JPH0820301B2 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH0820301B2 JPH0820301B2 JP63241337A JP24133788A JPH0820301B2 JP H0820301 B2 JPH0820301 B2 JP H0820301B2 JP 63241337 A JP63241337 A JP 63241337A JP 24133788 A JP24133788 A JP 24133788A JP H0820301 B2 JPH0820301 B2 JP H0820301B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- transmission chamber
- resin
- water
- pressure transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 32
- 230000005540 biological transmission Effects 0.000 claims description 30
- 239000011347 resin Substances 0.000 claims description 28
- 229920005989 resin Polymers 0.000 claims description 28
- 239000000945 filler Substances 0.000 claims description 12
- 239000012212 insulator Substances 0.000 claims description 5
- 230000005484 gravity Effects 0.000 claims description 4
- 230000009969 flowable effect Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 239000003921 oil Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 238000002485 combustion reaction Methods 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 230000007257 malfunction Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- GNBHRKFJIUUOQI-UHFFFAOYSA-N fluorescein Chemical compound O1C(=O)C2=CC=CC=C2C21C1=CC=C(O)C=C1OC1=CC(O)=CC=C21 GNBHRKFJIUUOQI-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000615 nonconductor Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、浴槽の水位を圧力として検知する圧力検知
センサに関するものであり、浴槽へ自動的に湯張りを行
う自動風呂に用いられるものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure detection sensor for detecting the water level of a bathtub as pressure, and is used for an automatic bath for automatically filling the bathtub with water.
従来の技術 従来のこの種の圧力検知センサを第４図に示す。2. Description of the Related Art A conventional pressure detecting sensor of this type is shown in FIG.
１は浴槽もしくは浴槽に連通したパイプであり、水が
充填していて浴槽の水位に応じてその圧力が変化するも
のであり、２はセンサ取付台である。1 is a bathtub or a pipe communicating with the bathtub, which is filled with water and whose pressure changes according to the water level in the bathtub, and 2 is a sensor mounting base.
３は圧力検知素子であり、圧力導入口４を有する。５
は圧力検知素子３を支持する素子支持体であり、圧力導
入口４を開口させた圧力伝達室６を有する。７はゴムダ
イヤフラムであり、センサ取付台２と素子支持体５とを
ビス８で結合するときに圧力伝達室６を密閉し、パイプ
１内の充填水と圧力検知素子３とを隔離すると同時に圧
力を伝達させる役目を果す。９はゴムダイヤフラム７で
密閉された圧力伝達室６内に充填する流動性の充填材で
あり、例えばシリコンオイル等を用いる。ゴムダイヤフ
ラム７で水と圧力検知素子３とを隔離する理由は、汚れ
た浴槽水で圧力検知素子が腐蝕したり、圧力導入口がつ
まったり、水の凍結で異常をおこしたり、電圧サージが
水を伝搬して圧力検知素子３を破壊したりするのを防止
し、かつ、圧力を正確に伝達させるためである。また充
填材を用いる理由は、もし充填材を用いないで空気層を
形成させている場合には水の圧力変化で空気の圧縮度合
が大きく変化してゴムダイヤフラムの動作点が移動し圧
力伝達特性に影響をおよぼして好ましくないからであ
る。また水の温度は大きく変化するがその時空気の体積
も大きく変化し前記と同様の悪影響をおよぼすのを防止
するためである。Reference numeral 3 denotes a pressure detecting element having a pressure inlet 4. 5
Is an element support for supporting the pressure detection element 3, and has a pressure transmission chamber 6 in which the pressure introduction port 4 is opened. Reference numeral 7 denotes a rubber diaphragm, which seals the pressure transmission chamber 6 when the sensor mounting base 2 and the element support 5 are connected with the screw 8 so as to separate the filling water in the pipe 1 from the pressure detection element 3 and at the same time provide a pressure. Serves to convey information. Reference numeral 9 is a fluid filling material filled in the pressure transmission chamber 6 which is closed by the rubber diaphragm 7, and for example, silicone oil or the like is used. The reason why the rubber diaphragm 7 separates the water and the pressure detecting element 3 is that the pressure detecting element is corroded by dirty bath water, the pressure inlet is clogged, water freezes abnormally, or a voltage surge causes water. This is to prevent the pressure detecting element 3 from being propagated through and destroy the pressure detecting element 3 and to accurately transmit the pressure. The reason for using the filler is that if the air layer is formed without using the filler, the compression degree of the air changes greatly due to the pressure change of water, the operating point of the rubber diaphragm moves, and the pressure transmission characteristic This is because it has an adverse effect on This is also to prevent the temperature of water from changing greatly and the volume of air to change greatly at that time to exert the same adverse effects as described above.
なお、10は圧力検知素子３の信号を処理する回路、11
はそれらを支持するプリント板、12は蓋である。In addition, 10 is a circuit for processing the signal of the pressure sensing element 3, 11
Is a printed board that supports them, and 12 is a lid.
13は圧力検知素子３の圧力導入口４と素子支持体５
を、シールするＯリングであり、プリント板11はビス14
によって素子支持体５に固定されている。Reference numeral 13 is the pressure inlet 4 of the pressure detecting element 3 and the element support 5
Is an O-ring that seals the printed board 11 with screws 14
It is fixed to the element support 5 by.
発明が解決しようとする課題 しかしながら上記のような構成では、ダイヤフラム７
としてゴムを使用し、圧力導入口４と素子支持体５のシ
ールにゴム製Ｏリング13を用いているため、下記の課題
を有することがわかった。パイプ１の水は、浴槽水を空
にするたびに空になって空気に置換される。ところが、
その空気が微量づつではあるがゴムダイヤフラム７とＯ
リング13を透過し、長年の間に充填材９内に気泡を生じ
させる。その気泡が上記の充填材を用いない場合の説明
と同様の悪影響をおよぼし、圧力伝達特性を悪くするこ
とがわかった。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the above configuration, the diaphragm 7
Since rubber is used as the material and a rubber O-ring 13 is used to seal the pressure introducing port 4 and the element support 5, it has been found that the following problems occur. The water in the pipe 1 is emptied and replaced with air every time the bath water is emptied. However,
Although the amount of air is very small, the rubber diaphragm 7 and O
It penetrates the ring 13 and creates bubbles in the filler 9 for many years. It has been found that the bubbles have the same adverse effect as described above when the filler is not used, and deteriorate the pressure transmission characteristics.
本発明はかかる従来の課題を解消するもので、空気の
透過を防止するために、上記のダイヤフラムおよびＯリ
ングを使用せずに、圧力伝達特性を良好に保つ圧力セン
サを提供するものである。The present invention solves the conventional problems, and provides a pressure sensor that maintains good pressure transmission characteristics without using the diaphragm and the O-ring in order to prevent air permeation.
課題を解決するための手段 上記課題を解決するために本発明の圧力センサは、圧
力導入口を有する圧力検知素子と、この圧力検知素子を
取付け、かつ前記圧力導入口を臨ませた圧力伝達室を形
成する壁を有する樹脂製素子支持体と、この樹脂製素子
支持体に溶着して前記圧力伝達室を形成するとともにこ
の圧力伝達室に連通した一端を開放した直管部を有する
樹脂製蓋と、前記圧力伝達室に注入した水の比重より重
い流動性充填材とを備えたものである。Means for Solving the Problems In order to solve the above problems, a pressure sensor of the present invention comprises a pressure detecting element having a pressure introducing port, and a pressure transmitting chamber having the pressure detecting element attached and facing the pressure introducing port. And a resin-made element support having a wall for forming a pressure transmission chamber by welding to the resin-made element support and forming a straight line portion communicating with the pressure transmission chamber and having an open end. And a fluid filler that is heavier than the specific gravity of water injected into the pressure transmission chamber.
作用 本発明は上記構成によって、圧力伝達室の一端を開放
した直管部以外は、樹脂製蓋と溶着された樹脂製素子支
持体によって圧力導入口を覆う圧力伝達室が形成され、
樹脂製素子支持体や樹脂製蓋は気密が確保されているの
で、一旦注入された水より重い流動性充填材は抜け出す
ことがなく、且つ、圧力伝達特性の良い圧力センサを提
供できるものである。Action The present invention has the above-described structure, except for the straight pipe portion having one end of the pressure transmission chamber opened, the pressure transmission chamber is formed to cover the pressure introduction port with the resin element support body welded to the resin lid,
Since the resin element support and the resin lid are airtight, a fluid sensor that is heavier than water once injected does not come out, and a pressure sensor with good pressure transmission characteristics can be provided. .
実施例 以下、本発明の実施例を第１図、第２図、第３図に基
づいて説明する。第１図において第４図と同一のものに
は同一符号を付して詳細な説明を省略し、異なる部分を
中心に説明する。15は樹脂製蓋であり、一端が開放され
た直管部18を有している。16は樹脂製素子支持体５の圧
力伝達室壁である。そして、樹脂製素子支持体５は圧力
伝達室壁16に樹脂製蓋15を溶着して間に圧力伝達室６を
構成している。17は圧力導入口４と樹脂製素子支持体５
の間に挿入されたシール材で、たとえばフッソゴム等か
らなり、プリント板11に無理な力がかからないようにす
る役目も有する。圧力導入口４と樹脂製支持体５とは、
間隙が10μ〜数十μになるようにしてあり、プライマー
処理されたお互いが、接着剤にてシールしてある。圧力
導入口４は、Fe−Niの合金にNiメッキした後、金メッキ
処理をしたもので、樹脂製素子支持体５はポリプロピレ
ンからできている。第２図において、樹脂製蓋15の圧力
伝達室６側に端部19を有し、その先端にはビード部20を
有し、前記ビード部20が樹脂製素子支持体５に設けられ
たガイド部21で、超音波溶着でシールされている。第３
図は、圧力センサ３の拡大主要断面図であり、22はピア
ゾ素子からなるシリコンウエハーであり、歪を抵抗の変
化に変換した後、回路10で温度特性や圧力特性が補正さ
れ、圧力と出力（Ｖ）が直線性を有するようになってい
る。23はパイレックス等からなる電気的絶縁体であり、
ピアゾ素子からなるシリコンウエハー22は電気的絶縁体
23を介して、圧力導入口４とは電気的に絶縁され、且
つ、電圧と圧力をかけて、シール性を確保している。Embodiments Embodiments of the present invention will be described below with reference to FIGS. 1, 2, and 3. In FIG. 1, the same parts as those in FIG. 4 are designated by the same reference numerals, detailed description thereof will be omitted, and different parts will be mainly described. Reference numeral 15 denotes a resin lid, which has a straight pipe portion 18 whose one end is open. Reference numeral 16 denotes a pressure transmission chamber wall of the resin element support 5. Further, the resin element support 5 constitutes the pressure transmission chamber 6 by welding the resin lid 15 to the pressure transmission chamber wall 16. 17 is a pressure inlet 4 and a resin element support 5
A seal member inserted between the two is made of, for example, fluorine rubber, and also has a role of preventing an excessive force from being applied to the printed board 11. The pressure inlet 4 and the resin support 5 are
The gap is set to 10 μm to several tens of μm, and the primed parts are sealed with an adhesive. The pressure introducing port 4 is formed by plating an Fe-Ni alloy with Ni and then performing gold plating, and the resin element support 5 is made of polypropylene. In FIG. 2, a resin lid 15 has an end portion 19 on the pressure transmission chamber 6 side and a bead portion 20 at its tip, and the bead portion 20 is a guide provided on the resin element support body 5. The portion 21 is sealed by ultrasonic welding. Third
The figure is an enlarged main cross-sectional view of the pressure sensor 3. Reference numeral 22 is a silicon wafer composed of a piezo element. After the strain is converted into a change in resistance, the temperature characteristic and the pressure characteristic are corrected by the circuit 10, and the pressure and the output are obtained. (V) has linearity. 23 is an electrical insulator made of Pyrex or the like,
Silicon wafer 22 consisting of piezo element is an electrical insulator
It is electrically insulated from the pressure introducing port 4 via 23, and a voltage and pressure are applied to secure the sealing property.
今、浴槽に連通したパイプ１内に、水が充填していて
浴槽の水位に応じてその圧力が変化するものであり、浴
槽水位の圧力は、流動性充填材９を介して、圧力伝達室
６へ導かれ、圧力導入口４を介して、圧力センサ３に伝
えられる。圧力伝達室６は圧力導入口４を接着剤でシー
ルした樹脂性素子支持体５と樹脂製蓋15によって、気密
が確保されているので、たとえば、直空中で注入された
流動性充填材９は、樹脂製蓋15の一端の直管部18を除い
て、確実にシールされているので、トリチェリーの定理
により流動性充填材９は抜け出さない。Now, the pipe 1 communicating with the bathtub is filled with water and its pressure changes according to the water level of the bathtub. The pressure of the bathtub level is transmitted through the fluid filling material 9 to the pressure transmission chamber. 6 is transmitted to the pressure sensor 3 via the pressure introducing port 4. The pressure transmission chamber 6 is airtightly secured by the resinous element support 5 having the pressure inlet 4 sealed with an adhesive and the resin lid 15, so that, for example, the fluid filler 9 injected in the direct air is Since the resin lid 15 is securely sealed except for the straight pipe portion 18 at one end, the fluid filler 9 does not come out due to Trichery's theorem.
さらに、流動性充填材として、水より比重の重いフッ
ソオイル等を使用すると、フッソオイルと水とは置換が
しにくい、即ち、ビーカーに水をフッソオイルを入れて
混合撹拌しても、分離性が良く水がフッソオイル中にと
け込むことはなく、水より重いフッソオイルがビーカー
下部に沈澱している特長があるので、本発明の構成にお
いても水とフッソオイルは置換がしにくい。Furthermore, when a fluorine oil having a specific gravity larger than that of water is used as the fluid filler, it is difficult to replace the water with the fluorine oil, that is, even if the water is mixed and stirred in the beaker, the water is easily separated. Does not melt into the fluorescein oil, and the fluorescein oil, which is heavier than water, precipitates in the lower part of the beaker. Therefore, even in the configuration of the present invention, it is difficult to replace the fluorescein oil with water.
とは言え、樹脂性蓋15の直管部18を介して、たとえ
ば、ポンプのON−OFFや、製品の輸送中のショック等で
一部水が進入して、圧力パイプ４とパイプ１内の水が導
通することが考えられる。However, some water enters through the straight pipe portion 18 of the resin lid 15 due to, for example, ON / OFF of the pump or a shock during transportation of the product, and the pressure pipe 4 and the pipe 1 It is possible that water will conduct.
本図の如く、ピアゾ素子22が電気的絶縁体23を介して
いると、ピアゾ素子22の表面まで水が進入しないかぎ
り、電気的には絶縁性が確保される。As shown in the figure, if the piezo element 22 has the electrical insulator 23 in between, electrical insulation is ensured unless water enters the surface of the piezo element 22.
一般にガスを燃焼させる燃焼機器は、燃焼検出回路に
フレームロッド回路を有するものが多いが、この燃焼検
出回路は本体にアースされていることが多く、このフレ
ームロッド回路にたとえば200Vが印加されていても、圧
力センサ回路10へ回路が圧力センサ３を介して形成され
ると、燃焼検出回路が不安定となり、時には失火に至る
誤動作を生じることがある。このような現象は、ピアゾ
素子22と圧力導入口４が電気的に導通している構成で
は、圧力導入口４とパイプ１に導通がみられるときに
は、誤動作が生じることになる。一方、本発明の如く、
圧力導入口４とピアゾ素子22が電気的に絶縁されている
と、水がピアゾ素子表面に来ないと電気的に導通を生じ
ないので、誤動作を生じにくくできる。In general, most combustion equipment that burns gas has a flame rod circuit in the combustion detection circuit, but this combustion detection circuit is often grounded to the main body, and for example, 200 V is applied to this flame rod circuit. However, if a circuit is formed in the pressure sensor circuit 10 via the pressure sensor 3, the combustion detection circuit becomes unstable, and sometimes a malfunction resulting in misfire may occur. Such a phenomenon causes a malfunction when the pressure introducing port 4 and the pipe 1 are electrically connected in the configuration in which the piezo element 22 and the pressure introducing port 4 are electrically connected. On the other hand, as in the present invention,
When the pressure introducing port 4 and the piezo element 22 are electrically insulated, electrical continuity does not occur unless water reaches the surface of the piezo element, so that a malfunction can be less likely to occur.
又、フッソオイルは、撥水性があり、湯垢やゴミ等が
直管部18や圧力伝達室６内に入りにくい効果もある。Further, the fluorine oil has water repellency, and has an effect that it is difficult for the scale and dust to enter the straight pipe portion 18 and the pressure transmission chamber 6.
勿論、フッソオイルは電気的に絶縁されており、且
つ、低温でも凍結しないので、ピアゾ素子22の破壊を防
止している。Of course, the fluorine oil is electrically insulated and does not freeze even at a low temperature, so that the piezo element 22 is prevented from being broken.
さらには、圧力導入口が通常電気的に絶縁されている
分だけ、イオン化傾向による腐蝕を防止できる。Furthermore, since the pressure inlet is normally electrically insulated, corrosion due to the tendency of ionization can be prevented.
24はＯリングであり、センサ取付台２を樹脂製素子支
持体５をシールしている。An O-ring 24 seals the sensor mount 2 with the resin element support 5.
発明の効果 以上のように、本発明の圧力センサは圧力導入口を有
する圧力検知素子と、この圧力検知素子を取付け、かつ
前記圧力導入口を臨ませた圧力伝達室を形成する壁を有
する樹脂製素子支持体と、この樹脂製素子支持体に溶着
した前記圧力伝達室を形成するとともにこの圧力伝達室
に連通した一端を開放した直管部を有する樹脂製蓋と、
前記圧力伝達室に注入した水の比重より重い流動性充填
材を注入したものであり、さらには、前記圧力検出素子
はピアゾ素子部と絶縁体とからなり、圧力導入口とピア
ゾ素子及び絶縁体は電気的に絶縁されているので、以下
の効果を有する。EFFECTS OF THE INVENTION As described above, the pressure sensor of the present invention is a resin having a pressure detecting element having a pressure introducing port, and a wall having the pressure detecting element attached thereto and forming a pressure transmission chamber facing the pressure introducing port. An element support made of resin, and a resin lid having a straight pipe portion having one end opened, which forms the pressure transmission chamber welded to the resin element support and communicates with the pressure transmission chamber,
A fluid filler that is heavier than the specific gravity of the water injected into the pressure transmission chamber is injected, and the pressure detection element is composed of a piezo element part and an insulator, and a pressure inlet, a piezo element and an insulator. Is electrically insulated, it has the following effects.
（１） 圧力導入口と樹脂製素子支持体の樹脂製蓋は、
直管部の一端を除いて、気密性が高いので、一旦封入さ
れた水より重い流動性充填材は抜けにくいので、常に安
定した圧力センサとして使用できる。(1) The pressure inlet and the resin lid of the resin element support are
Except for one end of the straight pipe portion, since the airtightness is high, the fluid filler that is heavier than water once filled is hard to come off, so that it can always be used as a stable pressure sensor.
（２） 湯垢やゴミが付着しにくく、圧力伝達を妨害す
ることがない。(2) It is difficult for scale and dust to adhere, and pressure transmission is not hindered.
（３） 低温での凍結を防止しており、圧力センサが破
壊しない。(3) Freezing at low temperature is prevented and the pressure sensor does not break.
（４） ピアゾ素子と圧力導入口が電気的に絶縁されて
いるので、燃焼検出回路に誤動作を生じさせない。(4) Since the piezo element and the pressure inlet are electrically insulated, the combustion detection circuit does not malfunction.
（５） 圧力導入口が、電気的に絶縁されている分だ
け、イオン化傾向による腐蝕を防止できる。(5) Corrosion due to the ionization tendency can be prevented because the pressure inlet is electrically insulated.
第１図は本発明の一実施例における圧力センサの構成を
示す断面図、第２図は同センサの溶着部拡大断面図、第
３図は同圧力センサの拡大主要部断面図、第４図は従来
の圧力センサの構成を示す断面図である。 ３……圧力センサ、４……圧力導入口、５……樹脂製素
子支持体、６……圧力伝達室、９……水より重い流動性
充填材、15……樹脂製蓋、16……圧力伝達室、18……直
管部、22……ピアゾ素子部、23……絶縁体。FIG. 1 is a sectional view showing the structure of a pressure sensor in one embodiment of the present invention, FIG. 2 is an enlarged sectional view of a welded portion of the sensor, and FIG. 3 is an enlarged main portion sectional view of the pressure sensor, FIG. FIG. 7 is a cross-sectional view showing the configuration of a conventional pressure sensor. 3 ... Pressure sensor, 4 ... Pressure inlet, 5 ... Resin element support, 6 ... Pressure transmission chamber, 9 ... Fluid filler that is heavier than water, 15 ... Resin lid, 16 ... Pressure transmission chamber, 18 ...... straight pipe part, 22 ...... piezo element part, 23 ...... insulator.
Claims (2)
圧力検出素子を取付け、かつ前記圧力導入口を臨ませた
圧力伝達室を形成する壁を有する樹脂製素子支持体と、
この樹脂製素子支持体に溶着して前記圧力伝達室を形成
するとともにこの圧力伝達室に連通し、一端を開放した
直管部を有する樹脂製蓋と、圧力伝達室に注入した水の
比重より重い流動性充填材とを備えた圧力センサ。1. A pressure detecting element having a pressure introducing port, a resin element supporting body having a wall for mounting the pressure detecting element and forming a pressure transmission chamber facing the pressure introducing port.
From the specific gravity of the water injected into the pressure transmission chamber and the resin lid that is welded to this resin element support body to form the pressure transmission chamber and communicates with this pressure transmission chamber and has a straight pipe part with one end open A pressure sensor with a heavy flowable filler.
とからなり、圧力導入口とピアゾ素子及び絶縁体は電気
的に絶縁されている請求項（１）記載の圧力センサ。2. The pressure sensor according to claim 1, wherein the pressure detecting element comprises a piezo element portion and an insulator, and the pressure inlet, the piezo element and the insulator are electrically insulated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63241337A JPH0820301B2 (en) | 1988-09-27 | 1988-09-27 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63241337A JPH0820301B2 (en) | 1988-09-27 | 1988-09-27 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0288922A JPH0288922A (en) | 1990-03-29 |
| JPH0820301B2 true JPH0820301B2 (en) | 1996-03-04 |
Family
ID=17072802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63241337A Expired - Fee Related JPH0820301B2 (en) | 1988-09-27 | 1988-09-27 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0820301B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7192804B2 (en) | 2020-01-10 | 2022-12-20 | 横河電機株式会社 | Water level gauge with protective cover |
-
1988
- 1988-09-27 JP JP63241337A patent/JPH0820301B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0288922A (en) | 1990-03-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2511092B2 (en) | Fluid sensor | |
| JPS6067830A (en) | Sensor for detecting pressure of medium partitioned by wall | |
| JP2001527210A (en) | Universal media package for pressure sensing devices | |
| IE893463L (en) | Pressure sensor usable in oil wheels | |
| JPH0820301B2 (en) | Pressure sensor | |
| JP2712596B2 (en) | Pressure sensor | |
| CN210464774U (en) | Shock-proof pressure gauge | |
| JPH06174529A (en) | Apparatus for measuring stored quantity of liquid | |
| CN110749775A (en) | Deep sea conductivity sensor | |
| JP2568667B2 (en) | Pressure sensor | |
| JP2568666B2 (en) | Pressure sensor | |
| JP2568668B2 (en) | Pressure sensor | |
| US3402306A (en) | Compensating means for a piezoelectric sensing element | |
| JPH0827205B2 (en) | Pressure sensor | |
| CN210774489U (en) | Slurry pressure sensor | |
| RU2082953C1 (en) | Tensometric pressure module | |
| JP3193250B2 (en) | Diaphragm type pressure gauge | |
| JPH10132642A (en) | Liquid-level and liquid-temperature compound sensor | |
| JP2851188B2 (en) | Electromagnetic flow meter | |
| JP2591104B2 (en) | Pressure sensor | |
| JPS6088480A (en) | Semiconductor pressure sensor | |
| CN108709682A (en) | A kind of corrosion resistant type pressure sensor, circuit board and electronic device | |
| JPS6311331Y2 (en) | ||
| JPH07120336A (en) | Semiconductor pressure sensor | |
| JPH10122995A (en) | Differential pressure measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |