Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPH0818241B2 - Polishing tool manufacturing method - Google Patents
[go: Go Back, main page]

JPH0818241B2 - Polishing tool manufacturing method - Google Patents

Polishing tool manufacturing method

Info

Publication number
JPH0818241B2
JPH0818241B2 JP62066715A JP6671587A JPH0818241B2 JP H0818241 B2 JPH0818241 B2 JP H0818241B2 JP 62066715 A JP62066715 A JP 62066715A JP 6671587 A JP6671587 A JP 6671587A JP H0818241 B2 JPH0818241 B2 JP H0818241B2
Authority
JP
Japan
Prior art keywords
polishing
sphere
polishing tool
gel
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62066715A
Other languages
Japanese (ja)
Other versions
JPS63232954A (en
Inventor
学 安藤
聡 湯浅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62066715A priority Critical patent/JPH0818241B2/en
Priority to US07/169,060 priority patent/US4974368A/en
Publication of JPS63232954A publication Critical patent/JPS63232954A/en
Priority to US07/569,386 priority patent/US4999954A/en
Priority to US08/157,440 priority patent/US5347763A/en
Publication of JPH0818241B2 publication Critical patent/JPH0818241B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Description

【発明の詳細な説明】 〔発明の属する分野〕 本発明はレンズミラー等の光学素子又は金型等の研磨
加工に関し、特に流体又は液体内で加工物を研磨加工す
る研磨工具の製造方法に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to polishing of optical elements such as lens mirrors or dies, and more particularly to a method of manufacturing a polishing tool for polishing a workpiece in a fluid or liquid.

〔発明の従来技術〕(Prior art of the invention)

第6図は従来の液中研磨の方法を示し、回転軸1の先
端にポリウレタン等の樹脂2で作った球体を接合したも
の。研磨液中でこの球体を回転させ研磨液4をつれまわ
りさせることにより研磨液に必要な流速を得、球体を加
工物6の研磨加工したい部分に近づけることで、そのギ
ヤツプ部に研磨液の動圧を得、研磨加工を行う。
FIG. 6 shows a conventional method of polishing in liquid, in which a sphere made of resin 2 such as polyurethane is joined to the tip of a rotary shaft 1. By rotating this sphere in the polishing liquid and causing the polishing liquid 4 to circulate around it, the flow velocity required for the polishing liquid is obtained, and by bringing the sphere closer to the portion of the workpiece 6 to be polished, the movement of the polishing liquid to the gear part is achieved. Obtain pressure and perform polishing.

この従来例においては、ポリウレタンの球の加工精度
を上げることが困難なため、加工物に球をあまり近づけ
られない。又、回転するポリウレタン球を加工物に接触
させてしまうと、微小なキズがつき良好な表面アラサが
得られない。
In this conventional example, since it is difficult to improve the processing accuracy of the polyurethane balls, the balls cannot be brought close to the work piece. Further, if the rotating polyurethane spheres are brought into contact with the workpiece, fine scratches will be formed and a good surface roughness cannot be obtained.

更にポリウレタン球近傍の研磨液流速の変化率は第7
図のように急激におちるので(研磨液が低粘度の水溶液
性のものの時)加工点に十分な動圧を与えようとする
と、どうしてもポリウレタン球を加工物に近づけなくて
はならない。また、球の加工精度悪いので近づけられな
い。従来例はそれでも加工物に近づけなければいけない
ので非常に精密な工具移動系を持たなければならない。
Furthermore, the rate of change of the polishing liquid flow rate in the vicinity of the polyurethane ball is 7th
As it falls sharply as shown in the figure (when the polishing liquid is a low viscosity aqueous solution), in order to give sufficient dynamic pressure to the processing point, the polyurethane sphere must be brought close to the processed product. In addition, since the processing accuracy of the ball is poor, it cannot be approached. The conventional example still has to have a very precise tool movement system because it must approach the work piece.

適正な加工条件を保持することがむづかしいので(1,
2)加工能率は非常に悪い等の問題があった。
Since it is difficult to maintain proper processing conditions (1,
2) There were problems such as very poor processing efficiency.

〔本発明の課題及び課題達成のための手段〕[Problems of the Invention and Means for Achieving the Problems]

本発明者等は加工物と研磨工具を研磨液中に配置し、
前記研磨工具に回転を与え前記研磨工具の回転によって
前記研磨液を加工物表面に衝突させる研磨法において、 前記研磨工具と前記加工物間の距離に対する研磨液の
流速の変化率を所定の範囲内に制御するための研磨手段
として、第1図に示す研磨工具を提案した。
The present inventors arrange the workpiece and the polishing tool in the polishing liquid,
In a polishing method in which the polishing tool is rotated to cause the polishing solution to collide with the surface of the workpiece by the rotation of the polishing tool, the rate of change of the flow rate of the polishing solution with respect to the distance between the polishing tool and the workpiece is within a predetermined range. The polishing tool shown in FIG. 1 has been proposed as a polishing means for controlling.

第1図に示す研磨工具は研磨液中で回転する回転軸8
の先端に多孔質球体10を取り付け該多孔質球体のまわり
にゲル状物質12を固着した回転研磨工具と成し、ゲル状
物質12を親水性ポリマーゲル層とすることにより、親水
性のポリマーゲル層はつれまわりするので、研磨液のつ
れまわり速度が、中心球体からゲル層分シフトしたこと
になる。その結果中心球体を加工物から十分離して加工
でき安全性が増す効果を期待することができる。
The polishing tool shown in FIG. 1 has a rotary shaft 8 that rotates in the polishing liquid.
The porous sphere 10 is attached to the end of the porous sphere to form a rotary polishing tool in which a gel-like substance 12 is fixed around the sphere, and the gel-like substance 12 is formed into a hydrophilic polymer gel layer, thereby forming a hydrophilic polymer gel. Since the layers hang around, the wrapping speed of the polishing liquid is shifted from the central sphere by the gel layer. As a result, the central sphere can be processed sufficiently apart from the processed product, and the effect of increasing safety can be expected.

本発明は前述の研磨工具を製造する方法を提案するも
のであり、上記研磨工具を球体に対しゲル層をいかに固
着するかを検討し、その結果、多孔質芯体を研磨層成形
用型内に固定し、前記多孔質芯体と前記成形用型の間に
研磨層用キヤビテイを設け、 前記キヤビテイに研磨用コーテイング材料を注入し前
記コーテイング材料を前記多孔質芯体の多孔質内に浸漬
させるとともに前記キヤビテイ内に充填して成形する方
法を提案するものである。
The present invention proposes a method for producing the above-mentioned polishing tool, and examines how the above-mentioned polishing tool fixes a gel layer to a sphere, and as a result, a porous core body is formed in a polishing layer molding die. Fixed to the porous core and a cavity for a polishing layer is provided between the porous core and the molding die, and a coating material for polishing is injected into the cavity to immerse the coating material in the pores of the porous core. At the same time, a method of filling and molding in the cavity is proposed.

〔実施例の説明〕[Explanation of Example]

第2図乃至第5図は前述第1図に示した研磨工具の作
り方を示す。
2 to 5 show how to make the polishing tool shown in FIG.

まず、回転軸8の先端に多孔質のアルミニウム材10a
を嵌合、ねじ結合等により固定する(第2図)。次にア
ルミニウム材10aを球状に切削加工する(第3図)。こ
のようにして加工した多孔質アルミ球体10aを第4図示
の金型14A・14Bに入れてゲル層を成形加工する。
First, a porous aluminum material 10a is attached to the tip of the rotary shaft 8.
Are fixed by fitting, screwing or the like (Fig. 2). Next, the aluminum material 10a is cut into a spherical shape (Fig. 3). The porous aluminum sphere 10a processed in this way is put into the molds 14A and 14B shown in FIG. 4 to form a gel layer.

金型14A・14Bは回転軸8を嵌め込む半円形凸部と球体
及びゲル層を入れる半球状凸部を形成し、一方の型14B
にはゲル材を注入する注入口と注入路14b1,14b2を設け
てある。
The molds 14A and 14B are formed with a semi-circular convex part into which the rotary shaft 8 is fitted and a semi-spherical convex part into which the sphere and the gel layer are inserted, and one mold 14B
An injection port for injecting a gel material and injection paths 14b 1 and 14b 2 are provided therein.

型14A・14Bの半円形部に回転軸を嵌め込み両金型を閉
じると球体の周囲にゲル材を注入するキヤビテイを設け
る。型閉じ後、ゲル材を注入口から注入路を経てキヤビ
テイ内に射出すると、ゲル材は第5図にふすようにアル
ミ多孔質球体の表面から多孔内に浸入する。
When the rotary shaft is fitted into the semi-circular part of the molds 14A and 14B and both molds are closed, a cavity is provided to inject the gel material around the sphere. After the mold is closed, the gel material is injected from the injection port through the injection path into the cavity, and the gel material penetrates into the pores from the surface of the aluminum porous sphere as shown in FIG.

ゲル材料としては、 ビニルピロリドン5%水溶液に、架橋剤としてNN′メ
チレンビスアクリルアミドを1%加え、重合開始剤(ラ
ジカル開始剤)を加えただちにモールド型に注入する。
その後適当な温度に加熱し重合を開始,終了させる。す
るとアルミ多孔体の空孔中にもモノマーが浸入してから
重合を開始するのでゲルが強固に球体表面に固定され
る。アンカー効果またゲル外面の球精度はモールド型精
度で決まるので割と精度がよい。
As a gel material, 1% of NN'methylenebisacrylamide as a cross-linking agent and a polymerization initiator (radical initiator) are added to a 5% aqueous solution of vinylpyrrolidone, and the mixture is immediately poured into a mold.
Then, it is heated to an appropriate temperature to start and end the polymerization. Then, the monomer enters the pores of the aluminum porous body and then the polymerization is started, so that the gel is firmly fixed to the surface of the sphere. The anchor effect and the accuracy of the sphere on the outer surface of the gel are relatively accurate because they are determined by the accuracy of the mold.

親水性のポリマーゲルとしては、以下のモノマーの重
合度を調整したものも用い得る。
As the hydrophilic polymer gel, those having the degree of polymerization of the following monomers adjusted may be used.

剛体(アルミ多孔質体)の球の時は、加工精度高く、
従って回転精度高い。
For rigid (aluminum porous) spheres, high processing accuracy,
Therefore, the rotation accuracy is high.

ゲルが加工物に接触しても加工物にはキズがつかな
い。だから、流速の高い(球体に近い)部分を使えるの
で加工能率が高い。
Even if the gel contacts the work piece, the work piece is not scratched. Therefore, it is possible to use the part with a high flow velocity (close to a sphere), so the machining efficiency is high.

研磨液中の研磨材がたとえばシリカの極微粉(数10
Å)を使うとすると、ゲル中に研磨液が浸入し、一段と
研磨液と加工球体の境界をあいまいにすることができ
る。
The polishing material in the polishing liquid is, for example, ultrafine silica powder (10
By using Å), the polishing liquid penetrates into the gel, and the boundary between the polishing liquid and the processing sphere can be further blurred.

本発明に依って作った研磨工具は第8図に示すよう
に、研磨工具と加工物の距離が従来例より離れていても
つれまわり流速は急減しないので加工物に対し工具を離
しても十分に研磨液を加工物加工面に作用させることが
できる効果を有する。
As shown in FIG. 8, the polishing tool produced according to the present invention has a distance between the polishing tool and the workpiece that is farther than the conventional example, and the entanglement flow velocity does not decrease sharply. It has the effect of allowing the polishing liquid to act on the processed surface of the workpiece.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の製造方法に係わる研磨工具による研磨
作用を示す図。 第2図乃至第6図は本発明の実施例を示し、 第2図は回転軸に多孔質アルミを固着する説明図、 第3図は多孔質球体の説明図、 第4図はゲル材を球体に成形する説明図、 第5図はゲル材の固着状態を示す図、 第6図・第7図は従来技術の説明図、 第8図は本発明による効果の説明図。 8……回転軸 10……多孔質アルミ球体 12……ゲル材 14A・14B……金型
FIG. 1 is a view showing a polishing action by a polishing tool according to the manufacturing method of the present invention. 2 to 6 show an embodiment of the present invention, FIG. 2 is an explanatory view of fixing porous aluminum to a rotating shaft, FIG. 3 is an explanatory view of a porous sphere, and FIG. 4 is a gel material. FIG. 5 is an explanatory view of molding into a spherical body, FIG. 5 is a view showing a fixed state of a gel material, FIGS. 6 and 7 are explanatory views of a conventional technique, and FIG. 8 is an explanatory view of an effect of the present invention. 8 …… Rotating axis 10 …… Porous aluminum sphere 12 …… Gel material 14A ・ 14B …… Mold

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】多孔質芯体を研磨層成形用型内に固定し、
前記多孔質芯体と前記成形用型の間に研磨層用キャビテ
ィを設け、 前記キャビティにゲル材料を注入し、前記ゲル材料を前
記多孔質芯体の多孔質内に浸漬させるとともに前記キャ
ビティ内に充填して製造することを特徴とする研磨工具
の製造方法。
1. A porous core is fixed in a polishing layer molding die,
A polishing layer cavity is provided between the porous core body and the molding die, a gel material is injected into the cavity, and the gel material is immersed in the porosity of the porous core body and inside the cavity. A method for manufacturing an abrasive tool, which comprises filling and manufacturing.
JP62066715A 1987-03-19 1987-03-19 Polishing tool manufacturing method Expired - Fee Related JPH0818241B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62066715A JPH0818241B2 (en) 1987-03-19 1987-03-19 Polishing tool manufacturing method
US07/169,060 US4974368A (en) 1987-03-19 1988-03-16 Polishing apparatus
US07/569,386 US4999954A (en) 1987-03-19 1990-08-15 Polishing apparatus
US08/157,440 US5347763A (en) 1987-03-19 1993-11-26 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62066715A JPH0818241B2 (en) 1987-03-19 1987-03-19 Polishing tool manufacturing method

Publications (2)

Publication Number Publication Date
JPS63232954A JPS63232954A (en) 1988-09-28
JPH0818241B2 true JPH0818241B2 (en) 1996-02-28

Family

ID=13323883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62066715A Expired - Fee Related JPH0818241B2 (en) 1987-03-19 1987-03-19 Polishing tool manufacturing method

Country Status (1)

Country Link
JP (1) JPH0818241B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0884133A4 (en) * 1996-12-06 2000-11-29 Yoshiaki Nagaura Method and apparatus for manufacture of quartz oscillator
US7294044B2 (en) * 2005-04-08 2007-11-13 Ferro Corporation Slurry composition and method for polishing organic polymer-based ophthalmic substrates
JP6092559B2 (en) * 2012-09-28 2017-03-08 富士紡ホールディングス株式会社 Manufacturing method of polishing sheet
JP6884015B2 (en) * 2017-03-22 2021-06-09 株式会社荏原製作所 Substrate polishing equipment and polishing method

Also Published As

Publication number Publication date
JPS63232954A (en) 1988-09-28

Similar Documents

Publication Publication Date Title
US3408429A (en) Method for centrifugal casting a contact lens
US3691263A (en) Method for manufacturing rotation-symmetric articles by centrifugal casting
US3361858A (en) Reshaping a xerogel by mechanical removal and swelling to form a hydrogel contact lens
US5300262A (en) Process of spincasting a compound contact lens
CA1322091C (en) Method and apparatus for producing molded articles
JPH0818241B2 (en) Polishing tool manufacturing method
US4146565A (en) Rotational molding of hollow articles of uniform wall thickness
JPH0688119B2 (en) Die casting
JP2004537424A (en) Chemical mechanical polishing pad with micro holes
JPH02173721A (en) Coloring of hydrophilic resin product
JPH11165252A (en) Abrasive material, manufacture of abrasive material and polishing or grinding method
JPH0761604B2 (en) Non-contact spherical processing method
US4541969A (en) Method of making toric spin cast lenses
JP2000351960A (en) Abrasive grain body for grinding
JPS60199618A (en) Cutting device and method for precisely trimming rim of centrifugal casting lens
US4578230A (en) Method of contouring the edge of contact lenses
Feng et al. Fundamental investigation on the polishing aspheric elements with doughnut-shaped MCF slurry
US20240051087A1 (en) Smoothing method
JPS63199615A (en) Mold for golf ball
US3124623A (en) method of shaping crystal blanks
JPS62297120A (en) Molding tool for lens
JPH11114096A (en) Manufacturing method of golf ball molding die, golf ball molding die and golf ball
JPS6073836A (en) Manufacture of contact lens and mold for the same
JPH0333419B2 (en)
JPH0818240B2 (en) Polishing method and tool

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees