 0.000 claims description 5
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 230000002706 hydrostatic effect Effects 0.000 claims description 3
- 238000009489 vacuum treatment Methods 0.000 claims description 3
- 239000011148 porous material Substances 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 11
- 238000003746 solid phase reaction Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 238000001354 calcination Methods 0.000 description 5
- 238000010671 solid-state reaction Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 208000022417 sinus histiocytosis with massive lymphadenopathy Diseases 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Soft Magnetic Materials (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、多結晶体と単結晶体と
を接触させて加熱し、その固相反応によって単結晶を育
成成長する単結晶フェライトの製造方法に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a single crystal ferrite in which a polycrystal and a single crystal are brought into contact with each other and heated, and a single crystal is grown and grown by a solid phase reaction.
【0002】[0002]
【従来の技術】従来、多結晶体と単結晶体とを接触させ
て加熱し、その固相反応によって単結晶を育成成長させ
る固相反応法によるMn-Zn フェライトの製造方法は、例
えば特公昭61-10438号公報や特公昭61-3313号公報にお
いて知られている。2. Description of the Related Art Conventionally, a method for producing Mn-Zn ferrite by a solid-phase reaction method in which a polycrystal and a single crystal are brought into contact with each other and heated, and a single crystal is grown and grown by the solid-state reaction, is disclosed in, for example, Japanese Patent Publication No. It is known in Japanese Patent Publication No. 61-10438 and Japanese Patent Publication No. 61-3313.
【0003】しかしながら、上述した製造方法では、育
成成長した単結晶フェライト中に気孔が多く発生し、条
件によっては好適な材料とならない問題があった。However, the above-mentioned manufacturing method has a problem that a large number of pores are generated in the grown and grown single crystal ferrite, and the material cannot be a suitable material depending on the conditions.
【0004】[0004]
【発明が解決しようとする課題】この点に関し、固相反
応に使用する多結晶体中の気孔を減らせば育成した単結
晶中の気孔も減るであろうとも考えられ、HIP処理で
多結晶フェライトの気孔を低減することが知られてい
る。With respect to this point, it is considered that if the porosity in the polycrystal used for the solid phase reaction is reduced, the porosity in the grown single crystal will be reduced. It is known to reduce the porosity of the.
【0005】しかしながら、多結晶体中の気孔を低減し
ても、その後の単結晶育成のための高温加熱によって育
成した単結晶体中の気孔が増加してしまい、製品として
好ましいもの、すなわち1μm 以上の気孔が0.54mm2当
たり20個以下、気孔率換算で0.01%以下の製品を得るこ
とができなかった。However, even if the porosity in the polycrystal is reduced, the porosity in the single crystal grown by subsequent high temperature heating for growing the single crystal increases, which is preferable as a product, that is, 1 μm or more. It was not possible to obtain a product with less than 20 pores per 0.54 mm 2 and less than 0.01% in terms of porosity.
【0006】これは、固相反応法による単結晶育成が普
通一般的な焼鈍温度以上、すなわち1300℃から1560℃程
度の高温で処理されるため、いったん見かけ上は消滅し
た気孔の蘇生が発生するためであった。This is because the single crystal growth by the solid-phase reaction method is usually processed at a temperature higher than a general annealing temperature, that is, at a high temperature of about 1300 ° C. to 1560 ° C., so that apparently disappeared pores are revived. It was because of it.
【0007】また、本願人による特開昭62-41797号公報
では、単結晶フェライトを育成した後、得られた単結晶
フェライトを熱間静水圧プレス法により加圧熱処理する
技術が開示されている。Further, Japanese Patent Laid-Open No. 62-41797 by the present applicant discloses a technique of growing a single crystal ferrite and then subjecting the obtained single crystal ferrite to a pressure heat treatment by a hot isostatic pressing method. .
【0008】しかしながら、この方法では磁気ヘッドに
した場合帯磁ノイズが大きい、すなわち帯磁ノイズに寄
与する保持力Hcが0.05Oe以下という磁気ヘッドに必要
な条件を越えて、0.1 Oe程度まで劣化する場合がある
問題があった。However, in this method, when a magnetic head is used, the magnetizing noise is large, that is, the coercive force Hc contributing to the magnetizing noise is 0.05 Oe or less, which exceeds the condition required for the magnetic head and deteriorates to about 0.1 Oe. There was a problem.
【0009】本発明の目的は上述した課題を解消して、
固相反応法により育成した単結晶フェライト中の気孔が
少なく、単結晶成長距離も長く、量産に適した単結晶フ
ェライトの製造方法を提供しようとするものである。The object of the present invention is to solve the above-mentioned problems,
An object of the present invention is to provide a method for producing a single crystal ferrite, which has few pores in the single crystal ferrite grown by the solid-state reaction method and has a long single crystal growth distance, which is suitable for mass production.
【0010】[0010]
【課題を解決するための手段】本発明の単結晶フェライ
トの製造方法は、酸化鉄としてスピネル構造を有する
か、あるいはその履歴を有する酸化鉄を主として用いた
フェライト原料から成形体を製造し、この成形体に対
し、1100℃から1280℃の温度領域で真空処理した後ヘリ
ウム雰囲気または3%以下の酸素を含むヘリウム雰囲気
で焼成し窒素中で冷却するか、前記真空処理後ただちに
窒素中で冷却する第一次焼成を行い、平均粒子径10μm
以下の焼結体を作製し、この焼結体に対し、60kg/cm2以
上の静水圧下で第一次焼成の温度以上であって1150℃か
ら1350℃の温度領域で焼成する第二次焼成を行い、第一
次焼成後の焼結体の平均粒子径より大きく粒成長させた
多結晶フェライト焼結体を作製し、この多結晶フェライ
ト焼結体を種子単結晶に接合し、この接合体を第二次焼
成の温度以上であって1300℃から1560℃の温度領域で窒
素または3%以下の酸素を含む窒素雰囲気で加熱処理す
ることを特徴とするものである。The method for producing a single crystal ferrite according to the present invention comprises producing a compact from a ferrite raw material mainly using iron oxide having a spinel structure as iron oxide or having a history thereof. The molded body is vacuum-treated in the temperature range of 1100 ° C to 1280 ° C and then fired in a helium atmosphere or a helium atmosphere containing oxygen of 3% or less and cooled in nitrogen, or immediately after the vacuum treatment, cooled in nitrogen. Primary calcination, average particle size 10μm
The following sintered body is produced, and the sintered body is fired in a temperature range of 1150 ° C to 1350 ° C at a temperature equal to or higher than the primary firing temperature under a hydrostatic pressure of 60 kg / cm 2 or more. After firing, a polycrystalline ferrite sintered body is produced that has grown to a grain size larger than the average particle diameter of the sintered body after the primary firing, and this polycrystalline ferrite sintered body is bonded to a seed single crystal, and this bonding is performed. It is characterized in that the body is heat-treated in a nitrogen atmosphere containing nitrogen or 3% or less of oxygen in the temperature range of 1300 ° C to 1560 ° C above the temperature of the second firing.
【0011】[0011]
【作用】上述した構成において、まず、フェライト成形
体に対して所定の一次焼成を低酸素雰囲気中で行い、酸
素空格子量を多くして、その後の所定のHIP処理(静
水圧プレス処理)を用いた二次焼成において一次焼成よ
り処理温度を上げ、一次焼成より粒成長させ、粒界の界
面をずらし気孔をバルク内に拡散させた多結晶フェライ
トを種子単結晶フェライトと接触させ、所定の加熱処理
により固相反応を行っているため、育成した単結晶フェ
ライト中に気孔が少なく、結晶成長距離の長い単結晶を
得ることができる。In the above-mentioned structure, first, the ferrite molded body is subjected to a predetermined primary firing in a low oxygen atmosphere to increase the amount of oxygen vacancies, and then subjected to a predetermined HIP treatment (hydrostatic pressing treatment). In the secondary calcination used, the treatment temperature was raised from the primary calcination, the grains were grown from the primary calcination, the grain boundaries were shifted, the polycrystalline ferrite with pores diffused in the bulk was brought into contact with the seed single crystal ferrite, and the prescribed heating was performed. Since the solid-phase reaction is carried out by the treatment, it is possible to obtain a single crystal having a long crystal growth distance with few pores in the grown single crystal ferrite.
【0012】ここで、HIP処理後の固相反応を実施す
る温度が1300℃から1560℃とそれ以前の処理温度より高
いため、従来と同様に気孔蘇生が生じるように思える
が、本発明では、多結晶フェライトのHIP処理の粒成
長に伴い粒界が移動することに着目し、生成される酸素
空格子量を多くするとともに低い酸素濃度を選ぶことに
より、気孔蘇生が少なく実質的に気孔が皆無に近い好適
な単結晶フェライトを得ている。Here, since the temperature for carrying out the solid-phase reaction after HIP treatment is 1300 ° C. to 1560 ° C., which is higher than the treatment temperature before that, it seems that stomatal resuscitation occurs as in the conventional case, but in the present invention, Focusing on the movement of grain boundaries along with the grain growth of HIP treatment of polycrystalline ferrite, by increasing the amount of oxygen vacancies produced and selecting a low oxygen concentration, there is little pore resuscitation and virtually no pores. A suitable single crystal ferrite close to is obtained.
【0013】HIP焼成の条件として温度及び圧力を規
定したのは、この範囲が実質的に粒成長が起きる温度で
あるとともに、HIP処理で気孔低減が可能な圧力であ
ったためである。なお、本発明の温度範囲で圧力を2000
kg/cm2まであげても、単結晶化に障害となる液相物質の
FeO は発生しなかった。The temperature and pressure are defined as the conditions for HIP firing because this range is the temperature at which grain growth substantially occurs, and the pressure is such that HIP treatment can reduce pores. In addition, the pressure is 2000 in the temperature range of the present invention.
Even if the weight is increased up to kg / cm 2, the liquid phase substance
FeO was not generated.
【0014】固相反応における単結晶育成条件として焼
成雰囲気と温度を規定したのは、この範囲内では気孔蘇
生が少ない条件であるためである。The firing atmosphere and the temperature are defined as the single crystal growth conditions in the solid-state reaction, because the pore revival is small within this range.
【0015】また、本発明において単結晶育成距離が長
いのは、以下の理由による。まず、第1の理由は、フェ
ライトを構成するスピネル単位格子では、酸素の存在が
少ないと格子ユニットが不安定となり単結晶化に必要な
駆動力が小さくなる。このため多結晶を維持する力が弱
く、単結晶育成温度が若干低下したりあるいは異常成長
開始温度と単結晶育成温度が離れ、異種結晶からの単結
晶化が抑制されるためである。The reason why the single crystal growth distance is long in the present invention is as follows. First, the first reason is that in the spinel unit lattice that constitutes ferrite, if the presence of oxygen is small, the lattice unit becomes unstable and the driving force required for single crystallization becomes small. For this reason, the force for maintaining the polycrystal is weak, the single crystal growth temperature is slightly lowered, or the abnormal growth start temperature and the single crystal growth temperature are separated from each other, and single crystal formation from a heterogeneous crystal is suppressed.
【0016】第2の理由は、多結晶体の酸素空格子量が
多く、またフェライトにHIP処理時の加圧によってス
ピネル格子が歪み、またHIP処理自体がフェライトに
とって還元作用として働くため、スピネル格子が不安定
な状態になることにより、その後の外部からの加熱によ
って容易にドライビング力が大きくなり、単結晶育成距
離を長くすることができるためである。実際に単結晶化
は、試料の外側が早く伸び異種結晶の発生以前に多結晶
体が成長した単結晶に覆われることにより、単結晶育成
距離が大きくなった。The second reason is that the polycrystal has a large amount of oxygen vacancies, the spinel lattice is distorted by the pressure applied to the ferrite during the HIP treatment, and the HIP treatment itself acts as a reducing action on the ferrite. This is because the driving force is easily increased by the subsequent heating from the outside, and the single crystal growing distance can be lengthened. In fact, in the case of single crystallization, the growth distance of the single crystal was increased because the outside of the sample was rapidly expanded and the polycrystal was covered with the single crystal grown before the generation of the heterogeneous crystal.
【0017】なお、フェライト成形体を作製するのに使
用する酸化鉄原料としては、従来から公知のように、ス
ピネル構造を有するかあるいはその履歴を有すること
が、単結晶フェライトの製造に必須であるため、本発明
でも原料を規定している。It is essential for the production of single crystal ferrite that the iron oxide raw material used for producing the ferrite molded body has a spinel structure or a history thereof, as conventionally known. Therefore, the raw material is specified also in the present invention.
【0018】[0018]
【実施例】酸化鉄原料として湿式合成されたマグネタイ
トを焙焼し、これをMnO 31.0mol%,ZnO 16.4mol%,Fe2O3
52.6mol% の組成に調合し、混合、1050℃で仮焼、粉砕
を経由した後、35000psiで成形した。[Examples] Wet-synthesized magnetite as an iron oxide raw material was roasted, and MnO 31.0mol%, ZnO 16.4mol%, Fe 2 O 3
The mixture was compounded to a composition of 52.6 mol%, mixed, calcined at 1050 ° C., ground, and molded at 35000 psi.
【0019】この成形体を、ロータリポンプを用いて15
0 ℃/hの昇温速度で800℃まで昇温した後、40℃/hの昇
温速度に切り換え1000℃まで昇温した。この温度で8時
間保持した後、10℃/hの昇温速度で1060℃まで昇温し、
この温度で8時間保持した。さらに、10℃/hの昇温速度
で以下に示す表1の本発明範囲内および範囲外の一次焼
成温度まで昇温し、この温度で8時間保持した。This molded body was prepared by using a rotary pump.
After raising the temperature to 800 ° C. at a temperature rising rate of 0 ° C./h, the temperature was changed to 40 ° C./h and the temperature was raised to 1000 ° C. After holding at this temperature for 8 hours, the temperature was raised to 1060 ° C at a heating rate of 10 ° C / h,
Hold at this temperature for 8 hours. Further, the temperature was raised at a heating rate of 10 ° C./h to the primary firing temperature within and outside the scope of the present invention shown in Table 1 below, and this temperature was maintained for 8 hours.
【0020】この後、焼成雰囲気を表1に示すようにH
e雰囲気(酸素濃度0%と表示)または3%以下のO2
を含むHe雰囲気で4時間保持後N2 雰囲気に切り換え
て冷却するか、表2に示すようにただちに窒素に切り換
え、以後 950℃まで 300℃/hの降温速度で冷却し、窒素
を止め密閉した。得られた多結晶フェライトの一例の気
孔率は0.5%で、結晶粒子径は7.1 μm であった。After this, the firing atmosphere was changed to H as shown in Table 1.
e atmosphere (displayed as 0% oxygen concentration) or O 2 at 3% or less
After holding in a He atmosphere containing He for 4 hours, switch to an N 2 atmosphere and cool, or immediately switch to nitrogen as shown in Table 2 and then cool to 950 ° C at a temperature lowering rate of 300 ° C / h, and then stop and seal nitrogen. . An example of the obtained polycrystalline ferrite had a porosity of 0.5% and a crystal grain size of 7.1 μm.
【0021】得られた多結晶フェライトをGr-HIP N2 ガ
スの使用のもとアルミナ坩堝の中に埋粉なしでセット
し、300 ℃/hの昇温速度で昇温し、表1および表2に示
す本発明範囲内および範囲外の温度で3時間、60kg/cm2
に保持してHIP処理を行った後冷却した。得られた多
結晶フェライトの一例の気孔は2個/0.54mm2 であり、
結晶粒子径は8.2 μm であった。また、本発明の範囲内
の条件による多結晶フェライトでは、還元に伴うFeO の
析出は観察されなかった。The obtained polycrystalline ferrite was set in an alumina crucible without using any embedded powder under the use of Gr-HIP N 2 gas, and the temperature was raised at a heating rate of 300 ° C./h. 60 kg / cm 2 at a temperature within and outside the range of the present invention shown in 2 for 3 hours.
After that, HIP treatment was carried out, and then cooling was performed. An example of the obtained polycrystalline ferrite has 2 pores / 0.54 mm 2 ,
The crystal particle size was 8.2 μm. Further, in the polycrystalline ferrite according to the conditions within the scope of the present invention, precipitation of FeO 2 accompanying reduction was not observed.
【0022】得られた多結晶フェライトを従来から行わ
れているフェライトの加工条件で切削研磨して、研磨し
た多結晶フェライトと種子単結晶とを硝酸で仮接合し、
内側をフェライトで覆ったアルミナ匣鉢中に入れ、窒素
雰囲気中で300 ℃/hの昇温速度で昇温し、1150℃で表1
に示す本発明範囲内および範囲外の酸素濃度の窒素雰囲
気に切り換えて15分保持した。The obtained polycrystalline ferrite is cut and polished under the conventional processing conditions of ferrite, and the polished polycrystalline ferrite and the seed single crystal are temporarily joined with nitric acid,
It is placed in an alumina bowl with the inside covered with ferrite, heated in a nitrogen atmosphere at a heating rate of 300 ° C / h, and heated to 1150 ° C in Table 1.
The atmosphere was switched to a nitrogen atmosphere having oxygen concentrations within and outside the range of the present invention as shown in FIG.
【0023】その後、300 ℃/hの昇温速度でさらに昇温
し1340℃に達した後、15℃/hの昇温速度に切り換えて単
結晶育成を行った。さらに、1480℃まで同じ雰囲気を維
持し、以後300 ℃/hの昇温速度、窒素単独雰囲気に切り
換えサブグレインを無くすため1500℃で0.5h保持し、以
後窒素雰囲気で冷却した。After that, the temperature was further raised at a heating rate of 300 ° C./h to reach 1340 ° C., and then the temperature was switched to a heating rate of 15 ° C./h to grow a single crystal. Further, the same atmosphere was maintained up to 1480 ° C., and thereafter, the temperature was raised to 300 ° C./h, the atmosphere was changed to nitrogen-only atmosphere, the temperature was kept at 1500 ° C. for 0.5 h to eliminate subgrains, and then cooled in a nitrogen atmosphere.
【0024】各接合体に対して、育成して得られた単結
晶フェライトのサブグレインはなかった。成長距離は、
種子単結晶フェライトと多結晶フェライトとの接合面か
らの単結晶フェライトの育成した距離として求めた。ま
た、気孔数は、高速ラップ研磨機で仕上げた面を、1000
倍のスケール視野内の1μm 以上の気孔を光学顕微鏡で
肉眼観察して求めた。結果を併せて表1に記載する。な
お、気孔率は以下の式1For each bonded body, there was no subgrain of the single crystal ferrite obtained by growing. The growth distance is
The distance was calculated as the grown distance of the single crystal ferrite from the joint surface between the seed single crystal ferrite and the polycrystalline ferrite. Also, the number of pores is 1000 on the surface finished with a high-speed lapping machine.
The pores of 1 μm or more in the double scale visual field were determined by visual observation with an optical microscope. The results are also shown in Table 1. The porosity is calculated by the following formula 1.
【式1】 ただし、di :気孔径(長径)、ni :気孔径di の個
数より求めた。[Formula 1] However, d i: pore diameter (major axis), n i: was determined from the number of the pore diameter d i.
【0025】[0025]
【表1】 [Table 1]
【0026】[0026]
【表2】 [Table 2]
【0027】表1および表2の結果から、本発明の範囲
内の試験No1〜11及びNo19〜22は、育成して得た単結晶
中の気孔も少なく単結晶成長距離も大きいのに対し、本
発明の範囲外の試験No12〜18及びNo23〜25は、単結晶中
の気孔が多く単結晶成長距離も小さいことがわかる。な
お、本発明試験No4の単結晶フェライトの磁気特性のμ
特性は、0.1MHz=4800,1MHz=2400 となり、本発明範囲外
の比較例試験No14では、0.1MHz=1800,1MHz=1100 とな
り、本発明例では比較例に比べて磁気的特性が大幅に改
善されていることがわかる。From the results of Tables 1 and 2, the test Nos. 1 to 11 and Nos. 19 to 22 within the scope of the present invention have few pores in the single crystal grown and have a large single crystal growth distance. It can be seen that in Test Nos. 12 to 18 and Nos. 23 to 25, which are outside the scope of the present invention, the single crystal has many pores and the single crystal growth distance is small. In addition, μ of the magnetic characteristics of the single crystal ferrite of the present invention test No.
The characteristics are 0.1MHz = 4800, 1MHz = 2400, and in the comparative example test No. 14 outside the scope of the present invention, 0.1MHz = 1800, 1MHz = 1100, and in the present invention example, the magnetic characteristics are significantly improved compared to the comparative example. You can see that it is done.
【0028】[0028]
【発明の効果】以上の説明から明らかなように、本発明
の単結晶フェライトの製造方法によれば、所定のフェラ
イト成形体に対し、所定温度及び雰囲気の第一次焼成、
その後の所定温度及び圧力のHIP処理による第二次焼
成、種子単結晶と接合後の所定温度及び雰囲気の固相反
応の為の加熱処理を行うことにより、育成した単結晶中
の気孔数を減らすことができるとともに、単結晶成長距
離を大きくすることができるため、良好な磁気的特性を
有する単結晶フェライトを量産することができる。As is apparent from the above description, according to the method for producing a single crystal ferrite of the present invention, a predetermined ferrite compact is subjected to primary firing at a predetermined temperature and atmosphere,
The number of pores in the grown single crystal is reduced by performing secondary calcination by HIP treatment at a predetermined temperature and pressure after that, and heat treatment for solid phase reaction at a predetermined temperature and atmosphere after joining with the seed single crystal. Since it is possible to increase the single crystal growth distance, it is possible to mass-produce single crystal ferrite having good magnetic characteristics.
【0029】また、本発明により得た単結晶フェライト
は、その製造に当たって、埋粉を必要とせず、また、Gr
-HIP N2 ガスの処理でも還元に伴うFeO の析出とか、還
元によって粒界強度が低下し機械加工が劣るといった問
題はなかった。かくして得られた単結晶は、従来の固相
反応で得られた単結晶と比べ気孔率が格段に改良された
ため、寸法仕様が厳しいRDD 用基板あるいはVTR 用基板
となって、ヘッド特性が優れるものとなった。The single crystal ferrite obtained according to the present invention does not require any embedded powder in its production,
-HIP N 2 gas treatment did not cause any problems such as precipitation of FeO due to reduction, or reduction in grain boundary strength and poor machining. The single crystal thus obtained has a significantly improved porosity as compared with the single crystal obtained by the conventional solid-phase reaction, so it becomes a substrate for RDDs or VTRs with strict size specifications and excellent head characteristics. Became.
Claims (1)
あるいはその履歴を有する酸化鉄を主として用いたフェ
ライト原料から成形体を製造し、この成形体に対し、11
00℃から1280℃の温度領域で真空処理した後ヘリウム雰
囲気または3%以下の酸素を含むヘリウム雰囲気に切り
換えて焼成し窒素中で冷却するか、前記真空処理後ただ
ちに窒素中で冷却する第一次焼成を行い、平均粒子径10
μm 以下の焼結体を作製し、この焼結体に対し、60kg/c
m2以上の静水圧下で第一次焼成の温度以上であって1150
℃から1350℃の温度領域で焼成する第二次焼成を行い、
第一次焼成後の焼結体の平均粒子径より大きく粒成長さ
せた多結晶フェライト焼結体を作製し、この多結晶フェ
ライト焼結体を種子単結晶に接合し、この接合体を第二
次焼成の温度以上であって1300℃から1560℃の温度領域
で窒素または3%以下の酸素を含む窒素雰囲気で加熱処
理することを特徴とする単結晶フェライトの製造方法。1. An iron oxide having a spinel structure,
Alternatively, a molded body is produced from a ferrite raw material mainly using iron oxide having that history, and
After vacuum treatment in the temperature range of 00 ° C to 1280 ° C, switch to a helium atmosphere or a helium atmosphere containing 3% or less of oxygen and bake and cool in nitrogen, or immediately after the vacuum treatment, cool in nitrogen. Calcinated, average particle size 10
We made a sintered body of μm or less, and weighed 60kg / c for this sintered body.
A m 2 or more under hydrostatic pressure primary firing temperature above 1150
Perform the secondary firing to fire in the temperature range of ℃ to 1350 ℃,
A polycrystalline ferrite sintered body was produced by grain growth larger than the average particle diameter of the sintered body after the primary firing, and this polycrystalline ferrite sintered body was bonded to a seed single crystal, and this bonded body was 1. A method for producing a single crystal ferrite, which comprises heat-treating in a nitrogen atmosphere containing nitrogen or 3% or less of oxygen in a temperature range of 1300 ° C. to 1560 ° C. which is higher than a temperature of the subsequent firing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3041410A JPH0796475B2 (en) | 1991-01-18 | 1991-01-18 | Method for producing single crystal ferrite |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3041410A JPH0796475B2 (en) | 1991-01-18 | 1991-01-18 | Method for producing single crystal ferrite |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04240195A JPH04240195A (en) | 1992-08-27 |
| JPH0796475B2 true JPH0796475B2 (en) | 1995-10-18 |
Family
ID=12607589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3041410A Expired - Lifetime JPH0796475B2 (en) | 1991-01-18 | 1991-01-18 | Method for producing single crystal ferrite |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0796475B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115368127B (en) * | 2022-08-22 | 2023-04-28 | 深圳顺络电子股份有限公司 | A kind of ferrite material, preparation method and common mode inductor |
-
1991
- 1991-01-18 JP JP3041410A patent/JPH0796475B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04240195A (en) | 1992-08-27 |
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