JPH0814466B2 - High temperature heating furnace - Google Patents
High temperature heating furnaceInfo
- Publication number
- JPH0814466B2 JPH0814466B2 JP2190414A JP19041490A JPH0814466B2 JP H0814466 B2 JPH0814466 B2 JP H0814466B2 JP 2190414 A JP2190414 A JP 2190414A JP 19041490 A JP19041490 A JP 19041490A JP H0814466 B2 JPH0814466 B2 JP H0814466B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- high temperature
- heating furnace
- strip
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims description 42
- 239000011810 insulating material Substances 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Details (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は高温用加熱炉、特に1000℃以上の高温用加熱
炉に関するものである。TECHNICAL FIELD The present invention relates to a high temperature heating furnace, and more particularly to a high temperature heating furnace of 1000 ° C. or higher.
従来、炉内の温度が1000℃以上となる高温用の加熱炉
としては、直径4m/m以上の線状の発熱体を加熱炉内面
に、適当な間隔をもって配置し、耐熱電気絶縁性を有す
る保持具にて保持せしめ、その外面に、シリカ、アルミ
ナなどのファインセラミックスを材料とするファイバー
状断熱材を配置し、この線状発熱体に通電して炉内を昇
温していた。又、これにより細い直径の線状発熱体をコ
イル状やジグザグ状に曲げ加工して、加熱炉内面に配置
してなる高温用加熱炉も使用されている。Conventionally, as a heating furnace for high temperature where the temperature in the furnace is 1000 ° C or higher, a linear heating element having a diameter of 4 m / m or more is arranged at an appropriate interval on the inner surface of the heating furnace and has heat-resistant electric insulation. It was held by a holder, and a fibrous heat insulating material made of fine ceramics such as silica and alumina was arranged on the outer surface of the holder, and the linear heating element was energized to raise the temperature inside the furnace. Further, there is also used a high temperature heating furnace in which a linear heating element having a small diameter is bent into a coil shape or a zigzag shape and arranged on the inner surface of the heating furnace.
然しながら細い線状の発熱体を用いたものでは太い線
のものに比べて、高温時の強度が弱い為、熱変形を生じ
易く、長時間の使用に耐える物ではなかった。However, the one using a thin linear heating element is weaker in strength at high temperature than the one using a thick wire, so that thermal deformation is likely to occur and it is not a product that can be used for a long time.
又直径4m/m以上の線状の発熱体を使用した炉の場合、
線の断面積が大きくなる為、抵抗値は小さくなり、炉内
面の面積に対応させた適当な電気容量を得る為には、ト
ランスなどの変圧器により印加電圧を下げて大電流を流
す必要があり、又、発熱体及び保持具の熱容量が大きい
為、急速な昇温及び降温は不可能であった。又、印加電
圧を下げる為のトランスは重量が極めて大きく、設置す
る場所が限定される場合が多かった。In the case of a furnace using a linear heating element with a diameter of 4 m / m or more,
Since the cross-sectional area of the wire becomes large, the resistance value becomes small, and in order to obtain an appropriate electric capacity corresponding to the area of the furnace inner surface, it is necessary to lower the applied voltage with a transformer such as a transformer to flow a large current. In addition, since the heat capacity of the heating element and the holder was large, it was not possible to rapidly raise or lower the temperature. Further, the transformer for lowering the applied voltage is extremely heavy, and the place where it is installed is often limited.
このため例えば特開平１−116395号公報や特公昭40−
22097号公報に示すように帯状の発熱体を用いたものが
提案されている。Therefore, for example, JP-A-1-116395 and JP-B-40-
As disclosed in Japanese Patent No. 22097, a device using a belt-shaped heating element has been proposed.
然しながら、このようなものでは帯状の発熱体の支持
構造が複雑で且つ確実性に欠ける欠点があった。However, such a structure has a drawback that the supporting structure for the belt-shaped heating element is complicated and lacks certainty.
本発明は上記の欠点を除くようにしたものである。 The present invention has been made to eliminate the above disadvantages.
本発明の高温用加熱炉は、炉心を囲むよう周方向及び
軸方向に延びる帯状発熱体と、この帯状発熱体の外面に
対向する断熱兼保持用のファイバー状断熱材とより成
り、上記帯状発熱体の上下縁の少なくとも何れか一方に
軸方向に延びる切り込みを有し、この切り込み部分で上
記縁が外方に折り曲げられて突出し、この突出部分が上
記ファイバー状断熱材内に埋め込まれていることを特徴
とする。The high-temperature heating furnace of the present invention comprises a band-shaped heating element extending in the circumferential direction and the axial direction so as to surround the core, and a fiber-shaped heat insulating material facing the outer surface of the band-shaped heating element for heat insulation and holding. At least one of the upper and lower edges of the body has a notch that extends in the axial direction, and at the notch, the edge is bent outward to project, and the projecting section is embedded in the fibrous heat insulating material. Is characterized by.
本発明の高温用加熱炉は炉心に面するよう筒状に巻か
れた帯状発熱体から一体に外方に突出する部分が形成さ
れ、この部分が、帯状発熱体の外面を覆うファイバー状
断熱材に埋め込まれ、これによって帯状発熱体が強固に
保持されるようになる。The high-temperature heating furnace of the present invention is formed with a portion integrally protruding outward from the strip-shaped heating element wound in a cylindrical shape so as to face the core, and this portion covers the outer surface of the strip-shaped heating element. Embedded in the strip-shaped heating element, so that the strip-shaped heating element is firmly held.
以下図面によって本発明の実施例を説明する。 Embodiments of the present invention will be described below with reference to the drawings.
本発明の高温用加熱炉においては第１図に示すように
炉心１の円筒状に囲むように巻いた複数の帯状発熱体２
を円周方向及び軸方向に延びるよう螺旋状に巻き、この
帯状発熱体２の外面の断熱兼保持用の円筒状のファイバ
ー状断熱材３によって保持せしめる。In the high temperature heating furnace of the present invention, as shown in FIG. 1, a plurality of strip-shaped heating elements 2 wound so as to surround the core 1 in a cylindrical shape.
Is spirally wound so as to extend in the circumferential direction and the axial direction, and the outer surface of the band-shaped heating element 2 is held by a cylindrical heat insulating material 3 for heat insulation and holding.
この保持のため、本発明の高温用加熱炉においては、
帯状発熱体２はその上下縁、例えば上縁に第２図に示す
ように多数の軸方向の切り込み４を形成し、この切り込
み４を利用して上記上縁を他の部分に対し第３図、第４
図に示すように直角に外方に折り曲げ、この折り曲げ部
分５を第５図に示すように上記ファイバー状断熱材３内
に食い込ませ又は埋め込むようにする。For this retention, in the high temperature heating furnace of the present invention,
The strip-shaped heating element 2 has a number of axial notches 4 formed in the upper and lower edges thereof, for example, the upper edge, as shown in FIG. , 4th
As shown in the drawing, it is bent outward at a right angle, and this bent portion 5 is made to bite or be embedded in the fibrous heat insulating material 3 as shown in FIG.
本発明の高温用加熱炉は上記のような構成であるか
ら、帯状発熱体２を簡単，確実にすることができる。Since the high-temperature heating furnace of the present invention has the above-described configuration, the strip-shaped heating element 2 can be simply and reliably provided.
本発明の高温用加熱炉は上記のような構成であるから
下記のような種々な利益がある。Since the high temperature heating furnace of the present invention is configured as described above, it has the following various benefits.
（１） 帯状発熱体を炉内面に向けて配置し炉心に面す
る側が保持材によって覆わないようにしたので、炉の内
面有効発熱面積を太い発熱線と同じように大きくするの
は容易であり、しかも、断面積を小さく出来る為、商用
電圧である200Vや220Vをそのまま使用出来、変圧器が不
要であり、又、電流が小さい為、給電部や配線材を小さ
く出来る。(1) Since the strip-shaped heating element is arranged so as to face the inner surface of the furnace and the side facing the core is not covered with the holding material, it is easy to increase the effective heating area on the inner surface of the furnace in the same manner as a thick heating wire. Moreover, since the cross-sectional area can be made small, the commercial voltage of 200V or 220V can be used as it is, no transformer is required, and the current is small, the power supply part and wiring material can be made small.
（２） 帯状発熱体の上縁または下縁を折り曲げ、これ
をファイバー状断熱材に直接保持させるようにしたので
その保持が確実であり、また、特別な保持具を必要とせ
ず、保持具が不要となる分、コストダウンが可能とな
る。(2) Since the upper edge or the lower edge of the strip-shaped heating element is bent and is directly held by the fiber-shaped heat insulating material, the holding is reliable, and no special holding tool is required, and the holding tool is Since it is unnecessary, cost can be reduced.
第１図は本発明高温用加熱炉の断面図、第２図は加工前
の帯状発熱体の一部の展開図、第３図、第４図は加工後
の上記帯状発熱体の一部の正面図及び縦断側面図、第５
図は第１図のＡ−Ａ線断面図である。 １……炉心、２……帯状発熱体、３……ファイバー状断
熱材、４……切り込み、５……折り曲げ部分。FIG. 1 is a sectional view of a high temperature heating furnace of the present invention, FIG. 2 is a developed view of a part of a belt-shaped heating element before processing, and FIGS. 3 and 4 are a part of the band-shaped heating element after processing. Front view and vertical side view, 5th
The figure is a sectional view taken along the line AA of FIG. 1 ... Reactor core, 2 ... Strip heating element, 3 ... Fiber insulation, 4 ... Notch, 5 ... Bent part.
Claims (1)
帯状発熱体と、この帯状発熱体の外面に対向する断熱兼
保持用のファイバー状断熱材とより成り、上記帯状発熱
体の上下縁の少なくとも何れか一方に軸方向に延びる切
り込みを有し、この切り込み部分で上記縁が外方に折り
曲げられて突出し、この突出部分が上記ファイバー状断
熱材内に埋め込まれていることを特徴とする高温用加熱
炉。1. A strip-shaped heating element extending in the circumferential direction and the axial direction so as to surround the core, and a fiber-shaped heat insulating material facing the outer surface of the strip-shaped heating element for heat insulation and holding. At least one of which has an axially extending notch, the edge is bent outward at the notch and protrudes, and the protruding part is embedded in the fibrous heat insulating material. High temperature heating furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2190414A JPH0814466B2 (en) | 1990-07-20 | 1990-07-20 | High temperature heating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2190414A JPH0814466B2 (en) | 1990-07-20 | 1990-07-20 | High temperature heating furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0480590A JPH0480590A (en) | 1992-03-13 |
| JPH0814466B2 true JPH0814466B2 (en) | 1996-02-14 |
Family
ID=16257745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2190414A Expired - Fee Related JPH0814466B2 (en) | 1990-07-20 | 1990-07-20 | High temperature heating furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0814466B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5544121B2 (en) | 2009-07-21 | 2014-07-09 | 株式会社日立国際電気 | Heating apparatus, substrate processing apparatus, and semiconductor device manufacturing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0539437Y2 (en) * | 1988-01-29 | 1993-10-06 |
-
1990
- 1990-07-20 JP JP2190414A patent/JPH0814466B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480590A (en) | 1992-03-13 |
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